EP1523025A3 - Source d'électrons à émission de champ - Google Patents

Source d'électrons à émission de champ Download PDF

Info

Publication number
EP1523025A3
EP1523025A3 EP02022014A EP02022014A EP1523025A3 EP 1523025 A3 EP1523025 A3 EP 1523025A3 EP 02022014 A EP02022014 A EP 02022014A EP 02022014 A EP02022014 A EP 02022014A EP 1523025 A3 EP1523025 A3 EP 1523025A3
Authority
EP
European Patent Office
Prior art keywords
layer
polycrystalline silicon
surface electrode
lower electrode
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP02022014A
Other languages
German (de)
English (en)
Other versions
EP1523025B1 (fr
EP1523025A2 (fr
Inventor
Takuya Komoda
Yoshiyuki Takegawa
Koichi Aizawa
Takashi Hatai
Tsutomu Ichihara
Yoshiaki Honda
Yoshifumi Watabe
Toru Baba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002083927A external-priority patent/JP3755474B2/ja
Priority claimed from JP2002083928A external-priority patent/JP2003281993A/ja
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Publication of EP1523025A2 publication Critical patent/EP1523025A2/fr
Publication of EP1523025A3 publication Critical patent/EP1523025A3/fr
Application granted granted Critical
Publication of EP1523025B1 publication Critical patent/EP1523025B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/30Cold cathodes, e.g. field-emissive cathode
    • H01J1/312Cold cathodes, e.g. field-emissive cathode having an electric field perpendicular to the surface, e.g. tunnel-effect cathodes of metal-insulator-metal [MIM] type

Landscapes

  • Cold Cathode And The Manufacture (AREA)
EP02022014A 2002-03-25 2002-10-01 Source d'électrons à émission de champ Expired - Lifetime EP1523025B1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2002083927 2002-03-25
JP2002083928 2002-03-25
JP2002083927A JP3755474B2 (ja) 2002-03-25 2002-03-25 電子源およびその製造方法
JP2002083928A JP2003281993A (ja) 2002-03-25 2002-03-25 電子源およびその製造方法

Publications (3)

Publication Number Publication Date
EP1523025A2 EP1523025A2 (fr) 2005-04-13
EP1523025A3 true EP1523025A3 (fr) 2005-04-20
EP1523025B1 EP1523025B1 (fr) 2012-12-19

Family

ID=34315543

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02022014A Expired - Lifetime EP1523025B1 (fr) 2002-03-25 2002-10-01 Source d'électrons à émission de champ

Country Status (1)

Country Link
EP (1) EP1523025B1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1056110A1 (fr) * 1998-02-09 2000-11-29 Matsushita Electric Industrial Co., Ltd. Dispositif emetteur d'electrons, son procede de production, et son procede d'excitation; afficheur d'images comprenant ledit emetteur d'electrons et son procede de fabrication
EP1094484A2 (fr) * 1999-10-18 2001-04-25 Matsushita Electric Works, Ltd. Source d'électrons à émission de champs et procédé pour sa fabrication
EP1096532A1 (fr) * 1999-10-27 2001-05-02 Pioneer Corporation Dispositif d'émission d'électrons
US20010017515A1 (en) * 2000-02-29 2001-08-30 Toshiaki Kusunoki Display device using thin film cathode and its process

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0367195A3 (fr) * 1988-10-31 1991-10-02 Matsushita Electric Industrial Co., Ltd. Eléments émetteurs d'électrons à cathode froide MIM et leurs procédés de fabrication
JP2987140B2 (ja) 1997-10-29 1999-12-06 松下電工株式会社 電界放射型電子源およびその製造方法および平面発光装置およびディスプレイ装置および固体真空デバイス
WO2000074098A1 (fr) * 1999-05-28 2000-12-07 Hitachi, Ltd. Source couche mince d'electrons, affichage et dispositif
JP3874396B2 (ja) * 2000-01-13 2007-01-31 パイオニア株式会社 電子放出素子及びその製造方法並びに電子放出素子を用いた表示装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1056110A1 (fr) * 1998-02-09 2000-11-29 Matsushita Electric Industrial Co., Ltd. Dispositif emetteur d'electrons, son procede de production, et son procede d'excitation; afficheur d'images comprenant ledit emetteur d'electrons et son procede de fabrication
EP1094484A2 (fr) * 1999-10-18 2001-04-25 Matsushita Electric Works, Ltd. Source d'électrons à émission de champs et procédé pour sa fabrication
EP1096532A1 (fr) * 1999-10-27 2001-05-02 Pioneer Corporation Dispositif d'émission d'électrons
JP2001126610A (ja) * 1999-10-27 2001-05-11 Pioneer Electronic Corp 電子放出素子
US20010017515A1 (en) * 2000-02-29 2001-08-30 Toshiaki Kusunoki Display device using thin film cathode and its process
JP2001243901A (ja) * 2000-02-29 2001-09-07 Hitachi Ltd 薄膜型電子源を用いた表示装置及びその製造方法

Also Published As

Publication number Publication date
EP1523025B1 (fr) 2012-12-19
EP1523025A2 (fr) 2005-04-13

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