EP1408234B2 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP1408234B2
EP1408234B2 EP03022427A EP03022427A EP1408234B2 EP 1408234 B2 EP1408234 B2 EP 1408234B2 EP 03022427 A EP03022427 A EP 03022427A EP 03022427 A EP03022427 A EP 03022427A EP 1408234 B2 EP1408234 B2 EP 1408234B2
Authority
EP
European Patent Office
Prior art keywords
piston
valve
space
locking device
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP03022427A
Other languages
German (de)
English (en)
Other versions
EP1408234B1 (fr
EP1408234A1 (fr
Inventor
Eckhard Bez
Thorsten Burggraf
Stefan Dr. Zabeschek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1408234A1 publication Critical patent/EP1408234A1/fr
Publication of EP1408234B1 publication Critical patent/EP1408234B1/fr
Application granted granted Critical
Publication of EP1408234B2 publication Critical patent/EP1408234B2/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/12—Valves; Arrangement of valves arranged in or on pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/0005—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00 adaptations of pistons
    • F04B39/0016—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00 adaptations of pistons with valve arranged in the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/12—Valves; Arrangement of valves arranged in or on pistons
    • F04B53/123—Flexible valves

Definitions

  • the invention relates to a vacuum pump.
  • the closest prior art is the WO 00/63557 , It shows a vacuum pump for conveying gases with a piston chamber wall limited displacement, with a piston oscillating in the piston with piston crown, which is designed as a valve, with gas discharge valve at the upper end of the displacement and with a gas inlet opening, which radially in the lower part of the displacement is arranged, the valve in the piston head allows a gas flow between the hub and gear chamber, in order to reduce the pressure difference between the two spaces, the valve consists of an opening in the piston head and a frictional device, wherein the opening through a membrane depending on Gas flow is held by the non-positive device in a closed state.
  • the present invention relates to one or more stages of construction.
  • the pistons perform an oscillating movement between their two reversal points. During the upward movement of a piston, the gas is compressed and expelled. During the downward movement creates a vacuum in the displacement. So gases can flow through suitable valves in the displacement.
  • the work to be done in the downward movement of the piston results from the pressure difference between the pressure in the transmission chamber and the negative pressure in the displacement and from the surface of the piston and the length of the stroke. This effect increases the power consumption of the pump drive and increases the temperature of pump components, which interferes with smooth and safe operation. Dissipating the heat is associated with additional undesirable expense.
  • the invention is based on the object to present a construction by which additional unnecessary energy consumption and unwanted heating of the pump components are avoided. Particular attention should be paid to the fact that dead spaces do not arise in the area of pump-active components (eg pistons and valves). These include gases during the pumping process and thus significantly affect the pumping properties.
  • pump-active components eg pistons and valves
  • the work to be done in the downward movement of the piston is reduced.
  • the pressure difference between the pressure in the gear chamber and the negative pressure in the displacement is reduced by the flowing over the piston head into the displacement gas.
  • This effect is achieved by installing a valve in the piston crown. Openings in the piston crown provide a direct connection between the gear chamber and displacement. By such a construction dead spaces are avoided and thus ensures an effective pumping behavior.
  • the piston 3 performs an oscillating movement, whereby the delivery of gas is effected.
  • the gas to be pumped passes through radial inlet openings 5 in the piston cylinder wall 2 in the region of the lower pressure point of the piston in the displacement 1 and is discharged via a valve 7 at the upper end of the displacement.
  • the movement of the piston is generated via a connecting rod 8 and a piston rod 10, which is connected to a drive device.
  • the axial boundary of the piston 3 is formed by the piston head 12.
  • the piston head is formed according to the invention simultaneously as a valve. For this he is provided with openings 14. These openings are covered by a membrane which, depending on the embodiment, can be designed as a plastic membrane 16 interspersed with ferromagnetic particles or as a magnetic plastic membrane 18.
  • the function of the valve includes a non-positive device which presses the membrane in the closed state to seal the openings 14 on this.
  • the non-positive device is formed by a recessed in a groove 20 magnetic ring 21 or magnet segments 22 together with the plastic membrane 16.
  • a metal plate 24 and a magnetic plastic membrane 18 together form the frictional device.
  • the openings 14 are sealed by the membrane 16 or 18, so that the previously flowed through the inlet openings 5 in the displacement 1 gas compressed and can be discharged via the valve 7.
  • the diaphragm 16 or 18 is raised due to the pressure difference between the negative pressure in the displacement 1 and the pressure in the transmission chamber 26, and a pressure compensation takes place.
  • the magnetic forces generated by the non-positive device ensure from a defined pressure difference for a secure adhesion of the membrane and thus for a gas-tight closing of the holes.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Reciprocating Pumps (AREA)

Claims (4)

  1. Pompe à vide de transport de gaz comprenant une chambre de levée (1) délimitée par une paroi de cylindre à piston (2), un piston (3) se déplaçant en va-et-vient dans la chambre de levée et équipé d'un fond de piston (12) formant soupape, une soupape de décharge de gaz (7) disposée à l'extrémité haute de la chambre de levée et des orifices d'admission de gaz (5) agencés radialement en partie basse de la chambre de levée, dans laquelle la soupape en fond de piston permet le passage d'un flux gazeux entre la chambre de levée et la chambre de transmission en réduction d'un différentiel de pression entre ces deux chambres, ladite soupape comportant des ouvertures (14) pratiquées dans le fond de piston (12) et un actionneur (16, 21 ; 18, 24) pour maintenir lesdites ouvertures (14) ouvertes ou fermées en fonction du flux gazeux et dans laquelle ledit actionneur est constitué d'un dispositif magnétique et d'une membrane en matière plastique chargée de particules ferromagnétiques.
  2. Pompe à vide selon la revendication 1, caractérisée en ce que le dispositif magnétique est constitué d'un aimant permanent de forme annulaire (21) encastré dans une gorge (20).
  3. Pompe à vide selon la revendication 1, caractérisée en ce que le dispositif magnétique est constitué d'un aimant permanent fait de plusieurs segments (22) encastrés dans une gorge (20).
  4. Pompe à vide de transport de gaz comprenant une chambre de levée (1) délimitée par une paroi de cylindre à piston (2), un piston (3) se déplaçant en va-et-vient dans la chambre de levée et équipé d'un fond de piston (12) formant soupape, une soupape de décharge de gaz (7) disposée à l'extrémité haute de la chambre de levée et des orifices d'admission de gaz (5) agencés radialement en partie basse de la chambre de levée, dans laquelle la soupape en fond de piston permet le passage d'un flux gazeux entre la chambre de levée et la chambre de transmission en réduction d'un différentiel de pression entre ces deux chambres, ladite soupape comportant des ouvertures (14) pratiquées dans le fond de piston (12) et un actionneur (16, 21 ; 18, 24) pour maintenir lesdites ouvertures (14) ouvertes ou fermées en fonction du flux gazeux et dans laquelle l'actionneur est constitué d'une plaque métallique (24) et d'une membrane magnétique en matière plastique (18).
EP03022427A 2002-10-10 2003-10-07 Pompe à vide Expired - Lifetime EP1408234B2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10247336A DE10247336A1 (de) 2002-10-10 2002-10-10 Kolbenmaschine zur Förderung von Gasen
DE10247336 2002-10-10

Publications (3)

Publication Number Publication Date
EP1408234A1 EP1408234A1 (fr) 2004-04-14
EP1408234B1 EP1408234B1 (fr) 2006-11-22
EP1408234B2 true EP1408234B2 (fr) 2010-08-25

Family

ID=32010426

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03022427A Expired - Lifetime EP1408234B2 (fr) 2002-10-10 2003-10-07 Pompe à vide

Country Status (4)

Country Link
US (1) US7241120B2 (fr)
EP (1) EP1408234B2 (fr)
JP (1) JP4397664B2 (fr)
DE (2) DE10247336A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BRPI0702471B1 (pt) * 2007-07-04 2018-07-10 Whirlpool S.A. Pistão para compressor de refrigeração
JP5458439B2 (ja) * 2010-03-24 2014-04-02 株式会社医器研 ロータリ式シリンダ装置
DE102012217892A1 (de) * 2012-10-01 2014-05-15 Siemens Aktiengesellschaft Gusseisen mit Niob und Bauteil
BR102014007259A2 (pt) * 2014-03-26 2015-12-08 Whirlpool Sa compressor alternativo provido de arranjo de válvulas de sucção
CN104033378B (zh) * 2014-06-19 2015-12-30 皖西学院 磁铁式柱塞泵
CN104912773B (zh) * 2015-07-01 2017-10-24 浙江申元机电有限公司 一种空气压缩装置及空压机
CN110425106B (zh) * 2019-08-16 2020-09-08 成都正升能源技术开发有限公司 一种直线压缩机用活塞组件

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19634517A1 (de) † 1996-08-27 1998-03-05 Leybold Vakuum Gmbh Kolbenvakuumpumpe mit Auslaßventil
WO2000063557A1 (fr) † 1999-04-15 2000-10-26 Leybold Vakuum Gmbh Pompe a vide a piston a entree et a sortie de gaz

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4176586A (en) * 1975-01-31 1979-12-04 Manfred Rudle Piston and cylinder device
DE2946826C2 (de) * 1979-11-20 1984-01-19 Interflux AG, 8700 Küsnacht, Zürich Durchflußwächter für flüssige oder gasförmige Medien
DE3146030A1 (de) * 1981-11-20 1983-05-26 Siemens AG, 1000 Berlin und 8000 München Ueberdruckventil fuer behaelter
DE4203534C2 (de) * 1992-02-07 1998-02-12 Bruno Gruber Pumpe
JP2515669B2 (ja) * 1992-06-12 1996-07-10 永島医科器械株式会社 真空ポンプ
JPH06287445A (ja) * 1993-03-30 1994-10-11 Toda Kogyo Corp ポリアミド系プラスチック磁石用材料
JP3378335B2 (ja) * 1994-01-28 2003-02-17 板倉 剛 エアー・ポンプの弁装置
JP2533940Y2 (ja) * 1994-03-31 1997-04-30 株式会社セブンリバー 逆流防止装置
BE1009433A3 (nl) * 1995-06-20 1997-03-04 Atlas Copco Airpower Nv Zuigermechanisme met doorvoer doorheen de zuiger.
JP2999945B2 (ja) * 1995-06-28 2000-01-17 東製株式会社 ドライ式ピストン型真空ポンプ
US5775886A (en) * 1996-08-08 1998-07-07 Terwilliger; Gerald L. Gas compressor with reciprocating piston with valve sheath
JP3057426B2 (ja) * 1997-02-05 2000-06-26 株式会社マグエックス 軟質磁性シート
US5921755A (en) * 1997-04-21 1999-07-13 Dry Vacuum Technologies, Inc. Dry vacuum pump
US6019080A (en) * 1998-04-27 2000-02-01 Lagrone; John T. Ported piston
KR100378818B1 (ko) * 2000-12-01 2003-04-07 엘지전자 주식회사 압축기용 흡입밸브의 고정장치

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19634517A1 (de) † 1996-08-27 1998-03-05 Leybold Vakuum Gmbh Kolbenvakuumpumpe mit Auslaßventil
WO2000063557A1 (fr) † 1999-04-15 2000-10-26 Leybold Vakuum Gmbh Pompe a vide a piston a entree et a sortie de gaz

Also Published As

Publication number Publication date
US20040071574A1 (en) 2004-04-15
JP4397664B2 (ja) 2010-01-13
JP2004132371A (ja) 2004-04-30
DE50305737D1 (de) 2007-01-04
EP1408234B1 (fr) 2006-11-22
US7241120B2 (en) 2007-07-10
DE10247336A1 (de) 2004-04-22
EP1408234A1 (fr) 2004-04-14

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