EP1906024B1 - Betriebssteuerungsvorrichtung und -verfahren für Vakuumpumpen - Google Patents

Betriebssteuerungsvorrichtung und -verfahren für Vakuumpumpen Download PDF

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Publication number
EP1906024B1
EP1906024B1 EP07017322.4A EP07017322A EP1906024B1 EP 1906024 B1 EP1906024 B1 EP 1906024B1 EP 07017322 A EP07017322 A EP 07017322A EP 1906024 B1 EP1906024 B1 EP 1906024B1
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EP
European Patent Office
Prior art keywords
vacuum
value
pump
pumps
target
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Ceased
Application number
EP07017322.4A
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English (en)
French (fr)
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EP1906024A3 (de
EP1906024A2 (de
Inventor
Takamitsu Nakayama
Kazuaki Satoh
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Anest Iwata Corp
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Anest Iwata Corp
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Publication of EP1906024A2 publication Critical patent/EP1906024A2/de
Publication of EP1906024A3 publication Critical patent/EP1906024A3/de
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/403—Electric motor with inverter for speed control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/56—Number of pump/machine units in operation

Definitions

  • the present invention relates to an operation-control device and an operation-control method of vacuum pumps such as a scroll pump, a vane pump and the like, especially to a case where plural set of vacuum pumps are provided.
  • a frequency control by an inverter is introduced and the speed of an AC motor which drives a vacuum pump is controlled by using a signal of a pressure-sensor detecting a pressure of gas inside a vacuum tank to be depressurized.
  • a pump load control by means of an inverter a prior art, for instance, such as JP-A-H9-4591/1997 (hereafter, referred to as a patent document 1) or EP 1314890 A2 has been known.
  • a control-step constitution wherein the speed of an AC motor 04, which drives a vacuum blower (vacuum pump) 03 connected to a vacuum tank 01, is controlled by a frequency converter (inverter) 05, and the speed is increased when the operation differential pressure of the pump decreases and demand power goes down, while the speed is decreased when the operation differential pressure of the pump increases and demand power goes up; so that the input power poured into the motor driving the pump is kept constant. Further, the pressure P inside the vacuum tank 01 is detected for the estimation of vacuum condition.
  • EP 1314809 A2 the value of the electric current of the motor is monitored. However, the reduction of the number of vacuum pumps in operation is triggered by a pressure detector.
  • a pressure (vacuum) sensor is used for estimating the vacuum condition, since the vacuum condition in the tank 01 is detected as pressure P.
  • a pressure (vacuum) sensor is used for estimating the vacuum condition, since the vacuum condition in the tank 01 is detected as pressure P.
  • special sensors of a dust-free type and/or a waterproof type are required in order to prevent the invasion of dust and/or water droplet. Consequently, there arises a problem of cost increase as to equipment and/or facility.
  • a speed control inverter always accompanies electronic noise which causes undesirable problems to the surrounding electrical/electric equipment if it is nearby the inverter.
  • the present invention is aiming at: eliminating the difficulties in such a case of introduction of vacuum sensors and/or inverter speed control; realizing the operation of plural vacuum pumps wherein the increase of facility costs is restrained, the maintenance frequency is reduced and the man-hour of repair work is lessened; and providing an operation control device and an operation control method which are compatible with the just-stated aims.
  • the present invention provides an operation control device of plural vacuum pumps for depressurizing a gas inside at least one tank and/or vacuum facility room and so on, including: a current detecting means which detects a current flowing in a motor that drives the vacuum pumps; and a control means which reduces the number of the vacuum pumps actually under operation, while judging whether a target vacuum or substantially vacuum condition is reached, based on a situation that a current value detected by the current detection means converges within a predetermined range.
  • the current flowing in the motor is detected, and it is judged that a target vacuum or substantially target vacuum condition is realized when the current value converges within a predetermined range. Therefore, it is not necessary to provide with vacuum sensors for pressure detection of a vacuum tank as conventionally used, so that equipment costs can be restrained and a remarkable cost effectiveness can be obtained, especially in case where special sensors of a dust-free type and/or a waterproof type are required, depending on the service condition as to a vacuum tank or a vacuum facility room.
  • the control means of the operation control device further includes a vacuum-degree-estimation means to judge that a threshold criterion value is reached when a current value of the motor under watch reaches the predetermined range, the threshold criterion value being predetermined in advance of a target-vacuum value and to conclude that said target-vacuum value is reached in case when the current value stays within the predetermined range for a predetermined span of time after the threshold criterion value is reached; in which when the vacuum-degree-estimation means concludes that the threshold criterion value or the target-vacuum value within the predetermined range is reached, the number of the pumps under operation is reduced.
  • the another constitution of the above mentioned makes it possible to decrease the number of plural working vacuum pumps and to reduce the amount of power consumption as a result, because the target vacuum can be reached without large current after the depressurized pressure reaches the threshold criterion value.
  • the number of pumps and the amount of power consumption are reduced after surely estimating that the target vacuum (negative pressure) is reached when the detected current stays for a predetermined span of time in the predetermined range.
  • the target-vacuum value within the predetermined range is reset at a lower value as the operation hours of the vacuum pumps are prolonged.
  • the operation control device includes a pump operation control means, which designates one of the plural pumps as a pump under watch, stops at least one of the pumps other than the pump under watch when the vacuum-degree-estimation means concludes, based on a current value of the motor driving the pump under watch, that the threshold criterion value or the target-vacuum value within the predetermined range is reached and shifts the pump under watch evenly one by one among the whole pumps.
  • the method includes the steps of designating a pump under watch, stopping the pumps other than the pump under watch and shifting the pump under watch one by one among the whole pumps; thereby such operation manner can be evaded that a specific pump is always working, the other pumps are kept under suspension, and the operation unevenness among the plural pumps is incurred as a result. Therefore, plural pumps are evenly employed and maintenance work for each pump is equalized. Thus, the increase in efficiency of maintenance work can be promoted.
  • Another constitution of the present invention is characterized in that, in a case where any one of the vacuum pumps is unable or difficult to be operated, the operation of the pump unable or difficult to be operated is skipped and the other next pump is designated as a pump under watch.
  • the above constitution makes it possible to prevent operation unevenness among the plural sets of the vacuum pumps, since plural pumps are evenly employed and the operation hours of each pump are equalized.
  • Another constitution of the present invention relates to an operation control method for plural vacuum pumps for depressurizing a gas inside at least one tank and/or chamber including the steps of: detecting a current flowing in a motor that drives the vacuum pumps; and reducing the number of the vacuum pumps actually under operation, while judging whether a target vacuum and/or substantially vacuum condition is reached, based on the situation that a current value detected by the current detection means converges within a predetermined range.
  • the current to each motor which drives each corresponding vacuum pump is detected and it is judged that the target-vacuum or the substantial target-vacuum is realized when the current value converges within a predetermined range, resulting in that conventionally applied vacuum sensors for pressure detection of a vacuum tank or a vacuum facility room can be omitted, and the above constitution also makes it possible to restrain equipment costs and brings remarkable cost effectiveness especially in case in which special sensors of a dust-free type and/or a waterproof type are required, depending on the service condition as to a vacuum tank or a vacuum facility room.
  • the above constitution makes it possible to decrease the number of plural working vacuum pumps, to reduce the amount of power consumption as a result and to prolong maintenance intervals by stopping the operation of an unnecessary pump; since the gas to be exhausted is reduced when a target vacuum or substantially target vacuum condition is realized, it is possible to hold the vacuum condition or to reach the target vacuum condition without operation of an unnecessary pump. Still furthermore, in the control for operation and start/stop of the pumps, speed control equipment such as inverters and the like is not necessary. Therefore, undesirable effects due to inverters on surrounding equipment are avoidable.
  • an operation control method including the steps of designating one of the plural pumps as a pump under watch; judging that a threshold criterion value is reached when a current value of the motor under watch reaches a predetermined range, the threshold criterion value being predetermined in advance of a target-vacuum value; concluding that said target-vacuum value is reached in case when the current value stays within the predetermined range for a predetermined span of time after the threshold criterion value is reached; stopping at least one pump other than the pump under watch when it is concluded that the threshold criterion value and/or said target-vacuum value within the predetermined range is reached, based on a current value of the motor driving the pump under watch; shifting the pump under watch evenly to the other next pump one by one among the whole pumps.
  • the above described invention it is made possible to decrease the number of plural working vacuum pumps and to reduce a power consumption as a result, because the target vacuum can be reached without large current after the depressurized pressure reaches the threshold criterion value.
  • the number of pumps and the amount of the power consumption are reduced after surely estimating that the target vacuum (negative pressure) is realized when the detected current stays for a predetermined span of time in the predetermined range.
  • the present invention can provide an operation control device and operation method thereof so as to eliminate the difficulties in such a case of introduction of vacuum sensors and/or inverter.
  • the operation of plural vacuum pumps of the present invention the increase of facility costs is restrained, the maintenance frequency is reduced and the man-hour of repair work is lessened.
  • FIG. 1 shows a whole constitution of the invention, wherein a vacuum tank 1 is depressurized by three vacuum pumps P A , P B and P C .
  • the vacuum pumps P A , P B and P C are driven by motors M A , M B and M C , respectively.
  • Each of the vacuum pumps P A , P B and P C is of a rotary displacement (volumetric) type such as of a scroll type or of a vane type, etc.
  • Each of the motors M A , M B and M C is supplied with electricity from a power source 3. Since the speed control of each of the motors M A , M B and M C is not performed, an inverter or the like is not prepared. Incidentally, each of the motors needs only to be an electric motor and the present invention is applicable to both AC motor and DC motor. In addition, a current-detecting means 5 detects the supplied current to each motor.
  • a control means 7 controls the operation and start/stop of the vacuum pumps P A , P B and P C .
  • the control means 7 includes a vacuum-degree-estimation means 9 to judge whether the current signal from the current-detecting means 5 reaches a threshold criterion value S which is set beforehand a target-vacuum value within a predetermined range and to judge whether the current signal from the current-detecting means 5 converges to the target vacuum (negative pressure) value with a predetermined span of time after the current signal reaches a threshold criterion value S, and a pump operation control means 11 to reduce the number of the pumps under operation when the vacuum-degree-estimation means 9 concludes that the threshold criterion value S or the target-vacuum value within a predetermined range is reached.
  • a power (current value) characteristic curve is shown as such a curve as in Fig. 2 , wherein the curve includes a flat straight part and a mountain-shaped part, thereby the flat straight part corresponds to the current convergence by way of vacuum accomplishment and the mountain-shaped part means a large variation of the current.
  • the vacuum-degree-estimation means 9 judges whether the detected current reaches the aforementioned predetermined range from the constant value P minus a to the constant value P plus a, where a is allowance made for the fluctuation of measured values.
  • the vacuum-degree-estimation means 9 also estimates the time when the detected current enters the range, namely, the time when the current reaches the aforementioned, predetermined-threshold-criterion value S. Further, the vacuum-degree-estimation means 9 concludes that the target vacuum (negative pressure) is completed, if the current is held within the range for a predetermined duration of time, for instance, several minutes.
  • a consideration for operation hours can give more accurate judgment on a vacuum-degree-completion.
  • the consideration is given in such a manner that the aforementioned predetermined current range, whereby the threshold-criterion value S is regarded as reached, is lowered in connection with operation hours.
  • the present invention can do without conventionally applied vacuum sensors for pressure detection of a vacuum tank and the present invention makes it possible to restrain equipment costs and brings a remarkable cost effectiveness especially in case in which special sensors of a dust-free type and/or a waterproof type are required, depending on the service condition as to a vacuum tank or a vacuum facility room.
  • the target-vacuum can be realized without operation of an unnecessary pump because the gas to be exhausted is reduced.
  • the vacuum state can be held without operation of an unnecessary pump. Accordingly, it becomes possible to decrease the number of plural working vacuum pumps, to reduce the amount of power consumption as a result and to prolong maintenance intervals by stopping the operation of an unnecessary pump.
  • speed control equipment such as inverters and the like is not provided. Therefore, undesirable effects on surrounding equipment due to inverters are avoidable.
  • the pump to be watched is shifted to the vacuum pump P C (S10), and the vacuum state is monitored watched in the same approach as the case where a vacuum pump P A is used as a pump to be watched.
  • the vacuum pump P C is designated as the pump to be watched
  • the pumps to be stopped are shifted to the pumps P A and P B and the only pump to be operated is shifted to the pump P C (S11).
  • a pump operation control means 11 is constituted so that the control means 11 shifts a control step by a control step in such a manner that a control step A in the case where the vacuum pump P A is used as a pump to be watched, a control step B in the case where the vacuum pump P B is used as a pump to be watched, and a control step C in the case where the vacuum pump P C is used as a pump to be watched.
  • a time chart of Fig. 3 shows the situation of the shifting, namely, a shift-circulation.
  • a mark L in Fig. 3 means a point of time when the threshold criterion value S or the target-vacuum value is reached and the pumps other than the pump under watch are stopped.
  • a mark M means a point of time when a detected current value goes out of the aforementioned predetermined range and, therefore, the pumps under suspension are now be restarted. The control action at the marks L or M is repeated also in case when the pump under watch is the pump P B or P C .
  • the operation of the pump unable or difficult to be operated is skipped and the other next pump is designated as a pump to be watched. For instance, when the pump P B is out of order or under maintenance, the pump to be monitored is shifted from the pump P A to the pump P C .
  • the electromagnetic open/close valves V A , V B and V C are provided so as to hinder high pressure gas from flowing-back inside the vacuum tank by the vacuum pumps P A , P B and P C .
  • the valve V A , V B or V C is opened respectively after the vacuum pumps P A , P B or P C starts running.
  • the present invention eliminates the difficulties in such a case of introduction of vacuum sensors and/or inverter control.
  • the present invention realizes the operation of plural vacuum pumps wherein the increase of facility costs is restrained, the maintenance frequency is reduced and the man-hour of repair work is lessened.
  • the present invention can be applicable to operation control devices and operation methods for plural vacuum pumps.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (7)

  1. Betriebssteuerungsvorrichtung einer Vielzahl von Vakuumpumpen (PA, PB, PC) zum Druckabbau von Gas innerhalb mindestens eines/r Behälters und/oder Kammer (1), umfassend:
    eine Stromerfassungseinheit (5), welche einen in einem Motor (MA, MB, MC) fließenden Strom erfasst, welcher die Vakuumpumpen (PA, PB, PC) antreibt, und dadurch gekennzeichnet, das sie umfasst:
    eine Steuerungseinheit (7), welche die Anzahl der Vakuumpumpen im Betrieb verringert, indem beurteilt wird, dass ein Zielvakuum und/oder ein weitgehender Vakuumzustand erreicht ist, wenn ein durch die Stromerfassungseinheit (5) erfasster Stromwert innerhalb eines vorbestimmten Bereichs konvergiert.
  2. Betriebssteuerungsvorrichtung nach Anspruch 1, wobei die Steuereinheit (7) weiterhin eine Vakuumgradabschätzeinheit (9) zur Beurteilung, dass ein Schwellwertkriterium erreicht ist, wenn ein Stromwert des beobachteten Motors den vorbestimmten Bereich erreicht, umfasst, wobei das Schwellwertkriterium vor einem Zielvakuumwert vorbestimmt wird, und zur Folgerung, dass der Zielvakuumwert erreicht wird, für den Fall, dass der Stromwert für eine vorbestimmte Zeitspanne nach Erreichen des Schwellwertkriteriums innerhalb des vorbestimmten Bereichs bleibt; wobei, wenn die Vakuumgradabschätzeinheit folgert, dass das Schwellwertkriterium oder der Zielvakuumwert innerhalb des vorbestimmten Bereichs erreicht ist, die Zahl der Pumpen und der Betrieb verringert wird.
  3. Betriebssteuerungsvorrichtung nach Anspruch 1, wobei der Zielvakuumwert innerhalb des vorbestimmten Bereichs auf einen niedrigeren Wert zurückgesetzt wird, wenn die Betriebsstunden der Vakuumpumpen sich angehäuft haben.
  4. Betriebssteuerungsvorrichtung nach Anspruch 2, wobei die Steuerungseinheit (7) weiterhin eine Pumpenbetriebssteuerungseinheit (11) aufweist, die eine der Vielzahl von Pumpen als zu beobachtende Pumpe ausweist, mindestens eine andere Pumpe als die Pumpe unter Beobachtung stoppt, wenn die Vakuumgradabschätzeinheit folgert, basierend auf einem Stromwert des Motors, welcher die Pumpe unter Beobachtung antreibt, dass das Schwellwertkriteriums oder der Zielvakuumwert innerhalb des vorbestimmten Bereichs erreicht ist, und die Pumpe unter Beobachtung gleichmäßig eine nach der anderen unter den gesamten Pumpen verschiebt.
  5. Betriebssteuerungsvorrichtung nach Anspruch 4, wobei, wenn eine der Vakuumpumpen nicht oder schwer zu betreiben ist, der Betrieb der schwer oder schwierig zu betreibenden Pumpe ausgelassen wird und die andere nächste Pumpe als Pumpe unter Beobachtung ausgewiesen wird.
  6. Betriebssteuerungsverfahren für eine Vielzahl von Vakuumpumpen (PA, PB, PC,) zum Druckablassen eines Gases innerhalb mindestens eines Behälters und/oder einer Kammer (1) mit den folgenden Schritten:
    Erfassen eines in einen Motor (MA, MB, MC) fließenden Stroms, der die Vakuumpumpen (PA, PB, PC, ) antreibt; dadurch gekennzeichnet, dass es den Schritt aufweist:
    Verringern der Anzahl der Vakuumpumpen unter Betrieb durch Beurteilung, dass ein Zielvakuum und/oder ein weitgehender Vakuumzustand erreicht ist, wenn ein durch die Stromerfassungseinheit (5) erfasster Stromwert innerhalb eines vorbestimmten Bereichs konvergiert.
  7. Betriebssteuerungsverfahren nach Anspruch 6, weiterhin umfassend die Schritte:
    Ausweisen einer der Vielzahl von Pumpen als Pumpe unter Beobachtung; Beurteilen, dass ein Schwellwertkriterium erreicht ist, wenn ein Stromwert des Motors unter Beobachtung den vorbestimmten Bereich erreicht, wobei das Schwellwertkriterium im Voraus von einem Zielvakuumwert vorbestimmt wird; Folgern, dass der Zielvakuumwert erreicht ist, wenn der Stromwert für eine vorbestimmte Zeitspanne nach Erreichen des Schwellwertkriteriums in dem vorbestimmten Bereich bleibt; Stoppen mindestens einer anderen Pumpe als der Pumpe unter Beobachtung, wenn gefolgert wird, dass das Schwellwertkriterium und/oder der Zielvakuumwert innerhalb des vorbestimmten Bereichs erreicht ist, basierend auf einem Stromwert des Motors, welcher die Pumpe unter Beobachtung antreibt; und Verschieben der Pumpe unter Beobachtung gleichförmig zu der anderen nächsten Pumpe nacheinander unter den gesamten Pumpen.
EP07017322.4A 2006-09-12 2007-09-04 Betriebssteuerungsvorrichtung und -verfahren für Vakuumpumpen Ceased EP1906024B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006247398A JP4737770B2 (ja) 2006-09-12 2006-09-12 真空ポンプの運転制御装置および方法

Publications (3)

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EP1906024A2 EP1906024A2 (de) 2008-04-02
EP1906024A3 EP1906024A3 (de) 2012-06-13
EP1906024B1 true EP1906024B1 (de) 2017-06-28

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US (1) US20080063534A1 (de)
EP (1) EP1906024B1 (de)
JP (1) JP4737770B2 (de)
CN (1) CN101144470B (de)

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JP4737770B2 (ja) 2011-08-03
EP1906024A2 (de) 2008-04-02
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