EP1764343A3 - Verfahren zum Ätzen eines strukturierten Hohlraums mit einer einzigen Maske - Google Patents

Verfahren zum Ätzen eines strukturierten Hohlraums mit einer einzigen Maske Download PDF

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Publication number
EP1764343A3
EP1764343A3 EP06120739A EP06120739A EP1764343A3 EP 1764343 A3 EP1764343 A3 EP 1764343A3 EP 06120739 A EP06120739 A EP 06120739A EP 06120739 A EP06120739 A EP 06120739A EP 1764343 A3 EP1764343 A3 EP 1764343A3
Authority
EP
European Patent Office
Prior art keywords
mask
cavity
etching
substrate
single mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06120739A
Other languages
English (en)
French (fr)
Other versions
EP1764343A2 (de
Inventor
Richard Beaudry
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teledyne Digital Imaging Inc
Original Assignee
Dalsa Semiconductor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dalsa Semiconductor Inc filed Critical Dalsa Semiconductor Inc
Publication of EP1764343A2 publication Critical patent/EP1764343A2/de
Publication of EP1764343A3 publication Critical patent/EP1764343A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0315—Cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0353—Holes

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Drying Of Semiconductors (AREA)
  • Pressure Sensors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
EP06120739A 2005-09-16 2006-09-15 Verfahren zum Ätzen eines strukturierten Hohlraums mit einer einzigen Maske Withdrawn EP1764343A3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/227,065 US7439093B2 (en) 2005-09-16 2005-09-16 Method of making a MEMS device containing a cavity with isotropic etch followed by anisotropic etch

Publications (2)

Publication Number Publication Date
EP1764343A2 EP1764343A2 (de) 2007-03-21
EP1764343A3 true EP1764343A3 (de) 2008-05-28

Family

ID=37561007

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06120739A Withdrawn EP1764343A3 (de) 2005-09-16 2006-09-15 Verfahren zum Ätzen eines strukturierten Hohlraums mit einer einzigen Maske

Country Status (2)

Country Link
US (1) US7439093B2 (de)
EP (1) EP1764343A3 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1034489C2 (nl) * 2007-10-09 2009-04-14 Micronit Microfluidics Bv Werkwijzen voor het vervaardigen van een microstructuur.
DE102008040597A1 (de) * 2008-07-22 2010-01-28 Robert Bosch Gmbh Mikromechanisches Bauelement mit Rückvolumen
US7951636B2 (en) * 2008-09-22 2011-05-31 Solid State System Co. Ltd. Method for fabricating micro-electro-mechanical system (MEMS) device
US8963262B2 (en) * 2009-08-07 2015-02-24 Massachusettes Institute Of Technology Method and apparatus for forming MEMS device
US8739390B2 (en) * 2008-12-16 2014-06-03 Massachusetts Institute Of Technology Method for microcontact printing of MEMS
US10570005B2 (en) 2008-12-16 2020-02-25 Massachusetts Institute Of Technology Method and apparatus for release-assisted microcontact printing of MEMS
DE102009019446B4 (de) * 2009-04-29 2014-11-13 Epcos Ag MEMS Mikrofon
US8603848B2 (en) * 2009-08-25 2013-12-10 Electronics And Telecommunications Research Institute Three-dimensional MEMS structure and method of manufacturing the same
CN102530831B (zh) 2010-12-27 2014-05-21 上海丽恒光微电子科技有限公司 Mems器件的制作方法
US8643140B2 (en) 2011-07-11 2014-02-04 United Microelectronics Corp. Suspended beam for use in MEMS device
CN103578965B (zh) * 2012-07-31 2016-08-03 无锡华润上华半导体有限公司 两种腐蚀深度的一次成形方法
US10858241B2 (en) 2015-04-09 2020-12-08 Rensselaer Polytechnic Institute Enhanced control of shuttle mass motion in MEMS devices
US20180242092A1 (en) * 2015-11-03 2018-08-23 Goertek Inc. Mems microphone chip trimming method, apparatus, manufacturing method and microphone
US11190868B2 (en) 2017-04-18 2021-11-30 Massachusetts Institute Of Technology Electrostatic acoustic transducer utilized in a headphone device or an earbud
CN110013999B (zh) * 2019-05-17 2021-06-29 电子科技大学 一种基于惰性离子束刻蚀的氚污染光学膜无损去除方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030210799A1 (en) * 2002-05-10 2003-11-13 Gabriel Kaigham J. Multiple membrane structure and method of manufacture
EP1441561A2 (de) * 2003-01-23 2004-07-28 Akustica Inc. Verfahren zur Herstellung und akustischen Verbindung von Strukturen auf einem Substrat
EP1529753A2 (de) * 2003-11-05 2005-05-11 Akustica Inc. Herstellung von sehr dünnen MEMS Mikrophonen und Mikrolautsprechern

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4241045C1 (de) * 1992-12-05 1994-05-26 Bosch Gmbh Robert Verfahren zum anisotropen Ätzen von Silicium
DE19641288A1 (de) * 1996-10-07 1998-04-09 Bosch Gmbh Robert Verfahren zum anisotropen Plasmaätzen verschiedener Substrate
US6767614B1 (en) * 2000-12-19 2004-07-27 Wolfgang M. J. Hofmann Multiple-level actuators and clamping devices
US6685844B2 (en) * 2001-02-14 2004-02-03 Delphi Technologies, Inc. Deep reactive ion etching process and microelectromechanical devices formed thereby
US6500348B2 (en) * 2001-02-14 2002-12-31 Delphi Technologies, Inc. Deep reactive ion etching process and microelectromechanical devices formed thereby
US6712983B2 (en) 2001-04-12 2004-03-30 Memsic, Inc. Method of etching a deep trench in a substrate and method of fabricating on-chip devices and micro-machined structures using the same
ATE280437T1 (de) * 2001-05-31 2004-11-15 Cit Alcatel Abnehmbare schirmvorrichtung für plasmareaktoren
WO2004023644A1 (ja) * 2002-09-04 2004-03-18 Mitsubishi Denki Kabushiki Kaisha シリコン基板装置とその製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030210799A1 (en) * 2002-05-10 2003-11-13 Gabriel Kaigham J. Multiple membrane structure and method of manufacture
EP1441561A2 (de) * 2003-01-23 2004-07-28 Akustica Inc. Verfahren zur Herstellung und akustischen Verbindung von Strukturen auf einem Substrat
EP1529753A2 (de) * 2003-11-05 2005-05-11 Akustica Inc. Herstellung von sehr dünnen MEMS Mikrophonen und Mikrolautsprechern

Also Published As

Publication number Publication date
EP1764343A2 (de) 2007-03-21
US7439093B2 (en) 2008-10-21
US20070065967A1 (en) 2007-03-22

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