EP1899494A2 - Procede de fabrication de couches ceramiques - Google Patents

Procede de fabrication de couches ceramiques

Info

Publication number
EP1899494A2
EP1899494A2 EP06763866A EP06763866A EP1899494A2 EP 1899494 A2 EP1899494 A2 EP 1899494A2 EP 06763866 A EP06763866 A EP 06763866A EP 06763866 A EP06763866 A EP 06763866A EP 1899494 A2 EP1899494 A2 EP 1899494A2
Authority
EP
European Patent Office
Prior art keywords
cold gas
ceramic
precursors
particles
energy input
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06763866A
Other languages
German (de)
English (en)
Other versions
EP1899494B1 (fr
Inventor
Ursus KRÜGER
Raymond Ullrich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of EP1899494A2 publication Critical patent/EP1899494A2/fr
Application granted granted Critical
Publication of EP1899494B1 publication Critical patent/EP1899494B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/02—Coating starting from inorganic powder by application of pressure only
    • C23C24/04—Impact or kinetic deposition of particles

Definitions

  • the invention relates to a method for producing ceramic layers, in which particles are injected by means of a nozzle onto the surface to be coated and adhere there.
  • the thermal spray gun is a Plas ⁇ mastrahl generated can be fed into the micro-particles of ceramics ⁇ substance and thereby at least partially melted. In this way, the microparticles formed during the impact with the substrate to be coated or the layer located in the structure, a ceramic structure of which may be provides by a thermal aftertreatment finished ge ⁇ .
  • the silicon-containing plastics which are also referred to as preceramic polymers (for example, polycarbosilanes, Polysila- Zane Poysiloxane), by thermal decomposition (Py ⁇ rolyse) in high-performance ceramic materials be transferred. Because of the lower process temperatures, however, thermal spraying processes are not available for the production of polymer ceramics.
  • the object of the invention is to provide a method for producing ceramic layers by means of injection, which is accessible to the production of polymer-ceramic layers.
  • Cold spraying methods are basically known, for example, from DE 102 24 780 A1.
  • the device necessary for operating the method has, for example, a vacuum chamber in which a substrate can be placed in front of a so-called cold spray nozzle.
  • the vacuum chamber is evacuated and by means of the cold spray nozzle (also called the cold gas spray gun) a gas jet is generated, in which particles can be introduced for coating the workpiece.
  • the cold spray nozzle also called the cold gas spray gun
  • the particles can additionally be heated, their heating being limited in such a way that the melting temperature of the particles is not achieved (this circumstance is named after the term cold gas spraying).
  • thermal energy can be changed into the cold gas jet by adjusting the speed of the cold gas stream as well as possibly ⁇ additional contribution. He must be such that the precursors of the polymer ceramic ber Diagram in particle form to the O of the accelerated substrate to be coated ⁇ remain to at least stick (this hereinafter more).
  • a coating of polymer ceramic can be produced by spraying, the properties of which are not jeopardized by thermal overstressing of the particles to be sprayed.
  • fillers whose thermal sensitivity would not permit addition to the plasma jet of a thermal spraying process. Since the ceramics used in thermal spraying generally have a very high melting point, the addition of fillers is virtually eliminated in conventional ceramic processes.
  • metals in particular zirconium (Zr), titanium (Ti) or aluminum (Al) or metal alloys are supplied in particular from the abovementioned materials, which react with the precursors of the polymer ceramic in the course of layer formation.
  • Zr zirconium
  • Ti titanium
  • Al aluminum
  • metal alloys are supplied in particular from the abovementioned materials, which react with the precursors of the polymer ceramic in the course of layer formation.
  • active fillers for example silicon oxide (SiO 2 ), silicon carbide (SiC), silicon nitride (SiN), boron nitride (BN) or corundum.
  • passivated metals are inactive as they have an oxidized upper surface ⁇ having ceramic properties.
  • ⁇ active metals generally have a sufficiently high melting point, so they are not involved in the reactions involved in the formation of the poly ⁇ mericeramics.
  • noble metals such as gold (Au) or platinum (Pt).
  • the fillers can be preference as nanoparticulate involved in the cold spray process to increase the reactivity ⁇ .
  • the nanoparticles In order for a processing with the cold gas spraying is possible, the nanoparticles must be attached to larger particles due to their very clotting ⁇ gen inertia.
  • the fillers can be embedded as nanoparticles in a matrix of preceramic polymers as precursors of the polymer ceramic, wherein the precursors each form microparticles that can be processed by cold gas spraying. Embedding in the matrix of the precursors is particularly advantageous in the case of reactive fillers, since they can then react completely in the formation process of the polymer ceramic because of their good distribution and large surface area. Tikeln a process for the production of microparticles with embedded as microencapsulation in a matrix nanoparticle is offered for example by the company capsulation ® ⁇ on.
  • the energy input into the cold gas jet is so will measure that the reaction of the precursors of the polymer ceramic during the film formation is completed.
  • the precursors of the polymer ceramic when impinging on the backing (substrate layer or under construction in the up) are converted completely into the polymer ceramic fillers while simultaneously turned ⁇ builds with or are the precursors of the polymer ceramic react.
  • the energy input into the cold gas jet is dimensioned such that a liability of the
  • the post-treatment for example, by the energy input electromag netic radiation ⁇ , particular of laser light in the forming layer.
  • the laser can be advantageously aligned to the impact of the cold gas jet, where ⁇ is achieved by the energy input into the layer just as locally takes place, as it is ⁇ rich by the cold gas jet .
  • the polymer ceramic in the coating can also be completed if, due to the requirements of the process, the energy input into the cold gas jet is limited.
  • the process parameter of the energy input into the cold gas jet can also advantageously be used to favorably influence the adhesion of the layer to the substrate. This takes place in that the energy input into the cold gas jet ⁇ is measured during the coating of the still uncoated substrate such that the particles have a Verbin ⁇ dung received with the material of the substrate.
  • the particles can form a bond with this because of their kinetic energy on impact with the still uncoated substrate, said be for example of covalent bonds ⁇ can stand.
  • the layer adhesion is advantageously improved, which, for example, reduces the risk of it peeling off when the ceramic layer is produced mechanically.
  • the single FIGURE represents a device for cold gas spraying.
  • This has a vacuum tank 11, in which on the one hand a cold spray nozzle 12, which can also be referred to as a cold gas spray gun, and on the other ⁇ hand, a substrate 13 is arranged (attachment not shown in detail).
  • a process gas can be supplied to the cold gas spray gun 12 through a first line 14. This has, as indicated by the contour, a laval shape, through which the process gas is expanded and accelerated in the form of a gas jet ⁇ (arrow 15) to a surface 16 of the substrate 13 out.
  • the process gas can, for example, as Reactive gas containing oxygen 17.
  • the process gas can be heated in a manner not shown, where ⁇ sets itself in the vacuum container 12 a required process temperature.
  • a second conduit 18 of the cold spray nozzle 12 can be supplied particles 19, the preceramic polymers as the matrix can be made with fillers 19a 19b for the polymer to be formed ⁇ ceramic. These particles are accelerated in the gas jet and impinge on the surface 16. The kinetic energy of the particles causes them to adhere to the surface 16, whereby the oxygen 17 is also incorporated into the forming layer 20 or is involved in the pyrolytic reactions of the preceramic polymers.
  • other filler 19c which are designed as microparticles, the cold gas stream fed ⁇ are mixed, the also incorporated into the layer 21 ⁇ to.
  • the substrate can be ⁇ 13 in the direction of the double arrow 21 can be moved in front of the cold spray nozzle 12 back and forth.
  • the coating process is constantly maintained preserver ⁇ th the vacuum in the Va kuumhunt 11 by the vacuum pump 22, wherein the process gas is passed through a filter 23 before passage through the vacuum pump 22 to particle filter out the non when impinging on the surface 16 bound to them.
  • a boundary area 24 which is shown cross-hatched and refers to the surface-adjoining part of the fabric 16 of the substrate 13 and adjacent to the surface at ⁇ particles of the forming layer.
  • the energy input into the forming layer can be controlled in such a way that a good adhesion between the layer 20 and the substrate 13 is effected.
  • covalent bonds are used which form between the impinging particles 19 and the substrate 13, without the surface 16 of the substrate 13 being melted.
  • ⁇ prevents can that components of the Substra ⁇ tes 13 are installed in an undesired manner in the forming layer 20 and vice versa.
  • a heater 25 is furthermore provided in the vacuum container 11. With this, during the course of the coating process, the temperatures required in the vacuum chamber can be achieved. Furthermore, to introduce a local energy input into the layer in the form of electromagnetic radiation, a laser 26 is accommodated in the vacuum container 11, which can be moved by means of a pivotable suspension 27. In particular, this as shown in the figure, are directed towards the impact point of the cold gas stream 15 where ⁇ through during the layer forming process may be carried out an additional ex- ternal energy input that is independent of the energy input into the cold gas jet 15 °.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

L'invention concerne un procédé de fabrication de couches céramiques (20) par pulvérisation. L'invention vise à fabriquer des céramiques polymères à partir de polymères précéramiques. A cet effet, on fait intervenir un procédé de pulvérisation à gaz froid selon lequel un pistolet de pulvérisation à froid (12) produit un jet de gaz froid (15) additionné de particules (19) provenant du polymère précéramique par l'intermédiaire d'une conduite (18). L'énergie nécessaire à la fabrication de la couche (20) sur un substrat (13) est produite par application d'une énergie cinétique élevée au jet de gaz froid (15), de telle manière qu'un réchauffement thermique du jet de gaz froid n'est pas nécessaire ou peut être réduit fortement. Il est ainsi possible d'appliquer les polymères précéramiques thermiquement sensibles par pulvérisation à gaz froid en tant que revêtement (20) sur un substrat (13). Les céramiques polymères peuvent ainsi être employées dans un procédé économique de fabrication rapide de couches d'épaisseur relativement élevée. On peut ainsi fabriquer des couches de protection contre l'usure, des couches de protection thermique et d'autres couches fonctionnelles.
EP06763866A 2005-06-28 2006-06-23 Procede de fabrication de couches ceramiques Not-in-force EP1899494B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005031101A DE102005031101B3 (de) 2005-06-28 2005-06-28 Verfahren zum Herstellen von keramischen Schichten
PCT/EP2006/063516 WO2007000422A2 (fr) 2005-06-28 2006-06-23 Procede de fabrication de couches ceramiques

Publications (2)

Publication Number Publication Date
EP1899494A2 true EP1899494A2 (fr) 2008-03-19
EP1899494B1 EP1899494B1 (fr) 2010-07-28

Family

ID=36709978

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06763866A Not-in-force EP1899494B1 (fr) 2005-06-28 2006-06-23 Procede de fabrication de couches ceramiques

Country Status (5)

Country Link
US (1) US7781024B2 (fr)
EP (1) EP1899494B1 (fr)
JP (1) JP5106390B2 (fr)
DE (2) DE102005031101B3 (fr)
WO (1) WO2007000422A2 (fr)

Cited By (1)

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CN115400926A (zh) * 2021-05-27 2022-11-29 创兆光有限公司 半导体激光器介电层以及半导体激光器的制作方法

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DE102011052118A1 (de) * 2011-07-25 2013-01-31 Eckart Gmbh Verfahren zum Aufbringen einer Beschichtung auf einem Substrat, Beschichtung und Verwendung von Partikeln
US9828542B2 (en) 2013-03-15 2017-11-28 Melior Innovations, Inc. Methods of hydraulically fracturing and recovering hydrocarbons
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US9499677B2 (en) 2013-03-15 2016-11-22 Melior Innovations, Inc. Black ceramic additives, pigments, and formulations
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US11091370B2 (en) 2013-05-02 2021-08-17 Pallidus, Inc. Polysilocarb based silicon carbide materials, applications and devices
US11014819B2 (en) 2013-05-02 2021-05-25 Pallidus, Inc. Methods of providing high purity SiOC and SiC materials
US9919972B2 (en) 2013-05-02 2018-03-20 Melior Innovations, Inc. Pressed and self sintered polymer derived SiC materials, applications and devices
US12215031B2 (en) 2013-05-02 2025-02-04 Pallidus, Inc. High purity polysilocarb derived silicon carbide powder
US10322936B2 (en) 2013-05-02 2019-06-18 Pallidus, Inc. High purity polysilocarb materials, applications and processes
US9657409B2 (en) 2013-05-02 2017-05-23 Melior Innovations, Inc. High purity SiOC and SiC, methods compositions and applications
US9481781B2 (en) 2013-05-02 2016-11-01 Melior Innovations, Inc. Black ceramic additives, pigments, and formulations
JP6341505B2 (ja) * 2014-06-02 2018-06-13 国立大学法人東北大学 コールドスプレー用粉末、高分子被膜の製造方法および高分子被膜
EP3247488A4 (fr) * 2015-01-21 2018-08-08 Melior Innovations Inc. Procédés de fabrication de particules de céramique dérivées de polymère
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CN109554701B (zh) * 2018-12-27 2021-06-29 东莞华誉精密技术有限公司 一种手机壳体表面的喷涂方法及喷涂装置
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CN115400926B (zh) * 2021-05-27 2024-05-10 创兆光有限公司 半导体激光器介电层以及半导体激光器的制作方法

Also Published As

Publication number Publication date
WO2007000422A2 (fr) 2007-01-04
DE102005031101B3 (de) 2006-08-10
JP5106390B2 (ja) 2012-12-26
DE502006007540D1 (de) 2010-09-09
WO2007000422A3 (fr) 2007-03-22
US20090202732A1 (en) 2009-08-13
JP2008544092A (ja) 2008-12-04
EP1899494B1 (fr) 2010-07-28
US7781024B2 (en) 2010-08-24

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