EP1580435A2 - Pompe turbomoléculaire - Google Patents

Pompe turbomoléculaire Download PDF

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Publication number
EP1580435A2
EP1580435A2 EP05003720A EP05003720A EP1580435A2 EP 1580435 A2 EP1580435 A2 EP 1580435A2 EP 05003720 A EP05003720 A EP 05003720A EP 05003720 A EP05003720 A EP 05003720A EP 1580435 A2 EP1580435 A2 EP 1580435A2
Authority
EP
European Patent Office
Prior art keywords
blades
turbomolecular pump
vacuum side
angle
attack
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP05003720A
Other languages
German (de)
English (en)
Other versions
EP1580435B1 (fr
EP1580435B2 (fr
EP1580435A3 (fr
Inventor
Armin Conrad
Peter Fahrenbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1580435A2 publication Critical patent/EP1580435A2/fr
Publication of EP1580435A3 publication Critical patent/EP1580435A3/fr
Publication of EP1580435B1 publication Critical patent/EP1580435B1/fr
Application granted granted Critical
Publication of EP1580435B2 publication Critical patent/EP1580435B2/fr
Anticipated expiration legal-status Critical
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape

Definitions

  • the invention relates to a turbomolecular pump having a plurality of alternating axially successively arranged and provided with blades Rotor and stator discs, with the blades towards the High vacuum side have a steeper angle of attack than the blades in Direction vacuum side.
  • the invention relates to a method for producing a Bladed rotor or stator of such a turbomolecular pump.
  • turbomolecular pumps are known, for example by the DE 2 035 063 B3 or DE 27 17 366 B2.
  • the blades shown there have the shape of a parallelogram in cross section. The angle of attack is depending on the axial position of the blades 25 ° to 40 °.
  • DE 101 03 230 A1 discloses a turbomolecular pump in which the blade in cross section deviates strongly from a parallelogram and in has approximately an airfoil shape.
  • the mean angle of attack is about 45 °.
  • a turbomolecular pump is known in which the Blades of a first, suction side arranged group of blades, called suction group A, an angle of attack of 30 ° to 40 ° and the blades a second group, called compression group B, consisting of the remaining blade stages have an angle of 17 ° to 30 °.
  • the second group, compression group can be divided into two subgroups be whose blades have a pitch of 25 ° to 30 ° respectively from 17 ° to 25 °.
  • the pump-active components of a turbomolecular pump consist of the with Blades provided rotor and stator discs, which alternately axially arranged one behind the other. Through the interaction of these discs In a known manner, the pumping effect is generated.
  • the characteristic features of a turbomolecular pump are Compression and absorbency. Both properties are mainly determined by the following parameters: The peripheral speed of the Blade ring of the rotor disks, the number of blades, the angle of attack the blades and the gradation of the different slices of the entire disc package. Within the gradation, the shrink Angle of attack of the blade from the intake opening to the gas outlet opening.
  • the invention is the technical problem underlying, a turbomolecular pump in such a way that heat and power consumption are reduced and a good pre-vacuum compatibility as well as compression are created.
  • This technical problem is due to a substantial reduction of the Angle of attack of the blades in the compression or exhaust stage, and that is the angle of attack of the blades to the vacuum side less than 8 °.
  • the flatter formation of the angle of attack has a number of positive ones Impact: Initially decreases at the same coverage ratio despite small disc height, the number of blades per disc. Furthermore vortex formations are avoided in the high pressure range, which causes it to a reduction in the recording power and heat generation comes.
  • the low disc and blade height leads to a lower burst rate of Molecules and thus to less losses and finally to a low Overall length of the pump.
  • the reduction in the number of teeth leads to a further reduction of the compression power.
  • a further increase of the aforementioned advantages can be achieved if the angle of attack of the blades to the vacuum side is less than 6 °.
  • the benefits are particularly pronounced when in extreme cases the Incident angle of the blades to the vacuum side is even less than 5 °.
  • Incidence angle of the blades to the vacuum side towards 5.9 ° to 4.6 °.
  • the reduction of the disc height means that the axial thickness of the Blades smaller than 5.0 millimeters, in particular equal to or smaller 4.5 millimeters and in extreme cases even reduced to 3.0 to 4.5 millimeters is.
  • the blades in the Have cross-section at least approximately the shape of a parallelogram.
  • the turbomolecular pump (T) comprises a housing (1) on which on the one hand a suction flange (2) formed on the other hand a Exhaust flange (3) is mounted.
  • the housing (1) has a rotor shaft (4) Rolling bearings (5, 6) rotatably mounted.
  • the rotor shaft (4) is connected via a electromotive drive (7) in high-speed rotation. Act here the on the rotor shaft (4) fixed rotor discs (8) with those in the housing (1) inserted stator discs (9) together.
  • the angle of attack is ⁇ drawn in Fig. 2 the clearer representation because of greatly enlarged.
  • the Slice thickness (D) is between 3.0 millimeters and 4.5 millimeters.
  • the blade (10) has a cross-section which is at least approximately a trapezoidal shape having.
  • the blade (10) is removed without pressure.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP05003720.9A 2004-03-16 2005-02-22 Pompe turbomoléculaire Expired - Lifetime EP1580435B2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004012713 2004-03-16
DE102004012713A DE102004012713A1 (de) 2004-03-16 2004-03-16 Turbomolekularpumpe

Publications (4)

Publication Number Publication Date
EP1580435A2 true EP1580435A2 (fr) 2005-09-28
EP1580435A3 EP1580435A3 (fr) 2009-12-30
EP1580435B1 EP1580435B1 (fr) 2011-08-31
EP1580435B2 EP1580435B2 (fr) 2020-11-18

Family

ID=34853986

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05003720.9A Expired - Lifetime EP1580435B2 (fr) 2004-03-16 2005-02-22 Pompe turbomoléculaire

Country Status (5)

Country Link
US (1) US8398362B2 (fr)
EP (1) EP1580435B2 (fr)
JP (1) JP2005264932A (fr)
AT (1) ATE522725T1 (fr)
DE (1) DE102004012713A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3002459A1 (fr) * 2014-10-02 2016-04-06 Pfeiffer Vacuum GmbH Procédé de fabrication d'un disque de rotor ou de stator pour une pompe à vide et disque de rotor ou de stator pour une pompe à vide

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2088327B1 (fr) * 2008-02-11 2011-08-31 Agilent Technologies Italia S.p.A. Support de roulement à rouleaux
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
GB2612781B (en) * 2021-11-10 2024-04-10 Edwards Ltd Turbomolecular pump bladed disc

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE757354A (fr) † 1969-10-27 1971-03-16 Sargent Welch Scientific Co Pompe turbomoleculaire a stators et rotors perfectionnes
DE2035063C3 (de) * 1970-07-15 1974-05-30 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Laufrad für eine Turbomolekularpumpe
DE7237362U (de) * 1972-10-12 1973-01-11 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
CH557468A (de) * 1973-04-30 1974-12-31 Bbc Brown Boveri & Cie Turbine axialer bauart.
US3969039A (en) † 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
JPS5898696A (ja) * 1981-12-09 1983-06-11 Hitachi Ltd 分子ポンプのステ−タ
DE3402549A1 (de) * 1984-01-26 1985-08-01 Leybold-Heraeus GmbH, 5000 Köln Molekularvakuumpumpe
JPS6125993A (ja) * 1984-07-13 1986-02-05 Ulvac Corp タ−ボ分子ポンプ
JPS61123797A (ja) * 1984-11-19 1986-06-11 Mitsubishi Heavy Ind Ltd 高真空排気装置
JPH0261387A (ja) * 1988-08-24 1990-03-01 Seiko Seiki Co Ltd ターボ分子ポンプ
JPH02201100A (ja) * 1989-01-20 1990-08-09 Ntn Corp ターボ分子ポンプ
JP2865888B2 (ja) * 1991-03-05 1999-03-08 日本原子力研究所 マルチターボ型真空ポンプ
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
JP3898785B2 (ja) * 1996-09-24 2007-03-28 株式会社日立製作所 高低圧一体型蒸気タービン用動翼と高低圧一体型蒸気タービン及びコンバインド発電システム並びに複合発電プラント
JP3047292B1 (ja) * 1998-11-24 2000-05-29 セイコー精機株式会社 ターボ分子ポンプ及び真空装置
JP2001132683A (ja) * 1999-10-29 2001-05-18 Applied Materials Inc ターボ分子ポンプ
DE10046506A1 (de) * 2000-09-20 2002-03-28 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotorschaufelreihen und Statorschaufelreihen
DE10103230A1 (de) * 2001-01-25 2002-08-01 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotor-und Statorschaufeln
EP1249613B1 (fr) * 2001-03-15 2004-01-28 VARIAN S.p.A. Turbine-pompe avec un étage statorique intégré avec un anneau d'espacement
JP3978001B2 (ja) * 2001-06-29 2007-09-19 三菱重工業株式会社 ターボ分子ポンプ
US6760971B2 (en) * 2002-07-15 2004-07-13 Pratt & Whitney Canada Corp. Method of making a gas turbine engine diffuser

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3002459A1 (fr) * 2014-10-02 2016-04-06 Pfeiffer Vacuum GmbH Procédé de fabrication d'un disque de rotor ou de stator pour une pompe à vide et disque de rotor ou de stator pour une pompe à vide

Also Published As

Publication number Publication date
US8398362B2 (en) 2013-03-19
DE102004012713A1 (de) 2005-10-06
EP1580435B1 (fr) 2011-08-31
EP1580435B2 (fr) 2020-11-18
EP1580435A3 (fr) 2009-12-30
ATE522725T1 (de) 2011-09-15
US20050207884A1 (en) 2005-09-22
JP2005264932A (ja) 2005-09-29

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