EP1232411A2 - Guide d'onde optique plan integre et obturateur - Google Patents

Guide d'onde optique plan integre et obturateur

Info

Publication number
EP1232411A2
EP1232411A2 EP00993213A EP00993213A EP1232411A2 EP 1232411 A2 EP1232411 A2 EP 1232411A2 EP 00993213 A EP00993213 A EP 00993213A EP 00993213 A EP00993213 A EP 00993213A EP 1232411 A2 EP1232411 A2 EP 1232411A2
Authority
EP
European Patent Office
Prior art keywords
waveguide
trench
optical
optical signal
optical switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00993213A
Other languages
German (de)
English (en)
Inventor
Kadhair Al-Hemyari
Roydn David Jones
Jose Luis Jimenez
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LNL Technologies Inc
Original Assignee
Nanovation Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanovation Technologies Inc filed Critical Nanovation Technologies Inc
Publication of EP1232411A2 publication Critical patent/EP1232411A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/355—1x2 switch, i.e. one input and a selectable single output of two possible outputs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/3552—1x1 switch, e.g. on/off switch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3576—Temperature or heat actuation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3578—Piezoelectric force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system

Definitions

  • the present invention is directed to an optical switch for allowing or preventing the
  • Optical switches are essential components in an optical network for determining and controlling the path along which a light signal propagates.
  • an optical signal the
  • light signal and optical signal are used interchangeably herein and are intended to be broadly construed and to refer to visible, infrared, ultraviolet light, and the like), is guided by
  • a waveguide along an optical path, typically defined by the waveguide core. It may become
  • optical signal may require that the optical signal propagate through a medium which may have an index of
  • an optical signal may be caused to change if that signal passes through materials (mediums)
  • an unintended phase shift may be
  • a reflected signal may be produced due to the mismatch of polarization fields at the interface between the two media.
  • the term "medium” is intended to be broadly construed and to include a vacuum.
  • This reflection of the optical signal is undesirable because it reduces the transmitted
  • the reflected signal may travel back in the direction of the optical source, which is
  • optical return loss also known as optical return loss.
  • Optical return loss is highly undesirable, since it can
  • a typical use in an optical switch is to fill a trench
  • the optical signal does not experience any significant change in the index of refraction as it passes through the trench from one waveguide to another.
  • optical signal will experience insertion loss as it passes across a trench
  • optical power of the optical signal to be directed back across the trench (i.e., an a direction
  • optical components i.e., devices, circuits, and systems. It is clearly desirable to provide
  • the present invention is directed to an optical switch having an input waveguide and
  • the input waveguide and the output waveguide have respective optical paths defined by their respective cores; those
  • optical paths (and cores) being generally aligned or coaxial with each other.
  • the trench has a
  • the invention accordingly comprises the features of construction, combination of elements, and arrangement of parts which will be exemplified in the disclosure herein.
  • FIG. 1 is a top plan view of an optical switch constructed in accordance with the present invention
  • FIGS. 2A and 2B are cross-sectional views of two embodiments of an optical switch taken along line 2-2 of FIG. 1 ;
  • FIG. 3 is a cross-sectional view of a waveguide of the optical switch taken along line 3-3 of FIG. 1;
  • FIG. 4 is a cross-sectional top view of an embodiment of an electrothermal actuator
  • FIG. 5 is a top plan view of another embodiment of an electrostatic actuator provided
  • FIG. 6 is a top plan view of a further embodiment of an electrostatic actuator provided
  • FIG. 7 is a top plan view showing a close-up of a portion of a tapered portion of the
  • FIGS. 8A and 8B depict the assembly of an optical switch in accordance with an
  • FIGS. 9A and 9B are partial side cross-sectional views showing portions of the structure of optical switches in accordance with the present invention manufactured using
  • the present invention is directed to an optical switch having an input waveguide and
  • the output waveguide have respective optical paths defined by their respective cores; and those optical paths (and cores) are aligned or coaxial with each other.
  • those waveguides are
  • the trench having a medium provided therein that has a refractive
  • the input and output waveguides are separated
  • the output waveguide must completely traverse the trench, the distance over which the optical waveguide
  • the trench should also be as small as possible to minimize the
  • the optical switch 1 of the present invention is preferably constructed of silica-
  • based semiconductors e.g., SiO
  • Other semiconductors such as, for example, GaAs and InP, also might be used.
  • the semiconductors such as, for example, GaAs and InP, also might be used.
  • FIG. 1 depicts a 1 x 1 switch.
  • the switch 1 includes an input waveguide 3 and an input waveguide 3
  • output waveguide 5 which is also exemplary of the input waveguide 3, is depicted in FIG. 3.
  • the following description of and reference to the output waveguide 5 shall also apply to the input waveguide 3.
  • the waveguide 5 is constructed using semiconductor fabrication
  • the waveguide 5 includes a core 7 deposited on a lower cladding layer 9b, which
  • SiO 2 substrate 13 by way of example only, a silicon or quartz substrate also
  • An upper cladding layer 9a is deposited over and around the core 7 to form a buried
  • the waveguides 3, 5 may be formed from a wide variety of materials chosen to
  • the desired optical properties may also be used.
  • the core 7 might include
  • the upper and lower cladding 9a, 9b may include thermal Si0 2
  • index contrasts 0.35% to 1.10 %.
  • Other platforms which could be used include, by way of non-limiting example, SiO x N polymers, or combinations thereof.
  • Other systems such as indium phosphide or gallium arsenide also might be used..
  • the core 7 can have an index of refraction contrast
  • the index of refraction can be any suitable index of refraction.
  • the index of refraction can be any suitable index of refraction.
  • core 7 can be rectangular, with sides running from approximately 3-10 ⁇ m thick and
  • the core 7 is square, with sides from
  • layers 9a, 9b adjacent to core 7 can be approximately 3-18 ⁇ m thick, and are preferably
  • the core thickness can range from approximately 7 to 8 ⁇ m
  • the present invention will work with both weakly-confined waveguides and strongly-
  • the core 7 of input waveguide 3 defines an optical path 2
  • That optical path 2 is generally coaxial with an
  • a trench 15 is defined in the substrate 13 (see, e.g., FIGS. 2A and 2B) that separates
  • the trench 15 is filled, partly or completely, with an optically transparent medium
  • a switching element 130 either allows or blocks the passage of an optical signal
  • the switching element 130 is configured to control the switching element 130 between the input waveguide 3 and the output waveguide 5.
  • actuator 33 Various embodiments of the actuator 33 are contemplated by the present invention including,
  • electrothermal, electrostatic, and piezoelectric each of
  • the shutter 17 is preferably made from a light yet stiff material such as silicon,
  • Shutter 17 can be a thin film shutter. Such a low-
  • rigid shutter 17 can be caused to move quickly in response to an electrical signal, for
  • the thin film shutter 17 can be coated with a metal film 29 to block the light.
  • this switch is optical wavelength independent, i.e. both bands of the
  • telecommunication windows (1310nm and 1550nm bands) are covered with the same switch.
  • the thin film shutter 17 does not need to be very smooth or oriented in a precisely vertical manner, the only requirement is that the shutter 17 can block the optical path between waveguides 3 and 5.
  • a highly-reflective coating can be provided on at least one surface 140 of
  • the shutter 17 preferably the surface facing the output facet 21 of the input waveguide 3
  • the light without distortion (approximately 95% reflection) and is essentially wavelength independent for telecommunication, data communication, and spectroscopic applications, for
  • face refers to an end of a waveguide
  • the shutter 17 has a height h s sufficient to completely block or reflect light, as the case may be. It will be appreciated that to block incoming optical signals completely, the
  • shutter 17 should have a height greater than the thickness t c of core 7.
  • shutter 17 is preferably minimized to reduce the distance required for the shutter 17 to be
  • the shutter 17 should have a
  • a thinner shutter 17 may lower the
  • the trench can be from approximately 8-40 ⁇ m wide.
  • the trench is
  • the shutter can be from approximately 1-8 ⁇ m thick, approximately 10-100 ⁇ m high,
  • the shutter can be made from any sufficiently rigid and approximately 10-100 ⁇ m long.
  • the shutter can be made from any sufficiently rigid and
  • the shutter can be between approximately 20 and 70 ⁇ m long.
  • the shutter is approximately 2 ⁇ m thick, approximately 30-40 ⁇ m high.
  • the shutter is also preferably made from silicon, and as
  • a preferred reflective surface is made from gold.
  • the input waveguide 3 receives an optical signal
  • optical source 100 (e.g.. a WDM. DWDM, UDWDM. etc.) from an optical source 100 and guides the optical
  • the optical signal in the core 7 and along an optical path 2.
  • the optical signal exits the input waveguide 3 via an output facet 21 and enters the trench 15.
  • optical signal will either propagate across the trench 15 and enter the output
  • optical signal continue to propagate and be guided by the core 7 of the output waveguide 5
  • the shutter 17 may be in virtually any direction (e.g., along a plane parallel with or
  • FIGS. 1 and 2A depict a first embodiment of the switching element 130 having
  • a shutter 17 that is movable along a plane generally parallel with the plane of the bottom
  • FIG. 2B Another embodiment is depicted in which the shutter 17 is movable along
  • the optical signal will reflect off or be absorbed by the shutter 17 and will not enter the
  • Movement of the shutter 17 by the actuator 133 may be in response to a control signal input to the actuator 133. That signal
  • actuator 133 to respond.
  • Actuator 133 is joined to shutter 17 by link 110 and serves to shift the shutter 17 into
  • Electrothermal actuators are generally known in the art, and therefore will not be
  • electrothermal actuator could be used which sufficiently changes its size in response to the
  • thermal energy (which, it will be appreciated, could be generated by applied
  • latching-type devices i.e., one that maintains its position without the continuous application
  • That actuator 233 includes a flexible member 34 which is securely fixed at endpoints 35. 35' to the walls of a cavity 37. Cavity 37 is of a size sufficient to allow the movement of flexible member 34. Also provided is a heater 39, which
  • member 34 warms and expands. Since the member's ends are secured at endpoints 35, 35',
  • the member 34 cannot simply expand so that the endpoints shift outward. Instead.
  • the member 34 could itself be the heater.
  • An electrostatic actuator may also be used to selectively move shutter 17. Benefits of
  • electrostatic actuators include high operating speed, low energy consumption, and minimal
  • electrostatic actuator 333 usable in connection with the present
  • That actuator 333 includes electrodes 41, 41' located on
  • a piezoelectric element 43 made from a material which expands in at least
  • piezoelectric element 43 will expand in the direction indicated by arrow E thus imparting
  • actuator 433 such as that depicted in FIG. 6, which includes a number of interlaced fingers 45. These fingers are attached to a support 20 within actuator 433. which serves to prevent unwanted motion of one side of the fingers 45.
  • 433 may require the application of substantial voltage, possibly on the order of 100 V, to
  • each of the waveguides 3 and 5 have an associated index of refraction determined, at least in part, by the material from which the waveguide core 7 is
  • the associated index of refraction for the waveguides 3 and 5 are approximately
  • the 120 provided in the trench 15 also has an associated index of refraction that may be different
  • the medium is air, for example, its refractive index
  • part of the optical signal (in terms of optical power) may be reflected back into
  • That reflected signal can propagate back to the input waveguide and along optical path 2. That reflected signal can propagate back to the input waveguide and along optical path 2. That reflected signal can propagate back to the input waveguide and along optical path 2. That reflected signal can propagate back to the input waveguide and along optical path 2. That reflected signal can propagate back to the input waveguide and along optical path 2. That reflected signal can propagate back to the input waveguide and along optical path 2. That reflected signal can propagate back to the
  • the optical signal may experience a phase shift when
  • the optical signal not experience any significant change in its optical characteristics as it is guided along and switched by the various components that make up the switch.
  • Another aspect of the present invention compensates for optical return loss caused
  • difference in refractive indices may cause part (in terms of optical power) of the optical signal
  • That reflected signal can disadvantageously reflect back to and possible destabilize
  • any reflected signal is directed away from the
  • the output facets 21 may be
  • optical return loss may be further minimized by applying an antireflective coating (not shown) on the waveguide facets 21.
  • antireflective coating can be single layer or a multilayer structure. Such a coating can reduce
  • the materials and thickness forming the antireflection coating layers are identical to those used in thin film technology. For example, the best single layer
  • antireflection coating layer between a silica waveguide and a trench at the wavelength of 1.55
  • ⁇ m has an refraction index of 1.204 and a thickness 322 nm.
  • optical return losses may be minimized by using a
  • Another aspect of this invention relates to the shape of the waveguides 3 and 5 used to
  • a tapered neck region 51 is provided on at least one of the waveguides 3 and 5 so that the waveguide width tapers to a smaller cross-section at a location 49 remote from
  • Tapered neck 51 helps to reduce the diffraction of light in the trench.
  • the waveguide width may be in the region of the trench 15.
  • That width may taper to a range of approximately 4-10
  • Tapered neck region 51 provides a smooth transition as the optical signal propagates
  • tapeered neck 51 confines the light traveling
  • Switches in accordance with the present invention can be assembled using a flip-chip
  • waveguides 3 and 5 and trench 15 are formed on one chip, and the shutter 17 and actuator 33
  • the two chips are formed on a different chip. Prior to assembly, the two chips are oriented to face each
  • the optical switch 1 may be constructed by monolithically forming the switching element 130 and waveguides 3
  • the various parts of the optical switch 1 are formed on a
  • FIGS. 1 and FIG. 1 also depict connection of the optical switch 1 to external optical components such as.
  • optical fibers 67 for example, optical fibers 67. such that waveguide cores 7 optically connect with fiber cores
  • Each optical fiber 67 is supported by a grooved member 69, and secured in place using a
  • a glass cover 61 protects the underlying switch components.
  • One difference between the two fabrication techniques is the location of the switching element 130: above the waveguides for flip-chip and within the substrate 13 for monolithic.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

L'invention porte sur un commutateur optique doté d'un guide d'onde d'entrée et de deux guides d'onde de sortie séparés et disposés autour d'une tranchée. Le guide d'onde d'entrée et un premier guide d'onde de sortie possèdent des chemins optiques respectifs définis par leurs centres respectifs ; ces chemins (et centres) optiques sont alignés ou coaxiaux les uns par rapport aux autres. Ces guides d'onde sont également séparés par une tranchée dans laquelle est ménagé un support ayant un indice de réfraction différent de celui des guides d'onde. Le guide d'onde d'entrée et un premier guide d'onde de sortie sont séparés d'une distance qui ne permet pas d'affecter les caractéristiques de transmission d'un signal optique se propageant du guide d'onde d'entrée au premier guide d'onde de sortie, même si le signal optique accuse différents indices de réfraction au moment où il se propage du premier guide d'onde d'entrée au premier guide d'onde de sortie. Le guide d'onde d'entrée et un second guide d'onde de sortie sont généralement placés du même côté de la tranchée de sorte qu'un signal optique passant du guide d'onde d'entrée au second guide d'onde de sortie ne traverse pas complètement la tranchée. Donc, même si un signal optique passant du guide d'onde d'entrée pour se diriger soit vers le premier, soit vers le second guide d'onde de sortie présente différents indices de réfraction, la distance sur laquelle le signal optique doit se déplacer entre les guides d'onde est suffisamment courte pour ne pas affecter les caractéristiques de transmission optique de ce signal.
EP00993213A 1999-11-23 2000-11-22 Guide d'onde optique plan integre et obturateur Withdrawn EP1232411A2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16714099P 1999-11-23 1999-11-23
US167140P 1999-11-23
PCT/US2000/032164 WO2001048532A2 (fr) 1999-11-23 2000-11-22 Guide d'onde optique plan integre et obturateur

Publications (1)

Publication Number Publication Date
EP1232411A2 true EP1232411A2 (fr) 2002-08-21

Family

ID=22606102

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00993213A Withdrawn EP1232411A2 (fr) 1999-11-23 2000-11-22 Guide d'onde optique plan integre et obturateur

Country Status (8)

Country Link
EP (1) EP1232411A2 (fr)
JP (1) JP2003524801A (fr)
KR (1) KR20020064908A (fr)
CN (1) CN1461420A (fr)
AU (1) AU5514601A (fr)
CA (1) CA2392467A1 (fr)
TW (1) TW521163B (fr)
WO (1) WO2001048532A2 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7103245B2 (en) 2000-07-10 2006-09-05 Massachusetts Institute Of Technology High density integrated optical chip
GB0203343D0 (en) 2002-02-13 2002-03-27 Alcatel Optronics Uk Ltd Micro opto electro mechanical device
US6934427B2 (en) 2002-03-12 2005-08-23 Enablence Holdings Llc High density integrated optical chip with low index difference waveguide functions
CN115291325A (zh) * 2022-08-12 2022-11-04 福建中科晶创光电科技有限公司 一种脊形波导制作方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5393371A (en) * 1989-12-18 1995-02-28 Litton Systems, Inc. Integrated optics chips and laser ablation methods for attachment of optical fibers thereto for LiNbO3 substrates
US5623564A (en) * 1995-06-07 1997-04-22 Lucent Technologies Inc. Self-aligned mechanical optical switch
JP3488776B2 (ja) * 1996-02-09 2004-01-19 Ｈｏｙａ株式会社 テーパ導波路およびそれを用いた光導波路素子
WO1998012589A1 (fr) * 1996-09-20 1998-03-26 Ascom Tech Ag Commutateur a fibres optiques et procede de production correspondant
US6075239A (en) * 1997-09-10 2000-06-13 Lucent Technologies, Inc. Article comprising a light-actuated micromechanical photonic switch
US5974207A (en) * 1997-12-23 1999-10-26 Lucent Technologies, Inc. Article comprising a wavelength-selective add-drop multiplexer
US5960131A (en) * 1998-02-04 1999-09-28 Hewlett-Packard Company Switching element having an expanding waveguide core
US5995688A (en) * 1998-06-01 1999-11-30 Lucent Technologies, Inc. Micro-opto-electromechanical devices and method therefor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO0148532A2 *

Also Published As

Publication number Publication date
WO2001048532A9 (fr) 2002-05-23
JP2003524801A (ja) 2003-08-19
KR20020064908A (ko) 2002-08-10
AU5514601A (en) 2001-07-09
CN1461420A (zh) 2003-12-10
CA2392467A1 (fr) 2001-07-05
TW521163B (en) 2003-02-21
WO2001048532A3 (fr) 2002-04-11
WO2001048532A2 (fr) 2001-07-05

Similar Documents

Publication Publication Date Title
US6493482B1 (en) Optical switch having a planar waveguide and a shutter actuator
EP0935149B1 (fr) Schaltelement mit expandierendem Wellenleiterkern
EP2634605B1 (fr) Réseau de couplage par diffraction permettant un couplage perpendiculaire
EP1287399B1 (fr) Dispositifs optiques a guide d'ondes micromecaniques
US6195478B1 (en) Planar lightwave circuit-based optical switches using micromirrors in trenches
US6389189B1 (en) Fluid-encapsulated MEMS optical switch
US6839479B2 (en) Optical switch
US12554065B2 (en) Structures and methods for stress and gap mitigation in integrated optics microelectromechanical systems
US6614947B1 (en) Digital optical switch using an integrated mach-zehnder interferometer having a movable phase shifter
US6430322B1 (en) Optical phase shifter having an integrated planar optical waveguide and phase shifter element
US6510259B1 (en) Optical switch using an integrated Mach-Zehnder interferometer having a movable phase shifter and asymmetric arms
WO2001059492A2 (fr) Guide d'ondes optique et obturateur
EP1232411A2 (fr) Guide d'onde optique plan integre et obturateur
US6563965B1 (en) Analog optical switch using an integrated Mach-Zehnder interferometer having a moveable phase shifter
US20040013344A1 (en) Planar optical switch and switch array
JP2004170464A (ja) 可変光減衰器
GB2388918A (en) Optical waveguide switch with movable reflector in trench

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20020531

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: L3 OPTICS, INC.

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: LNL TECHNOLOGIES, INC.

17Q First examination report despatched

Effective date: 20040323

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20040803