EP1564791A3 - Pallier pour un support de substrat - Google Patents

Pallier pour un support de substrat Download PDF

Info

Publication number
EP1564791A3
EP1564791A3 EP04026466A EP04026466A EP1564791A3 EP 1564791 A3 EP1564791 A3 EP 1564791A3 EP 04026466 A EP04026466 A EP 04026466A EP 04026466 A EP04026466 A EP 04026466A EP 1564791 A3 EP1564791 A3 EP 1564791A3
Authority
EP
European Patent Office
Prior art keywords
bearing elements
substrate support
housing
support bushing
formed therethrough
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04026466A
Other languages
German (de)
English (en)
Other versions
EP1564791A2 (fr
Inventor
Shinchi Kurita
Suhail Anwar
Toshio Kiyotake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34701410&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1564791(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of EP1564791A2 publication Critical patent/EP1564791A2/fr
Publication of EP1564791A3 publication Critical patent/EP1564791A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/04—Ball or roller bearings
    • F16C29/045—Ball or roller bearings having rolling elements journaled in one of the moving parts
    • F16C29/046—Ball or roller bearings having rolling elements journaled in one of the moving parts with balls journaled in pockets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
    • C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/04—Ball or roller bearings
    • F16C29/045—Ball or roller bearings having rolling elements journaled in one of the moving parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7612—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by lifting arrangements, e.g. lift pins
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Metallurgy (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Chemical Vapour Deposition (AREA)
EP04026466A 2004-02-12 2004-11-08 Pallier pour un support de substrat Withdrawn EP1564791A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US779130 2004-02-12
US10/779,130 US8033245B2 (en) 2004-02-12 2004-02-12 Substrate support bushing

Publications (2)

Publication Number Publication Date
EP1564791A2 EP1564791A2 (fr) 2005-08-17
EP1564791A3 true EP1564791A3 (fr) 2006-08-09

Family

ID=34701410

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04026466A Withdrawn EP1564791A3 (fr) 2004-02-12 2004-11-08 Pallier pour un support de substrat

Country Status (6)

Country Link
US (2) US8033245B2 (fr)
EP (1) EP1564791A3 (fr)
JP (1) JP4473144B2 (fr)
KR (3) KR100597495B1 (fr)
CN (2) CN1655336B (fr)
TW (1) TWI260064B (fr)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
US12184148B2 (en) 2021-06-18 2024-12-31 Goodrich Actuation Systems Sas Linear motor system guide

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JP4906375B2 (ja) * 2006-03-20 2012-03-28 東京応化工業株式会社 基板支持部材
US7997227B2 (en) * 2007-03-13 2011-08-16 General Electric Company Vacuum coater device and mechanism for supporting and manipulating workpieces in same
KR101433864B1 (ko) * 2007-11-30 2014-09-01 주성엔지니어링(주) 기판 승강 장치
USD640715S1 (en) * 2008-11-17 2011-06-28 Applied Materials, Inc. Lift pin assembly
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KR101045247B1 (ko) 2008-12-12 2011-06-29 엘아이지에이디피 주식회사 리프트 핀 승강장치
USD650818S1 (en) * 2008-12-19 2011-12-20 Applied Materials, Inc. Inner lift pin
US20110014396A1 (en) * 2009-07-14 2011-01-20 Applied Materials, Inc. Recirculating linear rolling bushing
WO2011009007A2 (fr) * 2009-07-15 2011-01-20 Applied Materials, Inc. Guides améliorés de tige de levage
DE102009035950B4 (de) * 2009-08-03 2011-09-01 Siemens Aktiengesellschaft Führungselement für Rillschlauch
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KR101628918B1 (ko) * 2009-12-22 2016-06-09 주성엔지니어링(주) 기판처리장치
JP2012162752A (ja) * 2011-02-03 2012-08-30 Taiyo Nippon Sanso Corp 気相成長装置
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CN103132051B (zh) * 2011-11-23 2015-07-08 中微半导体设备(上海)有限公司 化学气相沉积反应器或外延层生长反应器及其支撑装置
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KR102511875B1 (ko) * 2016-05-09 2023-03-17 주성엔지니어링(주) 리프트핀용 지지유닛 및 이를 사용한 기판처리장치
KR102723647B1 (ko) * 2016-10-12 2024-10-29 램 리써치 코포레이션 반도체 프로세싱용 웨이퍼 포지셔닝 페데스탈의 패드 상승 메커니즘
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CN106601659B (zh) * 2016-12-30 2024-02-02 上海新阳半导体材料股份有限公司 新型晶圆转移装置
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KR102772197B1 (ko) * 2019-11-04 2025-02-26 삼성디스플레이 주식회사 증착장치 및 이를 이용한 기판 처리방법
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TW200527577A (en) 2005-08-16
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KR101108389B1 (ko) 2012-01-30
US8033245B2 (en) 2011-10-11
CN101221896B (zh) 2010-07-21
JP4473144B2 (ja) 2010-06-02
US20050220604A1 (en) 2005-10-06
JP2005240173A (ja) 2005-09-08
EP1564791A2 (fr) 2005-08-17
CN1655336B (zh) 2010-12-22
US20050180737A1 (en) 2005-08-18
CN1655336A (zh) 2005-08-17
KR20110074839A (ko) 2011-07-04
TWI260064B (en) 2006-08-11
KR100597495B1 (ko) 2006-07-10
US8216422B2 (en) 2012-07-10
KR20050081839A (ko) 2005-08-19

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