EP1330606B1 - Pompe a vide cinetique mecanique - Google Patents

Pompe a vide cinetique mecanique Download PDF

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Publication number
EP1330606B1
EP1330606B1 EP01974146A EP01974146A EP1330606B1 EP 1330606 B1 EP1330606 B1 EP 1330606B1 EP 01974146 A EP01974146 A EP 01974146A EP 01974146 A EP01974146 A EP 01974146A EP 1330606 B1 EP1330606 B1 EP 1330606B1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
mechanical kinetic
rotor
pump
alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP01974146A
Other languages
German (de)
English (en)
Other versions
EP1330606A1 (fr
Inventor
Heinrich Engländer
Michael Froitzheim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP1330606A1 publication Critical patent/EP1330606A1/fr
Application granted granted Critical
Publication of EP1330606B1 publication Critical patent/EP1330606B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/20—Manufacture essentially without removing material
    • F05D2230/22—Manufacture essentially without removing material by sintering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/12—Light metals
    • F05D2300/125—Magnesium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/173—Aluminium alloys, e.g. AlCuMgPb

Definitions

  • the invention relates to a mechanical kinetic vacuum pump with a rotor consisting of an aluminum alloy.
  • the mechanical kinetic vacuum pumps by definition include gas ring pumps, turbo vacuum pumps (axial, radial) and molecular / turbomolecular pumps. They are able to mechanically transport the gas particles to be delivered in the area of the molecular flow (pressures less than 10 -3 mbar). In addition, molecular pumps are still capable of conveying gases in the region of the Knudsen flow (10 -3 to 1 mbar). Preferably used mechanical kinetic vacuum pumps often have a turbomolecular pumping stage and an adjoining molecular pumping stage (compound or hybrid pump), since such a pump is capable of compressing gases up to the region of the viscous flow.
  • Turbomolecular vacuum pumps and compound pumps are used in manufacturing processes in the semiconductor industry.
  • the procedures used here - etching, coating or the like - can only be carried out in a vacuum.
  • the vacuum pumps mentioned have the task of evacuating the vacuum chambers before the start of the processes and maintain the desired low pressures during the course of the processes.
  • Turbomolecular vacuum pumps are operated at high speeds (up to 100,000 revolutions / min).
  • the rotors are made of a light metal, usually from a melt-metallurgically produced aluminum alloy ( DE 2923632 A1 ).
  • the alloy is adjusted so that the rotors have the highest possible heat resistance and creep rupture strength.
  • the creep rupture strength decreases with increasing rotor temperature. In the aluminum alloys used so far, an acceptable creep rupture strength results if the rotor temperatures do not exceed the value of 120 ° C.
  • the semiconductor components located in the vacuum chamber assume elevated temperatures. Associated with this is an increase in temperature of the gases to be delivered by the vacuum pumps. These gases in particular cause a temperature increase of the rotors of the connected vacuum pumps. This increase in temperature adversely affects the creep strength mentioned.
  • the bearings must not take high temperatures due to the presence of a lubricant.
  • the operation of mechanical bearings itself is associated with heat generation.
  • the drive motor of the pump is part of the stator and arranged in the vicinity of the bearings. In the phases in which it is operated under load, it forms itself a source of heat. In this case, a partial transport of heat between the rotor and stator via the gas is possible due to the increased density. The removal of significant amounts of heat through the mechanical bearings would only be possible with intensive cooling of the stator bearing parts.
  • the present invention has for its object to improve the hot and creep strength of a friction vacuum pump of the type mentioned. According to the invention this object is achieved by the characterizing features of the claims.
  • Aluminum alloys powder-metallurgically are known per se. They are produced in such a way that the melt consisting of the alloy constituents by means of Dü sprayed on a cold surface. Compared to the production of aluminum alloys by fusion metallurgy, a very rapid solidification of the melt takes place, as a result of which the alloy acquires a new microstructure with altered properties. In particular, spray-compacted aluminum alloys, the main alloying constituent of which is copper, have a substantially higher strength than a molten-metallurgically produced aluminum alloy.
  • DISPAL Materials of the type according to the invention are marketed under the name DISPAL (eg DISPAL S 690 and S 691).
  • DISPAL eg DISPAL S 690 and S 691.
  • copper In addition to the aluminum they contain 3.8 to 5.6% by weight of copper and further alloying constituents, such as magnesium, manganese, zirconium, silver and / or titanium with proportions between 0.1 and 1 wt .-%.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

L'invention concerne une pompe à vide cinétique mécanique comprenant un rotor constitué d'un alliage. L'invention vise à augmenter la résistance à la chaleur et au fluage. A cet effet, le matériau du rotor est un alliage léger produit par métallurgie des poudres.

Claims (2)

  1. Pompe à vide cinétique mécanique comprenant un rotor formé d'une al liage d'aluminium, caractérisée en ce que le matériau dudit rotor est une alliage de cuivre obtenu par métallurgie des poudres, dont le composant principal de l'alliage est le cuivre, et que le pourcentage en cuivre est 3 à 7 % en poids.
  2. Pompe selon la revendication 1, caractérisée en ce que ledit matériau dudit rotor contient autres composants de l'alliage, à savoir le magnésium, le manganèse, le zircon et l'argent en pourcentages entre 0,1 et 1 % en poids.
EP01974146A 2000-10-28 2001-08-09 Pompe a vide cinetique mecanique Expired - Lifetime EP1330606B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10053664 2000-10-28
DE10053664A DE10053664A1 (de) 2000-10-28 2000-10-28 Mechanische kinetische Vakuumpumpe
PCT/EP2001/009193 WO2002035100A1 (fr) 2000-10-28 2001-08-09 Pompe a vide cinetique mecanique

Publications (2)

Publication Number Publication Date
EP1330606A1 EP1330606A1 (fr) 2003-07-30
EP1330606B1 true EP1330606B1 (fr) 2011-07-13

Family

ID=7661493

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01974146A Expired - Lifetime EP1330606B1 (fr) 2000-10-28 2001-08-09 Pompe a vide cinetique mecanique

Country Status (5)

Country Link
US (1) US7097431B2 (fr)
EP (1) EP1330606B1 (fr)
JP (1) JP2004512463A (fr)
DE (1) DE10053664A1 (fr)
WO (1) WO2002035100A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4151860A3 (fr) * 2022-12-22 2023-04-05 Pfeiffer Vacuum Technology AG Pompe à vide

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003254285A (ja) * 2002-02-28 2003-09-10 Boc Edwards Technologies Ltd ポンプ装置
DE102004049543A1 (de) * 2004-10-12 2006-04-13 Man B & W Diesel Ag Radialverdichterlaufrad und Verfahren zu seiner Herstellung
JP5274446B2 (ja) * 2006-04-29 2013-08-28 エーリコン ライボルト ヴァキューム ゲゼルシャフト ミット ベシュレンクテル ハフツング ターボ分子ポンプのローター又はステーター
WO2010133866A1 (fr) 2009-05-20 2010-11-25 Edwards Limited Pompe à canal latéral avec palier à gaz axial
US9335296B2 (en) 2012-10-10 2016-05-10 Westinghouse Electric Company Llc Systems and methods for steam generator tube analysis for detection of tube degradation
DE102013219050B3 (de) * 2013-09-23 2015-01-22 Oerlikon Leybold Vacuum Gmbh Hochleistungsrotoren einer Turbomolekularpumpe
DE102013219043A1 (de) 2013-09-23 2015-03-26 Oerlikon Leybold Vacuum Gmbh Legierungen von Rotoren einer Turbomolekularpumpe
EP3085964B1 (fr) * 2015-04-21 2019-12-11 Pfeiffer Vacuum Gmbh Production d'un composant de pompe à vide par fabrication additive métallique
US11935662B2 (en) 2019-07-02 2024-03-19 Westinghouse Electric Company Llc Elongate SiC fuel elements
ES2955292T3 (es) 2019-09-19 2023-11-29 Westinghouse Electric Co Llc Aparato para realizar pruebas de adherencia in situ de depósitos de pulverización en frío y procedimiento de empleo
GB2592043A (en) * 2020-02-13 2021-08-18 Edwards Ltd Axial flow vacuum pump
FR3111143B1 (fr) 2020-06-04 2022-11-18 Constellium Issoire Produits en alliage aluminium cuivre magnésium performants à haute température

Citations (3)

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DE2923632A1 (de) * 1979-06-11 1980-12-18 Leybold Heraeus Gmbh & Co Kg Verfahren zur herstellung eines schaufelkranzes fuer den rotor einer tubomolekularpumpe und mit schaufelkraenzen dieser art ausgeruesteter rotor
JPH0334699U (fr) * 1989-08-07 1991-04-04
DE10210404A1 (de) * 2002-03-08 2003-09-18 Leybold Vakuum Gmbh Verfahren zur Herstellung des Rotors einer Reibungsvakuumpumpe sowie nach diesem Verfahren hergestellter Rotor

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DE3530910A1 (de) * 1984-08-31 1986-03-13 Hitachi, Ltd., Tokio/Tokyo Verfahren zur herstellung von giessformen
US5512241A (en) 1988-08-18 1996-04-30 Martin Marietta Corporation Al-Cu-Li weld filler alloy, process for the preparation thereof and process for welding therewith
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FR2651244B1 (fr) * 1989-08-24 1993-03-26 Pechiney Recherche Procede d'obtention d'alliages de magnesium par pulverisation-depot.
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DE19915307A1 (de) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
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Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2923632A1 (de) * 1979-06-11 1980-12-18 Leybold Heraeus Gmbh & Co Kg Verfahren zur herstellung eines schaufelkranzes fuer den rotor einer tubomolekularpumpe und mit schaufelkraenzen dieser art ausgeruesteter rotor
JPH0334699U (fr) * 1989-08-07 1991-04-04
DE10210404A1 (de) * 2002-03-08 2003-09-18 Leybold Vakuum Gmbh Verfahren zur Herstellung des Rotors einer Reibungsvakuumpumpe sowie nach diesem Verfahren hergestellter Rotor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4151860A3 (fr) * 2022-12-22 2023-04-05 Pfeiffer Vacuum Technology AG Pompe à vide
EP4390145A3 (fr) * 2022-12-22 2024-09-18 Pfeiffer Vacuum Technology AG Pompe à vide

Also Published As

Publication number Publication date
US20040013529A1 (en) 2004-01-22
JP2004512463A (ja) 2004-04-22
WO2002035100A1 (fr) 2002-05-02
US7097431B2 (en) 2006-08-29
DE10053664A1 (de) 2002-05-08
EP1330606A1 (fr) 2003-07-30

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