EP1530654A2 - Procede de depot par galvanisation de couches de contact sur des composants en ceramique - Google Patents

Procede de depot par galvanisation de couches de contact sur des composants en ceramique

Info

Publication number
EP1530654A2
EP1530654A2 EP02754511A EP02754511A EP1530654A2 EP 1530654 A2 EP1530654 A2 EP 1530654A2 EP 02754511 A EP02754511 A EP 02754511A EP 02754511 A EP02754511 A EP 02754511A EP 1530654 A2 EP1530654 A2 EP 1530654A2
Authority
EP
European Patent Office
Prior art keywords
contact
ceramic
components
component
ceramic components
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02754511A
Other languages
German (de)
English (en)
Inventor
Robert Krumphals
Axel Pecina
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Electronics AG
Original Assignee
Epcos AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epcos AG filed Critical Epcos AG
Publication of EP1530654A2 publication Critical patent/EP1530654A2/fr
Withdrawn legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
    • C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
    • C04B35/465—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/4505—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application
    • C04B41/4564—Electrolytic or electrophoretic processes, e.g. electrochemical re-alkalisation of reinforced concrete
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00844—Uses not provided for elsewhere in C04B2111/00 for electronic applications
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3213—Strontium oxides or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3215—Barium oxides or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3227—Lanthanum oxide or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3232—Titanium oxides or titanates, e.g. rutile or anatase
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/327—Iron group oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3275—Cobalt oxides, cobaltates or cobaltites or oxide forming salts thereof, e.g. bismuth cobaltate, zinc cobaltite

Definitions

  • the invention relates to a method for producing a well-adhering electroplating of ceramic materials.
  • Contact surfaces are then wires, e.g. applied in a soldering process.
  • the adhesive strength of the contact surfaces on the ceramic component plays an important role. On an untreated ceramic surface, it is usually so low that it does not meet the requirements of practice. Various methods have therefore been described to achieve better adhesive strengths by pretreating the ceramic components before applying the contact surfaces.
  • a basic contact is normally applied, for example, by dipping the component in metallizing paste or in conductive adhesive. This basic contact is then dried and usually baked. Due to the oxidative conditions during baking, almost all metallization pastes or conductive adhesives contain precious metals such as silver, palladium or platinum. The basic contact then enables the galvanic application of further metal layers, for example consisting of nickel or tin. The outermost layer, usually tin, is used for the necessary wettability of the component with solder when soldering. responsive and thus determines the component's SMD capability.
  • the disadvantage of applying a base contact by means of a metallization paste is that large amounts of precious metals have to be used and at the same time a time-consuming and energy-intensive baking of the base contact is necessary.
  • DE 36 32 513 A1 discloses a process in which the ceramic base bodies are pretreated first by the action of gaseous boron halides on the ceramic surface in a glow discharge zone and by subsequent immersion in alkaline or acidic aqueous solutions. After further treatment with a metal salt solution, a contacting layer can be galvanically deposited on the ceramic component. This process is also very time and energy consuming and usually also requires precious metal salt solutions.
  • the object of the invention is therefore to enable direct galvanic deposition of a contacting layer on the ceramic components by simple pretreatment of the ceramic components.
  • the invention describes a method in which a simple mechanical and chemical treatment of the areas of the ceramic component to be electroplated with a phosphoric acid, aqueous solution with a pH of about 1.0 to 1.5 increases the adhesive strength for contact layers can be achieved.
  • the contact layers can then be applied directly to the areas previously activated with the solution by means of a galvanic process.
  • Direct electroplating in the sense of the invention is understood to be to galvanically deposit a contact layer immediately after the mechanical and chemical pretreatment of the areas to be electroplated, without further additional time-consuming and cost-intensive process steps, for example using electroless processes based on tin chloride-palladium chloride solutions to create a catalytic seed layer.
  • the ceramic components can advantageously be washed in order to remove the chemical solutions.
  • the surfaces of the ceramic base body to be electroplated are advantageously treated during a process step A) by mechanical roughening and by chemical etching in the above-mentioned acidic aqueous solution.
  • the roughening can be accomplished, for example, by the fact that grinding bodies act on the areas of the components to be galvanized. Small balls or cubes made of SiC, corundum or steel, for example, can be used as grinding wheels.
  • Process step A can advantageously be implemented by rolling friction in a mixture of ceramic components and grinding wheels in an acidic, aqueous medium in a rotating drum. Due to the simultaneous mechanical roughening and the chemical etching, the surfaces of the ceramic component can be modified reliably so that a good adhesive strength of the contact surfaces on the ceramic component can be guaranteed during the galvanizing process in process step B).
  • High-resistance materials such as barium titanate, aluminum oxide or glass are suitable for the passivation layer.
  • divalent metal MII is either strontium or
  • Barium and the trivalent metal MIII is a rare earth element where:
  • the passivation layer can also comprise, for example, a lead-lanthanum-zirconium-titanate ceramic (PLZT ceramic) of the formula (Pb, La) (Zr, Ti) Ü3.
  • Pb, La lead-lanthanum-zirconium-titanate ceramic
  • Ü3 lead-lanthanum-zirconium-titanate ceramic
  • Pb, La lead-lanthanum-zirconium-titanate ceramic
  • Ü3 lead-lanthanum-zirconium-titanate ceramic
  • PbO ceramic lead-lanthanum-zirconium-titanate ceramic
  • These ceramics are advantageously composed of PbO with an approximate proportion of 50-80% by weight, ZrO2 with approximately 20-50% by weight, Ti 0 3 with approximately 10-40% by weight and La0 3 with approximately 0-20% by weight.
  • a contact layer is then electrodeposited onto the areas of the component which are roughened and etched in method step A).
  • the electroplating is advantageously carried out in the bulk material, the components being mixed with contact bodies in an acidic metal salt solution.
  • the contact bodies are advantageously electrically conductive metal balls, for example steel balls, which contact the components and ensure better current flow between the components, so that a higher deposition rate of the metal (contact layer) on the components can be achieved.
  • the component-contact body mixture is in a rotating drum in an electrolyte solution, the drum being in a galvanic basin.
  • a contact layer can be galvanically deposited on the areas of the components which have been pretreated according to process step A).
  • FIGS. 1A and 1B show process steps A) and B) of the process according to the invention.
  • FIGS. 2A and 2B show a cross section and a perspective view through a ceramic component produced by the method according to the invention with a continuous passivation layer on the lateral surfaces, with further galvanic layers then being applied using conventional methods.
  • FIGS. 3A and 3B show a cross section and a perspective view of a ceramic component produced by the method according to the invention with also further metallization layers applied by conventional methods, the passivation layer leaving free the areas of the lateral surfaces adjoining the end faces.
  • the areas of the ceramic component 1 which are not to be galvanized are provided with a passivation layer made of ZnMn2Ü4, for example, in method step AI) before the method according to the invention.
  • the ceramic components 1 with the passivation layers 2 are brought into contact with grinding bodies 5 in an acidic, aqueous solution (process step A).
  • the mixture of grinding wheels and ceramic components is located in a rotating drum 10 which is immersed in an acid bath 15.
  • the rotating movement of the drum is shown by an arrow in Figure 1A.
  • the axis of rotation of the drum is inclined in order to ensure a rolling movement of the mixture of ceramic components and grinding wheels. Due to the simultaneous mechanical roughening by the grinding bodies 5 and the chemical etching in the acid bath 15, the areas 3 of the components 1 to be galvanized are modified in such a way that a reliable casual adhesion of the galvanically applied contact layers becomes possible.
  • a phosphoric acid, aqueous solution with a pH of about 1.0 to 1.5 is used as the acid bath.
  • the contact areas and the contacting probability between the grinding wheels and the ceramic components are increased by maintaining an advantageous ratio of component length to grinding wheel diameter. This is advantageously about 1: 0.05 to 1: 0.8.
  • the entire arrangement with the rotating drum 10 and the grinding device component mixture is located in a basin 20 together with the acid bath.
  • the ceramic components pretreated according to A) are galvanized in the bulk material (see also FIG. IB).
  • a mixture of components 1 with a passivation layer 2 and contact bodies 25 is brought into a rotating drum 10.
  • This drum is immersed in an electrolyte solution 30, which is located in an electroplating basin 35.
  • the electrolytic solution consists, for example, of a tin-salt solution with an approximate concentration of 10 to 20 g SnII / liter, the pH being approximately 3 to 4.5.
  • Electrically conductive balls for example steel balls, are preferably used as contact bodies.
  • the electroplating basin 35 is switched as an anode and at the same time an electrode 36 is immersed in the rotating drum 10, which is connected as a cathode.
  • the rolling movement of the drum 10 enables good contact between the components and the contact bodies, the ratio of component length to contact body diameter preferably being in the range from about 1: 0.05 to 1: 0.08 in the method according to the invention. This increases the contact probability between the contact bodies and the components, so that a good deposition of the metal on the regions 3 is possible due to the good current flow.
  • the Current densities are preferably in the range from 0.05 to 0.15 A / dm 2 .
  • the contact bodies used in B) are preferably also used simultaneously as grinding bodies in process step A). This enables a simple and continuous process, in which after the process step A) the rotating drum is removed from the acid bath 15, washed several times with water, in order to avoid contamination of the acid bath on the components or contact or grinding wheels in the process step B) to convict. After washing, the component / contact body mixture can be immersed directly in the electroplating bath with the electrolyte solution 35 and process step B) can be carried out. As a result, additional complex work steps, such as, for example, removing the grinding wheels during the transition from process steps A) to B) can be avoided.
  • the advantages of the present variant of the method according to the invention also consist in the fact that both the pretreatment of the areas 3 to be galvanized in method step A) and method step B) can be carried out with the same technical devices provided for the galvanizing. There is no longer any need for cumbersome baking processes for metal conductive pastes or additional insertion of the components in glow discharge zones.
  • FIGS. 2A and 2B show a component 1 (varistor) produced by the method according to the invention with internal electrodes 55, which contact the contact layers 40, in cross section and in perspective view.
  • the passivation layer 2 which completely covers the lateral surfaces of the component and which was applied in method step AI), is located on the component.
  • the contact layer 50 generally consists of tin and determines the soldering properties of the ceramic component. In this case, the contact layers only cover the end faces of the component.
  • FIGS. 3A and 3B show a component, a varistor, produced by the method according to the invention, also in cross section and in a perspective view. It can be seen that in this case, after the process step AI), a passivation layer 2 is present, which only covers parts of the lateral surfaces of the component, while the end faces and regions of the lateral surfaces adjacent to the end faces are left free. Inside the component there are internal electrodes 55 which contact the contact layers 40 applied by the method according to the invention in B). Further contact layers 45 and 50 can be applied using conventional galvanic processes. In this case, the contact layers cover the end faces and the regions of the lateral surfaces of the component which are adjacent thereto.
  • the method according to the invention is not limited to the exemplary embodiment presented here. Further variations are possible with regard to the chemical and mechanical pretreatment of the components as well as with regard to the electrolyte solutions and grinding media used, as well as contact bodies. With the method according to the invention, contact layers can be applied directly to a whole series of ceramic components, for example varistors or thermistors, or other ceramic components.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrochemistry (AREA)
  • Composite Materials (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

Procédé de dépôt direct par galvanisation de couches de contact sur des composants en électrocéramique (1). Le traitement mécanique et chimique de zones à galvaniser (3) d'un composant électrocéramique (1) dont les zones à ne pas galvaniser ont éventuellement été préalablement couvertes d'une couche de passivation (2) augmente l'adhérence des couches de contact sur les zones à galvaniser (3). Le traitement chimique et mécanique repose sur l'utilisation d'un bain chimique (15) constitué d'une solution aqueuse d'acide phosphorique dans laquelle se trouvent des corps abrasifs (5) qui agissent sur les composants électrocéramiques.
EP02754511A 2001-09-28 2002-08-08 Procede de depot par galvanisation de couches de contact sur des composants en ceramique Withdrawn EP1530654A2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10147897 2001-09-28
DE10147897A DE10147897C1 (de) 2001-09-28 2001-09-28 Verfahren zum galvanischen Aufbringen von Kontaktschichten auf keramische Bauelemente
PCT/DE2002/002931 WO2003031671A2 (fr) 2001-09-28 2002-08-08 Procede de depot par galvanisation de couches de contact sur des composants en ceramique

Publications (1)

Publication Number Publication Date
EP1530654A2 true EP1530654A2 (fr) 2005-05-18

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP02754511A Withdrawn EP1530654A2 (fr) 2001-09-28 2002-08-08 Procede de depot par galvanisation de couches de contact sur des composants en ceramique

Country Status (4)

Country Link
EP (1) EP1530654A2 (fr)
DE (1) DE10147897C1 (fr)
TW (1) TW572869B (fr)
WO (1) WO2003031671A2 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10147898A1 (de) * 2001-09-28 2003-04-30 Epcos Ag Elektrochemisches Bauelement mit mehreren Kontaktflächen
US7306748B2 (en) * 2003-04-25 2007-12-11 Saint-Gobain Ceramics & Plastics, Inc. Methods for machining ceramics
US8025808B2 (en) 2003-04-25 2011-09-27 Saint-Gobain Ceramics & Plastics, Inc. Methods for machine ceramics
CN101588894B (zh) 2006-12-20 2013-03-27 圣戈本陶瓷及塑料股份有限公司 机械加工无机非金属工件的方法

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Publication number Priority date Publication date Assignee Title
US3035944A (en) * 1960-08-05 1962-05-22 Ben C Sher Electrical component preparation utilizing a pre-acid treatment followed by chemical metal deposition
DE3512342C2 (de) * 1985-04-04 1993-12-23 Daimler Benz Ag Verfahren zur Metallisierung einer elektrisch isolierenden Oberfläche
JPH0653253B2 (ja) * 1986-11-08 1994-07-20 松下電工株式会社 セラミツク基板の粗化法
DE4138214A1 (de) * 1991-11-21 1993-05-27 Daimler Benz Ag Verfahren zur metallisierung von aluminiumnitridkeramik
DE4238242C2 (de) * 1992-09-17 2003-04-24 Rieger Franz Metallveredelung Verfahren zur Vorbehandlung von Leichtmetallen nach Patent DE 4231052 C2
JPH0776763A (ja) * 1993-09-01 1995-03-20 Praxair St Technol Inc 合金層の付着防止性に優れた亜鉛めっき浴用部材とその製法およびそれを用いる溶融亜鉛めっき法

Non-Patent Citations (1)

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Title
See references of WO03031671A2 *

Also Published As

Publication number Publication date
TW572869B (en) 2004-01-21
WO2003031671A2 (fr) 2003-04-17
DE10147897C1 (de) 2003-01-23
WO2003031671A3 (fr) 2005-03-24

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