EP2144101A3 - Optisches Halbleiterbauelement und Herstellungsverfahren dafür - Google Patents

Optisches Halbleiterbauelement und Herstellungsverfahren dafür Download PDF

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Publication number
EP2144101A3
EP2144101A3 EP20090164138 EP09164138A EP2144101A3 EP 2144101 A3 EP2144101 A3 EP 2144101A3 EP 20090164138 EP20090164138 EP 20090164138 EP 09164138 A EP09164138 A EP 09164138A EP 2144101 A3 EP2144101 A3 EP 2144101A3
Authority
EP
European Patent Office
Prior art keywords
manufacturing
semiconductor device
semiconductor element
optical semiconductor
method therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20090164138
Other languages
English (en)
French (fr)
Other versions
EP2144101B1 (de
EP2144101A2 (de
Inventor
Shinsuke Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Publication of EP2144101A2 publication Critical patent/EP2144101A2/de
Publication of EP2144101A3 publication Critical patent/EP2144101A3/de
Application granted granted Critical
Publication of EP2144101B1 publication Critical patent/EP2144101B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4206—Optical features
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/85—Packages
    • H10H20/855—Optical field-shaping means, e.g. lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4225—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements by a direct measurement of the degree of coupling, e.g. the amount of light power coupled to the fibre or the opto-electronic element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4207—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms with optical elements reducing the sensitivity to optical feedback
    • G02B6/4208—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms with optical elements reducing the sensitivity to optical feedback using non-reciprocal elements or birefringent plates, i.e. quasi-isolators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4226—Positioning means for moving the elements into alignment, e.g. alignment screws, deformation of the mount
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/10007—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating in optical amplifiers
    • H01S3/10023—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating in optical amplifiers by functional association of additional optical elements, e.g. filters, gratings, reflectors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Semiconductor Lasers (AREA)
EP09164138.1A 2008-07-10 2009-06-30 Optisches Halbleiterbauelement und Herstellungsverfahren dafür Not-in-force EP2144101B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008180554A JP5277761B2 (ja) 2008-07-10 2008-07-10 光半導体装置及びその製造方法

Publications (3)

Publication Number Publication Date
EP2144101A2 EP2144101A2 (de) 2010-01-13
EP2144101A3 true EP2144101A3 (de) 2011-09-07
EP2144101B1 EP2144101B1 (de) 2015-10-21

Family

ID=41226080

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09164138.1A Not-in-force EP2144101B1 (de) 2008-07-10 2009-06-30 Optisches Halbleiterbauelement und Herstellungsverfahren dafür

Country Status (3)

Country Link
US (2) US8547630B2 (de)
EP (1) EP2144101B1 (de)
JP (1) JP5277761B2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9236521B2 (en) 2012-10-30 2016-01-12 Avago Technologies General Ip (Singapore) Pte. Ltd. Optocoupler having lens layer
WO2014112077A1 (ja) * 2013-01-17 2014-07-24 富士通株式会社 光配線チップとその検査方法、および光受信器
JP2018063354A (ja) * 2016-10-13 2018-04-19 アンリツ株式会社 半導体光増幅器モジュールの製造方法
CN107589512A (zh) * 2017-10-17 2018-01-16 歌尔股份有限公司 光学模组组装方法及装置
JP6884391B2 (ja) * 2017-12-01 2021-06-09 湖北工業株式会社 干渉フィルタモジュール
CN112198600B (zh) * 2020-12-07 2021-03-26 武汉乾希科技有限公司 用于光通信的多通道光接收组件及其光路耦合方法
US11863296B2 (en) * 2021-08-19 2024-01-02 Subcom, Llc Semiconductor based system and method for broad bandwidth transmission
CN115021822B (zh) * 2022-05-12 2023-09-12 昂纳科技(深圳)集团股份有限公司 一种光传输系统
CN116577070B (zh) * 2023-04-04 2024-01-26 河北圣昊光电科技有限公司 一种soa芯片光放大检测方法及检测设备

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1317034A2 (de) * 2001-11-01 2003-06-04 The Furukawa Electric Co., Ltd. Halbleiterlaser mit Beschichtung mit niedrigem Reflektionsvermögen
US20030215181A1 (en) * 2002-05-17 2003-11-20 Science & Engineering Services, Inc. Method of coupling a laser signal to an optical carrier
US20070091411A1 (en) * 2005-10-14 2007-04-26 Konica Minolta Opto, Inc. Semiconductor light source module

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998037604A2 (en) * 1997-02-24 1998-08-27 Koninklijke Philips Electronics N.V. Optoelectronic device with a semiconductor diode laser amplifier
US6310720B1 (en) * 2000-06-02 2001-10-30 Genoa Corporation Polarization insensitive semiconductor optical amplifier
US6775316B2 (en) * 2001-02-20 2004-08-10 Nortel Networks Ltd. Method and apparatus for integrating a vertical cavity surface emitting laser with a optical amplifier
US20030161379A1 (en) * 2001-12-26 2003-08-28 Jds Uniphase Corporation Laser package
WO2003069740A2 (en) 2002-02-13 2003-08-21 Koninklijke Philips Electronics N.V. Integrated semiconductor optical device, method and apparatus for manufacturing such a device
US7099535B2 (en) * 2002-12-31 2006-08-29 Corning Incorporated Small mode-field fiber lens
KR100703388B1 (ko) * 2004-12-29 2007-04-03 삼성전자주식회사 광송수신기 및 이를 이용한 수동형 광가입자망
JP4418474B2 (ja) 2007-01-23 2010-02-17 セイコープレシジョン株式会社 線量計容器

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1317034A2 (de) * 2001-11-01 2003-06-04 The Furukawa Electric Co., Ltd. Halbleiterlaser mit Beschichtung mit niedrigem Reflektionsvermögen
US20030215181A1 (en) * 2002-05-17 2003-11-20 Science & Engineering Services, Inc. Method of coupling a laser signal to an optical carrier
US20070091411A1 (en) * 2005-10-14 2007-04-26 Konica Minolta Opto, Inc. Semiconductor light source module

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
ANTONIADES N ET AL: "The Impact of Polarization-Dependent Gain on the Design of Cascaded Semiconductor Optical Amplifier CWDM Systems", IEEE PHOTONICS TECHNOLOGY LETTERS, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 8, no. 20, 1 October 2006 (2006-10-01), pages 2099 - 2101, XP011149314, ISSN: 1041-1135 *
KENNEDY ET AL: "Investigation of polarization dependent gain dynamics in a bulk SOA", OPTICS COMMUNICATIONS, NORTH-HOLLAND PUBLISHING CO. AMSTERDAM, NL, vol. 272, no. 2, 24 February 2007 (2007-02-24), pages 490 - 495, XP005905051, ISSN: 0030-4018, DOI: 10.1016/J.OPTCOM.2006.10.088 *

Also Published As

Publication number Publication date
US8547630B2 (en) 2013-10-01
US20130341668A1 (en) 2013-12-26
JP2010020105A (ja) 2010-01-28
JP5277761B2 (ja) 2013-08-28
EP2144101B1 (de) 2015-10-21
US9224929B2 (en) 2015-12-29
US20100007944A1 (en) 2010-01-14
EP2144101A2 (de) 2010-01-13

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