TW521163B - Integrated planar optical waveguide and shutter - Google Patents

Integrated planar optical waveguide and shutter Download PDF

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Publication number
TW521163B
TW521163B TW089124834A TW89124834A TW521163B TW 521163 B TW521163 B TW 521163B TW 089124834 A TW089124834 A TW 089124834A TW 89124834 A TW89124834 A TW 89124834A TW 521163 B TW521163 B TW 521163B
Authority
TW
Taiwan
Prior art keywords
waveguide
optical
patent application
item
groove
Prior art date
Application number
TW089124834A
Other languages
English (en)
Chinese (zh)
Inventor
Kadhair Al-Hemyari
Roydn D Jones
Jose Luis Jimenez
Original Assignee
L3 Optics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by L3 Optics Inc filed Critical L3 Optics Inc
Application granted granted Critical
Publication of TW521163B publication Critical patent/TW521163B/zh

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3596With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/351Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3514Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/351Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/353Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/354Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/35442D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/35481xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/3551x2 switch, i.e. one input and a selectable single output of two possible outputs
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/354Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/35442D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/35481xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/35521x1 switch, e.g. on/off switch
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357Electrostatic force
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3576Temperature or heat actuation
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3578Piezoelectric force
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Integrated Circuits (AREA)
TW089124834A 1999-11-23 2000-11-22 Integrated planar optical waveguide and shutter TW521163B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US16714099P 1999-11-23 1999-11-23

Publications (1)

Publication Number Publication Date
TW521163B true TW521163B (en) 2003-02-21

Family

ID=22606102

Family Applications (1)

Application Number Title Priority Date Filing Date
TW089124834A TW521163B (en) 1999-11-23 2000-11-22 Integrated planar optical waveguide and shutter

Country Status (8)

Country Link
EP (1) EP1232411A2 (fr)
JP (1) JP2003524801A (fr)
KR (1) KR20020064908A (fr)
CN (1) CN1461420A (fr)
AU (1) AU5514601A (fr)
CA (1) CA2392467A1 (fr)
TW (1) TW521163B (fr)
WO (1) WO2001048532A2 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7103245B2 (en) 2000-07-10 2006-09-05 Massachusetts Institute Of Technology High density integrated optical chip
GB0203343D0 (en) 2002-02-13 2002-03-27 Alcatel Optronics Uk Ltd Micro opto electro mechanical device
US6934427B2 (en) 2002-03-12 2005-08-23 Enablence Holdings Llc High density integrated optical chip with low index difference waveguide functions
CN115291325A (zh) * 2022-08-12 2022-11-04 福建中科晶创光电科技有限公司 一种脊形波导制作方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5393371A (en) * 1989-12-18 1995-02-28 Litton Systems, Inc. Integrated optics chips and laser ablation methods for attachment of optical fibers thereto for LiNbO3 substrates
US5623564A (en) * 1995-06-07 1997-04-22 Lucent Technologies Inc. Self-aligned mechanical optical switch
JP3488776B2 (ja) * 1996-02-09 2004-01-19 Hoya株式会社 テーパ導波路およびそれを用いた光導波路素子
WO1998012589A1 (fr) * 1996-09-20 1998-03-26 Ascom Tech Ag Commutateur a fibres optiques et procede de production correspondant
US6075239A (en) * 1997-09-10 2000-06-13 Lucent Technologies, Inc. Article comprising a light-actuated micromechanical photonic switch
US5974207A (en) * 1997-12-23 1999-10-26 Lucent Technologies, Inc. Article comprising a wavelength-selective add-drop multiplexer
US5960131A (en) * 1998-02-04 1999-09-28 Hewlett-Packard Company Switching element having an expanding waveguide core
US5995688A (en) * 1998-06-01 1999-11-30 Lucent Technologies, Inc. Micro-opto-electromechanical devices and method therefor

Also Published As

Publication number Publication date
WO2001048532A9 (fr) 2002-05-23
JP2003524801A (ja) 2003-08-19
EP1232411A2 (fr) 2002-08-21
KR20020064908A (ko) 2002-08-10
AU5514601A (en) 2001-07-09
CN1461420A (zh) 2003-12-10
CA2392467A1 (fr) 2001-07-05
WO2001048532A3 (fr) 2002-04-11
WO2001048532A2 (fr) 2001-07-05

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GD4A Issue of patent certificate for granted invention patent
MM4A Annulment or lapse of patent due to non-payment of fees