EP1447567A2 - Unité de pompage à vide - Google Patents

Unité de pompage à vide Download PDF

Info

Publication number
EP1447567A2
EP1447567A2 EP04000831A EP04000831A EP1447567A2 EP 1447567 A2 EP1447567 A2 EP 1447567A2 EP 04000831 A EP04000831 A EP 04000831A EP 04000831 A EP04000831 A EP 04000831A EP 1447567 A2 EP1447567 A2 EP 1447567A2
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
temperature control
control device
pump
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP04000831A
Other languages
German (de)
English (en)
Other versions
EP1447567A3 (fr
EP1447567B1 (fr
Inventor
Robert Watz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=32668001&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1447567(A2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1447567A2 publication Critical patent/EP1447567A2/fr
Publication of EP1447567A3 publication Critical patent/EP1447567A3/fr
Application granted granted Critical
Publication of EP1447567B1 publication Critical patent/EP1447567B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/58Cooling; Heating; Diminishing heat transfer
    • F04D29/582Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/60Mounting; Assembling; Disassembling
    • F04D29/601Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump arrangement according to the preamble of 1. Protection claim.
  • Vacuum pumps in which the invention can be used particularly effectively can be rotating pumps, especially friction pumps. They exist usually from a number of levels, which are designed differently can and each have rotor and corresponding stator components. This Pump-active components are penetrated by the gas to be pumped. To optimal Pump properties, such as maximum gas throughput and maximum compression, To reach the rotating parts at high speed circulate. The drive energy required for this purpose is only partially in transformed kinetic energy. Much of it is called heat loss released. Further undesirable amounts of heat are released through storage (mechanical losses due to friction in ball bearings or electrical Losses in magnetic bearings) and by compression and friction of the gases.
  • the amount of gases pumped by a vacuum pump is among others depends on the temperature in the scoop chamber.
  • the amount of gas is higher Temperature per unit volume is lower than at lower temperature. It is So it makes sense to take measures to increase the temperature in the scooping chamber to reduce.
  • the rotor temperature becomes due to the heat dissipation to the pump housing affected. With a cool pump housing and thus a larger one The temperature difference between the rotor and the housing is the one that arises on the rotor Heat dissipated better. This allows the amount of gas to be pumped increase.
  • a lower rotor temperature also has a positive effect the lifespan.
  • vacuum pumps are of conventional design directly connected to the recipient.
  • cooling devices which are integrated in the pump housing.
  • Such a rigid solution fixes the increased manufacturing costs even for the applications where one Cooling at the appropriate point is not necessary.
  • the invention is based on the object of presenting a vacuum pump which effectively dissipates the heat generated during operation can.
  • the construction should be simple and inexpensive to implement and variable be applicable.
  • the arrangement according to the invention is a simple construction. You can in Principle of every pump both in the high vacuum range and in the fore vacuum area to be attached. If necessary, several components can be put together to be assembled. By varying the temperature of the tempered liquid the temperature at different points of the pump depending on the requirement adjusted and so the thermal conditions optimal to the application and the operating status can be adjusted. In particular, there is Possibility, for example, of a higher temperature on the fore-vacuum side generate to prevent condensation at this point.
  • the pump is with the housing 1, which has a suction opening 2 and Has gas outlet opening 3, provided.
  • the rotor shaft 4 is in bearings 5 and 6 fixed and driven by the motor 7.
  • Component 18 attached, which has a temperature control device 20.
  • a first embodiment (Fig. 2) is the component on the circumference with a groove 21 for Providing a tubular hollow body 22 provided. Through this hollow body flows through an inlet connection 23 and a corresponding one, not here shown outlet the tempered liquid.
  • a groove 16 is attached. This is with a sleeve 27 and Sealing devices 28 closed.
  • the tempered in this groove Liquid via an inlet connection 31 and one not shown Flow outlet pipe.
  • FIG. 4 Another embodiment is as a detail in Fig. 4 and for better explanation shown again in Fig. 4a in plan view as a section.
  • Component 18 with bores 32 extending in the tangential direction for receiving the tempered liquid.
  • ком ⁇ онент 18 can be between Pump and recipient can be arranged. Via a temperature control device 35 The temperature of those flowing through the component 18 can be known per se Liquid can be adapted to the requirements.
  • the invention enables better heat dissipation from the pump flange as well thermal decoupling from the recipient.
  • the temperature control is independent of the pump cooling circuit. Existing systems can easily can be converted by adding one or more components.
  • the invention Arrangement not only allows cooling, but also beyond general temperature control in the area used.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressor (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Flanged Joints, Insulating Joints, And Other Joints (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP04000831A 2003-02-07 2004-01-16 Unité de pompage à vide Expired - Lifetime EP1447567B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10305038 2003-02-07
DE10305038A DE10305038A1 (de) 2003-02-07 2003-02-07 Vakuumpumpanordnung

Publications (3)

Publication Number Publication Date
EP1447567A2 true EP1447567A2 (fr) 2004-08-18
EP1447567A3 EP1447567A3 (fr) 2005-06-15
EP1447567B1 EP1447567B1 (fr) 2007-09-19

Family

ID=32668001

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04000831A Expired - Lifetime EP1447567B1 (fr) 2003-02-07 2004-01-16 Unité de pompage à vide

Country Status (5)

Country Link
US (1) US7500821B2 (fr)
EP (1) EP1447567B1 (fr)
JP (1) JP2004239258A (fr)
AT (1) ATE373781T1 (fr)
DE (2) DE10305038A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202008011489U1 (de) * 2008-08-28 2010-01-07 Oerlikon Leybold Vacuum Gmbh Stator-Rotor-Anordnung für eine Vakuumpumpe sowie Vakuumpumpe
DE102013203421A1 (de) * 2013-02-28 2014-08-28 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE202013008468U1 (de) * 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh Vakuumpumpengehäuse
JP5772994B2 (ja) * 2014-01-10 2015-09-02 株式会社島津製作所 ターボ分子ポンプ
JP7680226B2 (ja) * 2021-03-04 2025-05-20 エドワーズ株式会社 真空ポンプ

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1136957A (en) * 1914-01-06 1915-04-27 Carl F Hettinger Rotary compressor.
US1288728A (en) * 1915-09-18 1918-12-24 Spencer Turbine Co Rotary blower.
US1601531A (en) * 1925-05-11 1926-09-28 Jeannin Electric Company Electric-motor casing
CA584954A (fr) * 1954-07-01 1959-10-13 Westinghouse Electric Corporation Unite de pompe a moteur
US3142155A (en) * 1961-11-29 1964-07-28 Gen Electric Gas turbine engine cooling arrangement
US4073338A (en) * 1973-06-26 1978-02-14 Toyota Chuo Kenkyusho Heat exchangers
USRE36610E (en) * 1989-05-09 2000-03-14 Kabushiki Kaisha Toshiba Evacuation apparatus and evacuation method
JP2538796B2 (ja) * 1989-05-09 1996-10-02 株式会社東芝 真空排気装置および真空排気方法
DE4020015C1 (fr) 1990-06-20 1991-09-26 Mannesmann Ag, 4000 Duesseldorf, De
US5154573A (en) * 1991-09-12 1992-10-13 Ingersoll-Rand Company Cooling system for centrifugal pump components
DE4237972C2 (de) * 1992-11-11 1997-06-12 Leybold Ag Vakuumpumpe mit Rotor
DE4220015A1 (de) * 1992-06-19 1993-12-23 Leybold Ag Gasreibungsvakuumpumpe
FR2739574B1 (fr) * 1995-10-04 1997-11-14 Cit Alcatel Groupe de pompage secondaire
IT1287016B1 (it) * 1996-07-18 1998-07-24 Varian Spa Pompa da vuoto.
DE19724323A1 (de) * 1997-06-10 1998-12-17 Leybold Vakuum Gmbh Flanschverbindung
JPH11315794A (ja) * 1998-05-01 1999-11-16 Kashiyama Kogyo Kk 冷却機構付スクリュードライ真空ポンプ
WO2000011324A1 (fr) * 1998-08-18 2000-03-02 Siemens Aktiengesellschaft Carter de turbine
JP4657463B2 (ja) * 2001-02-01 2011-03-23 エドワーズ株式会社 真空ポンプ

Also Published As

Publication number Publication date
US20040156713A1 (en) 2004-08-12
EP1447567A3 (fr) 2005-06-15
DE502004004989D1 (de) 2007-10-31
EP1447567B1 (fr) 2007-09-19
JP2004239258A (ja) 2004-08-26
ATE373781T1 (de) 2007-10-15
DE10305038A1 (de) 2004-08-19
US7500821B2 (en) 2009-03-10

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