EP1478490A2 - Procede de finition et de polissage de surfaces de forme libre, notamment de lentilles optiques aspheriques a symetrie de revolution - Google Patents

Procede de finition et de polissage de surfaces de forme libre, notamment de lentilles optiques aspheriques a symetrie de revolution

Info

Publication number
EP1478490A2
EP1478490A2 EP03742562A EP03742562A EP1478490A2 EP 1478490 A2 EP1478490 A2 EP 1478490A2 EP 03742562 A EP03742562 A EP 03742562A EP 03742562 A EP03742562 A EP 03742562A EP 1478490 A2 EP1478490 A2 EP 1478490A2
Authority
EP
European Patent Office
Prior art keywords
tool
tools
free
polishing
removal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP03742562A
Other languages
German (de)
English (en)
Other versions
EP1478490B1 (fr
Inventor
Sven Kiontke
Hermann DÖHLER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asphericon GmbH
Original Assignee
Asphericon GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asphericon GmbH filed Critical Asphericon GmbH
Publication of EP1478490A2 publication Critical patent/EP1478490A2/fr
Application granted granted Critical
Publication of EP1478490B1 publication Critical patent/EP1478490B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B51/00Arrangements for automatic control of a series of individual steps in grinding a workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/06Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor grinding of lenses, the tool or work being controlled by information-carrying means, e.g. patterns, punched tapes, magnetic tapes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation

Definitions

  • the invention relates to a method for grinding and polishing free-form surfaces, in particular rotationally symmetrical aspherical optical lenses.
  • these aspherical lenses have special optical properties that theoretically represent the physical optimum. In practice, this means that the images realized with these aspherical lenses are much brighter and sharper. You avoid errors like spherical aberration.
  • the object of the invention is to avoid these disadvantages.
  • rotationally symmetrical free-form surfaces In contrast to any free-form surfaces, rotationally symmetrical free-form surfaces have a regular shape in the form of their rotational symmetry. It is irrelevant how the lens is rotated within its axis of symmetry, the cross-section of the surface shape as for example in Fig. 4 surface (1) remains the same. If the same surfaces are processed using methods that utilize the rotational symmetry (see also FIG. 4), the surface defects are also distributed rotationally symmetrically. Then it is possible to control the removal only radially. To control such processing, the method presented is converted into a one-dimensional form. The virtual removal and the distribution of the areas is limited to the one-dimensional, radial area (see FIG. 5). The machining then takes place with the rotation of the tool and workpiece.
  • overlapping areas are also permitted.
  • the areas B1, B2, B3 ... B9 shown in FIG. 10 overlap in pairs by 50%. For example, B3 overlaps half with B4 and half overlaps with B5. There are 16 common support points or calculation points.
  • this process enables the use of tools (2) with diameters from one eighth to one quarter of the diameter of the workpiece (Fig. 11) and is still able to correct the surface (1) (see also in embodiment).
  • tools (2) with diameters from one eighth to one quarter of the diameter of the workpiece (Fig. 11) and is still able to correct the surface (1) (see also in embodiment).
  • the use of these tools alone enables a more than six-fold increase in removal and a corresponding reduction in processing time.
  • the existing errors (7 in FIG. 12), which must be removed in order to achieve the required accuracy, are decisive for the use of tools. It is generally known that the tools used for correlating may only be as wide as the narrowest error, here 20 mm, which must be removed. With this method it is possible to use tools that are twice as wide or. have twice the diameter of 40 mm as the errors to be corrected. The errors are corrected as before, but in a quarter of the time, since the machining area quadruples with the tool, which is twice as wide as before.
  • the polishing or grinding film (14 from FIG. 13), the material of the tool (2) coming into contact with the processing surface should have a homogeneous structure which is free from bubbles, cracks or the like.
  • the composition of the material itself should also be macroscopically uniform.
  • a reproducible removal is essentially achieved when the tools rest vertically on the surface.
  • 16 illustrates an arrangement of several tools, all of which lie tangentially on the surface.
  • machining the surface is also possible and useful if the tools are not moving.
  • the tools are arranged in such a way that the entire free-form surface is machined, which is the case in the example from FIG. 14.
  • each of the individual tools is controlled separately.
  • it is easier, especially if the handling system of the tools for several lenses is to be universal, if each of the tools has a movable foot that meets the condition that the tool lies tangentially on the free surface even if it is not entirely correct Delivery guaranteed.
  • the individual tools can be mechanically bundled in a rod-shaped composite (18).
  • Round composites (17) are also an option for combining individual tools (2). In terms of the tangential support of the tool, they are particularly advantageous on a round, rotationally symmetrical free-form surface (1).
  • the exemplary embodiment relates to an aspherical optical lens that is to be corrected.
  • the lens is measured interferometrically.
  • FIG. 3 shows the error distribution measured before processing. Since the previous polishing out of the lens, as can be seen very well in FIG. 3, already took place in a rotationally symmetrical manner, the errors present on the surface are distributed rotationally symmetrically. In the meantime, both the lens and the tool rotate, the tool travels radially from the edge of the lens with a vertical orientation to its surface to the center of the lens (FIG. 4). The correction of the errors should be controlled along this path by the dwell time. In contrast to general free-form surfaces, the entire error analysis for the correction of this lens is limited to the radial distance. A somewhat descriptive example is chosen here to simplify the illustration. The application of the method to general free-form surfaces means only a transformation in two dimensions, i.e. the use of a surface instead of only one (radial) path.
  • the error of the entire measured area is first averaged over the radial average. 5 shows the result in curve 7.
  • the entire method works on 130 support points, on which calculations are made. The virtual removal is known for each position. Building on this, a dwell time is generated and used to control the removal during processing. Each of these interpolation points was generated with measured values from FIG. 3. In this example, these 130 support points correspond to a distance of 20 mm.
  • the virtual removal of the tool is calculated on the basis of footprints for the entire surface.
  • the tool has a width of 33 points, about 5 mm.
  • the areas should have the width of the tool.
  • a system of equations is now set up and solved for each of these areas, which reduces the error of the surface in this area by the influence of the adjacent areas estimated for the zero approximation (for Bl: B2 / for B2: Bl, B3 / for B3: B2, B4 / and for B4: B3) and the virtual removal at each of the 33 positions belonging to the area.
  • the example shows that the method is able to correct difficult surface defects in an extremely short time when using large tools.
  • the large tool diameter ratio tool: workpiece / 1: 8
  • the ability of the process to remove just enough to reduce only the actually existing error plays a significant part in the shortening of the production time.
  • FIG. 6 shows a curve 13 which illustrates how much removal is removed in such cases. In this case, the processing time would increase to 20 minutes. It is also crucial that this result was achieved in one processing step without repeated measuring and reworking.
  • Fig. 1 division of a round free-form surface (1) in areas (3) when using the
  • Fig. 2 Division of a rectangular free-form surface (4) into areas (3) which are delimited by the area boundaries (5) and correspond to the size of the tool (2) (top view on the free-form surface)
  • Fig. 3 Two-dimensional error distribution (6) of a rotationally symmetrical optical
  • FIG. 5 Radial average of the error distribution (7) on the rotationally symmetrical optical lens from FIG. 4; this corresponds to the minimum necessary removal 6: shifted radial average of the error distribution (13) on the rotationally symmetrical optical lens from FIG. 4; This corresponds to the removal that has often been carried out to date
  • Fig. 7 Illustration of the method with the actual state of the surface defect (7), the forecast removal (sum of 8 and 9) and the forecast remaining error after processing (10) Residence times determined by the method (11)
  • Fig. 9 The remaining on the surface processed with these residence times (11)
  • Fig. 10 Exemplary distribution of 50% overlapping areas (Bl, ..., B9) within a radial average of a rotationally symmetrical surface
  • Fig. 11 Size relationships between tool and workpiece 1: 8 and 1: 4
  • Fig. 12 Size comparison between the narrowest error in the error distribution () and the
  • Tool (2) Fig. 13 Tool with adapted polishing or grinding film (14) with vertical edges (15)
  • Fig. 14 Arrangement of several tools (2) on the round free-form surface (1)
  • Fig. 15 Arrangement of several tools (2) on the rectangular free-form surface (4)
  • Fig. 16 Arrangement of several tools (2) that are tangential Lie on the freeform surface (1) with a vertical orientation.
  • Fig. 17 Arrangement of round mechanical assemblies (17) of tools (2) on a round free-form surface (1)
  • Fig. 18 Arrangement of rod-shaped mechanical assemblies (18) of tools (2) on a rectangular free-form surface (4)

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
EP03742562A 2002-02-21 2003-02-20 Procede de finition et de polissage de surfaces de forme libre, notamment de lentilles optiques aspheriques a symetrie de revolution Expired - Lifetime EP1478490B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10207379 2002-02-21
DE10207379A DE10207379A1 (de) 2002-02-21 2002-02-21 Verfahren zum Schleifen und Polieren von Freiformflächen, insbesondere von rotationssymmetrischen asphärischen optischen Linsen
PCT/EP2003/001749 WO2003070427A2 (fr) 2002-02-21 2003-02-20 Procede de finition et de polissage de surfaces de forme libre, notamment de lentilles optiques aspheriques a symetrie de revolution

Publications (2)

Publication Number Publication Date
EP1478490A2 true EP1478490A2 (fr) 2004-11-24
EP1478490B1 EP1478490B1 (fr) 2006-10-25

Family

ID=27674822

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03742562A Expired - Lifetime EP1478490B1 (fr) 2002-02-21 2003-02-20 Procede de finition et de polissage de surfaces de forme libre, notamment de lentilles optiques aspheriques a symetrie de revolution

Country Status (6)

Country Link
US (1) US20050215175A1 (fr)
EP (1) EP1478490B1 (fr)
AT (1) ATE343454T1 (fr)
AU (1) AU2003215573A1 (fr)
DE (2) DE10207379A1 (fr)
WO (1) WO2003070427A2 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004028470A1 (de) 2004-06-11 2005-12-29 Leica Microsystems (Schweiz) Ag Augen-, insbesondere Retinaschutzvorrichtung und optisches Element mit einer Freiformfläche für einen Beleuchtungsstrahlengang, sowie Verwendung eines optischen Elements mit Freiformfläche
DE102007040395B4 (de) * 2007-08-27 2010-03-11 Optotech Optikmaschinen Gmbh Vorrichtung zur blockfreien Fertigung von Ein- und Mehrstärkengläsern in der Rezeptfertigung
DE102009004787A1 (de) * 2009-01-13 2010-07-15 Schneider Gmbh & Co. Kg Vorrichtung und Verfahren zum Polieren von Linsen
US20120301242A1 (en) * 2011-05-24 2012-11-29 Canon Kabushiki Kaisha Method of manufacturing workpiece
US20140113525A1 (en) * 2012-10-22 2014-04-24 Apple Inc. Methods for finishing surfaces using tool center point shift techniques
JP2016132077A (ja) * 2015-01-21 2016-07-25 株式会社ナガセインテグレックス 曲面研磨加工装置
CN110352115A (zh) * 2017-03-06 2019-10-18 应用材料公司 为cmp位置特定研磨(lsp)设计的螺旋及同心圆移动
DE102017130797B4 (de) * 2017-12-20 2022-06-09 Leibniz-Institut für Oberflächenmodifizierung e.V. Verfahren zur Erzeugung eines gewünschten Oberflächenprofils
CN111376142B (zh) * 2019-12-25 2021-09-10 苏州大学 一种大口径非球面镜数控铣磨成形抛光方法及装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU878530A1 (ru) * 1979-02-09 1981-11-07 Институт космических исследований АН СССР Способ формообразовани оптических поверхностей
DE3430499C2 (de) * 1984-08-18 1986-08-14 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und Einrichtung zum Läppen oder Polieren von optischen Werkstücken
US4958463A (en) * 1988-06-06 1990-09-25 United Technologies Corporation Optical surface quality improving arrangement
JP3587908B2 (ja) * 1995-09-01 2004-11-10 株式会社トプコン 研磨方法及び研磨装置
AU1399600A (en) * 1998-12-01 2000-06-19 Optical Generics Limited A polishing machine and method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO03070427A2 *

Also Published As

Publication number Publication date
WO2003070427A2 (fr) 2003-08-28
AU2003215573A1 (en) 2003-09-09
DE50305484D1 (de) 2006-12-07
ATE343454T1 (de) 2006-11-15
EP1478490B1 (fr) 2006-10-25
DE10207379A1 (de) 2003-09-04
US20050215175A1 (en) 2005-09-29
WO2003070427A3 (fr) 2004-03-04

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