EP1201928B1 - Disques pour pompe turbomoléculaire - Google Patents

Disques pour pompe turbomoléculaire Download PDF

Info

Publication number
EP1201928B1
EP1201928B1 EP01122335A EP01122335A EP1201928B1 EP 1201928 B1 EP1201928 B1 EP 1201928B1 EP 01122335 A EP01122335 A EP 01122335A EP 01122335 A EP01122335 A EP 01122335A EP 1201928 B1 EP1201928 B1 EP 1201928B1
Authority
EP
European Patent Office
Prior art keywords
blades
discs
disc
disks
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
EP01122335A
Other languages
German (de)
English (en)
Other versions
EP1201928A2 (fr
EP1201928A3 (fr
Inventor
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7660850&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1201928(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1201928A2 publication Critical patent/EP1201928A2/fr
Publication of EP1201928A3 publication Critical patent/EP1201928A3/fr
Application granted granted Critical
Publication of EP1201928B1 publication Critical patent/EP1201928B1/fr
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/50—Building or constructing in particular ways
    • F05D2230/54—Building or constructing in particular ways by sheet metal manufacturing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/171—Steel alloys

Definitions

  • the invention relates to disks for a turbomolecular pump according to the preamble of the first claim.
  • a turbomolecular pump is constructed of rotor and stator discs, which are arranged alternately one behind the other and have blade rings.
  • the pumping effect is based on the fact that impulses in the pumping direction are transmitted to the molecules of the gas to be pumped by the blades of the rotor disks.
  • the two main pumping properties namely pumping speed and pressure ratio, depend strongly on the speed of the rotor disks.
  • the pumping speed increases linearly with the speed and the pressure ratio even exponentially.
  • the speed of the rotor must be as high as possible. This places high demands on the blades of the rotor disks with regard to their geometry, mechanical strength and stability.
  • Another prerequisite for optimum pumping properties is a minimum thickness of the blades.
  • strength considerations play a role. Because of the desired high speed, the centrifugal force acting on the blades, the blade root and the inner diameter of the rotor disks must be kept to a minimum.
  • Another criterion for optimum pumping properties is the optical tightness of the individual panes. As a result, a backflow within the disk pack in the axial direction is prevented.
  • the milled discs are made of aluminum, as this material is well suited for milling.
  • turbomolecular pumps require the pumping of corrosive gases. Since aluminum is not resistant to corrosion, the disks thus produced can only be used in these cases after they have been made corrosion-resistant by an appropriate surface treatment. This makes the manufacture of the blades more expensive and expensive.
  • the discs thus produced by punching and bending out of the blades have the serious disadvantage that they are not optically dense. This leads to high pollströmmotheren within the pump.
  • Another disadvantage is that the total mass of the blades of a disc is relatively large, based on the radial surface of the support ring. As a result, this is highly loaded by the centrifugal force, which in turn limits the speed of the pump and thus their performance.
  • GB-A-1 275 386 shows a disc for turbomolecular pumps which is hollow and composed of two part discs, the part discs each having as many blades as the composite disc.
  • US-A-3 477 381 teaches a variant of constructing opaque stator disks.
  • the blades of the stator disk are mounted individually in an external retaining ring.
  • US-A-4 309 143 deals with the choice of material for the production of stamped discs. It proposes to use material whose ratio of tensile strength to specific gravity is greater than 17 ⁇ 10 3 m and which has a modulus of elasticity of more than 10 ⁇ 10 3 kp / mm 2 . Preferably, a copper-beryllium alloy is proposed. Furthermore, it proposes to vary the blade angle between the pump inlet and outlet.
  • So-called coiled blades have a different angle of attack on the blade root than on the blade head.
  • the advantageous application thereof in turbomolecular pumps teaches US-A-3,748,055.
  • the invention has for its object to develop discs for turbomolecular pumps, which do not have the disadvantages described above.
  • the discs are made of corrosion-resistant material and can be produced inexpensively with little effort.
  • the optical tightness should be largely guaranteed and the burden by the centrifugal force should be kept within such limits, within which the pump can be operated safely at maximum speed.
  • the disks according to the invention make it possible to use corrosion-resistant materials for their production, from which the gas-promoting structure is formed by punching slots and unscrewing the blades from the disk plane.
  • the joining of several part disks leads to the optical sealing of the entire disk, whereby backflow is prevented both within a disk and within the entire disk package.
  • this design allows to equip the individual part discs with fewer blades than a one-piece disc to achieve the optical tightness.
  • Fig. 1 shows the two part discs 11 and 12.
  • the support rings are denoted by 21 and 22.
  • the blades 31 and 32 arranged at an angle to the disk plane are designed so that they form a gas-conveying structure. Between the blades are openings in the form of radially extending slots 41 and 42.
  • the two part discs are joined together to form a disc 1 in Fig. 3.
  • 2 shows an intermediate stage in which the two partial disks 11 and 12 are already close to each other, but not yet connected to each other.
  • the two part discs are joined together with the help of the felts 51 and 52.
  • a disk 1 is formed with the inner support ring 2 and the blades 3 arranged at an angle to the disk plane.
  • the openings are in the form of radially extending slots 4.
  • the blades 3 are made of the blades 31, 32 of the partial disks 11, 12 assembled and designed so that they are visually tight in the axial direction.
  • the dividing disks 11, 12 are formed from sheet metal bodies and the blades 31, 32 are produced by punching and subsequent unscrewing from the disk plane.
  • Rotor disks consisting of two part disks, were shown in the example. Likewise, more than two part discs can be joined together to form an entire disc. Stator discs may also be composed in the same way within the scope of the invention. As a rule, the blades are then located in the radial direction within the support ring.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Claims (3)

  1. Disques (1) pour pompe turbomoléculaire munis d'une bague de support (2) et d'ailettes (3) agencées en cercle et en oblique par rapport au plan du disque, de telle sorte que des ouvertures sous forme de fentes (4) sont présentes dans le sens radial entre les ailettes, caractérisés en ce que les disques sont constitués de plusieurs disques partiels (11, 12) qui sont joints dans le sens axial et dont chacun comprend moins d'ailettes que le disque complet assemblé, la jonction étant réalisée de telle sorte que les ailettes (31, 32) de chaque disque partiel recouvrent en partie ou en totalité les fentes (41, 42) du disque partiel suivant.
  2. Disques selon la revendication 1, caractérisés en ce que les disques partiels (11, 12) sont joints de telle sorte qu'ils ne présentent pas d'ouvertures visibles dans le sens axial.
  3. Disques selon la revendication 1, caractérisés en ce que les disques partiels (11, 12) sont des corps en tôle et en ce que les ailettes (31, 32) sont formées par découpage puis tournées pour les écarter du plan du disque.
EP01122335A 2000-10-24 2001-09-19 Disques pour pompe turbomoléculaire Revoked EP1201928B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10052637.3A DE10052637B4 (de) 2000-10-24 2000-10-24 16.02.2001 Scheiben für eine Turbomolekularpumpe
DE10052637 2000-10-24

Publications (3)

Publication Number Publication Date
EP1201928A2 EP1201928A2 (fr) 2002-05-02
EP1201928A3 EP1201928A3 (fr) 2003-04-16
EP1201928B1 true EP1201928B1 (fr) 2006-11-08

Family

ID=7660850

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01122335A Revoked EP1201928B1 (fr) 2000-10-24 2001-09-19 Disques pour pompe turbomoléculaire

Country Status (4)

Country Link
US (1) US20020098088A1 (fr)
EP (1) EP1201928B1 (fr)
JP (1) JP4056725B2 (fr)
DE (2) DE10052637B4 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI424121B (zh) * 2010-12-10 2014-01-21 Prosol Corp 渦輪分子泵浦之葉片結構改良

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006020081A1 (de) * 2006-04-29 2007-10-31 Pfeiffer Vacuum Gmbh Rotor- oder Statorscheibe für eine Molekularpumpe
GB2440947A (en) * 2006-08-16 2008-02-20 Boc Group Plc A stator blade made of at least two stacked sheets
DE102007027370A1 (de) * 2007-06-11 2008-12-18 Wilo Ag Laufrad aus flächigem Material
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
CN102062121B (zh) * 2010-09-16 2013-03-27 格兰富水泵(苏州)有限公司 液体轴流式叶轮
DE102014114326A1 (de) 2014-10-02 2016-04-07 Pfeiffer Vacuum Gmbh Verfahren zur Herstellung einer Rotor- oder Statorscheibe für eine Vakuumpumpe sowie Rotor- oder Statorscheibe für eine Vakuumpumpe
EP3032106B1 (fr) * 2014-12-08 2020-02-12 Pfeiffer Vacuum Gmbh Pompe à vide
EP3051140B1 (fr) * 2015-01-29 2018-01-10 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe à vide

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1071275B (fr) * 1959-12-17
DE1503704C3 (de) * 1966-12-30 1972-03-23 Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar Schaufelkranz fuer ein lauf und oder leitrad einer turbomolekularpumpe
CH499019A (de) * 1970-04-10 1970-11-15 Balzers Patent Beteilig Ag Scheibe für eine Turbomolekular-Vakuumpumpe
DE2035063C3 (de) * 1970-07-15 1974-05-30 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Laufrad für eine Turbomolekularpumpe
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
DE2717366B2 (de) * 1977-04-20 1979-10-11 Arthur Pfeiffer-Vakuumtechnik-Wetzlar Gmbh, 6334 Asslar Laufrad für eine Turbomolekularpumpe
JPS5898696A (ja) * 1981-12-09 1983-06-11 Hitachi Ltd 分子ポンプのステ−タ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI424121B (zh) * 2010-12-10 2014-01-21 Prosol Corp 渦輪分子泵浦之葉片結構改良

Also Published As

Publication number Publication date
JP4056725B2 (ja) 2008-03-05
DE50111402D1 (de) 2006-12-21
EP1201928A2 (fr) 2002-05-02
US20020098088A1 (en) 2002-07-25
EP1201928A3 (fr) 2003-04-16
DE10052637A1 (de) 2002-05-02
DE10052637B4 (de) 2021-03-11
JP2002161889A (ja) 2002-06-07

Similar Documents

Publication Publication Date Title
DE3919529C2 (de) Vakuumpumpe
WO1997049921A1 (fr) Rotor pour une turbomachine avec des pales a monter dans des rainures et pales pour un rotor
EP0635643A2 (fr) Turbo-compresseur pour fluide de réfrigération
WO2009049988A1 (fr) Rotor de pompe à plusieurs étages pour pompes turbomoléculaires
DE29516599U1 (de) Reibungsvakuumpumpe mit Zwischeneinlaß
EP1201928B1 (fr) Disques pour pompe turbomoléculaire
DE102012003680A1 (de) Vakuumpumpe
DE102008021683A1 (de) Rotierende Einheit für einen Axialkompressor
EP0363503B1 (fr) Etage de pompage pour une pompe à vide élevé
DE3722164A1 (de) Turbomolekularpumpe
EP1498612B1 (fr) Pompe turbomoléculaire
EP1130269B1 (fr) Pompe turbo-moléculaire
EP1731766A2 (fr) Anneau de stator pour pompe moléculaire
WO2011032549A1 (fr) Turbomachine axiale-radiale
DE29715035U1 (de) Reibungsvakuumpumpe
EP1850011B1 (fr) Disque de rotor ou de stator pour une pompe moléculaire
EP3762613B1 (fr) Pompe à vide
DE3402549C2 (fr)
EP1580435B1 (fr) Pompe turbomoléculaire
WO2003031823A1 (fr) Pompe a vide rotative a refoulement axial
DE102008058149A1 (de) Turbomolekularpumpe
EP2295813B1 (fr) Rotor de pompe turbo-moléculaire
DE102011121223A1 (de) Turboverdichter
EP3051140B1 (fr) Disque de stator pour une pompe à vide
DE102014102681A1 (de) Statorscheibe

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Extension state: AL LT LV MK RO SI

RIC1 Information provided on ipc code assigned before grant

Ipc: 7F 04D 29/32 B

Ipc: 7F 04D 29/54 B

Ipc: 7F 04D 19/04 A

17P Request for examination filed

Effective date: 20030905

AKX Designation fees paid

Designated state(s): CH DE FR GB IT LI NL

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): CH DE FR GB IT LI NL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20061108

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REF Corresponds to:

Ref document number: 50111402

Country of ref document: DE

Date of ref document: 20061221

Kind code of ref document: P

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 20070207

NLV1 Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents act
ET Fr: translation filed
PLBI Opposition filed

Free format text: ORIGINAL CODE: 0009260

26 Opposition filed

Opponent name: EDWARDS LIMITED

Effective date: 20070704

PLAX Notice of opposition and request to file observation + time limit sent

Free format text: ORIGINAL CODE: EPIDOSNOBS2

PLAF Information modified related to communication of a notice of opposition and request to file observations + time limit

Free format text: ORIGINAL CODE: EPIDOSCOBS2

PLBB Reply of patent proprietor to notice(s) of opposition received

Free format text: ORIGINAL CODE: EPIDOSNOBS3

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20070930

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20070930

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20110906

Year of fee payment: 11

PLAB Opposition data, opponent's data or that of the opponent's representative modified

Free format text: ORIGINAL CODE: 0009299OPPO

R26 Opposition filed (corrected)

Opponent name: EDWARDS LIMITED

Effective date: 20070704

REG Reference to a national code

Ref country code: DE

Ref legal event code: R064

Ref document number: 50111402

Country of ref document: DE

Ref country code: DE

Ref legal event code: R103

Ref document number: 50111402

Country of ref document: DE

RDAF Communication despatched that patent is revoked

Free format text: ORIGINAL CODE: EPIDOSNREV1

RDAG Patent revoked

Free format text: ORIGINAL CODE: 0009271

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: PATENT REVOKED

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20120817

Year of fee payment: 12

27W Patent revoked

Effective date: 20120522

GBPR Gb: patent revoked under art. 102 of the ep convention designating the uk as contracting state

Effective date: 20120522

REG Reference to a national code

Ref country code: DE

Ref legal event code: R107

Ref document number: 50111402

Country of ref document: DE

Effective date: 20121227

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20120831

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20120927

Year of fee payment: 12