EP1376144A3 - Analysesystem für Testdaten - Google Patents

Analysesystem für Testdaten Download PDF

Info

Publication number
EP1376144A3
EP1376144A3 EP03254101A EP03254101A EP1376144A3 EP 1376144 A3 EP1376144 A3 EP 1376144A3 EP 03254101 A EP03254101 A EP 03254101A EP 03254101 A EP03254101 A EP 03254101A EP 1376144 A3 EP1376144 A3 EP 1376144A3
Authority
EP
European Patent Office
Prior art keywords
analysis
test data
data
stores
information obtained
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03254101A
Other languages
English (en)
French (fr)
Other versions
EP1376144A2 (de
Inventor
Yasuhiko Iguchi
Mitsuhiro Enokida
Hiroshi Tamura
Earl Louis Dombroski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Sandia Technologies Inc
Original Assignee
Agilent Technologies Inc
Sandia Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc, Sandia Technologies Inc filed Critical Agilent Technologies Inc
Publication of EP1376144A2 publication Critical patent/EP1376144A2/de
Publication of EP1376144A3 publication Critical patent/EP1376144A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2836—Fault-finding or characterising
    • G01R31/2846—Fault-finding or characterising using hard- or software simulation or using knowledge-based systems, e.g. expert systems, artificial intelligence or interactive algorithms
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/23—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by multiple measurements, corrections, marking or sorting processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
EP03254101A 2002-06-28 2003-06-27 Analysesystem für Testdaten Withdrawn EP1376144A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/186,171 US6898545B2 (en) 2002-06-28 2002-06-28 Semiconductor test data analysis system
US186171 2002-06-28

Publications (2)

Publication Number Publication Date
EP1376144A2 EP1376144A2 (de) 2004-01-02
EP1376144A3 true EP1376144A3 (de) 2006-01-18

Family

ID=29718020

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03254101A Withdrawn EP1376144A3 (de) 2002-06-28 2003-06-27 Analysesystem für Testdaten

Country Status (4)

Country Link
US (2) US6898545B2 (de)
EP (1) EP1376144A3 (de)
JP (1) JP2004072093A (de)
TW (1) TWI292540B (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7143370B1 (en) * 2003-06-11 2006-11-28 Advanced Micro Devices, Inc. Parameter linking system for data visualization in integrated circuit technology development
CN100555567C (zh) * 2004-11-30 2009-10-28 尼康股份有限公司 组件处理系统、信息显示方法及其应用装置
JP4537277B2 (ja) * 2005-07-08 2010-09-01 株式会社日立ハイテクノロジーズ 半導体検査装置
US7200523B1 (en) * 2005-11-30 2007-04-03 Taiwan Semiconductor Manufacturing Company, Ltd. Method and system for filtering statistical process data to enhance process performance
US20100076724A1 (en) * 2008-09-23 2010-03-25 Harold Lee Brown Method for capturing and analyzing test result data
US20140277467A1 (en) 2013-03-14 2014-09-18 Spinal Stabilization Technologies, Llc Prosthetic Spinal Disk Nucleus
CN104077271B (zh) * 2013-03-27 2018-06-05 珠海全志科技股份有限公司 晶圆图数据的处理方法及系统
WO2015049734A1 (ja) * 2013-10-02 2015-04-09 株式会社日立製作所 検索システム及び検索方法
US10786360B2 (en) 2014-11-04 2020-09-29 Spinal Stabilization Technologies Llc Percutaneous implantable nuclear prosthesis
AU2015343171B2 (en) 2014-11-04 2020-08-06 Spinal Stabilization Technologies Llc Percutaneous implantable nuclear prosthesis
US10204188B2 (en) * 2015-03-13 2019-02-12 Samsung Electronics Co., Ltd. Systems, methods and computer program products for analyzing performance of semiconductor devices
AU2016315964B2 (en) 2015-09-01 2021-05-13 Spinal Stabilization Technologies Llc Implantable nuclear prosthesis
JP2020004070A (ja) * 2018-06-28 2020-01-09 ルネサスエレクトロニクス株式会社 半導体製品品質管理サーバ、半導体装置、および半導体製品品質管理システム
WO2020106350A2 (en) 2018-09-04 2020-05-28 Spinal Stabilization Technologies, Llc Implantable nuclear prosthesis, kits, and related methods
US11475052B1 (en) * 2019-11-08 2022-10-18 Tableau Software, Inc. Using visual cues to validate object models of database tables
CN114297052B (zh) * 2021-12-13 2025-03-21 上海金仕达软件科技股份有限公司 测试数据生成方法及装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999022310A1 (en) * 1997-10-27 1999-05-06 Kla-Tencor Corporation Software system and method for extending classifications and attributes in production analysis
US6097887A (en) * 1997-10-27 2000-08-01 Kla-Tencor Corporation Software system and method for graphically building customized recipe flowcharts

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5371851A (en) * 1989-04-26 1994-12-06 Credence Systems Corporation Graphical data base editor
JP2941308B2 (ja) * 1989-07-12 1999-08-25 株式会社日立製作所 検査システムおよび電子デバイスの製造方法
DE69325770T2 (de) * 1992-06-02 1999-11-18 Hewlett-Packard Co., Palo Alto Verfahren zum rechnergestützten entwurf für mehrschichtverbindungen-technologien
JP2616413B2 (ja) * 1993-11-22 1997-06-04 日本電気株式会社 リペアデータの編集装置およびリペアデータの編集方法
JPH07234188A (ja) * 1994-02-23 1995-09-05 Hitachi Ltd データ解析システム
US5761417A (en) * 1994-09-08 1998-06-02 International Business Machines Corporation Video data streamer having scheduler for scheduling read request for individual data buffers associated with output ports of communication node to one storage node
JP3364390B2 (ja) * 1995-12-30 2003-01-08 東京エレクトロン株式会社 検査装置
US20020109734A1 (en) * 1997-10-10 2002-08-15 Satoshi Umezu GUI processing system for performing an operation of an application which controls testing equipment
US6128759A (en) * 1998-03-20 2000-10-03 Teradyne, Inc. Flexible test environment for automatic test equipment
US6476913B1 (en) * 1998-11-30 2002-11-05 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US6292766B1 (en) * 1998-12-18 2001-09-18 Vlsi Technology, Inc. Simulation tool input file generator for interface circuitry
JP2000269107A (ja) * 1999-03-15 2000-09-29 Toshiba Corp 半導体製造工程のデータ解析システム
US6319737B1 (en) * 1999-08-10 2001-11-20 Advanced Micro Devices, Inc. Method and apparatus for characterizing a semiconductor device
US6681351B1 (en) * 1999-10-12 2004-01-20 Teradyne, Inc. Easy to program automatic test equipment
US6707474B1 (en) * 1999-10-29 2004-03-16 Agilent Technologies, Inc. System and method for manipulating relationships among signals and buses of a signal measurement system on a graphical user interface
JP3660561B2 (ja) * 1999-11-10 2005-06-15 株式会社東芝 半導体集積回路の故障解析装置
JP3447638B2 (ja) * 1999-12-24 2003-09-16 日本電気株式会社 半導体装置のテスト方法及びシステム並びに記録媒体
JP2001306999A (ja) * 2000-02-18 2001-11-02 Fujitsu Ltd データ解析装置およびデータ解析方法
JP2002071762A (ja) * 2000-06-13 2002-03-12 Advantest Corp 半導体試験装置及びそのモニタ装置
CA2321346A1 (en) * 2000-09-28 2002-03-28 Stephen K. Sunter Method, system and program product for testing and/or diagnosing circuits using embedded test controller access data
KR100374636B1 (ko) * 2000-10-18 2003-03-04 삼성전자주식회사 결함 테스트 및 분석 회로를 구비하는 반도체 장치 및 결함 분석 방법
JP2002163900A (ja) * 2000-11-22 2002-06-07 Hitachi Ltd 半導体ウエハ、半導体チップ、半導体装置および半導体装置の製造方法
US6711522B2 (en) * 2001-04-25 2004-03-23 Fujitsu Limited Data analysis apparatus, data analysis method, and computer products
AU2002341677A1 (en) * 2001-09-18 2003-04-01 Applied Materials, Inc. Integrated equipment set for forming an interconnect on a substrate
US7043696B2 (en) * 2002-01-15 2006-05-09 National Instruments Corporation Graphical program system having a single graphical user interface shared by a plurality of graphical programs

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999022310A1 (en) * 1997-10-27 1999-05-06 Kla-Tencor Corporation Software system and method for extending classifications and attributes in production analysis
US6097887A (en) * 1997-10-27 2000-08-01 Kla-Tencor Corporation Software system and method for graphically building customized recipe flowcharts

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
KIYOSHI KOZUKA ET AL: "COMPONENT-BASED VISUAL PROGRAMMING ENVIRONMENT FOR COOPERATIVE SOFTWARE DEVELOPMENT", HITACHI REVIEW, HITACHI LTD. TOKYO, JP, vol. 45, no. 2, April 1996 (1996-04-01), pages 75 - 80, XP000622838, ISSN: 0018-277X *
LEE F ET AL: "Yield analysis and data management using Yield Manager<TM>", ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE AND WORKSHOP, 1998. 1998 IEEE/SEMI BOSTON, MA, USA 23-25 SEPT. 1998, NEW YORK, NY, USA,IEEE, US, 23 September 1998 (1998-09-23), pages 19 - 30, XP010314089, ISBN: 0-7803-4380-8 *

Also Published As

Publication number Publication date
US7035752B2 (en) 2006-04-25
EP1376144A2 (de) 2004-01-02
JP2004072093A (ja) 2004-03-04
US20050119852A1 (en) 2005-06-02
TWI292540B (en) 2008-01-11
TW200406692A (en) 2004-05-01
US6898545B2 (en) 2005-05-24
US20040002829A1 (en) 2004-01-01

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