EP1128069A2 - Pompe à effet visqueux - Google Patents

Pompe à effet visqueux Download PDF

Info

Publication number
EP1128069A2
EP1128069A2 EP01102552A EP01102552A EP1128069A2 EP 1128069 A2 EP1128069 A2 EP 1128069A2 EP 01102552 A EP01102552 A EP 01102552A EP 01102552 A EP01102552 A EP 01102552A EP 1128069 A2 EP1128069 A2 EP 1128069A2
Authority
EP
European Patent Office
Prior art keywords
pump
gas
pump unit
rotor
components
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01102552A
Other languages
German (de)
English (en)
Other versions
EP1128069B1 (fr
EP1128069A3 (fr
Inventor
Armin Conrad
Heinrich Lotz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1128069A2 publication Critical patent/EP1128069A2/fr
Publication of EP1128069A3 publication Critical patent/EP1128069A3/fr
Application granted granted Critical
Publication of EP1128069B1 publication Critical patent/EP1128069B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors

Definitions

  • the invention relates to a gas friction pump according to the preamble of the first claim.
  • Gas friction pumps of various types are known for the conveyance of gases. Their mode of operation is based on the transmission of impulses from moving Walls on the gas particles. In this way a gas flow is made into the desired one Direction generated.
  • Gas friction pumps operating in a pressure range work in which the mean free path of the gas molecules is large compared to the geometric dimensions of the pump, i.e. in the molecular flow area, are called molecular pumps.
  • the first gas friction pump of this type was presented by Gaede [1], others technical modifications while maintaining the basic principle are constructions by Siegbahn [2], Holweck [3] and Becker [4].
  • the latter is a turbomolecular pump known and has become involved in wide areas of technology and science proven great success. It is therefore used to describe the present invention used as an example.
  • the pumping speed of a turbomolecular pump is essentially dependent on Inlet cross-section of the intake flange, from the average peripheral speed of the rotor blade ring facing the space to be pumped out and its geometric structure, moreover from the internal structure of the pump, through the gradation of pressure ratio and pumping speed between the individual Stages is determined, and not least by that part of the pump or the pump combination, which emits against atmospheric pressure.
  • the invention has for its object to present a gas friction pump, which compared to conventional constructions with the same cross-section of the intake flange has a significantly higher pumping speed.
  • Claims 2 to 7 represent further embodiments of the invention represents.
  • the arrangement according to the invention brings the greatest effect if the additional Pump unit is attached entirely or partially outside the housing. For structural reasons, however, it may be necessary for the additional pump unit all or part of it must be fitted inside the housing. Even then it yields a significant advantage due to the additional radial conveying component compared to the conventional design.
  • Fig. 1 shows a gas friction pump with the housing 1, which has a suction opening 2 and a gas outlet opening 3 is provided.
  • the rotor shaft 4 is in bearings 5 and 6 fixed and is driven by the motor 7.
  • the Rotor disks 12 On the rotor shaft 4 are the Rotor disks 12 attached. These are provided with a pump-active structure and effect with the stator disks 14, which also have a pump-active structure are provided, the pump effect.
  • a pump unit 20 is attached to the side of the suction opening 2. In the present example, this is carried out in one stage.
  • a section along the line A / A- in Fig. 1a a section along in Fig. 1b the line B / B and shown in Fig. 1c a perspective view.
  • the rotor components 21 and the stator components 22 of this additional pump unit each exist from an end disk-shaped section 23, 24 and cylindrical sections 25, 26.
  • the pump-active structure 23a, 24a of the front disc-shaped Section is the structure of corresponding components in turbomolecular pumps replicated.
  • the pump-active structure 25a, 26a of the cylindrical section 25, 26 corresponds to that of paddle wheels.
  • the rotor components 31 and stator components 32 of the additional pump unit 30 in a conical design.
  • the pump-active structure of these components corresponds to an inclined one in the conveying direction Bucket profile.
  • the embodiment of the additional pump unit 40 shown in FIG. 3 shows Rotor components 41 and stator components 42, each of which has a dome-shaped design.
  • the pump-active structure corresponds to an inclined one in the conveying direction Bucket profile.
  • FIG. 4 An example is shown in FIG. 4, in which the additional pump unit 20 located within the housing 1. This is the example of embodiment 20 here the additional pump unit shown in FIG. 1. In a corresponding way also the embodiments 30 and 40 of the additional pump unit in FIG. 2 and 3 are inside the case.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP01102552.5A 2000-02-24 2001-02-06 Pompe à effet visqueux Expired - Lifetime EP1128069B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10008691.8A DE10008691B4 (de) 2000-02-24 2000-02-24 Gasreibungspumpe
DE10008691 2000-02-24

Publications (3)

Publication Number Publication Date
EP1128069A2 true EP1128069A2 (fr) 2001-08-29
EP1128069A3 EP1128069A3 (fr) 2002-11-06
EP1128069B1 EP1128069B1 (fr) 2016-03-30

Family

ID=7632258

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01102552.5A Expired - Lifetime EP1128069B1 (fr) 2000-02-24 2001-02-06 Pompe à effet visqueux

Country Status (4)

Country Link
US (1) US6524060B2 (fr)
EP (1) EP1128069B1 (fr)
JP (1) JP4907774B2 (fr)
DE (1) DE10008691B4 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1205667A3 (fr) * 2000-11-13 2002-11-20 Pfeiffer Vacuum GmbH Pompe à effet visqueux
EP2295813A3 (fr) * 2009-08-01 2015-08-19 Pfeiffer Vacuum GmbH Rotor de pompe turbo-moléculaire

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
GB0414316D0 (en) * 2004-06-25 2004-07-28 Boc Group Plc Vacuum pump
KR100610012B1 (ko) * 2004-08-16 2006-08-09 삼성전자주식회사 터보 펌프
US7927066B2 (en) * 2005-03-02 2011-04-19 Tokyo Electron Limited Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
US20100266426A1 (en) * 2009-04-16 2010-10-21 Marsbed Hablanian Increased volumetric capacity of axial flow compressors used in turbomolecular vacuum pumps
DE202013010195U1 (de) * 2013-11-12 2015-02-18 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-Rotoreinrichtung sowie Vakuumpumpe
DE102018119747B3 (de) * 2018-08-14 2020-02-13 Bruker Daltonik Gmbh Turbomolekularpumpe für massenspektrometer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997015760A1 (fr) 1995-10-20 1997-05-01 Leybold Vakuum Gmbh Pompe a vide a friction a admission intermediaire

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1810083A (en) * 1927-11-30 1931-06-16 Norinder Ernst Harald High vacuum molecular pump
US3734640A (en) * 1971-06-23 1973-05-22 W Daniel Airfoil vacuum pump with tapered rotor
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
GB8507010D0 (en) * 1985-03-19 1985-04-24 Framo Dev Ltd Compressor unit
JPS61247893A (ja) * 1985-04-26 1986-11-05 Hitachi Ltd 真空ポンプ
DE3885899D1 (de) * 1988-10-10 1994-01-05 Leybold Ag Pumpenstufe für eine Hochvakuumpumpe.
JPH0313495A (ja) * 1989-06-12 1991-01-22 Natl House Ind Co Ltd 吊上げ金具
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
JPH0886298A (ja) * 1994-09-19 1996-04-02 Hitachi Ltd ドライターボ真空ポンプ
DE19634095A1 (de) * 1996-08-23 1998-02-26 Pfeiffer Vacuum Gmbh Eingangsstufe für eine zweiflutige Gasreibungspumpe
DE29717079U1 (de) * 1997-09-24 1997-11-06 Leybold Vakuum GmbH, 50968 Köln Compoundpumpe
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
US6193461B1 (en) * 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps
JP3961155B2 (ja) * 1999-05-28 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997015760A1 (fr) 1995-10-20 1997-05-01 Leybold Vakuum Gmbh Pompe a vide a friction a admission intermediaire

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1205667A3 (fr) * 2000-11-13 2002-11-20 Pfeiffer Vacuum GmbH Pompe à effet visqueux
EP2295813A3 (fr) * 2009-08-01 2015-08-19 Pfeiffer Vacuum GmbH Rotor de pompe turbo-moléculaire

Also Published As

Publication number Publication date
EP1128069B1 (fr) 2016-03-30
EP1128069A3 (fr) 2002-11-06
JP4907774B2 (ja) 2012-04-04
US6524060B2 (en) 2003-02-25
DE10008691A1 (de) 2001-08-30
JP2001280289A (ja) 2001-10-10
US20010018018A1 (en) 2001-08-30
DE10008691B4 (de) 2017-10-26

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