EP1741003A2 - Films optiques et procedes de fabrication de ces derniers - Google Patents

Films optiques et procedes de fabrication de ces derniers

Info

Publication number
EP1741003A2
EP1741003A2 EP05744565A EP05744565A EP1741003A2 EP 1741003 A2 EP1741003 A2 EP 1741003A2 EP 05744565 A EP05744565 A EP 05744565A EP 05744565 A EP05744565 A EP 05744565A EP 1741003 A2 EP1741003 A2 EP 1741003A2
Authority
EP
European Patent Office
Prior art keywords
article
layer
less
continuous layer
nanolaminate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05744565A
Other languages
German (de)
English (en)
Other versions
EP1741003A4 (fr
Inventor
Jian Jim Wang
Xuegong Deng
Anguel N. Nikolov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Polarization Solutions LLC
Original Assignee
Nanoopto Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/866,416 external-priority patent/US20050275944A1/en
Application filed by Nanoopto Corp filed Critical Nanoopto Corp
Publication of EP1741003A2 publication Critical patent/EP1741003A2/fr
Publication of EP1741003A4 publication Critical patent/EP1741003A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1347—Arrangement of liquid crystal layers or cells in which the final condition of one light beam is achieved by the addition of the effects of two or more layers or cells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/06—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain multicolour or other optical effects
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3083—Birefringent or phase retarding elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/13363—Birefringent elements, e.g. for optical compensation

Definitions

  • forming the plurality of monolayers of the second material comprises depositing a monolayer of a precursor and exposing the monolayer of the precursor to a reagent to provide a monolayer of the second material.
  • the reagent can chemically react with the precursor to form the second material.
  • the reagent can oxidize the precursor to form the second material.
  • Depositing the monolayer of the precursor can include introducing a first gas comprising the precursor into a chamber housing the article. A pressure of the first gas in the chamber can be about 0.01 to about 100 Torr while the monolayer of the precursor is deposited.
  • Exposing the monolayer of the precursor to the reagent can include introducing a second gas comprising the reagent into the chamber.
  • ⁇ is between about 400 nm and about 700 nm (e.g., between about 510 nm and about 570 nm).
  • the continuous layer has an optical retardation of about 4 nm or more for light of wavelength ⁇ propagating through the continuous layer along an axis, wherein ⁇ is between about 400 nm and about 700 nm.
  • the article can include a second continuous layer including rows of a third material alternating with rows of a second nanolaminate material, wherein the second continuous layer is birefringent for light of wavelength ⁇ propagating through the second continuous layer along the axis.
  • A corresponding to Am + ⁇ 2 .
  • A is less than ⁇ , such as about 0.5 ⁇ or less (e.g., about 0.3 ⁇ or less, about 0.2 ⁇ or less, about 0.1 ⁇ or less, about 0.08 ⁇ or less, about 0.05 ⁇ or less, about 0.04 ⁇ or less, about 0.03 ⁇ or less, about 0.02 ⁇ or less, 0.01 ⁇ or less).
  • A is about 500 nm or less (e.g., about 300 nm or less, about 200 nm or less, about 100 nm or less, about 80 nm or less, about 60 nm or less, about 50 nm or less, about 40 nm or less).
  • retardation layer 110 is shown as having 19 portions, in general, the number of portions in a retardation layer may vary as desired. The number of portions depends on the period, ⁇ , and the area required by the retarder's end use application. In some embodiments, retardation layer 110 can have about 50 or more portions (e.g., about 100 or more portions, about 500 or more portions, about 1,000 or more portions, about 5,000 or more portions, about 10,000 or more portions, about 50,000 or more portions, about 100,000 or more portions, about 500,000 more portions). The thickness, d, of retardation layer 110 measured along the z-axis can vary as desired.
  • Deposition process parameters are controlled and synchronized by an electronic controller 399.
  • Electronic controller 399 is in communication with temperature controller 395; pump 340; and valves 352, 362, 372, 382, and 392.
  • Electronic controller 399 also includes a user interface, from which an operator can set deposition process parameters, monitor the deposition process, and otherwise interact with system 300. Referring to FIG.
  • the refractive index of the nanolaminate was estimated to be approximately 1.88 at 632 nm, as determined from measurements of a nanolaminate film similarly prepared on a flat glass substrate.
  • the retardation of an optical retarder was measured using an M-2000N ® Spectroscopic

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Nanotechnology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mathematical Physics (AREA)
  • Biophysics (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Mechanical Engineering (AREA)
  • Polarising Elements (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)

Abstract

L'invention concerne des films à usage optique, des articles contenant lesdits films, des procédés de fabrication desdits films ainsi que des systèmes qui utilisent lesdits films.
EP05744565A 2004-04-15 2005-04-08 Films optiques et procedes de fabrication de ces derniers Withdrawn EP1741003A4 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US56289004P 2004-04-15 2004-04-15
US10/866,416 US20050275944A1 (en) 2004-06-11 2004-06-11 Optical films and methods of making the same
PCT/US2005/011860 WO2005101112A2 (fr) 2004-04-15 2005-04-08 Films optiques et procedes de fabrication de ces derniers

Publications (2)

Publication Number Publication Date
EP1741003A2 true EP1741003A2 (fr) 2007-01-10
EP1741003A4 EP1741003A4 (fr) 2009-11-11

Family

ID=35150603

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05744565A Withdrawn EP1741003A4 (fr) 2004-04-15 2005-04-08 Films optiques et procedes de fabrication de ces derniers

Country Status (4)

Country Link
EP (1) EP1741003A4 (fr)
JP (1) JP4778958B2 (fr)
KR (1) KR20070034992A (fr)
WO (1) WO2005101112A2 (fr)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8164721B2 (en) 2003-12-11 2012-04-24 Tan Kim L Grating trim retarders
US20050275944A1 (en) * 2004-06-11 2005-12-15 Wang Jian J Optical films and methods of making the same
US7630133B2 (en) 2004-12-06 2009-12-08 Moxtek, Inc. Inorganic, dielectric, grid polarizer and non-zero order diffraction grating
JP5933910B2 (ja) * 2006-08-15 2016-06-15 ポラリゼーション ソリューションズ エルエルシー 偏光子薄膜及びこの製作方法
US8755113B2 (en) 2006-08-31 2014-06-17 Moxtek, Inc. Durable, inorganic, absorptive, ultra-violet, grid polarizer
KR100808204B1 (ko) 2007-04-10 2008-03-03 엘지전자 주식회사 드럼세탁기
JP5424730B2 (ja) * 2009-06-12 2014-02-26 三菱電機株式会社 光学フィルタの製造方法
US8913321B2 (en) 2010-09-21 2014-12-16 Moxtek, Inc. Fine pitch grid polarizer
US8611007B2 (en) 2010-09-21 2013-12-17 Moxtek, Inc. Fine pitch wire grid polarizer
US8913320B2 (en) 2011-05-17 2014-12-16 Moxtek, Inc. Wire grid polarizer with bordered sections
US8873144B2 (en) 2011-05-17 2014-10-28 Moxtek, Inc. Wire grid polarizer with multiple functionality sections
US8922890B2 (en) 2012-03-21 2014-12-30 Moxtek, Inc. Polarizer edge rib modification
CN103529507B (zh) * 2012-07-06 2016-05-25 三菱电机株式会社 偏振光相位差板以及激光加工机
JP6274916B2 (ja) * 2014-03-10 2018-02-07 キヤノン株式会社 偏光情報取得ユニットを有する撮像装置
KR101944440B1 (ko) * 2016-03-23 2019-01-31 한국과학기술원 3 차원 나노구조체를 이용한 초박막형 위상차 필름, 및 이를 포함하는 디스플레이 디바이스
JPWO2017195810A1 (ja) * 2016-05-11 2019-03-07 Ｓｃｉｖａｘ株式会社 位相差素子、位相差素子製造方法および光学部材
JP6981074B2 (ja) * 2017-07-25 2021-12-15 Ａｇｃ株式会社 光学素子
JP7165029B2 (ja) * 2017-12-05 2022-11-02 信越化学工業株式会社 反射防止積層膜、反射防止積層膜の形成方法、及び眼鏡型ディスプレイ
WO2019203926A1 (fr) * 2018-04-16 2019-10-24 Applied Materials, Inc. Éléments optiques à empilements multiples utilisant une liaison temporaire et permanente
CN108417719B (zh) * 2018-05-04 2021-08-24 苏州宝澜环保科技有限公司 一种硅基核壳结构光伏电池及其制备方法
WO2019239926A1 (fr) 2018-06-12 2019-12-19 ウシオ電機株式会社 Élément, dispositif et procédé de polarisation du vide ultraviolet, et procédé d'alignement
JP6825610B2 (ja) 2018-10-02 2021-02-03 セイコーエプソン株式会社 偏光素子、液晶装置、および電子機器
WO2020210425A1 (fr) * 2019-04-11 2020-10-15 Applied Materials, Inc. Formation de motifs sur des dispositifs optiques à profondeurs multiples
KR102265168B1 (ko) * 2019-12-30 2021-06-14 백석대학교산학협력단 스트라이프 구조를 이용한 자외선 차단용 자동차 썬팅 필름 및 썬팅 장치
CN114509838B (zh) * 2022-01-05 2023-11-14 中国科学院苏州纳米技术与纳米仿生研究所 氮化镓基激光器及其内氮化镓纳米超结构的制备方法
JP2025077363A (ja) * 2023-11-06 2025-05-19 ウシオ電機株式会社 反射型位相差構造体およびその製造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1017022B (it) * 1974-07-02 1977-07-20 Marazzi Ceramica Impianto automatico perfezionato per l essiccazione e la monocot tura rapida di piastrelle cerami che
DE3412958A1 (de) * 1984-04-06 1985-10-17 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Phasengitter
US4915463A (en) * 1988-10-18 1990-04-10 The United States Of America As Represented By The Department Of Energy Multilayer diffraction grating
JPH02230203A (ja) * 1989-03-03 1990-09-12 Nippon Telegr & Teleph Corp <Ntt> 偏光子
US5119231A (en) * 1990-06-15 1992-06-02 Honeywell Inc. Hybrid diffractive optical filter
US5245471A (en) * 1991-06-14 1993-09-14 Tdk Corporation Polarizers, polarizer-equipped optical elements, and method of manufacturing the same
DE69323127T2 (de) * 1992-08-10 1999-07-22 Canon K.K., Tokio/Tokyo Halbleitervorrichtung und Herstellungsverfahren
JP3320507B2 (ja) * 1993-06-18 2002-09-03 ティーディーケイ株式会社 回折格子型偏光子とその製造方法
JPH0990122A (ja) * 1995-09-28 1997-04-04 Kyocera Corp グリッド型偏光子の製造方法
JP3654553B2 (ja) * 1997-06-19 2005-06-02 株式会社リコー 光学素子
TW460758B (en) * 1998-05-14 2001-10-21 Holographic Lithography System A holographic lithography system for generating an interference pattern suitable for selectively exposing a photosensitive material
JP2000284117A (ja) * 1999-03-30 2000-10-13 Fuji Elelctrochem Co Ltd グリッド偏光子及びその製造方法
TW515032B (en) * 1999-10-06 2002-12-21 Samsung Electronics Co Ltd Method of forming thin film using atomic layer deposition method
US6893500B2 (en) * 2000-05-25 2005-05-17 Atomic Telecom Method of constructing optical filters by atomic layer control for next generation dense wavelength division multiplexer
US6813077B2 (en) * 2001-06-19 2004-11-02 Corning Incorporated Method for fabricating an integrated optical isolator and a novel wire grid structure
JP2003066229A (ja) * 2001-08-28 2003-03-05 Kyocera Corp 縞状偏光子
JP3898597B2 (ja) * 2002-08-19 2007-03-28 信越化学工業株式会社 偏光子および偏光子の製造方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
No further relevant documents disclosed *
See also references of WO2005101112A2 *

Also Published As

Publication number Publication date
JP4778958B2 (ja) 2011-09-21
WO2005101112A2 (fr) 2005-10-27
JP2007532977A (ja) 2007-11-15
EP1741003A4 (fr) 2009-11-11
KR20070034992A (ko) 2007-03-29
WO2005101112A3 (fr) 2007-02-08

Similar Documents

Publication Publication Date Title
US8765360B2 (en) Optical films and methods of making the same
WO2005101112A2 (fr) Films optiques et procedes de fabrication de ces derniers
US8808972B2 (en) Optical films and methods of making the same
US8709703B2 (en) Methods for forming patterned structures
JP5775201B2 (ja) 製作方法
US8804241B2 (en) Methods for forming optical films
US7203001B2 (en) Optical retarders and related devices and systems
US7619816B2 (en) Structures for polarization and beam control
WO2006014408A2 (fr) Reseaux, dispositifs et systemes optiques apparentes et leurs procedes de fabrication
EP3380876B1 (fr) Procédé de dépôt de couche atomique pour fabriquer des métasurfaces diélectriques pour longueurs d&#39;onde dans le spectre visible
US20060127830A1 (en) Structures for polarization and beam control
US8506827B2 (en) Short pitch metal gratings and methods for making the same
US20070139771A1 (en) Optical retarders and methods of making the same
US20110076456A1 (en) Lens arrays and methods of making the same
US20070165308A1 (en) Optical retarders and methods of making the same
CN100476464C (zh) 光学膜及其制造方法
WO2007117323A2 (fr) Retardateurs optiques et leurs procedes de fabrication

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20061019

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA HR LV MK YU

PUAK Availability of information related to the publication of the international search report

Free format text: ORIGINAL CODE: 0009015

RIC1 Information provided on ipc code assigned before grant

Ipc: B05D 5/06 20060101ALI20070226BHEP

Ipc: G02B 5/30 20060101ALI20070226BHEP

Ipc: G02B 5/18 20060101AFI20070226BHEP

DAX Request for extension of the european patent (deleted)
RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: API NANOFABRICATION AND RESEARCH CORP.

A4 Supplementary search report drawn up and despatched

Effective date: 20091014

17Q First examination report despatched

Effective date: 20100305

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: ABRAXIS BIOSENSORS, LLC

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: POLARIZATION SOLUTIONS, LLC

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20160427