EP1205667A2 - Pompe à effet visqueux - Google Patents

Pompe à effet visqueux Download PDF

Info

Publication number
EP1205667A2
EP1205667A2 EP01124630A EP01124630A EP1205667A2 EP 1205667 A2 EP1205667 A2 EP 1205667A2 EP 01124630 A EP01124630 A EP 01124630A EP 01124630 A EP01124630 A EP 01124630A EP 1205667 A2 EP1205667 A2 EP 1205667A2
Authority
EP
European Patent Office
Prior art keywords
gas
pump
rotor
components
gas friction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01124630A
Other languages
German (de)
English (en)
Other versions
EP1205667A3 (fr
EP1205667B1 (fr
Inventor
Armin Conrad
Heinrich Lotz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1205667A2 publication Critical patent/EP1205667A2/fr
Publication of EP1205667A3 publication Critical patent/EP1205667A3/fr
Application granted granted Critical
Publication of EP1205667B1 publication Critical patent/EP1205667B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the invention relates to a gas friction pump according to the preamble of the first claim.
  • Gas friction pumps of various types are known for the conveyance of gases. Their mode of operation is based on the transmission of impulses from moving Walls on the gas particles. In this way a gas flow is made into the desired one Direction generated.
  • Gas friction pumps operating in a pressure range work in which the mean free path of the gas molecules is large compared to the geometric dimensions of the pump, i.e. in the molecular flow area, are called molecular pumps.
  • the first gas friction pump of this type was presented by Gaede [1], others technical modifications while maintaining the basic principle are constructions by Siegbahn [2], Holweck [3] and Becker [4].
  • the latter is a turbomolecular pump known and has become involved in wide areas of technology and science proven great success. It is therefore used to describe the present invention used as an example.
  • the pumping speed of a turbomolecular pump is essentially dependent on Inlet cross-section of the intake flange, from the average peripheral speed of the rotor blade ring facing the space to be pumped out and its geometric structure, moreover from the internal structure of the pump, through the gradation of pressure ratio and pumping speed between the one individual stages is determined, and not least by that part of the pump or the pump combination, which emits against atmospheric pressure.
  • These conditions can be optimally designed and the speed can be The scope of technical possibilities will be increased so much that the majority of the molecules which are based on the above-mentioned Hit the rotor blade ring and be pumped out can. Not all molecules are recorded that refer to the input cross section of the intake flange.
  • Rotor face which has no gas-promoting structure, formed. Even if the rotor blade ring is further enlarged at the expense of the rotor face, remains the pumping speed is limited by the cross-section of the intake flange. It can no more molecules are pumped out than on the gas producing structure of the Meet entrance level. But a large part of these also bounce off the surface and is therefore not covered by the funding mechanism.
  • the invention has for its object to present a gas friction pump, which compared to conventional constructions with the same cross-section of the intake flange has a significantly higher pumping speed.
  • an additional pump unit is made one or more levels, designed so that most of the Molecules that bounce off the gas-producing structure on another area this structure is reflected and thus subjected to the funding mechanism again is.
  • This effect is due to the essentially concave design of the gas-producing Structure causes.
  • Such a design allows a radial promotion Direction. This allows reflected molecules to be captured again and further be promoted. This means a significant increase in pumping speed with the same intake cross section.
  • the design according to the invention has another great advantage.
  • the concave suction space offers space for components that come from the recipient can protrude into it and thus an extremely effective pumping effect are subject.
  • FIGS. 1-3 the invention is intended to take a turbomolecular pump as an example are explained in more detail. They each show the arrangement according to the invention in Pot-shaped, conical and dome-shaped shape.
  • Fig. 1 shows a gas friction pump with housing 1, which with an intake opening 2 and a gas outlet opening 3 is provided.
  • the rotor shaft 4 is in bearings 5 and 6 fixed and is driven by the motor 7.
  • On the rotor shaft 4 the rotor disks 12 of a turbomolecular pump are attached. These are with one provided gas-producing structure and effect with the stator disks 14, the are also provided with such a structure, the pump effect.
  • the rotor components 21 and the stator components 22 exist each of a cylindrical part 25, 26 and a disc-shaped bottom part 23, 24 and are provided with gas-producing structures.
  • FIG. 2 are a conical design of the additional pump unit 30 with rotor part 31 and stator part 32 and in Fig. 3 a dome-shaped design of the additional Pump unit 40 with rotor part 41 and stator part 42 shown.
  • Molecules e.g. B. coming from A, are partly from the gas-producing structure of the Rotor components recorded and further promoted and partly reflected at B. A large At C, some of the reflected molecules meet a gas-producing structure and can therefore be pumped on or reflected again. As a result a substantial proportion of the molecules that are reflected by the surface, fed back to the conveyor mechanism.
  • suction space 16 created by the concave construction can be used for evacuation and / or degassing components are dipped from the recipient. They are here largely surrounded by pump-active structures and are therefore subject to one extremely effective pumping process.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Rotary Pumps (AREA)
EP01124630A 2000-11-13 2001-10-16 Pompe à effet visqueux Expired - Lifetime EP1205667B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10056144A DE10056144A1 (de) 2000-11-13 2000-11-13 Gasreibungspumpe
DE10056144 2000-11-13

Publications (3)

Publication Number Publication Date
EP1205667A2 true EP1205667A2 (fr) 2002-05-15
EP1205667A3 EP1205667A3 (fr) 2002-11-20
EP1205667B1 EP1205667B1 (fr) 2009-01-14

Family

ID=7663092

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01124630A Expired - Lifetime EP1205667B1 (fr) 2000-11-13 2001-10-16 Pompe à effet visqueux

Country Status (4)

Country Link
US (1) US6638010B2 (fr)
EP (1) EP1205667B1 (fr)
JP (1) JP4183409B2 (fr)
DE (2) DE10056144A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1852613A3 (fr) * 2006-05-04 2014-04-02 Pfeiffer Vacuum Gmbh Pompe à vide avec boîtier

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
GB0229355D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
GB0329839D0 (en) * 2003-12-23 2004-01-28 Boc Group Plc Vacuum pump
KR100610012B1 (ko) * 2004-08-16 2006-08-09 삼성전자주식회사 터보 펌프
US7927066B2 (en) * 2005-03-02 2011-04-19 Tokyo Electron Limited Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
US20100266426A1 (en) * 2009-04-16 2010-10-21 Marsbed Hablanian Increased volumetric capacity of axial flow compressors used in turbomolecular vacuum pumps
JP7108377B2 (ja) * 2017-02-08 2022-07-28 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法
DE102018119747B3 (de) 2018-08-14 2020-02-13 Bruker Daltonik Gmbh Turbomolekularpumpe für massenspektrometer

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
GB8507010D0 (en) * 1985-03-19 1985-04-24 Framo Dev Ltd Compressor unit
US5020969A (en) * 1988-09-28 1991-06-04 Hitachi, Ltd. Turbo vacuum pump
FR2641582B1 (fr) * 1989-01-09 1991-03-22 Cit Alcatel Pompe a vide du type a canal de gaede
JPH05195957A (ja) * 1992-01-23 1993-08-06 Matsushita Electric Ind Co Ltd 真空ポンプ
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
JPH0886298A (ja) * 1994-09-19 1996-04-02 Hitachi Ltd ドライターボ真空ポンプ
JP3486000B2 (ja) * 1995-03-31 2004-01-13 日本原子力研究所 ねじ溝真空ポンプ
JPH0988872A (ja) * 1995-09-18 1997-03-31 Hitachi Ltd ターボ真空ポンプ
JPH0988875A (ja) * 1995-09-26 1997-03-31 Daikin Ind Ltd ターボ分子ポンプ
JPH10246197A (ja) * 1997-03-05 1998-09-14 Ebara Corp ターボ分子ポンプ
JP3716068B2 (ja) * 1997-04-22 2005-11-16 三菱重工業株式会社 ターボ分子ポンプ及び同ターボ分子ポンプを有する真空容器
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
US6193461B1 (en) * 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps
JP4104098B2 (ja) * 1999-03-31 2008-06-18 エドワーズ株式会社 真空ポンプ
DE10008691B4 (de) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gasreibungspumpe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1852613A3 (fr) * 2006-05-04 2014-04-02 Pfeiffer Vacuum Gmbh Pompe à vide avec boîtier

Also Published As

Publication number Publication date
DE10056144A1 (de) 2002-05-23
JP2002180989A (ja) 2002-06-26
JP4183409B2 (ja) 2008-11-19
EP1205667A3 (fr) 2002-11-20
US6638010B2 (en) 2003-10-28
EP1205667B1 (fr) 2009-01-14
US20020064451A1 (en) 2002-05-30
DE50114655D1 (de) 2009-03-05

Similar Documents

Publication Publication Date Title
EP0626516B1 (fr) Dispositif de pompe à vide sans lubrifiant
EP1205667A2 (fr) Pompe à effet visqueux
EP0828080A2 (fr) Pompe à effet visqueux
DE3932228A1 (de) Turbovakuumpumpe
EP1078166A1 (fr) Pompe a vide a friction dotee d'un stator et d'un rotor
EP1067290B1 (fr) Pompe à vide
EP2295812A1 (fr) Récipient repliable
EP1128069A2 (fr) Pompe à effet visqueux
EP1706645B1 (fr) Pompe à vide à frottement à plusieurs étages
EP0363503B1 (fr) Etage de pompage pour une pompe à vide élevé
DE3705912C2 (fr)
EP2039941A2 (fr) Pompe à vide
WO2000058629A1 (fr) Compresseur a conduit lateral
EP1243796B1 (fr) Pompe à vide
EP0825346B1 (fr) Etage d'entrée pour une pompe à gaz à friction à double flux
DE3032967A1 (de) Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem
EP1164294B1 (fr) Pompe à gaz à friction
DE10224604B4 (de) Evakuierungseinrichtung
DE2526164A1 (de) Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor
EP1081387A2 (fr) Pompe à vide
EP0373229B1 (fr) Pompe à vide mécanique avec une soupape anti-retour chargée par ressort
DE10111546A1 (de) Gasreibungspumpe
DE3314651C2 (de) Vakuumpumpe
DE2220875A1 (de) Selbstansaugende kreiselpumpe
DE202018105024U1 (de) Verdichter mit einer Axialdruckausgleichsvorrichtung

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

17P Request for examination filed

Effective date: 20030425

AKX Designation fees paid

Designated state(s): CH DE FR GB IT LI NL

17Q First examination report despatched

Effective date: 20080422

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): CH DE FR GB IT LI NL

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REF Corresponds to:

Ref document number: 50114655

Country of ref document: DE

Date of ref document: 20090305

Kind code of ref document: P

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090114

NLV1 Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents act
PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20091015

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20091031

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20091031

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20120920

Year of fee payment: 12

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20140630

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20131031

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20181220

Year of fee payment: 18

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 50114655

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20200501

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20201016

Year of fee payment: 20

Ref country code: IT

Payment date: 20200828

Year of fee payment: 20

REG Reference to a national code

Ref country code: GB

Ref legal event code: PE20

Expiry date: 20211015

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF EXPIRATION OF PROTECTION

Effective date: 20211015