EP2196669B1 - Agencement doté d'une pompe à vide et procédé de fonctionnement d'une pompe à vide - Google Patents

Agencement doté d'une pompe à vide et procédé de fonctionnement d'une pompe à vide Download PDF

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Publication number
EP2196669B1
EP2196669B1 EP09014532.7A EP09014532A EP2196669B1 EP 2196669 B1 EP2196669 B1 EP 2196669B1 EP 09014532 A EP09014532 A EP 09014532A EP 2196669 B1 EP2196669 B1 EP 2196669B1
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EP
European Patent Office
Prior art keywords
motor
vacuum pump
pump
arrangement
power consumption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
EP09014532.7A
Other languages
German (de)
English (en)
Other versions
EP2196669A3 (fr
EP2196669A2 (fr
Inventor
Stefan Kallenborn
Wolfgang Losch
Ronald Sachs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2196669A2 publication Critical patent/EP2196669A2/fr
Publication of EP2196669A3 publication Critical patent/EP2196669A3/fr
Application granted granted Critical
Publication of EP2196669B1 publication Critical patent/EP2196669B1/fr
Revoked legal-status Critical Current
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/02—Motor parameters of rotating electric motors
    • F04B2203/0208—Power
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/02—Motor parameters of rotating electric motors
    • F04B2203/0209—Rotational speed

Definitions

  • the invention relates to an arrangement with a vacuum pump according to the preamble of the first claim and a method for operating a vacuum pump according to the preamble of the seventh claim.
  • Vacuum pumps are today an indispensable part of many industrial processes. Applications range from freeze-drying to leak detection to lamp and tube production, to name but a few. The processes used in these applications today have ever shorter cycle times, which increases the load on the vacuum pump. Added to this is the desire to use dry-compressing vacuum pumps, ie vacuum pumps, whose pumping chamber is largely free of lubricants. However, since often touching seals must be used in these conditions, they are subject to high wear. Measures to reduce wear are known, so suggests the DE-OS 10 2006 012 532 to support the seal with a guide element. However, there is a desire to achieve further improvements in service life. From the EP 1515423 A2 a turbomolecular points with a motor control known.
  • the engine control of this turbomolecular pump detects the engine temperature and shortens the start time of the turbomolecular pump. With turbomolecular pumps very low pressures can be achieved. Disadvantage of such pumps is that they are not able to compress independently against the atmosphere.
  • the US 6244825 B1 discloses a safety device for a pump that detects increased engine loads and reduces engine speed to conserve the engine.
  • the DE 10359270 A1 discloses a controller for a vacuum pump that reduces the rotational speed of the electric motor as the load torque of the vacuum pump increases per unit time.
  • a control device for a vacuum pump known, whereby the speed of the drive is controlled.
  • the aforementioned pumps detect special loads and react with measures that improve the service life of the corresponding drives.
  • a measuring assembly for determining an electrical operating variable of the motor of the vacuum pump makes it possible to operate the motor so that the wear of the pumping stage is greatly reduced.
  • the inventive method according to claim 7 has the advantage that a wear-reducing operation can be initiated at a reduced speed by a simple measurement and a simple criterion.
  • the method is advantageously further developed in that falling below a power threshold value is selected as a criterion for lowering the speed. This simplifies the necessary control module.
  • Another development proposes to provide at least two pumping stages, wherein the motor drives at least two of these pumping stages at the same time.
  • the advantages come into their own, as there is a simple and unambiguous criterion for switching to the low-wear operating state. For example, positioning problems of pressure switches are avoided.
  • multistage vacuum pumps there are many different pressure levels at different parts of the pump and it is unclear which pressure measurement provides the most meaningful value for evaluating the changeover.
  • the reduction in wear is particularly pronounced when the motor is designed as a brushless DC motor, as this produces sufficient torque even at low speeds. This means that particularly low speeds can be achieved without sacrificing pumping efficiency.
  • a further development suggests that at least one pumping stage is designed to be dry running against the atmosphere in a condensing manner.
  • the advantage of the wear reduction is particularly pronounced.
  • At least one pumping stage has a reciprocating piston running in a bushing and a seal between the bushing and the reciprocating piston.
  • the wear reduction comes into its own, because the seal is highly susceptible to wear, but the vacuum pump can be operated at low speed without losing tightness.
  • FIG. 1 shown schematically.
  • the vacuum pump 10 includes a pumping stage 12 and a motor 14. This drives the pumping stage.
  • a drive unit 20 is provided in addition to the vacuum pump. It can be a stand-alone device, or it can be located in a housing part of the vacuum pump.
  • the drive unit includes a lighting device 21, which is connected by a Bestromungs effet 22 with the motor of the vacuum pump.
  • the power supply module generates current and voltage such that the motor is set in motion, preferably in rotation. Current and voltage are supplied via the Bestromungsön the engine.
  • a measuring line 26 is provided and connects the energizing line 22 to a measuring subassembly 24.
  • This measuring subassembly is designed such that it determines an electrical quantity which is transmitted via the current feed line. These electrical quantities may be current or voltage.
  • the power consumption of the motor is preferably determined by the measuring module by measuring an electrical quantity.
  • the measuring module and the power supply module are in contact via a connection 27. This contact changes the current supplied to the motor to signal from the measuring module. These Change takes place depending on the measured current. In particular, the speed of the motor generated by the energization is lowered as soon as the measuring module determines a low power consumption by the motor.
  • the pumping stage designed dry compacting, for example as a diaphragm, piston or reciprocating pump, since here the speed reduction leads to a particularly significant reduction in wear.
  • the Hubkolbenvakuumpumpe 210 has in its housing 240 one of bearings 253, for example bearings, rotatably supported shaft 250.
  • This shaft is rotated by a motor 214 which is formed by stator-side electric coils 251 and shaft-side permanent magnets 252. It is designed as a brushless DC motor.
  • a crank pulley 254 Connected to the shaft is a crank pulley 254 having a crank pin 255.
  • a connecting rod 256 is rotatably mounted.
  • a cylinder 241 gas-tightly connected to the housing has a cylindrical cavity into which the bushing 245 is fitted.
  • the piston 246 connected to and driven by the connecting rod 256 moves back and forth between two reversal points.
  • the piston releases inlet openings which are in gas-conducting connection with the gas inlet 243.
  • the second reversal point it lifts a valve cover 249 from the valve seat, so that gas is expelled from the pump chamber, valve cover and liner limited pumping chamber 248.
  • the Gas then leaves the pumping stage via the gas outlet 244 provided on the cylinder cover 242 and enters the transfer line 280.
  • a seal 247 is attached, which slidably contacts the bushing and seals in this way the space between the bushing and piston. By sliding contact and the absence of lubricants such as oil, this seal is subject to high stress and wears out accordingly.
  • the reciprocating vacuum pump has a drive unit 220 in which a lighting device 221 and a power determination unit 224 are provided.
  • the energizing module is in electrical contact with the electric coils by means of the energizing line 222. It generates currents and voltages in the coils that cause the rotation of the shaft.
  • the power supply assembly is designed so that the speed of the shaft can be adjusted in a wide speed range.
  • the speed range advantageously comprises the range of standstill, over fewer revolutions per second up to sixty revolutions per second.
  • the power determination unit is designed to determine the power consumed by the motor by measuring electrical quantities. The measurement is made via a measuring line 226. Depending on the measured power consumption, the speed is set.
  • the rotational speed is set to a low value.
  • a sinking power consumption of the motor is characteristic of a low compression work to be performed in the pumping stage, in particular for a small quantity of gas to be compressed.
  • a small amount of gas a low speed and thus a small number of strokes of the piston is sufficient to keep a deep vacuum at the gas inlet.
  • a small number of strokes is equal to a significantly reduced wear of the seal, as it rubs less on the liner per second. It is advantageously easy, the Switching the speed from an upper normal condition value falls below a power consumption threshold value to a low speed threshold value.
  • FIG. 3 is the reciprocating vacuum pump in a section along the in FIG. 2 shown line II 'shown. Accordingly, connecting rod 256, bushing 245, piston 246 and cylinder 241 of the first pumping stage can be seen. Also are at FIG. 2 already mentioned seal 247, cylinder cover 242 and valve cover 242 to see.
  • a second cylinder 261 with a second cylinder cover 262 is also connected to the housing 240 of the reciprocating vacuum pump and forms the second pumping stage.
  • a second bushing 265 is provided, in which a second piston 266 reciprocates. It is connected to a second connecting rod 257 and is driven by this.
  • the connecting rod is rotatably mounted on the crank pin 255, which is provided on the crank disk 254. This is rotated by the shaft 250 in rotation.
  • the gas ejected from the first pumping stage passes through the transfer line to the second stage gas inlet 281. After being compressed by the second piston, it lifts the second valve cover 269 and discharges the gas through the pump outlet 282 to the atmosphere.
  • a bushing which contacts the bushing 267 is provided, which is subject to wear according to the same principle as in the case of the seal 247 of the first pumping stage. In the same way, the wear is reduced as soon as the speed is lowered according to the pre-described method.
  • FIG. 4 shows the basic structure of the electrical circuit of the drive unit 220 in a schematic representation.
  • a voltage conditioning 431 is detachably connected to an electrical supply network 430.
  • This Supply network is, for example, the 230 V AC mains or an industrial power grid.
  • the voltage conditioning generates the voltage for a DC link 432 and operating voltages for the electronic components of this circuit. Therefore, it is connected via a supply circuit 440 to the power determination unit 224 and the encoder 433 of the lighting module 221.
  • the power supply module has an output stage 434. In this output stage, an upper power transistor 435 and a lower power transistor 436 are arranged in pairs. They convert the voltage of the intermediate circuit into phase voltage, which are then applied via the motor phases 437 to the coils of the motor 214.
  • the wiring of the power transistors 435, 436 is done by the encoder. This causes a blocking or opening of the power transistors such that the motor is rotated by energizing the motor phases, wherein the encoder is designed so that it can generate the wiring of the power transistors for a variety of speeds.
  • the power determination unit is connected via a measuring line 226 with the motor phases and measures the currents and voltages occurring in these. There is a connection between the power determination unit and the encoder. If the power determination unit determines that the power consumption by the motor has dropped, the encoder is caused to cause a clocking of the power transistors and thus the energization of the motor phases in such a way that the speed of the motor receives a lower value. It is advantageously simple to switch the rotational speed from an upper normal condition value when falling below a power consumption threshold value to a low slip speed value.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (8)

  1. Agencement comprenant une pompe à vide (10 ; 210) assurant une compression vis-à-vis de l'atmosphère, qui comprend au moins un étage de pompe (12 ; 212) et un moteur (14 ; 214) qui entraîne l'étage de pompe, et comprenant un composant d'alimentation électrique (21 ; 221), caractérisé en ce que l'agencement comprend un composant de mesure (24 ; 234) pour déterminer une grandeur de fonctionnement électrique du moteur, et en ce que l'absorption de puissance du moteur peut être déterminée avec la grandeur de fonctionnement électrique du moteur, et en ce que cette absorption de puissance du moteur convient à tirer des conclusions quant au travail de compression à fournir dans la pompe.
  2. Agencement selon la revendication 1, caractérisé en ce qu'il comprend une liaison (27 ; 227) entre le composant de mesure (24 ; 224) et le composant d'alimentation électrique (21 ; 221).
  3. Agencement selon l'une des revendications précédentes, caractérisé en ce que la pompe à vide (10 ; 210) comprend au moins deux étages de pompe, et le moteur (214) entraîne simultanément au moins deux des étages de pompe.
  4. Agencement selon l'une des revendications précédentes, caractérisé en ce que le moteur est conçu sous la forme d'un moteur à courant continu sans balais.
  5. Agencement selon l'une des revendications précédentes, caractérisé en ce qu'au moins un étage de pompe (12 ; 212) est conçu de manière à assurer une compression vis-à-vis de l'atmosphère en fonctionnant à sec.
  6. Agencement selon l'une des revendications précédentes, caractérisé en ce qu'au moins un étage de pompe (12) comprend un piston en va-et-vient (246 ; 266) en déplacement dans un manchon de guidage (245 ; 265), et un joint (247 ; 267) entre le manchon de guidage et le piston en va-et-vient.
  7. Procédé pour le fonctionnement d'une pompe à vide (10 ; 210) comprenant un moteur (14 ; 214), dans laquelle une faible vitesse de rotation suffit pour une faible quantité de gaz à comprimer, caractérisé en ce qu'une faible quantité de gaz est déterminée par l'absorption de puissance du moteur, et en ce que l'absorption de puissance du moteur est mesurée et, lors d'une chute de l'absorption de puissance, la vitesse de rotation du moteur est abaissée.
  8. Procédé selon la revendication 7, caractérisé en ce que l'abaissement de la vitesse de rotation a lieu lors du passage au-dessous d'une valeur seuil d'absorption de puissance.
EP09014532.7A 2008-12-12 2009-11-20 Agencement doté d'une pompe à vide et procédé de fonctionnement d'une pompe à vide Revoked EP2196669B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008062054.8A DE102008062054B4 (de) 2008-12-12 2008-12-12 Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2196669A2 EP2196669A2 (fr) 2010-06-16
EP2196669A3 EP2196669A3 (fr) 2012-07-11
EP2196669B1 true EP2196669B1 (fr) 2014-07-23

Family

ID=41629114

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09014532.7A Revoked EP2196669B1 (fr) 2008-12-12 2009-11-20 Agencement doté d'une pompe à vide et procédé de fonctionnement d'une pompe à vide

Country Status (3)

Country Link
EP (1) EP2196669B1 (fr)
JP (1) JP2010138901A (fr)
DE (1) DE102008062054B4 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008062054B4 (de) * 2008-12-12 2019-05-29 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe
BR112013012171B1 (pt) * 2010-11-17 2022-03-29 KSB SE & Co. KGaA Método para controle de velocidade rotacional variável de uma unidade de bomba de deslocamento, dispositivo de controle e arranjo de bomba de deslocamento
DE102011010218B4 (de) 2011-02-03 2019-09-12 Robert Bosch Gmbh Verfahren zum Regeln des Drucks eines mittels einer drehzahlgeregelten Pumpe geförderten Fluids

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5713286A (en) * 1980-06-30 1982-01-23 Toshiba Corp Operating method of vacuum pump
DE19630384A1 (de) * 1996-07-29 1998-04-23 Becker Kg Gebr Verfahren zur Steuerung oder Regelung eines Aggregats und Frequenzumwandler
JP2000110735A (ja) * 1998-10-01 2000-04-18 Internatl Business Mach Corp <Ibm> ポンプ保護装置、ポンプ保護方法及びポンプ装置
JP4365059B2 (ja) * 2001-10-31 2009-11-18 株式会社アルバック 真空排気装置の運転方法
JP2003155981A (ja) 2001-11-21 2003-05-30 Toyota Industries Corp 真空ポンプにおける運転制御方法及び運転制御装置
JP4111728B2 (ja) 2002-03-20 2008-07-02 株式会社リコー 真空ポンプの制御装置及び真空装置
JP2004197644A (ja) 2002-12-18 2004-07-15 Toyota Industries Corp 真空ポンプの制御装置
JP2005083316A (ja) * 2003-09-10 2005-03-31 Boc Edwards Kk モータ制御システム及び該モータ制御システムを搭載した真空ポンプ
DE102006012532A1 (de) 2006-03-18 2007-09-20 Pfeiffer Vacuum Gmbh Dichtungsanordnung für eine Hubkolbenvakuumpumpe
DE102006032765A1 (de) * 2006-07-14 2008-01-17 Leybold Vacuum Gmbh Vakuumpumpe
DE102006050943B4 (de) * 2006-10-28 2020-04-16 Pfeiffer Vacuum Gmbh Vakuumpumpe und Verfahren zum Betrieb derselben
DE102008062054B4 (de) * 2008-12-12 2019-05-29 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe

Also Published As

Publication number Publication date
DE102008062054A1 (de) 2010-06-17
DE102008062054B4 (de) 2019-05-29
JP2010138901A (ja) 2010-06-24
EP2196669A3 (fr) 2012-07-11
EP2196669A2 (fr) 2010-06-16

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