EP2201420A2 - System zur strukturierten beleuchtung einer probe - Google Patents

System zur strukturierten beleuchtung einer probe

Info

Publication number
EP2201420A2
EP2201420A2 EP08870802A EP08870802A EP2201420A2 EP 2201420 A2 EP2201420 A2 EP 2201420A2 EP 08870802 A EP08870802 A EP 08870802A EP 08870802 A EP08870802 A EP 08870802A EP 2201420 A2 EP2201420 A2 EP 2201420A2
Authority
EP
European Patent Office
Prior art keywords
beams
coherent
sample
objective
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08870802A
Other languages
English (en)
French (fr)
Inventor
Vincent Liorette
Benoit Dubertret
Pedro Felipe Gardeazalbal Rodriguez
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique
Original Assignee
Centre National de la Recherche Scientifique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique filed Critical Centre National de la Recherche Scientifique
Publication of EP2201420A2 publication Critical patent/EP2201420A2/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0072—Optical details of the image generation details concerning resolution or correction, including general design of CSOM objectives
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens

Definitions

  • the invention relates to a structured illumination system for three-dimensional microscopy of a sample.
  • the illumination of the sample is structured by a movable grid.
  • Such structuring allows an improvement in the axial resolution of the system compared to a so-called conventional microscope but it does not improve the lateral resolution.
  • the invention more particularly relates to a structured illumination system for three-dimensional microscopy of a sample comprising:
  • beam generation means arranged to generate coherent light beams
  • an objective having a rear focal plane, the objective being arranged so that the sample is likely to be positioned in the objective focusing plane;
  • the illumination system 1 comprises a light source 2, a diffraction grating 3 forming the beam generation means, the diffraction grating 3 being coupled to a filter 7 so as to generate only two coherent diffracted light beams 4a and 4b from the light source 2, a lens 5 arranged to focus the coherent beams 4a and 4b in the rear focal plane PFA of a microscope objective 6, a sample 18 being positioned in the focus plane PMP of the objective 6.
  • the coherent beams 4a and 4b are diffracted beams having symmetrical orders p and
  • An object of the invention is to improve the axial resolution in such a structured illumination system for three-dimensional microscopy of a sample.
  • this document uses a simple grid to generate the diffracted beams, and it does not describe how axial displacement of the sample is performed for axial measurements.
  • An object of the invention is to provide a structured illumination system for three-dimensional microscopy of a sample to improve the axial resolution compared to a conventional illumination system.
  • the original approach underlying the invention is to simulate the axial displacement of the sample without mechanical displacement.
  • Another object of the invention is to provide a structured illumination system for the three-dimensional microscopy of a sample for improving both the axial resolution and the lateral resolution with respect to a conventional illumination system. That is to say to achieve axial resolutions of the order of 0.3 micrometers, and lateral resolutions of the order of 0.1 microns.
  • Another object of the invention is to achieve such performance while maintaining an acquisition rate compatible with the study of dynamic phenomena, that is to say greater than or equal to 1 Hertz.
  • the beam generating means comprises a spatial light modulator programmed to diffracting a light signal so as to generate at least two coherent diffracted beams not symmetrical with respect to the optical axis of the objective, the spatial light modulator comprising a calculator arranged to apply a constant phase term to each of said at least two coherent beams not symmetrical with respect to the optical axis.
  • the sample is illuminated by coherent but non-coherent beams. symmetrical in the axial direction. Therefore, it is possible, by a modification of the distance between the objective and the sample or an axial displacement of the illumination in the sample, to use this non-symmetry, in particular from the difference in illumination between two axial positions of the sample. This thus makes it possible to improve the axial resolution with respect to the Gustaffson et al. mentioned above, and in particular to obtain an axial resolution of less than 0.3 micrometers. According to the invention, this axial displacement is simulated by means of the spatial light modulator by applying a phase term to each of the coherent beams. Thus, the measurement does not require any mechanical displacement and the mechanical losses are therefore reduced.
  • the two beams that are not symmetrical with respect to the optical axis of the objective are in particular diffracted diffraction beams of n and p diffraction order with n + p different from 0.
  • the lateral resolution maintained around 0.1 micrometers, as in the Gustaffson et al. above.
  • a three-dimensional structuring of the illumination has thus been realized, which makes it possible to carry out an axial coding of the illumination in addition to the lateral coding known per se.
  • the beam generating means may comprise a light source capable of generating a light signal.
  • the beam generating means can be arranged to generate three coherent beams, at least two coherent beams among the three coherent beams being unsymmetrical with respect to the optical axis of the objective.
  • the generation of these three coherent beams makes it possible to obtain a structuring of the field symmetrical with respect to the optical axis of the objective and a gain of a factor of two in axial resolution with respect to a lighting with only two coherent beams not symmetrical.
  • the beam generation means are arranged so that the three coherent beams generated by diffraction correspond to two diffracted beams of symmetrical diffraction orders and to a zero diffraction order beam.
  • the symmetric order beams N and N form, with the zero diffraction order beam, two pairs of beams that are not symmetrical with respect to the optical axis that can be used in the context of the invention.
  • the two diffracted beams of diffraction order symmetric diffraction orders can be chosen such that the intensity of the zero diffraction order beam is equal to four times the intensity of one of the order diffracted beams.
  • symmetrical diffraction Indeed, it is demonstrated that the improvement of the axial resolution is the best in this case.
  • the beams Io and IN are non-symmetrical with respect to the optical axis of the lens. Similarly, the beams I 0 and L N are unsymmetrical with respect to the optical axis of the objective.
  • the light signal received from the source 9 it is possible to position a not shown afocal device between the source 9 and the spatial light modulator 10 so as to widen the signal bright, for example five to ten times.
  • a sample 14 for example in the form of a fluorescent point object, is positioned in the PMP focusing plane of the objective 12 of the microscope 13 at which the three diffracted beams IN, IN and Io interfere.
  • the system 8 described above allows a three-dimensional structuring of the illumination to the sample 14.
  • the use of three diffraction orders reveals a Talbot effect in the field transmitted by the objective.
  • the spatial light modulator 10 is programmed so as to laterally shift the interference pattern generated by the three diffracted beams in the objective focusing plane.
  • This programming makes it possible to simulate a lateral displacement of a diffraction grating generating the three diffracted beams without the modulator physically moving.
  • the position of the fluorescent point object is measured in a manner known per se by combining several images or their Fourier transform for different real or simulated positions of the diffraction grating, for example by difference between the intensity the fluorescence received for two real or simulated positions of the diffraction grating.
  • the optical distance between the sample 14 and the objective 12 is modified.
  • a piezoelectric plate 15 positioned at the level of the sample. 14 or axially moving the objective 12.
  • the path of the light beams is illustrated by the illumination system according to the invention.
  • the light source 9 generates a light signal in the form of a plane wave 22.
  • This plane wave is diffracted by means of beam generation 21 for generating only three diffraction orders lo, IN and IN.
  • These beam generation means correspond to the spatial light modulator 10 described with reference to FIG. 2.
  • the diffracted beams I 0 , IN and LN are still plane waves.
  • the focusing means 19, for example corresponding to a lens or achromatic doublet 19 described above converge these beams towards the back focal plane PFA of the objective 12 of microscope 13. In this way, the beams lo, IN and N L interfere in the PMP focusing plane in the form of plane waves and measurements relating to a sample 14 positioned in the PMP focusing plane can be realized.
  • Beam generating means for generating three coherent beams that interfere at the objective focus plane have been described above.
  • the effect of improving the axial resolution is then optimal for beams IN, IN and lo, the orders N and -N being chosen as before so that
  • the system 8 described above can also easily fit on an existing microscope 13, in parallel with the existing illumination system.
  • the microscope 13 may be an existing microscope with an existing objective 12, and the illumination system is adapted so that the beams IN, IN and Io are focused in the PFA rear focal plane of the objective 12.
  • a new microscope having a improved resolution allowing full field observation.

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)
EP08870802A 2007-10-18 2008-10-17 System zur strukturierten beleuchtung einer probe Withdrawn EP2201420A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0707299A FR2922658B1 (fr) 2007-10-18 2007-10-18 Systeme d'illuminations structuree d'un echantillon
PCT/FR2008/001469 WO2009090341A2 (fr) 2007-10-18 2008-10-17 Systeme d ' illuminations structuree d ' un echantillon en microscopie tridimensionelle

Publications (1)

Publication Number Publication Date
EP2201420A2 true EP2201420A2 (de) 2010-06-30

Family

ID=39432831

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08870802A Withdrawn EP2201420A2 (de) 2007-10-18 2008-10-17 System zur strukturierten beleuchtung einer probe

Country Status (5)

Country Link
US (1) US8289622B2 (de)
EP (1) EP2201420A2 (de)
JP (1) JP2011501214A (de)
FR (1) FR2922658B1 (de)
WO (1) WO2009090341A2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2922658B1 (fr) * 2007-10-18 2011-02-04 Centre Nat Rech Scient Systeme d'illuminations structuree d'un echantillon
JP5900515B2 (ja) * 2012-01-18 2016-04-06 株式会社ニコン 構造化照明装置、構造化照明顕微鏡装置、構造化照明方法
JP2014063151A (ja) * 2012-08-29 2014-04-10 Canon Inc 顕微鏡用照明光学系およびこれを用いた顕微鏡
DE102012017922B4 (de) * 2012-09-11 2024-03-14 Carl Zeiss Microscopy Gmbh Optikanordnung und Lichtmikroskop
CN106680271A (zh) * 2015-11-05 2017-05-17 南京理工大学 基于空间光调制器的裸眼立体显微成像装置及方法
US11287627B2 (en) 2017-06-30 2022-03-29 Chrysanthe Preza Multi-focal light-sheet structured illumination fluorescence microscopy system
US20230384574A1 (en) * 2020-10-28 2023-11-30 Georgia Tech Research Corporation Cell imaging systems and methods

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4348574B2 (ja) * 1998-04-30 2009-10-21 株式会社ニコン 暗視野照明装置および暗視野照明方法
DE19827139C2 (de) * 1998-06-18 2002-01-31 Zeiss Carl Jena Gmbh Mikroskop mit einem über eine Lichtleitfaser eingekoppelten Kurzpulslaser
US7274446B2 (en) * 2001-04-07 2007-09-25 Carl Zeiss Jena Gmbh Method and arrangement for the deep resolved optical recording of a sample
JP4844862B2 (ja) * 2001-09-14 2011-12-28 株式会社ニコン 格子照明顕微鏡
ATE539345T1 (de) * 2001-10-09 2012-01-15 Univ Ruprecht Karls Heidelberg Mikroskopisches weitfeldlichtverfahren
US6888148B2 (en) * 2001-12-10 2005-05-03 Carl Zeiss Jena Gmbh Arrangement for the optical capture of excited and /or back scattered light beam in a sample
US7312432B2 (en) * 2002-07-08 2007-12-25 Dmetrix, Inc. Single axis illumination for multi-axis imaging system
DE10254139A1 (de) * 2002-11-15 2004-05-27 Carl Zeiss Jena Gmbh Verfahren und Anordnung zur tiefenaufgelösten optischen Erfassung einer Probe
DE10332073A1 (de) * 2003-07-11 2005-02-10 Carl Zeiss Jena Gmbh Anordnung zur optischen Erfassung von in einer Probe angeregter und / oder rückgestreuter Lichtstrahlung mit Doppelobjektivanordnung
JP4512180B2 (ja) * 2004-01-09 2010-07-28 独立行政法人理化学研究所 干渉装置
US7046342B2 (en) * 2004-01-29 2006-05-16 International Business Machines Corporation Apparatus for characterization of photoresist resolution, and method of use
DE102004034962A1 (de) * 2004-07-16 2006-02-16 Carl Zeiss Jena Gmbh Mikroskop mit erhöhter Auflösung
EP1865355B1 (de) * 2005-03-30 2013-03-06 Nikon Corporation Bilderzeugungsverfahren und mikroskopeinrichtung
US7485875B2 (en) * 2005-07-22 2009-02-03 Carl Zeiss Microimaging Gmbh Resolution-enhanced luminescence microscopy
US20080158668A1 (en) * 2005-10-07 2008-07-03 Nikon Corporation Microscope and Image Generation Method
US8081378B2 (en) * 2005-10-13 2011-12-20 Nikon Corporation Microscope
JP2007147388A (ja) * 2005-11-25 2007-06-14 Toshiba Corp 表面測定装置
JP2007199572A (ja) * 2006-01-30 2007-08-09 Nikon Corp 顕微鏡装置
EP1816493A1 (de) * 2006-02-07 2007-08-08 ETH Zürich Abstimmbares Diffraktionsgitter
US7619732B2 (en) * 2006-03-01 2009-11-17 Leica Microsystems Cms Gmbh Method and microscope for high spatial resolution examination of samples
WO2008030681A2 (en) * 2006-09-08 2008-03-13 Gsi Group Corporation Interferometric position encoder employing spatial filtering of diffraction orders
WO2008072597A1 (ja) * 2006-12-12 2008-06-19 Nikon Corporation 顕微鏡装置及び画像処理方法
US8405059B2 (en) * 2007-02-02 2013-03-26 King's College London Method and apparatus for improving the resolution and/or sectioning ability of an imaging system
US8279329B2 (en) * 2007-04-10 2012-10-02 University Of Rochester Structured illumination for imaging of stationary and non-stationary, fluorescent and non-fluorescent, objects
US8072611B2 (en) * 2007-10-12 2011-12-06 Zygo Corporation Interferometric analysis of under-resolved features
JP2009098215A (ja) * 2007-10-12 2009-05-07 Nikon Corp 顕微鏡装置、及び顕微鏡装置における位相変化量の算出方法。
FR2922658B1 (fr) * 2007-10-18 2011-02-04 Centre Nat Rech Scient Systeme d'illuminations structuree d'un echantillon
DE102007063274B8 (de) * 2007-12-20 2022-12-15 Albert-Ludwigs-Universität Freiburg Mikroskop
US8115992B2 (en) * 2007-12-31 2012-02-14 Stc.Unm Structural illumination and evanescent coupling for the extension of imaging interferometric microscopy
US20090219607A1 (en) * 2008-01-17 2009-09-03 Baylor College Of Medicine Method and apparatus for enhanced resolution microscopy of living biological nanostructures
US8019136B2 (en) * 2008-12-03 2011-09-13 Academia Sinica Optical sectioning microscopy
US8107084B2 (en) * 2009-01-30 2012-01-31 Zygo Corporation Interference microscope with scan motion detection using fringe motion in monitor patterns
GB0907965D0 (en) * 2009-05-08 2009-06-24 King S College London Imaging system
US8174761B2 (en) * 2009-06-10 2012-05-08 Universitat Heidelberg Total internal reflection interferometer with laterally structured illumination
JP2013513823A (ja) * 2009-12-09 2013-04-22 アプライド プレシジョン インコーポレイテッド 高速の3次元構造化照明による顕微鏡撮像の方法およびシステム
JP5452713B2 (ja) * 2010-04-26 2014-03-26 株式会社ニコン 構造化照明光学系および構造化照明顕微鏡装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2009090341A3 *

Also Published As

Publication number Publication date
FR2922658B1 (fr) 2011-02-04
JP2011501214A (ja) 2011-01-06
US8289622B2 (en) 2012-10-16
WO2009090341A2 (fr) 2009-07-23
WO2009090341A3 (fr) 2009-09-11
FR2922658A1 (fr) 2009-04-24
US20110116163A1 (en) 2011-05-19

Similar Documents

Publication Publication Date Title
WO2009090341A2 (fr) Systeme d ' illuminations structuree d ' un echantillon en microscopie tridimensionelle
WO1998013715A1 (fr) Microscope generant une representation tridimensionnelle d'un objet
EP3069185B1 (de) Dreidimensionale fokussierungsvorrichtung und verfahren für ein mikroskop
EP3039475B1 (de) Mikroskopiesystem und -verfahren mt kantenbeleuchtung
EP3918292B1 (de) Vorrichtung zur wellenfrontanalyse und mikroskopische abbildungssysteme mit solchen analysevorrichtungen
FR2997518A1 (fr) Systeme d'imagerie holographique auto-reference
CN103823353B (zh) 基于微球体的亚波长超分辨率数字全息成像系统
EP3397944B1 (de) Vorrichtung und verfahren zur bimodalen beobachtung eines objekts
EP3602201B1 (de) Vorrichtungen und verfahren zur optischen bildgebung mittels digitaler holographie ausserhalb der achse
EP3199941A1 (de) Beobachtungsverfahren einer probe mittels bildgebungssystem ohne linse
CA2963297A1 (fr) Optical telemetry device
CN116300364A (zh) 一种基于部分相干光照明的定量相衬显微成像装置
EP3371574B1 (de) Vorrichtung und verfahren zur beobachtung eines objekts mittels linsenfreier abbildung
JP6154676B2 (ja) 空間周波数再現装置
CA2617983A1 (fr) Imagerie tomographique par microscope interferometrique a immersion
EP3903098B1 (de) Verfahren zur charakterisierung einer probe durch phasenbildgebung
FR3081552A1 (fr) Dispositif et procede d'observation d'un echantillon fluorescent par imagerie defocalisee
Liu et al. Enhancing Coherent Superoscillatory Microscopy through Complex Deconvolution
FR3114661A1 (fr) Dispositif optique de déviation d’un faisceau lumineux et spectromètre de diffusion inélastique comprenant un tel dispositif
Zhang et al. Fresnel incoherent correlation holographic localization microscopy with enhanced localization accuracy by employing autofocus algorithm
WO2010001047A1 (fr) Dispositif de caracterisation optique d'un objet de tres petites dimensions
CA3056969C (fr) Systeme de projection pour la mesure de vibrations
Jung et al. Dark-field synthetic-aperture digital holographic microscopy with an enhanced numerical aperture
HU231741B1 (hu) Eljárás terület szkennelésére több-foton lézer pásztázó mikroszkóppal
Tao et al. Interferometric focusing of guide-stars for direct wavefront sensing

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20100415

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA MK RS

DAX Request for extension of the european patent (deleted)
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20150501