EP1655494A2 - Pompe à vide et procédé de génération de signaux - Google Patents

Pompe à vide et procédé de génération de signaux Download PDF

Info

Publication number: EP1655494A2
Authority: EP; European Patent Office
Prior art keywords: vacuum pump; comparison; pump system; processing unit; state processing
Prior art date: 2004-11-09
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP05022633A

Other languages

German (de)

English (en)

Other versions

EP1655494B1 (fr

EP1655494A3 (fr

Inventor

Jochen BÖTTCHER

Wolfgang Losch

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Pfeiffer Vacuum GmbH

Original Assignee

Pfeiffer Vacuum GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2004-11-09

Filing date

2005-10-18

Publication date

2006-05-10

2005-10-18 Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH

2006-05-10 Publication of EP1655494A2 publication Critical patent/EP1655494A2/fr

2013-05-22 Publication of EP1655494A3 publication Critical patent/EP1655494A3/fr

2019-03-20 Application granted granted Critical

2019-03-20 Publication of EP1655494B1 publication Critical patent/EP1655494B1/fr

2025-10-18 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

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Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
- F04D15/0066—Control, e.g. regulation, of pumps, pumping installations or systems by changing the speed, e.g. of the driving engine
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring

Definitions

the invention relates to an apparatus and a method for operating a vacuum pumping system.
Vacuum pumps are important components of many systems for the production of products or for the analysis of substances.
the manufacturing processes have become increasingly complex and highly efficient, which is why the demands on the vacuum pumps have increased.
high flexibility and good operability with high reliability are required today.
vacuum pumps have a variety of sensors that monitor the operating condition. These include Temperaturfiihler, tachometer and many more. Even those variables that are determined without a sensor characterize the state of the pump, for example error codes that are stored in a fault memory, or the switching states of heating elements, etc.
the integration of the vacuum pump and safe operation require that the measured values of the Sensors and the other sizes constantly monitored and control signals can be generated.
control signals it is possible for the user of the pump to integrate the pump into his system. In particular, they allow a response to a changing operating condition of the pump.
the control signals are generated by first detecting those quantities which characterize the operating state of the vacuum pump system. Subsequently, these quantities are compared with default values. The result of this comparison can then logically be linked to other such results and form an end result. From this, a control signal is then generated and made available on the control line. In the prior art, this is done in a fixed predetermined form, ie when making the pump is determined which links are possible.
the object of the invention is to provide a vacuum pumping system in which the adaptation of the generation of control signals is more flexible and overall cost-saving.
the generation of the control signals within the vacuum pumping system is adaptable. This allows the vacuum pumping system to be adapted to current needs without having to consult the manufacturer. The adjustment is on-site and can be done by the user of the vacuum pumping system or a service person, which saves overall working time for vacuum pump system owners and vacuum pump system manufacturers. A cost-intensive variety of variants is avoided because each variant by adaptation on site from the same basic type of vacuum pump system emerges.
the user or service employee can also use an adjustment that has been created by a third party.
the setting can be made virtually also far away from the vacuum pump system.
the setting can also be spent by a third party via a suitable medium (eg Internet) directly on the vacuum pump system, without having to be on site
the inventive method is shown in its simplest form in Fig. 1.
Fig. 1a There are at least two output values (left side of FIG. 1a), wherein in the example shown here, the speed is a variable characterizing the state of the vacuum pump and a default value. These two values are compared with one another in the "compare” step, thereby generating a comparison result.
the values are checked for equality, but any comparison operator can be used, including "greater than”, “less than”, “less than or equal to”, “greater than or equal to”.
the comparison produces a result in the form of a logical state.
This state is then used to generate a signal, for example, a light-emitting diode is driven, a signal line is set to a logic level (eg 5V or 0V) or a logic value is transmitted via a bus system.
a logic level eg 5V or 0V
a logic value is transmitted via a bus system.
the choice of the user creates an individual graph that corresponds to a configuration of the vacuum pumping system.
several variables characterizing the state of the vacuum pump can also be used. This is shown in Figure 1b, where two measured temperatures 1 and 2 are compared. Shown is the comparison "Temperature 1 greater than temperature 2". This results again a comparison result "result 2", from which a signal 2 is generated.
the user of the vacuum pumping system is enabled to choose the type and number of comparisons himself.
the invention gives the user the opportunity to choose the type and number of comparisons, which is not the case with a prefabricated configuration as in the prior art.
FIG. 2 The higher flexibility and efficiency of the method according to the invention is illustrated in FIG. 2 using the example of a more complex system.
the error code is a binary number representing whether a component is working properly or not.
the error code may also include timeouts or similar errors. According to the invention, the user can now subject these detected variables to his chosen comparisons.
FIG. 2 Another example of a user-selected scheme of comparisons and logical operations is shown in FIG. Compared to the example in Figure 2, the comparison of the temperature 1 has been omitted.
a masking of the error code was made, i. only part of the error code is used for comparison with the default "0101", for example the last four digits or "bits" (underlined).
the masking can be done by bitwise AND, bitwise OR, bitwise EXCLUSIVE-OR or similar bitwise operations.
the result of the masking is still a value and only becomes a logical state through the following comparison. It is also new with respect to FIG. 2 that the result 1 of the logical combination of the results of the two comparisons in lines 1 and 2 is used as the basis for the comparison in line 3.
FIG. 4 shows a vacuum pumping system designed to carry out the method according to the invention. Shown are a turbomolecular pump 41, a roughing pump 42, a state processing unit 43 and a tool 44.
the rotor 50 of the turbomolecular pump is rotated by a drive 45 and rotatably supported by bearings 51.
Temperature sensors 46 and 47 monitor the temperature of various areas of the turbomolecular pump.
a valve 48 serves, for example, for flooding the turbomolecular pump.
the state processing unit 43 monitors the state of the turbomolecular pump. For this purpose it is in connection with its sensors, for example the temperature sensors, the drive, the flood valve and the bearing sensors 52.
the state processing unit includes electrical and electronic circuits 53 for performing the method steps "compare” and "generate a signal".
the generated signals are on the Lines 56 are provided, 56 may also be a digital bus system or a display unit.
the choice of the type of comparisons can be made in different ways. It is conceivable, for example, in discrete electronic circuits that are provided on the board selector switch with which individual parts of the circuit (each corresponding to individual comparisons) can be switched off or bypasses can be unlocked. In another form, it might be possible to exchange electronic boards containing circuits with comparisons. Depending on the need, another board would be used. In vacuum pump systems with microprocessors, the comparisons can be made by a program on the microprocessor.
the user or another operator of the pump according to the invention is able to determine the active parts of the software and thus the comparisons.
the tool 44 which may be formed as part of the state processing unit 43 or as a stand-alone device, enables the user to select the type of comparisons and logical operations. It is conceivable that the configuration of the comparisons is carried out in the aid 44, while the aid 44 and the state processing unit 43 are separated from one another. Through a connection or a transmission medium, the new configuration is then transferred to the state processing unit.
this tool is designed as a computer, which is in contact via a bus system with the state processing unit and exchanges data.
the state processing unit may include one or more physical transducers 54, for example in the form of one or more analog-to-digital converters.
the state processing unit 43 or the aid 44 may include a test unit 55. This unit checks the user-selected comparisons and logic operations for logical correctness.
the state processing unit may include a microprocessor that performs at least a portion of the functions of the electrical and electronic circuits 53, the physical converter 54, and the test unit 55.
the state processing unit 43 is part of the turbomolecular pump 41. It may also be part of the control electronics, the drive and possibly existing magnetic bearing controls.

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Control Of Positive-Displacement Pumps (AREA)
Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

EP05022633.1A 2004-11-09 2005-10-18 Pompe à vide et procédé de génération de signaux Expired - Lifetime EP1655494B1 (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE102004054004A DE102004054004A1 (de)	2004-11-09	2004-11-09	Vakuumpumpsystem und Signalerzeugungsverfahren

Publications (3)

Publication Number	Publication Date
EP1655494A2 true EP1655494A2 (fr)	2006-05-10
EP1655494A3 EP1655494A3 (fr)	2013-05-22
EP1655494B1 EP1655494B1 (fr)	2019-03-20

Family

ID=35759230

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP05022633.1A Expired - Lifetime EP1655494B1 (fr)	2004-11-09	2005-10-18	Pompe à vide et procédé de génération de signaux

Country Status (2)

Country	Link
EP (1)	EP1655494B1 (fr)
DE (1)	DE102004054004A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP2758670B1 (fr) *	2011-09-20	2018-10-31	Grundfos Holding A/S	Unité de pompe
EP3456979A1 (fr)	2017-09-18	2019-03-20	Pfeiffer Vacuum Gmbh	Appareil à vide et procédé de génération d'une information sur le fonctionnement d'un appareil à vide

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE102006034478A1 (de) *	2006-07-26	2008-01-31	Oerlikon Leybold Vacuum Gmbh	Verfahren zur Ermittlung einer Aussage über einen Zustand einer Turbomolekularpumpe sowie eine Turbomolekularpumpe
DE102010005458A1 (de) *	2010-01-23	2011-07-28	Oerlikon Leybold Vacuum GmbH, 50968	Wälzlageranordnung sowie Verfahren zur frühzeitigen Detektion von Lagerschäden bei einer Wälzlageranordnung

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US20020094277A1 (en)	1993-07-16	2002-07-18	Helix Technology Corporation	Electronically controlled vacuum pump

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE4237971B4 (de) *	1992-11-11	2004-05-06	Unaxis Deutschland Holding Gmbh	Vakuumpumpe mit Wandler
JP2002295398A (ja) *	2001-03-28	2002-10-09	Boc Edwards Technologies Ltd	ターボ分子ポンプの保護装置、及びターボ分子ポンプの保護方法
DE20118185U1 (de) *	2001-11-09	2003-03-20	Leybold Vakuum GmbH, 50968 Köln	Vakuumpumpe

2004
- 2004-11-09 DE DE102004054004A patent/DE102004054004A1/de not_active Withdrawn
2005
- 2005-10-18 EP EP05022633.1A patent/EP1655494B1/fr not_active Expired - Lifetime

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US20020094277A1 (en)	1993-07-16	2002-07-18	Helix Technology Corporation	Electronically controlled vacuum pump

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP2758670B1 (fr) *	2011-09-20	2018-10-31	Grundfos Holding A/S	Unité de pompe
EP3462032A1 (fr) *	2011-09-20	2019-04-03	Grundfos Holding A/S	Unité de pompage
EP3456979A1 (fr)	2017-09-18	2019-03-20	Pfeiffer Vacuum Gmbh	Appareil à vide et procédé de génération d'une information sur le fonctionnement d'un appareil à vide

Also Published As

Publication number	Publication date
EP1655494B1 (fr)	2019-03-20
EP1655494A3 (fr)	2013-05-22
DE102004054004A1 (de)	2006-05-11

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