EP1598558B1 - Pompe à vide rotative à palettes étanchéifiée par de l'huile - Google Patents

Pompe à vide rotative à palettes étanchéifiée par de l'huile Download PDF

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Publication number
EP1598558B1
EP1598558B1 EP05008941.6A EP05008941A EP1598558B1 EP 1598558 B1 EP1598558 B1 EP 1598558B1 EP 05008941 A EP05008941 A EP 05008941A EP 1598558 B1 EP1598558 B1 EP 1598558B1
Authority
EP
European Patent Office
Prior art keywords
oil
vacuum pump
shaft
type rotary
rotary vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP05008941.6A
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German (de)
English (en)
Other versions
EP1598558A1 (fr
Inventor
Armin Conrad
Wolfgang Losch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1598558A1 publication Critical patent/EP1598558A1/fr
Application granted granted Critical
Publication of EP1598558B1 publication Critical patent/EP1598558B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • F04C18/3442—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation the surfaces of the inner and outer member, forming the inlet and outlet opening
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/70—Safety, emergency conditions or requirements
    • F04C2270/701—Cold start

Definitions

  • the invention relates to an oil-sealed rotary vane vacuum pump according to the preamble of the first claim.
  • Rotary vane vacuum pumps play an important role in the generation of vacuum. They are used to generate coarse and fine vacuum with final pressures of up to approx. 6 * 10 -3 mbar and are used in industry, research and laboratories. Traditionally, these pumps also serve as a backing pump for non-atmospheric pressure pumps such as Roots pumps and turbomolecular pumps. Depending on the application, they are designed in one or more stages.
  • Rotary vane vacuum pumps of the present type belong to the class of oil superposed positive displacement pumps.
  • the oil in the pump performs a number of tasks, including on the one hand the sealing of the gas outlet against the gas inlet side. On the other hand, the oil is used for cooling and lubricating the mechanical components of the pump.
  • the oil also plays a negative role in the design of the drive motor.
  • the oil is tough and viscous. This requires a lot of power on the side of the drive motor in order to turn the rotor of the pump.
  • insufficient dimensioning ie, too low a torque of the drive motor, it may even happen that the pump does not even start up.
  • Remedy can provide the choice of an oil with higher viscosity, however, such oils have volatile constituents, so that the final pressure increases (Wutz: "Handbook Vacuum Technology", Vieweg-Verlag, 8th edition, p 202 ff).
  • the drive motors are designed very powerful in oil-lubricated rotary vane vacuum pumps.
  • Prior art rotary vane vacuum pumps of the prior art are equipped with asynchronous AC electric motors. Their typical torque as a function of the speed is in Fig. 3 shown. At low speeds, the torque is low, the much higher maximum torque is achieved only at medium speeds. At higher speeds, the torque drops again.
  • This situation requires that the drive motors must be oversized, so that the rotary vane vacuum pumps can even start.
  • This oversizing causes an unnecessarily high power consumption of the drive and thereby increases both the manufacturing costs, as well as the operating costs of the pump. The latter play an increasing role, as rotary vane vacuum pumps are designed for continuous operation. Negatively, the oversizing of the drive motor also affects the size of the entire pump.
  • AC electric motors as they are mostly used in particular in small and medium rotary vane vacuum pumps with pumping speeds up to 40 m 3 / h, are often two-phase motors. These motors use capacitors to allow more than two coils per circumference. This results in an uneven torque characteristic, ie an uneven torque relative to a complete revolution of the shaft. This results in an unnecessarily high vibration and noise, which is difficult to tolerate in many applications. Appropriate installation measures must be taken to ensure that that these vibrations are not transmitted to, for example, sensitive laboratory equipment.
  • the oil within the rotary vane pump is used for cooling, for lubricating the moving parts and for sealing the suction chamber. Contamination of the pump environment by oil escaping from the housing should be prevented. Especially the sealing of the implementation of the rotor shaft through the housing is difficult.
  • radial shaft seals are used here, which, however, have a high degree of wear, i. lead to high maintenance costs.
  • in the prior art rotary vane vacuum pumps are equipped with magnetic coupling and split pot, which leads to an increase in manufacturing costs while reducing operating costs.
  • the drive system of a rotary vane vacuum pump has at least two shafts, namely rotor shaft and motor shaft. Both must be stored, also coupling elements between the waves are needed. These measures increase the number of components, the assembly costs and the error rate of the pump.
  • the prior art ( GB 2 151 091 A ) includes a rotary vane pump with a shaft and an electric drive motor for the shaft.
  • Roots pump which also has a shaft and a drive motor.
  • This prior art vacuum pump can be improved so that components provided for driving, such as coils of oil and any residues therein, can not be attacked and decomposed.
  • the invention is therefore based on the object to build an oil-sealed rotary vane vacuum pump, which overcomes the disadvantages of the prior art.
  • the oil-sealed rotary vane vacuum pump is driven by a brushless DC motor.
  • This consists of permanent magnets, which are mounted on the shaft of the pumping system, and stationary coils, which are controlled by an electronics.
  • These engines have a very even course of torque as a function of speed and angle of rotation. Even at very low speeds almost the full torque is applied as starting torque. In this way, a motor can be used, which has a significantly lower power consumption compared to an asynchronous AC motor with the same starting torque. Therefore, the entire engine is structurally smaller, so the pump can be made more compact.
  • the torque which is more uniform with respect to the rotation, ensures significantly smoother running, which has a very positive effect on vibration and noise development.
  • the rotary vane vacuum pump according to the invention requires only a single shaft, whereby manufacturing costs and error rate are reduced.
  • FIG. 1 shows an oil-sealed rotary vane vacuum pump 1 with housing 2, gas inlet 3 and gas outlet 4. Inside the housing is the pumping system 5 with a shaft 12 which is mounted in the bearings 13. The pumping effect results from the rotation of the shaft in interaction with the Rotary valves 7.
  • a hydraulic oil pump 6 supplies the bearings, which are designed as plain bearings, and the high-vacuum safety valve with oil. This valve closes when the shaft stops rotating, causing the oil pressure generated by the oil pump to drop.
  • Coils 10 generate a magnetic rotating field, which changes its position by electronic commutation and thus sets the shaft in rotation.
  • this pump has only one shaft.
  • Sensors 16 preferably Hall sensors, are used to determine the angular position of the shaft.
  • the sensor signals are read by the control electronics 8.
  • the control electronics generates the necessary voltages and currents for the coils and the commutation signals.
  • This control electronics sits in a removable and in particular against the oil chamber dense part of the housing. Furthermore, it is designed so that it must be connected to the power supply only via a cable to an existing supply network, such as the 230 V AC mains or a 24 V industrial power network (for example 24 V or 48 V).
  • control electronics are designed so that they can be operated on single- or multi-phase mains voltages between 60 V and 400 V or industrial voltage networks (24 V or 48 V).
  • a selector switch allows adjustment to the respective supply voltage. It is even more advantageous if the control electronics contains means with which they can automatically detect the applied supply voltage.
  • the control electronics 8 includes a power unit 9 for controlling the coils. It is advantageous if this power unit is brought into thermal contact with the housing wall. The heat is then removed from the pump via the housing in thermal convection, whereby additional coolant can be avoided.
  • the coils are encapsulated in synthetic resin according to the invention, so that they can not be attacked and decomposed by the oil and any residues therein. Such residues occur, for example, in application fields of the pumps, in which corrosive and other process gases must be promoted.
  • control electronics makes it possible to operate the shaft with various user-selectable rotational frequencies and thus to regulate the pump's pumping speed.
  • the hydraulic pump must be designed so that it builds up enough oil pressure even in the lower speed range to supply the bearings with oil and open the high vacuum safety valve 20.
  • An overpressure valve in the oil circuit must then open at high speeds in order to avoid excessive pressure.
  • the oil pump is dispensed with.
  • the high vacuum safety valve is designed electromagnetically and is controlled by the control electronics 8 via cable 22. If the control electronics detects that the shaft is no longer rotating, it switches the electromagnetic high-vacuum safety valve to the closed state.
  • FIG. 2 A further advantageous embodiment shows Fig. 2 , Opposite the in Fig. 1
  • This rotary vane vacuum pump has a split pot 18. This sits between the shaft and the coils and thus allows to arrange the coils outside of the oil-filled space.
  • This split pot consists of a non-magnetic material, such as a ceramic.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Claims (7)

  1. Pompe à vide rotative à palettes étanchéifiée par de l'huile (1) comportant
    - au moins un étage de pompage,
    - dans lequel chaque étage de pompage est constitué d'une chambre cylindrique comportant un arbre (12) disposé dans celle-ci de manière excentrique et muni de palettes tournantes (7),
    - dans lequel tous les étages de pompage sont entraînés par un arbre en une seule pièce,
    - comportant un système d'entraînement de l'arbre,
    - dans lequel le système d'entraînement est constitué d'aimants permanents (14) montés sur l'arbre et de bobines électriques fixes (10) qui génèrent un champ électrique tournant,
    - caractérisée en ce que l'électronique de commande (8) nécessaire pour la commande des bobines est disposée dans une partie formant boîtier amovible de la pompe,
    - en ce que l'électronique de commande (8) peut être mise en fonctionnement avec des tensions monophasées ou polyphasées comprises entre 60 V et 400 V ou par des réseaux électriques industriels (24 V ou 48 V),
    - et en ce que les bobines (10) sont coulées dans une résine synthétique.
  2. Pompe à vide rotative à palettes étanchéifiée par de l'huile selon la revendication 1, caractérisée en ce qu'un pot d'entrefer (18) est utilisé entre l'arbre et les bobines (10) pour séparer l'espace de pompage (9) de l'atmosphère.
  3. Pompe à vide rotative à palettes étanchéifiée par de l'huile selon la revendication 1 ou 2, caractérisée en ce que des capteurs (16) sont présents pour déterminer la position du rotor.
  4. Pompe à vide rotative à palettes étanchéifiée par de l'huile selon la revendication 3, caractérisée en ce que les capteurs (16) sont des capteurs à effet Hall destinés à déterminer la position du rotor.
  5. Pompe à vide rotative à palettes étanchéifiée par de l'huile selon l'une quelconque des revendications précédentes, caractérisée en ce que l'électronique de commande (8) contient des moyens destinés à modifier la vitesse de rotation de l'arbre.
  6. Pompe à vide rotative à palettes étanchéifiée par de l'huile selon l'une quelconque des revendications précédentes, caractérisée en ce que l'électronique de commande (8) est conçue de manière à être directement connectée à un réseau électrique pour l'alimentation en énergie.
  7. Pompe à vide rotative à palettes étanchéifiée par de l'huile selon l'une quelconque des revendications précédentes, caractérisée en ce que le module de puissance (9) de l'électronique de commande (8) est en contact thermique avec la paroi du boîtier.
EP05008941.6A 2004-05-18 2005-04-23 Pompe à vide rotative à palettes étanchéifiée par de l'huile Expired - Lifetime EP1598558B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004024554 2004-05-18
DE102004024554.1A DE102004024554B4 (de) 2004-05-18 2004-05-18 Ölgedichtete Drehschiebervakuumpumpe

Publications (2)

Publication Number Publication Date
EP1598558A1 EP1598558A1 (fr) 2005-11-23
EP1598558B1 true EP1598558B1 (fr) 2015-12-30

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ID=34935641

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EP05008941.6A Expired - Lifetime EP1598558B1 (fr) 2004-05-18 2005-04-23 Pompe à vide rotative à palettes étanchéifiée par de l'huile

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US (1) US20050260082A1 (fr)
EP (1) EP1598558B1 (fr)
DE (1) DE102004024554B4 (fr)

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DE102006022772A1 (de) 2006-05-16 2007-11-22 Pfeiffer Vacuum Gmbh Antriebsanordnung für eine Vakuumpumpe
DE102006032765A1 (de) * 2006-07-14 2008-01-17 Leybold Vacuum Gmbh Vakuumpumpe
DE102006039958A1 (de) * 2006-08-25 2008-02-28 Busch Produktions Gmbh Drehschieber-Vakuumpumpe bzw.-Verdichter in Blockbauweise mit fliegend gelagertem Scheibenläufer-Synchronmotor
DE102006058837C5 (de) * 2006-12-13 2022-05-05 Pfeiffer Vacuum Gmbh Schmiermittelgedichtete Drehschiebervakuumpumpe
DE102006058843A1 (de) * 2006-12-13 2008-06-19 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102007060147A1 (de) 2007-12-13 2009-06-18 Pfeiffer Vacuum Gmbh Drehschiebervakuumpumpe
DE102008042656A1 (de) 2008-10-07 2010-04-15 Ilmvac Gmbh Elektromotor mit gekapseltem Motorgehäuse
EP2530325B1 (fr) * 2010-01-29 2018-10-17 Ulvac Kiko, Inc. Pompe
CN102280965B (zh) * 2010-06-12 2013-07-24 中国科学院沈阳科学仪器股份有限公司 真空泵用屏蔽电机
US20140363319A1 (en) * 2013-06-07 2014-12-11 Agilent Technologies, Inc Rotary vane vacuum pump
DE102015010846B4 (de) 2015-08-19 2017-04-13 Nidec Gpm Gmbh Elektromotorisch angetriebene Vakuumpumpe
DE102015118022B4 (de) * 2015-10-22 2024-05-29 Pfeiffer Vacuum Gmbh Rotationsverdrängervakuumpumpe
WO2017080599A1 (fr) * 2015-11-12 2017-05-18 Pierburg Pump Technology Gmbh Pompe à vide électrique de véhicule automobile
NL2016728B1 (en) * 2016-05-03 2017-11-10 Actuant Corp Pump unit with integrated piston pump and electric motor.
US11905958B2 (en) * 2017-03-29 2024-02-20 Hong Wang Vacuuming device and vacuum apparatus
CN106704185B (zh) * 2017-03-29 2019-03-19 王鸿 抽真空装置及真空设备
EP3597922B1 (fr) * 2018-07-19 2024-08-28 Agilent Technologies, Inc. (A Delaware Corporation) Système de pompage à vide comportant une pompe à vide lubrifiée à l'huile
IT202000004513A1 (it) * 2020-03-04 2021-09-04 Marziano Salvaro Pompa per il vuoto, particolarmente per apparecchiature per la conservazione di cibi.

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Publication number Priority date Publication date Assignee Title
WO1993017484A1 (fr) * 1992-02-26 1993-09-02 Magnet-Motor Gesellschaft Für Magnetmotorische Technik Mbh Pompe electrique
WO2003100258A1 (fr) * 2002-05-29 2003-12-04 Leybold Vakuum Gmbh Pompe a vide a deux arbres

Also Published As

Publication number Publication date
DE102004024554A1 (de) 2005-12-15
EP1598558A1 (fr) 2005-11-23
US20050260082A1 (en) 2005-11-24
DE102004024554B4 (de) 2018-01-25

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