EP1201928A2 - Disques pour pompe turbomoléculaire - Google Patents

Disques pour pompe turbomoléculaire Download PDF

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Publication number
EP1201928A2
EP1201928A2 EP01122335A EP01122335A EP1201928A2 EP 1201928 A2 EP1201928 A2 EP 1201928A2 EP 01122335 A EP01122335 A EP 01122335A EP 01122335 A EP01122335 A EP 01122335A EP 1201928 A2 EP1201928 A2 EP 1201928A2
Authority
EP
European Patent Office
Prior art keywords
disks
blades
disk
axial direction
disc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01122335A
Other languages
German (de)
English (en)
Other versions
EP1201928B1 (fr
EP1201928A3 (fr
Inventor
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7660850&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1201928(A2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1201928A2 publication Critical patent/EP1201928A2/fr
Publication of EP1201928A3 publication Critical patent/EP1201928A3/fr
Application granted granted Critical
Publication of EP1201928B1 publication Critical patent/EP1201928B1/fr
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/50—Building or constructing in particular ways
    • F05D2230/54—Building or constructing in particular ways by sheet metal manufacturing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/171—Steel alloys

Definitions

  • the invention relates to disks for a turbomolecular pump according to the preamble of the 1st claim.
  • a turbomolecular pump is made up of rotor and stator disks, which alternate are arranged one behind the other and have blade rings.
  • the Pumping action is based on the impulses in the blades of the rotor disks Pump direction are transferred to the molecules of the gas to be pumped.
  • the two essential pump properties namely pumping speed and pressure ratio, depend strongly on the speed of the rotor disks.
  • the pumping speed increases linear with the speed and the pressure ratio even exponentially.
  • the rotor speed must be as high as possible his. This places high demands on the blades of the rotor disks their geometry, mechanical strength and stability.
  • Another criterion for optimal pump properties is the optical tightness of the individual slices. This creates a backflow within the disc package prevented in the axial direction.
  • the milled disks are made of aluminum because this material well suited for milling. In many applications, it becomes when using turbomolecular pumps required to pump corrosive gases. Because aluminum is not resistant is against corrosion, the disks produced in this way can only be used after going through an appropriate surface treatment have been made corrosion-resistant. This will make the Buckets more complex and expensive.
  • the disks thus produced by punching and bending out the blades have the serious disadvantage that they are not optically dense. This leads to high backflow losses within the pump.
  • Another disadvantage is that the Total mass of the blades of a disc is relatively large, based on the radial Surface of the support ring. As a result, this is highly stressed by the centrifugal force, what again the speed of the pump and thus its performance is limited.
  • the invention is based on the task, disks for turbomolecular pumps to develop which do not have the disadvantages described above.
  • the disks should consist of corrosion-resistant material and can be produced with little effort and inexpensively.
  • the optical Tightness should be largely guaranteed and the stress caused by centrifugal force should be kept within such limits, within which the pump with maximum Speed can be operated safely.
  • the disks according to the invention make it possible to manufacture them in a corrosion-resistant manner
  • Use materials that make up the gas producing structure by punching slots and unscrewing the blades from the disc plane is formed.
  • the joining of several partial disks leads to the optical one Tightness of the entire disc, causing backflow both inside a disc as well as within the entire disc package can be prevented.
  • this construction allows the individual indexing disks with fewer blades to be equipped as a one-piece disc in order to achieve optical tightness.
  • FIGS. 1-3 With the aid of FIGS. 1-3, the invention is to be illustrated using the example of one made of two partial disks existing disc for mounting on a rotor shaft are explained in more detail.
  • Fig. 1 shows the two pulleys 11 and 12.
  • the blades 31 and 32 arranged at an angle to the disc plane are designed to form a gas-producing structure. Between the blades there are openings in the form of radially extending slots 41 and 42.
  • the two partial disks are combined to form a disk 1 in FIG. 3.
  • the Fig. 2 shows an intermediate stage in which the two partial disks 11 and 12 already close to each other, but not yet connected. 3 are the the two part disks are joined together with the aid of the link plates 51 and 52. It arises thus a disc 1 with the inner support ring 2 and at an angle to the disc plane arranged blades 3. Between these are the openings in Form of radially extending slots 4.
  • the blades 3 are made of the Blades 31, 32 of the dividing discs 11, 12 assembled and designed so that they are in are optically tight in the axial direction.
  • the dividing disks 11, 12 are made of sheet metal bodies formed and the blades 31, 32 are made by punching and then unscrewing generated from the disk plane.
  • rotor disks consisting of two partial disks were shown. Likewise, more than two partial disks can be combined to form an entire disk become. Stator disks can also be used within the scope of the invention be composed of the same kind. The blades are then usually located in the radial direction within the support ring.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP01122335A 2000-10-24 2001-09-19 Disques pour pompe turbomoléculaire Revoked EP1201928B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10052637 2000-10-24
DE10052637.3A DE10052637B4 (de) 2000-10-24 2000-10-24 16.02.2001 Scheiben für eine Turbomolekularpumpe

Publications (3)

Publication Number Publication Date
EP1201928A2 true EP1201928A2 (fr) 2002-05-02
EP1201928A3 EP1201928A3 (fr) 2003-04-16
EP1201928B1 EP1201928B1 (fr) 2006-11-08

Family

ID=7660850

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01122335A Revoked EP1201928B1 (fr) 2000-10-24 2001-09-19 Disques pour pompe turbomoléculaire

Country Status (4)

Country Link
US (1) US20020098088A1 (fr)
EP (1) EP1201928B1 (fr)
JP (1) JP4056725B2 (fr)
DE (2) DE10052637B4 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008151770A1 (fr) * 2007-06-11 2008-12-18 Wilo Ag Rotor constitué d'un matériau plat
CN102062121A (zh) * 2010-09-16 2011-05-18 格兰富水泵(苏州)有限公司 轴流式叶轮
EP3032106A1 (fr) * 2014-12-08 2016-06-15 Pfeiffer Vacuum Gmbh Pompe à vide

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006020081A1 (de) * 2006-04-29 2007-10-31 Pfeiffer Vacuum Gmbh Rotor- oder Statorscheibe für eine Molekularpumpe
GB2440947A (en) * 2006-08-16 2008-02-20 Boc Group Plc A stator blade made of at least two stacked sheets
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
TWI424121B (zh) * 2010-12-10 2014-01-21 Prosol Corp 渦輪分子泵浦之葉片結構改良
DE102014114326A1 (de) 2014-10-02 2016-04-07 Pfeiffer Vacuum Gmbh Verfahren zur Herstellung einer Rotor- oder Statorscheibe für eine Vakuumpumpe sowie Rotor- oder Statorscheibe für eine Vakuumpumpe
EP3051140B1 (fr) * 2015-01-29 2018-01-10 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe à vide

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1071275B (fr) * 1959-12-17
DE1503704C3 (de) * 1966-12-30 1972-03-23 Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar Schaufelkranz fuer ein lauf und oder leitrad einer turbomolekularpumpe
CH499019A (de) * 1970-04-10 1970-11-15 Balzers Patent Beteilig Ag Scheibe für eine Turbomolekular-Vakuumpumpe
DE2035063C3 (de) * 1970-07-15 1974-05-30 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Laufrad für eine Turbomolekularpumpe
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
DE2717366B2 (de) * 1977-04-20 1979-10-11 Arthur Pfeiffer-Vakuumtechnik-Wetzlar Gmbh, 6334 Asslar Laufrad für eine Turbomolekularpumpe
JPS5898696A (ja) * 1981-12-09 1983-06-11 Hitachi Ltd 分子ポンプのステ−タ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008151770A1 (fr) * 2007-06-11 2008-12-18 Wilo Ag Rotor constitué d'un matériau plat
CN102062121A (zh) * 2010-09-16 2011-05-18 格兰富水泵(苏州)有限公司 轴流式叶轮
CN102062121B (zh) * 2010-09-16 2013-03-27 格兰富水泵(苏州)有限公司 液体轴流式叶轮
EP3032106A1 (fr) * 2014-12-08 2016-06-15 Pfeiffer Vacuum Gmbh Pompe à vide

Also Published As

Publication number Publication date
EP1201928B1 (fr) 2006-11-08
DE10052637B4 (de) 2021-03-11
DE50111402D1 (de) 2006-12-21
EP1201928A3 (fr) 2003-04-16
JP2002161889A (ja) 2002-06-07
JP4056725B2 (ja) 2008-03-05
DE10052637A1 (de) 2002-05-02
US20020098088A1 (en) 2002-07-25

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