EP2009287A3 - Dispositif et procédé d'échappement sous vide - Google Patents

Dispositif et procédé d'échappement sous vide Download PDF

Info

Publication number
EP2009287A3
EP2009287A3 EP08011531.4A EP08011531A EP2009287A3 EP 2009287 A3 EP2009287 A3 EP 2009287A3 EP 08011531 A EP08011531 A EP 08011531A EP 2009287 A3 EP2009287 A3 EP 2009287A3
Authority
EP
European Patent Office
Prior art keywords
vacuum
oil
valve
exhaust
rotary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP08011531.4A
Other languages
German (de)
English (en)
Other versions
EP2009287A2 (fr
EP2009287B1 (fr
Inventor
Yoshio Saruki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2008162248A external-priority patent/JP5216433B2/ja
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of EP2009287A2 publication Critical patent/EP2009287A2/fr
Publication of EP2009287A3 publication Critical patent/EP2009287A3/fr
Application granted granted Critical
Publication of EP2009287B1 publication Critical patent/EP2009287B1/fr
Ceased legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Physical Vapour Deposition (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP08011531.4A 2007-06-26 2008-06-25 Dispositif et procédé d'échappement sous vide Ceased EP2009287B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007167639 2007-06-26
JP2008162248A JP5216433B2 (ja) 2007-06-26 2008-06-20 真空排気装置および真空排気方法

Publications (3)

Publication Number Publication Date
EP2009287A2 EP2009287A2 (fr) 2008-12-31
EP2009287A3 true EP2009287A3 (fr) 2016-07-20
EP2009287B1 EP2009287B1 (fr) 2017-11-29

Family

ID=39817150

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08011531.4A Ceased EP2009287B1 (fr) 2007-06-26 2008-06-25 Dispositif et procédé d'échappement sous vide

Country Status (1)

Country Link
EP (1) EP2009287B1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109839887A (zh) * 2017-11-28 2019-06-04 南京润邦金属复合材料有限公司 一种真空叠轧金属复合板板坯真空制备自动检测控制装置及方法
CN116892495A (zh) * 2023-07-05 2023-10-17 北京卫星环境工程研究所 一种用于氢原子钟地面测试的外真空获得和磁屏蔽设备
CN117846940A (zh) * 2024-01-18 2024-04-09 江苏省精创电气股份有限公司 一种真空泵自动控制方法及系统
CN120024862A (zh) * 2024-11-08 2025-05-23 上海联影医疗科技股份有限公司 便携式真空注油工装及真空注油方法
CN119223519B (zh) * 2024-11-28 2025-02-18 福建建壹真空科技有限公司 一种静态膨胀法真空标准装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07197884A (ja) * 1993-12-28 1995-08-01 Ulvac Japan Ltd 真空排気管路における油蒸気逆流防止装置
JP2006322405A (ja) * 2005-05-19 2006-11-30 Denso Corp 真空排気システム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3275098B2 (ja) 1991-08-09 2002-04-15 日本酸素株式会社 真空排気装置及びその起動方法
JP2003157786A (ja) 2001-11-20 2003-05-30 Hitachi High-Technologies Corp 走査電子顕微鏡

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07197884A (ja) * 1993-12-28 1995-08-01 Ulvac Japan Ltd 真空排気管路における油蒸気逆流防止装置
JP2006322405A (ja) * 2005-05-19 2006-11-30 Denso Corp 真空排気システム

Also Published As

Publication number Publication date
EP2009287A2 (fr) 2008-12-31
EP2009287B1 (fr) 2017-11-29

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