EP1233927A4 - Apparat und verfahren für die herstellung einer membran mit poren im nanometerbereich - Google Patents

Apparat und verfahren für die herstellung einer membran mit poren im nanometerbereich

Info

Publication number
EP1233927A4
EP1233927A4 EP00980528A EP00980528A EP1233927A4 EP 1233927 A4 EP1233927 A4 EP 1233927A4 EP 00980528 A EP00980528 A EP 00980528A EP 00980528 A EP00980528 A EP 00980528A EP 1233927 A4 EP1233927 A4 EP 1233927A4
Authority
EP
European Patent Office
Prior art keywords
pores
membrane
producing
nanometer range
nanometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00980528A
Other languages
English (en)
French (fr)
Other versions
EP1233927A1 (de
Inventor
Derek Hansford
Mauro Ferrari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of California Berkeley
University of California San Diego UCSD
Original Assignee
University of California Berkeley
University of California San Diego UCSD
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of California Berkeley, University of California San Diego UCSD filed Critical University of California Berkeley
Publication of EP1233927A1 publication Critical patent/EP1233927A1/de
Publication of EP1233927A4 publication Critical patent/EP1233927A4/de
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/0058—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by selective elimination of components, e.g. by leaching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/006—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
    • B01D67/0062—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/0215—Silicon carbide; Silicon nitride; Silicon oxycarbide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/022—Metals
    • B01D71/0221—Group 4 or 5 metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/02—Details relating to pores or porosity of the membranes
    • B01D2325/0283—Pore size
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/04—Characteristic thickness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/08—Patterned membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/06—Bio-MEMS
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/10—Microfilters, e.g. for gas or fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0102—Surface micromachining
    • B81C2201/0105—Sacrificial layer
    • B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0135—Controlling etch progression
    • B81C2201/014—Controlling etch progression by depositing an etch stop layer, e.g. silicon nitride, silicon oxide, metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/05—Temporary protection of devices or parts of the devices during manufacturing
    • B81C2201/053—Depositing a protective layers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
EP00980528A 1999-11-17 2000-11-17 Apparat und verfahren für die herstellung einer membran mit poren im nanometerbereich Withdrawn EP1233927A4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16604999P 1999-11-17 1999-11-17
US166049P 1999-11-17
PCT/US2000/031749 WO2001036321A1 (en) 1999-11-17 2000-11-17 Apparatus and method for forming a membrane with nanometer scale pores

Publications (2)

Publication Number Publication Date
EP1233927A1 EP1233927A1 (de) 2002-08-28
EP1233927A4 true EP1233927A4 (de) 2003-01-08

Family

ID=22601590

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00980528A Withdrawn EP1233927A4 (de) 1999-11-17 2000-11-17 Apparat und verfahren für die herstellung einer membran mit poren im nanometerbereich

Country Status (4)

Country Link
EP (1) EP1233927A4 (de)
JP (1) JP2003514677A (de)
AU (1) AU1778101A (de)
WO (1) WO2001036321A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003028861A1 (en) * 2001-10-02 2003-04-10 Sophion Bioscience A/S Corbino disc electroosmotic flow pump
WO2003028862A1 (en) * 2001-10-02 2003-04-10 Sophion Bioscience A/S Sieve electroosmotic flow pump
FR2844725B1 (fr) * 2002-09-24 2005-01-07 Commissariat Energie Atomique Procede de fabrication d'une membrane biomimetique, membrane biomimetique et ses applications
US7578954B2 (en) * 2003-02-24 2009-08-25 Corium International, Inc. Method for manufacturing microstructures having multiple microelements with through-holes
DE10353894B4 (de) * 2003-07-11 2007-02-15 Nft Nanofiltertechnik Gmbh Filterelement und Verfahren zu dessen Herstellung
US7632406B2 (en) * 2004-04-20 2009-12-15 Lawrence Livermore National Security, Llc Smart membranes for nitrate removal, water purification, and selective ion transportation
NL1026530C2 (nl) * 2004-06-30 2006-01-02 Friesland Brands Bv Membraan op drager, alsmede werkwijze ter vervaardiging van een dergelijk membraan.
US20080248182A1 (en) * 2004-05-03 2008-10-09 Tjeerd Jongsma Device with a Membrane on a Carrier, as Well as a Method for Manufacturing Such a Membrane
EP1874443A4 (de) * 2005-04-29 2009-09-16 Univ Rochester Ultradünne poröse nanoskalige membranen, herstellungsverfahren dafür und verwendungen davon
EP1721657A1 (de) * 2005-05-13 2006-11-15 SONY DEUTSCHLAND GmbH Herstellungsverfahren für eine Polymermembran mit mindestens einer Pore
US8911749B2 (en) 2007-04-16 2014-12-16 Corium International, Inc. Vaccine delivery via microneedle arrays
EP2146689B1 (de) 2007-04-16 2020-08-12 Corium, Inc. Einen wirkstoff enthaltende lösungsmittel-gegossene mikronadelanordnungen
JP6327852B2 (ja) 2010-05-04 2018-05-23 コリウム インターナショナル， インコーポレイテッド 微小突起アレイを使用した副甲状腺ホルモンの経皮送達のための方法及びデバイス
EP2517779A1 (de) * 2011-04-26 2012-10-31 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Nanoporen-Verbundstoffmembran
AU2013364053B2 (en) 2012-12-21 2018-08-30 Corium Pharma Solutions, Inc. Microarray for delivery of therapeutic agent and methods of use
CA2903748C (en) 2013-03-12 2021-11-02 Corium International, Inc. Microprojection applicators
AU2014237279B2 (en) 2013-03-15 2018-11-22 Corium Pharma Solutions, Inc. Microarray with polymer-free microstructures, methods of making, and methods of use
US9962534B2 (en) 2013-03-15 2018-05-08 Corium International, Inc. Microarray for delivery of therapeutic agent, methods of use, and methods of making
BR112015022625B1 (pt) 2013-03-15 2023-01-31 Corium, Inc Aparelho de microestrutura para entrega de agente terapêutico
WO2014150285A2 (en) 2013-03-15 2014-09-25 Corium International, Inc. Multiple impact microprojection applicators and methods of use
WO2016036866A1 (en) 2014-09-04 2016-03-10 Corium International, Inc. Microstructure array, methods of making, and methods of use
US10857093B2 (en) 2015-06-29 2020-12-08 Corium, Inc. Microarray for delivery of therapeutic agent, methods of use, and methods of making
EP4523717A3 (de) * 2018-05-18 2025-04-23 The Regents of The University of California In-vivo-blutfiltrationsmembranen und -vorrichtungen

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4801380A (en) * 1987-12-23 1989-01-31 The Texas A&M University System Method of producing a silicon film with micropores
US5753014A (en) * 1993-11-12 1998-05-19 Van Rijn; Cornelis Johannes Maria Membrane filter and a method of manufacturing the same as well as a membrane
US5770076A (en) * 1994-03-07 1998-06-23 The Regents Of The University Of California Micromachined capsules having porous membranes and bulk supports
US5798042A (en) * 1994-03-07 1998-08-25 Regents Of The University Of California Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters
US5919364A (en) * 1996-06-24 1999-07-06 Regents Of The University Of California Microfabricated filter and shell constructed with a permeable membrane
US5948255A (en) * 1994-03-07 1999-09-07 The Regents Of The University Of California Microfabricated particle thin film filter and method of making it
US6405066B1 (en) * 2000-03-17 2002-06-11 The Regents Of The University Of California Implantable analyte sensor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5938923A (en) * 1997-04-15 1999-08-17 The Regents Of The University Of California Microfabricated filter and capsule using a substrate sandwich

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4801380A (en) * 1987-12-23 1989-01-31 The Texas A&M University System Method of producing a silicon film with micropores
US5753014A (en) * 1993-11-12 1998-05-19 Van Rijn; Cornelis Johannes Maria Membrane filter and a method of manufacturing the same as well as a membrane
US5770076A (en) * 1994-03-07 1998-06-23 The Regents Of The University Of California Micromachined capsules having porous membranes and bulk supports
US5798042A (en) * 1994-03-07 1998-08-25 Regents Of The University Of California Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters
US5948255A (en) * 1994-03-07 1999-09-07 The Regents Of The University Of California Microfabricated particle thin film filter and method of making it
US5919364A (en) * 1996-06-24 1999-07-06 Regents Of The University Of California Microfabricated filter and shell constructed with a permeable membrane
US6405066B1 (en) * 2000-03-17 2002-06-11 The Regents Of The University Of California Implantable analyte sensor

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
"PROCESS FOR PRODUCING A PRECISION FILTER", IBM TECHNICAL DISCLOSURE BULLETIN, IBM CORP. NEW YORK, US, vol. 32, no. 4A, 1 September 1989 (1989-09-01), pages 126 - 127, XP000040003, ISSN: 0018-8689 *
DESAI T A ET AL: "Characterization of micromachined silicon membranes for immunoisolation and bioseparation applications", JOURNAL OF MEMBRANE SCIENCE, ELSEVIER SCIENCE, AMSTERDAM, NL, vol. 159, no. 1-2, 1 July 1999 (1999-07-01), pages 221 - 231, XP004169176, ISSN: 0376-7388 *
DESAI T A ET AL: "Micromachined interfaces: new approaches in cell immunoisolation and biomolecular separation", BIOMOLECULAR ENGINEERING, ELSEVIER, NEW YORK, NY, US, vol. 17, no. 1, October 2000 (2000-10-01), pages 23 - 36, XP004257822, ISSN: 1389-0344 *
See also references of WO0136321A1 *

Also Published As

Publication number Publication date
WO2001036321A9 (en) 2002-07-04
JP2003514677A (ja) 2003-04-22
EP1233927A1 (de) 2002-08-28
AU1778101A (en) 2001-05-30
WO2001036321A1 (en) 2001-05-25

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