EP1903530B1 - Agencement doté d'un appareil sous vide et son procédé de fonctionnement - Google Patents

Agencement doté d'un appareil sous vide et son procédé de fonctionnement Download PDF

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Publication number
EP1903530B1
EP1903530B1 EP07017431.3A EP07017431A EP1903530B1 EP 1903530 B1 EP1903530 B1 EP 1903530B1 EP 07017431 A EP07017431 A EP 07017431A EP 1903530 B1 EP1903530 B1 EP 1903530B1
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EP
European Patent Office
Prior art keywords
data
vacuum device
vacuum
configuration data
bus system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP07017431.3A
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German (de)
English (en)
Other versions
EP1903530A2 (fr
EP1903530A3 (fr
Inventor
Jochen BÖTTCHER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1903530A2 publication Critical patent/EP1903530A2/fr
Publication of EP1903530A3 publication Critical patent/EP1903530A3/fr
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Publication of EP1903530B1 publication Critical patent/EP1903530B1/fr
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Classifications

    • G—PHYSICS
    • G08—SIGNALLING
    • G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
    • G08C17/00—Arrangements for transmitting signals characterised by the use of a wireless electrical link
    • G08C17/02—Arrangements for transmitting signals characterised by the use of a wireless electrical link using a radio link
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • G—PHYSICS
    • G08—SIGNALLING
    • G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
    • G08C19/00—Electric signal transmission systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/40—Use of a multiplicity of similar components

Definitions

  • the invention relates to an arrangement with a vacuum device designed as a vacuum pump, a first bus system and a control unit according to the preamble of claim 1. It also relates to a method for operating this arrangement.
  • Vacuum devices can, for example, be turbomolecular pumps that are equipped with drive electronics, which today often have programmable microprocessor units. It can also be pressure measuring devices, valve control devices and more, insofar as these can be electronically controlled or monitored electronically.
  • a control unit sends control data to the connected vacuum devices via a bus system, which is usually an installation of electrical conductors between the connected devices.
  • Changes for example to the operating software, usually require manual intervention on the respective vacuum device. This can disrupt the communication of other vacuum devices and thus the process.
  • manual intervention requires, for example, the removal and re-insertion of connectors, for example the bus system, which can lead to errors and failures.
  • Access to one or more vacuum devices is often not possible due to an industrial bus system used by the user, to the extent desired by the user or manufacturer and necessary for adaptation to new operating circumstances.
  • the arrangement according to the invention has an administration unit which is connected to the bus system, the bus system being set up in such a way that it has communication means which, on the one hand, are adapted for a first data exchange between vacuum device and control unit and a second data exchange between vacuum device and the administration unit, wherein first and second data exchange are independent of each other.
  • the operating method for an arrangement with all the features of one or more of claims 1 or 2 has a step A, in which in the second data exchange either the configuration data or the operating data or both are transmitted from the vacuum device to the administration unit.
  • the independence between a first and a second data exchange makes it possible to read out data from the vacuum devices and to process them in the administration unit without disrupting the operation of the arrangement, ie the system comprising the vacuum devices, the bus system, the administration unit and the control unit.
  • operating data can be collected in the administration unit and the configuration data can be stored.
  • it can make sense to process only operating data or configuration data or both.
  • the processing of operating data allows users and / or manufacturers to carry out statistical evaluations over longer periods of time. This makes it possible, for example, to identify service cases early on. It is also possible to call up the configurations and current operating data at a time without interrupting the operation of the system.
  • the dependent claims 2 and 4 to 8 represent advantageous developments of the invention.
  • the administration and control unit are designed as part of a control unit. Fewer components are needed, i.e. the system is becoming cheaper. In addition, all functions are combined in one spatial location.
  • the status of the configuration data of the vacuum devices and thus the configuration of the system can be stored centrally at any time. This makes it possible to view the configuration without checking each individual vacuum device. It is advantageously possible to do this even during operation.
  • the measure according to claim 5 allows configuration data of one or more vacuum devices within the administration unit to be compared with similar data.
  • Sources of this comparison data can be configuration data originating from other vacuum devices or parts thereof.
  • the comparison data can also get into the administration unit in another way, for example by manual input by the user or connection of the administration unit to a computer network.
  • the comparison advantageously allows changes and / or deviations in the configurations to be shown.
  • the measure according to claim 6 facilitates the exchange of a vacuum device.
  • a replacement vacuum device can take the place of a vacuum device and receives the configuration data from the administrative unit. This means that no lengthy configuration work has to be carried out on site, the exchange is much faster, which saves time and money. It also guarantees that the configuration of the replacement vacuum device really matches that of the previous vacuum device. This avoids errors that can ultimately lead to technical failure.
  • the data exchange between the vacuum device and the administrative unit can be done cyclically according to claim 7. This is advantageous when creating statistics about operating data. It is also advantageous to routinely save the configuration and thus have the current status of the system in the configuration data memory.
  • a recipient 1 is shown, to which vacuum devices are connected via flanges.
  • the recipient can be a simple vacuum chamber, a multi-chamber system or part of a complex vacuum system, wherein the vacuum devices can be arranged at different points in the system.
  • a first vacuum pump 2 a second vacuum pump 3 and a measuring device 4 are shown.
  • the vacuum pump 2 has a pump part 2a with the pump system for generating a vacuum and an operating device 2b.
  • This operating device 2b contains the control electronics for driving the electrical and electronic components of the pump part 2a, in particular the drive motor.
  • the power unit and power pack can also be arranged in the operating device 2b.
  • the vacuum device 3 is a vacuum pump in which the pump part 3a with a pump system and operating device 3b are separated from one another and are connected to one another via one or more cables.
  • the vacuum device 4 is designed as a measuring device, for example a pressure measuring device, wherein it contains at least one electronics, from which measured values are passed on to connectable devices.
  • a control unit 6 is used in a known manner to control the vacuum devices.
  • individual vacuum devices can be switched on and off depending on the process taking place in the vacuum system from a central location.
  • a bus system 5 is provided for communication between the vacuum devices and the control unit, to which the control unit and vacuum devices are connected, for example via a cable connection 5a.
  • the connected devices and units are assigned addresses at which they can be reached for communication. Cables and radio links can be used as a means of communication to design the bus system.
  • Conventional protocols and methods can be used for the communication itself, for example Internet protocols or those which are used in the area of the industrially customary "programmable logic controller (PLC)".
  • an administration unit 7 is connected to the bus system 5 via a cable connection 5b.
  • This administrative unit collects and distributes configuration data of the vacuum devices.
  • the bus system is designed so that parallel communication can be carried out.
  • the bus system must be designed so that it allows quasi-simultaneous operation with several so-called masters. Examples of such bus systems are Ethernet and the "Process Field Bus” (Profibus).
  • the administration and control unit are masters.
  • the management unit 7 has a radio module and communicates via a radio link 5b 'with a radio module connected to a second bus system 5'.
  • the second bus system is arranged parallel to the first bus system 5, so that data can be exchanged via both.
  • a temporarily connectable administration unit can be implemented in a particularly simple manner. It can then take the form of a personal digital assistant (PDA), for example, or it can be a portable computer (“laptop”) equipped with a radio module. It is also conceivable to set up the complete bus system 5 'or parts thereof via radio connections.
  • PDA personal digital assistant
  • laptop portable computer
  • Control unit and administration unit are parts of a control unit 9, which is connected to the bus system 5 via a connection 5b ".
  • this connection can consist of several cables.
  • a cable on which the data of both can be used by suitable means Units 6 and 7 are given and the management unit can receive and send data via an external connection 10.
  • Such a connection can be, for example, a computer network connection such as an intranet or the Internet.
  • the data exchanges between the vacuum device and the control unit on the one hand and the vacuum device and the inventive management unit on the other hand are independent of one another.
  • the administration unit can read data from the vacuum device without significantly impairing the data exchange between the vacuum device and the control unit.
  • the data transferred in the data exchange consist of control data, operating data and configuration data.
  • the control data include, in particular, control commands and instructions that are transmitted from the control device to the vacuum device and, for example, trigger actions such as reading out a measured value, changing the speed, and the like.
  • the operating data include the actual values of the vacuum device and are only read out by the control and / or administrative unit. These are, for example, the speed, a pressure or a temperature.
  • the configuration data include such data as pump type, software version, settings of parameters such as number and duration of cycles of measured value recordings, temperature of temperature management systems, coolant flow, and the like.
  • the sum of all configuration data of a vacuum device forms a configuration data record, the configuration data describe the configuration of the vacuum device.
  • the control unit sends data to one or more vacuum devices via the bus system. This data is received by the operating devices on the vacuum devices, interpreted as commands and the associated actions triggered. If the vacuum device is a vacuum pump, such an action can, for example, accelerate from a standby state with reduced Rotor speed to final speed. Since the process flow in the recipient requires certain actions and states of the vacuum devices, the operating devices of the vacuum devices send operating data to the control unit that describe their condition. This transmission can take place at regular, predefined intervals or in response to a corresponding command from the control unit. Sending the data between the operating devices and the control unit represents a data exchange.
  • the management unit sends and receives data, this data exchange taking place with the vacuum devices and not hindering the data exchange described above.
  • This data is configuration data or operating data or both together.
  • This data can be used in a variety of ways, for example it can be displayed on a display device, stored in a data memory or transmitted over a computer network.
  • An example of the application of the method is that a vacuum pump contains a temperature sensor, the temperature signal of which is sent to the management unit as part of the operating data. This saves each temperature value or only a previously determined portion of the temperature values and is simultaneously displayed on a display device, for example a screen.
  • the administrative unit can represent the current operating and configuration data of the arrangement in whole or in part and thus to represent and visualize its state.
  • the management unit sends a command to the vacuum device, upon which the vacuum device transmits its configuration data in response. These are stored in a step B of the method in the administration unit, specifying the address of the vacuum device within the bus system, as a result of which the configuration data are assigned to the vacuum device. The vacuum device is then replaced and a vacuum device of the same type installed in its place in the arrangement. The management unit again sends a command to the address of the vacuum device and receives configuration data as a reaction. A comparison of all or part of the configuration data record now takes place in the administration unit.
  • Step A of transmitting configuration data or operating data or both together from one vacuum device to the administration unit can be event-controlled or cyclical. Cyclic means that the step is repeated after a specified time interval. This time interval is stored in the administration unit or in the vacuum device. It can be fixed or changeable. An example of event control is when a user operates the administrative unit and thereby triggers the data exchange.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Hardware Redundancy (AREA)

Claims (8)

  1. Agencement comportant un appareil à vide (2, 3, 4) réalisé sous forme de pompe à vide, un premier système de bus (5) et une unité de commande (6), une unité de gestion (7) étant reliée au système de bus et le système de bus comportant des moyens de communication adaptés pour un premier échange de données entre l'appareil à vide (2, 3, 4) et l'unité de commande (6) d'une part et un second échange de données entre l'appareil à vide (2, 3, 4) et l'unité de gestion (7) d'autre part, le premier et le second échange de données étant indépendants l'un de l'autre,
    caractérisé en ce que
    l'unité de commande et l'unité de gestion font partie d'une unité de contrôle (9).
  2. Agencement selon la revendication 1,
    caractérisé en ce que
    les moyens de communication comprennent un deuxième système de bus (5').
  3. Procédé de fonctionnement d'un agencement présentant toutes les caractéristiques selon l'une ou plusieurs des revendications précédentes,
    le procédé comprenant une étape A dans laquelle, lors du deuxième échange de données, soit les données de configuration, soit les données d'exploitation, soit les deux ensemble, sont transmises de l'appareil à vide (2, 3, 4) à l'unité de gestion (7).
  4. Procédé selon la revendication 3,
    caractérisé en ce que
    dans une étape B, les données de configuration sont stockées dans une mémoire de données de configuration en étant affectées à l'appareil à vide (2, 3, 4) d'où proviennent les données de configuration.
  5. Procédé selon la revendication 4,
    caractérisé en ce que
    l'unité de gestion (7) compare tout ou partie des données de configuration transmises lors du deuxième échange de données avec des données de configuration de même type disponibles dans l'unité de gestion (7).
  6. Procédé selon la revendication 4 ou 5,
    caractérisé en ce que
    dans une autre étape, lors du deuxième échange de données, l'unité de gestion (7) transmet soit des données de configuration, soit un logiciel d'exploitation, soit les deux ensemble à l'appareil à vide (2, 3, 4).
  7. Procédé selon la revendication 3,
    caractérisé en ce que
    l'étape A est répétée de façon cyclique.
  8. Procédé selon la revendication 3,
    caractérisé en ce que
    l'étape A est à commande par événements.
EP07017431.3A 2006-09-23 2007-09-06 Agencement doté d'un appareil sous vide et son procédé de fonctionnement Active EP1903530B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006045022.1A DE102006045022B4 (de) 2006-09-23 2006-09-23 Anordnung mit Vakuumgerät und Verfahren zu derem Betrieb

Publications (3)

Publication Number Publication Date
EP1903530A2 EP1903530A2 (fr) 2008-03-26
EP1903530A3 EP1903530A3 (fr) 2014-09-17
EP1903530B1 true EP1903530B1 (fr) 2020-07-22

Family

ID=38969547

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07017431.3A Active EP1903530B1 (fr) 2006-09-23 2007-09-06 Agencement doté d'un appareil sous vide et son procédé de fonctionnement

Country Status (2)

Country Link
EP (1) EP1903530B1 (fr)
DE (1) DE102006045022B4 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013106474B4 (de) * 2013-06-20 2024-10-10 Pfeiffer Vacuum Gmbh Anordnung mit einem Vakuumgerät sowie Verfahren zur Erfassung von in einer Kommunikationsleitung zwischen einem Vakuumgerät und einer zentralen Steuereinrichtung kommunizierten Daten
EP3620663B1 (fr) * 2018-09-06 2021-02-17 Pfeiffer Vacuum Gmbh Dispositif à vide
EP3626973B1 (fr) * 2019-08-12 2022-08-03 Pfeiffer Vacuum Gmbh Système à vide et procédé d'identification de modules électroniques dans un tel système à vide
EP3620661B1 (fr) * 2019-08-30 2021-10-06 Pfeiffer Vacuum Gmbh Dispositif de raccordement, système et procédé de fonctionnement d'un dispositif de raccordement
EP3951738B1 (fr) * 2021-12-13 2023-12-13 Pfeiffer Vacuum Technology AG Appareil et procédé pour la communication avec un dispositif à vide
DE102024132173B3 (de) * 2024-11-05 2026-02-12 Endress+Hauser Flowtec Ag Messdatenverarbeitungssystem und Prozessanlage

Family Cites Families (7)

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Publication number Priority date Publication date Assignee Title
ATE187824T1 (de) * 1994-10-24 2000-01-15 Fisher Rosemount Systems Inc Vorrichtung, die einen zugang zu feldgeräten in einem verteilten steuerungssystem gestattet
US5793963A (en) * 1994-10-24 1998-08-11 Fisher Rosemount Systems, Inc. Apparatus for providing non-redundant secondary access to field devices in a distributed control system
US5971711A (en) * 1996-05-21 1999-10-26 Ebara Corporation Vacuum pump control system
US6272400B1 (en) * 1998-07-13 2001-08-07 Helix Technology Corporation Vacuum network controller
DE10114127A1 (de) * 2001-03-22 2002-09-26 Abb Patent Gmbh Verfahren zur Kommunikation mit einem Feldgerät
US7016751B2 (en) * 2001-07-13 2006-03-21 Helix Technology Corporation Vacuum system central control information server
DE102004036046A1 (de) 2004-07-24 2006-02-16 Robert Bosch Gmbh System und Verfahren zur Steuerung oder Regelung der Betriebsabläufe bei einem Fahrzeug

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
DE102006045022B4 (de) 2026-04-23
EP1903530A2 (fr) 2008-03-26
DE102006045022A1 (de) 2008-03-27
EP1903530A3 (fr) 2014-09-17

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