EP1273802A1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP1273802A1
EP1273802A1 EP02254522A EP02254522A EP1273802A1 EP 1273802 A1 EP1273802 A1 EP 1273802A1 EP 02254522 A EP02254522 A EP 02254522A EP 02254522 A EP02254522 A EP 02254522A EP 1273802 A1 EP1273802 A1 EP 1273802A1
Authority
EP
European Patent Office
Prior art keywords
rotor
circumferential surface
pump case
outer circumferential
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02254522A
Other languages
German (de)
English (en)
Inventor
Yasushi c/o BOC Edwards Technologies Ltd Maejima
Yoshiyuki c/o BOC Edwards Tech. Ltd Sakaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
BOC Edwards Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Edwards Technologies Ltd filed Critical BOC Edwards Technologies Ltd
Publication of EP1273802A1 publication Critical patent/EP1273802A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/662—Balancing of rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/90—Coating; Surface treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/95—Preventing corrosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/44—Resins
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/611—Coating

Definitions

  • the present invention relates to a vacuum pump used for a semiconductor manufacturing apparatus, an electron microscope, a surface analysis apparatus, a mass spectrometer, a particle accelerator, an experimental fusion apparatus, or the like.
  • the invention relates to a vacuum pump in which anti-corrosive processing is necessary, like one used in a semiconductor manufacturing apparatus.
  • a vacuum pump such as a turbo molecular pump is used as means for exhausting gas within a processing chamber, for forming a given high vacuum degree.
  • a rotational body of this type of vacuum pump is normally formed of an aluminum alloy.
  • an anti-corrosive processing is performed in which the surface of a rotational body made from an aluminum alloy is coated with an anti-corrosive prevention film such as a nickel phosphorous alloy plating.
  • a balancing method a method is generally known in which the mass of the rotational body is changed by partially cutting off the outer circumferential surface or the inner circumferential surface of the rotational body by using a cutting tool such as a drill or a router, thus performing fine adjustments of the balance.
  • balancing is performed by cutting in the above-stated manner after conducting the anti-corrosion process, and a portion of the anti-corrosive film coated on the surface of the rotational body is removed by the cutting tool such as a drill or a router. Therefore, corrosion develops in a cut off portion where the aluminum alloy of the rotational body itself is exposed due to a corrosive gas, stress corrosion cracks progress in the cut off portion due to high speed rotation of the rotational body, and in the worst case, this may lead to destruction of the rotational body, affecting the outside of the vacuum pump as well.
  • the aluminum alloy of the rotational body itself is exposed in the portion cut off for balancing, and if debris or the like generated by etching a wafer surface in a semiconductor manufacturing process is mixed into the inside of the vacuum pump, then the debris will adhere to the surface of the aluminum in the cut off portion, and will be deposited as a product.
  • the debris will be easily deposited on the surface of the deposited product, and if chain deposition of the product on the surface of the rotational body progresses in this manner, then the clearance between the fixed side of the vacuum pump and the rotational body will become smaller. Accordingly, there is a concern that the fixed side will have critical damage when the product deposited on the rotating body contacts the fixed side.
  • an object of the present invention is to provide a vacuum pump in which destruction of a rotational body due to corrosion can be prevented, and in which the deposition of the product is reduced, preventing damage due to contact between the rotational body and a fixed side.
  • a vacuum pump is provided with: a pump case having a gas inlet port opened in its top surface; a rotor shaft rotatably supported within the pump case; a plurality of rotor blades formed on an outer circumferential surface of a rotor that is fixed to the rotor shaft and housed within the pump case; a plurality of stator blades fixed within the pump case and positioned alternately with the plurality of rotor blades; a driving motor for rotating the rotor shaft; an anti-corrosive film layer formed on a surface of the rotor; and a balancing hole formed by partially cutting off an inner circumferential surface or an outer circumferential surface of the rotor, the vacuum pump being characterized in that anti-corrosion process is performed on the balancing hole.
  • the anti-corrosion process employed here means a process in which a thermosetting resin film layer is formed on a surface of the balancing hole.
  • Synthetic resins having superior heat resistance characteristics and superior anti-corrosion characteristics such as epoxy resins and fluorine resins, for example, can be used as the thermosetting resin.
  • a vacuum pump is provided with: a pump case having a gas inlet port opened in its top surface; a rotor shaft rotatably supported within the pump case; aplurality of rotor blades formed on an outer circumferential surface of a rotor that is fixed to the rotor shaft and housed within the pump case; a plurality of stator blades fixed within the pump case and positioned alternately with the plurality of rotor blades; a driving motor for rotating the rotor shaft; and a balancing hole formed by partially cutting off an inner circumferential surface or an outer circumferential surface of the rotor; the vacuum pump being characterized in that an anti-corrosive film layer is formed on a surface of the rotor.
  • Fig. 1 is a vertical cross sectional diagram showing the structure of a first embodiment of a vacuum pump according to the present invention.
  • a vacuum pump P of this embodiment is mainly structured from a pump case 1 composed of a cylindrical portion 1-1 and a base 1-2 attached to a lower end of the cylindrical portion 1-1, and a pump mechanism portion housed in the pump case 1.
  • An upper surface of the pump case 1 is opened, serving as a gas inlet port 2, and a not shown vacuum container, such as a process chamber, is screwed into the gas inlet port 2 and fixed with a bolt, and an exhaust pipe that serves as a gas exhaust port 3 is formed in one side surface of a lower portion of the pump case 1.
  • a lower base of the pump case 1 is covered by a rear cover 1-3, and a stator column 4 is disposed above the rear cover 1-3 in a standing manner toward an inside portion of the pump case 1 and is screwed into and fixed to the base 1-2.
  • a rotor shaft 5 is bearing-supported in the radial direction and in the axial direction by a radial direction electromagnet 6-1 and an axial direction electromagnet 6-2, respectively, which are formed in an inside portion of the stator column 4 so that the rotor 5 passing through between both ends of the stator column 4 is able to rotate.
  • reference numeral 7 denotes a ball bearing to which a dry lubricant has been applied. The ball bearing 7 protects the rotor shaft 5 and the electromagnets 6-1 and 6-2 from contacting and supports the rotor shaft 5 when an electric power source for the magnetic bearings fails, the electromagnets not being in contact with the rotor shaft 5 during normal operation.
  • a rotor 8 formed in a cylindrical shape is disposed in the inside portion of the pump case 1 so as to surround the stator column 4, an upper end of the rotor 8 extends to the vicinity of the gas inlet port 2, and is fixed to the rotor shaft 5 by screwing with a bolt.
  • a driving motor 9 composed of a high frequency motor or the like is provided between the rotor shaft 5 and the stator column 4, and the rotor shaft 5 and the rotor 8 are rotated at high speed by the driving motor 9.
  • the pump mechanism portion of the vacuum pump P of this embodiment is housed within the pump case 1 and employs a composite type pump mechanism composed of turbo molecular pump mechanism portion P A of upper half, and thread groove pump mechanism portion P B of lower half, which are defined between an outer circumferential surface of the rotor 8 and an inner circumferential surface of the pump case 1.
  • the turbo molecular pump mechanism portion P A is structured by rotator blades 10 that rotate at high speed and static stator blades 11 that are fixed.
  • a plurality of processed blade shape rotor blades 10, 10, ... are formed on the outer circumferential surface of the upper half of the rotor 8 from the gas inlet port 2 side in a direction to a central rotation axis L of the rotor 8.
  • a plurality of stator blades 11, 11, ... disposed alternately between the plurality of rotor blades 10, 10, ... are formed on the inner circumferential surface of the upper half of the pump case 1, and are fixed through spacers 12, 12, ...
  • the thread groove pump mechanism portion P B is structured by a cylindrical surface 8a of the rotor 8 rotating at high speed and a static thread groove 13.
  • the outer circumferential surface of the lower half of the rotor 8 serves as the flat cylindrical surface 8a
  • a cylindrical screw stator 14 is disposed so as to oppose the cylindrical surface 8a of the rotor 8 with a narrow gap.
  • the thread groove 13 is carved in the screw stator 14.
  • thread groove 13 can be carved in the outer circumferential surface of the lower half of the rotor 8. Also, an opposing surface of the screw stator 14 provided on the inner circumference of the lower half of the pump case 1, to the rotor 8 can be formed in the flat cylindrical surface.
  • the vacuum pump P of this embodiment is used under a severe environment exposed to corrosive chlorine and fluorine sulfide gasses during semiconductor manufacturing processes, an anti-corrosive process is performed as shown in Fig. 2 for forming an even coating of an anti-corrosive film layer 15 by means of a plating, such as a nickel phosphorous oxide plating, at a thickness on the order of 10 to 20 ⁇ m on the outer circumferential surface 8a and the inner circumferential surface 8b of the rotor 8, which is formed by an aluminum alloy or the like.
  • a plating such as a nickel phosphorous oxide plating
  • balancing holes 16, 16, ... maybe formed by partially cutting off the surface of the anti-corrosive film layer 15 formed in the outer circumferential surface 8a or the inner circumferential surface 8b of the rotor 8 using a cutting tool 20 such as a drill or a router; changing the mass of the rotor 8 and performing fine adjustments of the balance of the rotational body; and then an anti-corrosion process is performed on the surface of the balancing holes 16.
  • the surface of the balancing holes 16 after performing the rotational body balancing is in a state in which a portion of the aluminum alloy of main body of the rotor 8 is exposed because a portion of the anti-corrosive film layer 15 coated on the surface of the outer circumferential surface 8a and the inner circumferential surface 8b of the rotor 8 is cut off, as shown in Fig. 2.
  • thermosetting resin film layer 17 having superior heat resistance characteristics and superior anti-corrosion characteristics, such as an epoxy resin, a fluorine resin, or the like is formed on the surface of the balancing holes 16, as shown in Fig. 3.
  • thermosetting resin has good adhesive characteristics with respect to metallic materials and has strong adhesive force with respect to curved surfaces like the inner circumferential surface 8b and the outer circumferential surface 8a of the rotor 8, and therefore peeling due to centrifugal force of the rotational body will not occur. Further, the thermosetting resin has superior oxygen barrier characteristics, and therefore anti-corrosion process can be performed by a relatively simple method of only forming the thermosetting resin film layer 17 on the surface of the balancing holes 16.
  • thermosetting resin film layer 17 As a method of forming the thermosetting resin film layer 17, a known spray application process using a spray gun or the like, followed by age hardening by the rotor 8 at room temperature or a required temperature may be employed, whereby conducting a uniform application at least on the surface of the aluminum alloy of the balancing holes 16 at a thickness of 10 to 20 ⁇ m.
  • thermosetting resin film layer 17 is formed into a thick film, anti-corrosion performance can be increased, and corrosion of the balancing holes 16 can be prevented over a long period of time.
  • the gap between the outer circumferential surface 8a of the rotor 8 and the screw stator 14 becomes narrower, the rotational body and the fixed side of the vacuum pump come into contact, and the fixed side is damaged, the aforementioned film thickness range is appropriate.
  • the weight of the thermosetting resin film layer 17 after hardening and drying is set on the order of 1 to 10 mg with respect to the number of balancing holes 16, and considering the increase in weight due to the thermosetting resin film layer 17, it is necessary to form the synthetic resin film layer 17 after performing a little excess amount of material cutting for balancing.
  • the aluminum alloy surface of the balancing holes 16 formed in the surface of the outer circumferential surface 8a or the inner circumferential surface 8b of the rotor 8 is covered by the thermosetting resin film layer 17 as an anti-corrosion process, and therefore corrosion due to a corrosive gas does not develop in the aluminum alloy surface of the balancing holes 16, stress corrosion cracking of the balancing holes due to high speed rotation of the rotational body can be prevented, and rotor destruction due to corrosion can be prevented from happening.
  • thermosetting resin film layer 17 can be formed on the aluminum alloy surface of the balancing holes 16b into a thin film as an anti-corrosion process, and deposition of the product adhering to the aluminum alloy can be reduced, and therefore damage due to contact between the rotational body and the fixed side can be prevented.
  • the basic structure of the vacuum pump in this second embodiment is similar to the vacuum pump shown in Fig. 1, and therefore identical reference numerals are attached to identical portions, and a detailed explanation of those portions is omitted.
  • the vacuum pump in this second embodiment is characterized in that the balancing holes 16 are formed by removing a portion of the inner circumferential surface 8b or the outer circumferential surface 8a of the rotor 8, and in that the corrosion prevention layer 15 is formed on the inner circumferential surface 8b and the outer circumferential surface 8a of the rotor 8, as shown in Fig. 4.
  • a portion of the outer circumferential surface 8a or the inner circumferential surface 8b of the rotor 8 formed by the aluminum alloy or the like is removed by using the cutting tool 20 such as a drill or a router, changing the mass of the rotor 8 and performing fine adjustments of the balance of the rotational body, after which the corrosion prevention film layer 15 is uniformly coated to a thickness on the order of 10 to 20 ⁇ m by plating a nickel phosphorous alloy plating or the like, performing anti-corrosion process at the same time to the rotor 8 and to the balancing holes 16.
  • the cutting tool 20 such as a drill or a router
  • the process step for forming the thermosetting resin film layer 17 for anti-corrosion process of the balancing holes 16 can be omitted, anti-corrosion process of the balancing holes 16 can be simplified, and the manufacturing costs of the vacuum pump relating to anti-corrosion process can be lowered.
  • the corrosion prevention film layer 15 is formed uniformly over the entire surface of the rotor 8 after performing balancing as stated above, and therefore it is not necessary to remove an excess amount of material in order to adjust the balance.
  • the present invention can also be applied, of course, to other pumps that utilize rotation of a rotating body, such as a drag pump, and it is also possible to suitably change the locations in which the balancing holes are formed for design reasons.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP02254522A 2001-07-03 2002-06-27 Pompe à vide Withdrawn EP1273802A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001202297A JP2003021092A (ja) 2001-07-03 2001-07-03 真空ポンプ
JP2001202297 2001-07-03

Publications (1)

Publication Number Publication Date
EP1273802A1 true EP1273802A1 (fr) 2003-01-08

Family

ID=19039128

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02254522A Withdrawn EP1273802A1 (fr) 2001-07-03 2002-06-27 Pompe à vide

Country Status (4)

Country Link
US (1) US20030021672A1 (fr)
EP (1) EP1273802A1 (fr)
JP (1) JP2003021092A (fr)
KR (1) KR20030004118A (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1596068A3 (fr) * 2004-05-10 2007-01-10 BOC Edwards Japan Limited Pompe à vide
CN110199127A (zh) * 2017-02-08 2019-09-03 埃地沃兹日本有限公司 真空泵、真空泵所具备的旋转部及不平衡修正方法
EP3550150A1 (fr) * 2014-03-07 2019-10-09 Pfeiffer Vacuum Gmbh Procédé d'equilibrage d'un rotor d'une pompe à vide ou d'un rotor d'une unité de rotation pour une pompe à vide

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003021093A (ja) * 2001-07-05 2003-01-24 Boc Edwards Technologies Ltd 真空ポンプ
JP5494807B2 (ja) * 2010-08-06 2014-05-21 株式会社島津製作所 真空ポンプ
DE102011105806A1 (de) * 2011-05-05 2012-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Rotor
US20140127031A1 (en) * 2011-07-21 2014-05-08 Tohoku University Screw rotor for exhaust pump, method for manufacturing the same, gas exhaust pump having screw rotor, and manufacturing method and assembly method of the same
US10585291B2 (en) 2017-04-28 2020-03-10 Yonatan Gerlitz Eye safety system for lasers
JP6973348B2 (ja) * 2018-10-15 2021-11-24 株式会社島津製作所 真空ポンプ
JP7671586B2 (ja) 2021-01-18 2025-05-02 エドワーズ株式会社 真空ポンプとその回転体

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB687976A (en) * 1949-12-23 1953-02-25 Vickers Electrical Co Ltd Improved curing process for thermosetting resinous coatings
DE4239391A1 (en) * 1991-11-27 1993-06-09 Electro Chemical Engineering Gmbh, Zug, Ch Aluminium magnesium, titanium wear resistant rotor - comprises oxide ceramic layer with fluoro polymer, e.g. poly:tetra:fluoroethylene, for resistance to corrosion for turbo mol. pump
EP0799999A2 (fr) * 1996-04-05 1997-10-08 VARIAN S.p.A. Rotor pour pompe turbomoléculaire
US6164945A (en) * 1998-02-13 2000-12-26 Ebara Corporation Vacuum pump rotor and method of manufacturing the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2527398B2 (ja) * 1992-06-05 1996-08-21 財団法人真空科学研究所 タ―ボ分子ポンプ
JPH0783189A (ja) * 1993-09-17 1995-03-28 Hitachi Ltd ターボ真空ポンプ
US5938406A (en) * 1997-04-18 1999-08-17 Varian, Inc. Rotor for turbomolecular pump

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB687976A (en) * 1949-12-23 1953-02-25 Vickers Electrical Co Ltd Improved curing process for thermosetting resinous coatings
DE4239391A1 (en) * 1991-11-27 1993-06-09 Electro Chemical Engineering Gmbh, Zug, Ch Aluminium magnesium, titanium wear resistant rotor - comprises oxide ceramic layer with fluoro polymer, e.g. poly:tetra:fluoroethylene, for resistance to corrosion for turbo mol. pump
EP0799999A2 (fr) * 1996-04-05 1997-10-08 VARIAN S.p.A. Rotor pour pompe turbomoléculaire
US6164945A (en) * 1998-02-13 2000-12-26 Ebara Corporation Vacuum pump rotor and method of manufacturing the same

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1596068A3 (fr) * 2004-05-10 2007-01-10 BOC Edwards Japan Limited Pompe à vide
US7572096B2 (en) 2004-05-10 2009-08-11 Boc Edwards Japan Limited Vacuum pump
EP3550150A1 (fr) * 2014-03-07 2019-10-09 Pfeiffer Vacuum Gmbh Procédé d'equilibrage d'un rotor d'une pompe à vide ou d'un rotor d'une unité de rotation pour une pompe à vide
CN111473000A (zh) * 2014-03-07 2020-07-31 普发真空有限公司 用于平衡真空泵转子或真空泵旋转单元转子的方法
CN110199127A (zh) * 2017-02-08 2019-09-03 埃地沃兹日本有限公司 真空泵、真空泵所具备的旋转部及不平衡修正方法
CN110199127B (zh) * 2017-02-08 2021-10-29 埃地沃兹日本有限公司 真空泵、真空泵所具备的旋转部及不平衡修正方法

Also Published As

Publication number Publication date
KR20030004118A (ko) 2003-01-14
JP2003021092A (ja) 2003-01-24
US20030021672A1 (en) 2003-01-30

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