Classifications

• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
  • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
  • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
  • F04B45/043—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms two or more plate-like pumping flexible members in parallel
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
  • F04B25/00—Multi-stage pumps
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
  • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
  • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
  • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
  • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
  • F04B41/06—Combinations of two or more pumps
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
  • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
  • F04B49/007—Installations or systems with two or more pumps or pump cylinders, wherein the flow-path through the stages can be changed, e.g. from series to parallel
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
  • Y10T137/00—Fluid handling
  • Y10T137/8593—Systems
  • Y10T137/85978—With pump
  • Y10T137/86131—Plural
  • Y10T137/86139—Serial

Definitions

• the invention relates to a multi-stage diaphragm suction pump having at least two pump chambers, each having a, at least one inlet valve having fluid inlet and a, at least one outlet valve having fluid outlet, and with a, the fluid inlets of the pumping chambers connecting suction line, wherein each subsequent pumping spaces each at least a connecting line are connected to each other such that the diaphragm pump on reaching / exceeding a differential pressure in the suction line of a parallel operating operation of their pumping rooms in at least also serially operating operation of these pumping rooms passes, and wherein in the inflow and outflow of the at least one connecting line at least a, the subsequent pumping stage opening check valve is interposed.
• a large flow rate is desired, on the other hand, a good final vacuum.
• the large flow rate is achieved by parallel connection of the heads, the good final vacuum through multi-stage operation, ie by series connection.
• a low final pressure is required, which can only be achieved with a multi-stage arrangement.
• a micro-vacuum pump which has two, each limited by an oscillating pumping diaphragm pump chambers.
• Each of these pump chambers has one, an inlet valve having fluid inlet and a, an outlet Lassventil having fluid outlet, wherein a suction line connecting the fluid inlets of the pumping chambers and a, the fluid outlets connecting pressure line is provided.
• the pump chambers are connected to each other via a connecting line such that the previously known micro-vacuum pump on reaching and exceeding a specified differential pressure in the suction line from a parallel operating operation of their pumping rooms in a serially operating operation of these pumping ü passes.
• a check valve which opens for the subsequent pumping stage is interposed in each case.
• the check valves interposed in the connecting line have a size comparable to the inlet and outlet valves of the two pumping chambers. Accordingly, the line section of the connecting line provided between one of the check valves, on the one hand, and the adjacent pump chamber, on the other hand, is dimensioned comparably large.
• a throttle is interposed in the connecting line, which loses its throttling effect only when a corresponding pressure difference and a reduced pumping capacity are reached.
• the previously known micro-vacuum pump adopts a parallel configuration of its pump chambers, because the throttle provided in the connecting line causes the system to initially be able to work more easily in parallel due to the still missing obstructions in the air circulation.
• the fluid can be much easier through the in the connecting line flow restrictor so that it is also configured in a serial operation of their pumping rooms, in order to achieve the highest possible ultimate vacuum.
• the achievement of this object is, in particular, that the check valves provided in the inflow and outflow regions of the connecting line (s) are made smaller in comparison to the inlet and outlet valves of the pump chambers and that these check valves each have a line section open to the adjacent pump chamber Connecting line is associated with a smaller compared to the inlet and outlet valves clear line cross-section.
• the membrane pump according to the invention has in the at least one connecting line connecting its pumping spaces to one another.
• inlet and outlet check valves which are dimensioned much smaller compared to the inlet and outlet valves of these pump chambers. Since the movable valve body of these check valves thus also have lower masses and can react faster, an approximation to the optimal switching point between parallel and serial operation is substantially favored. Since the connecting line is effective only in the region of the optimal switching point, and since the connecting lines in this pumping phase have to handle only comparatively low flow rates, the clear cross section of the connecting lines can be made relatively small compared to the suction and the pressure line.
• the membrane pump according to the invention therefore allows the generation of the lowest possible final vacuum in the shortest possible time with comparatively simple technical means.
• an embodiment is preferred in which the non-return valves each associated with the adjacent pumping space line section of the connecting channel is assigned, which is dimensioned in comparison to the inlet and outlet valves such that these line sections form a smaller contrast harmful space.
• non-return valves are dimensioned and / or designed such that the inlet and outlet valves operate in the starting phase of a pumping operation and the non-return valves are activated in a subsequent phase of the pumping operation, preferably approximately at the optimum switching point.
• the suction line and / or the pressure line compared to at least one connecting line has a larger clear line cross-section.
• the exhaust valves are optionally formed open to the atmosphere with the interposition of at least one noise damper. In such an embodiment, a pressure line connecting the exhaust valves is avoided.
• the check valves each have a valve disk as valve or locking body, and if the changeover to the serial mode triggering pressure range of the differential pressure by setting the disc diameter and / or tuning the mass of the valve discs can be preselected or fixed.
• a preferred embodiment according to the invention provides that the membranes associated with subsequent pump stages are clocked by 180 ° relative to one another with regard to their suction or ejection movements.
• the harmful space between the pumping stages can be additionally reduced if two check valves are interposed in each connecting line, one of which is arranged on the inflow side and the other outflow side.
• the membrane pump according to the invention is not limited to a two-stage design, but may also have more than two pumping stages and in particular be designed in three stages or otherwise multi-stage. It is advantageous if at least one inlet, one outlet and one check valve opens in the first and last pumping stages and / or when at least one inlet, one outlet and two non-return valves open in the remaining or middle pumping stages.
• FIG. 1 shows the schematically illustrated configuration of a multi-stage membrane suction pump having a plurality of pumping chambers, which can be converted from an initially parallel operating mode practically automatically into a serial operating mode
• FIG. 2 shows a membrane suction pump likewise shown in a schematic representation, but here it has four stages
• FIG. 3 shows the delivery rate or the pumping speed of one of the multi-stage membrane suction pumps shown in FIGS. 1 and 2 in comparison to a single-headed diaphragm pump, depending on the final vacuum reached
• FIGS. 1 or 2 shows the first pumping stage of the multi-head diaphragm suction pumps shown in FIGS. 1 or 2 in a longitudinal section in the region of a pressure valve provided in the fluid outlet and a check valve arranged in a connecting line.
• FIG. 1 shows a multi-stage membrane suction pump 10.
• the membrane suction pump 10 has at least two, in particular three pump chambers Hi, H 2 and H 3 .
• the pump chambers Hi, H 2 and H 3 each have one, at least one inlet valve SV1, SV2 or SV3 having fluid inlet and one, at least one output valve DV1, DV2 or DV3 with fluid outlet.
• the membrane suction pump 10 has a suction line A connecting the fluid inlets of the pump chambers Hi, H 2 and H 3 and a pressure line B connecting the fluid outlets.
• successive pump chambers Hi, H 2 and H 3 are each connected via at least one connecting line C1 or C2 connected to each other such that the diaphragm suction pump 1 upon reaching and in particular when a differential pressure in the suction line A from a parallel operation of their pump chambers Hi, H 2 and H 3 in a serial operation of these pump chambers Hi, H 2 and H 3 passes.
• FIG. 1 it is indicated that the connecting lines C1 and C2, which each connect to one another following each other, have a smaller line cross-section compared to the suction line A and the pressure line B. Moreover, it becomes clear from FIG. 1 that at least one non-return valve opening to the subsequent pumping stage Hi, H 2 and H 3 is interposed in the at least one connecting line C 1, C 2 .
• two check valves RV1, RV2 and RV3, RV4 are interposed in each connecting line C1 and C2, one of which is arranged on the inflow side and the other outflow side.
• a harmful space is possibly limited to the remaining to the check valve portion of the connecting line C1 or C2. Since the at least one check valve RV1, RV2 or RV3, RV4 makes a throttle in the connecting line C1 or C2 dispensable, is an undesirable performance-reducing condensate formation during conveying damp vapors counteracted.
• connecting lines C1 and C2 take effect only in the region of the final vacuum and since the connecting lines C1 and C2 have to handle only comparatively low flow rates in this pumping phase, the clear cross section of these connecting lines C1 and C2 compared to the suction line A and the pressure line B comparatively be carried out small.
• This also makes it possible to design the check valves RV1, RV2 or RV3, RV4 provided in the connecting line C1 or C2 with a very small flow cross-section and correspondingly small diameter compared to the suction valves SV1, SV2, SV3 and pressure valves DV1, DV2, DV3.
• the at least one check valve due to the low mass of its movable valve or locking body when closing the suction and pressure valves react quickly and thereby prevents the diaphragm pump 1 promotes insufficient or insufficient in a transition region of the pressure differences.
• the diaphragm pump 10 therefore allows with relatively simple technical means to generate the highest possible final vacuum in the shortest possible time.
• the diaphragm pump 10 has in the, the pump chambers Hi, H 2 and H 3 interconnecting connecting lines C1 and C2 both inflow and outflow check valves RV1, RV2 and RV3, RV4, which compared to the intake and exhaust valves SV1, SV2, SV3 and DV1, DV2, DV3 of these pumping rooms are dimensioned much smaller. Since the movable valve body of these check valves RV1, RV2, RV3 and RV4 thus also have lower moving masses and can respond accordingly faster, an approximation to the optimal switching point between parallel and serial operation is much favored.
• the check valves are each assigned a line section leading to the adjacent pump space Hi, H 2 or H 3 , which in comparison with the inlet and outlet lassventilen has a much smaller clear line cross-section.
• the harmful space remaining between the pump chambers Hi, H 2 and H 3 and one of the check valves RV1, RV2, RV3 and RV4 can be kept so low that the generation of a comparatively low final vacuum is also possible.
• the heads suck together via the line A and push out together via the line B.
• the valves DV1, DV2, SV2 and SV3 work as check valves and close the flow.
• the heads are thereby connected in series.
• the gas flow is now via: A-SV1 -RV1 -C1 -RV2-RV3-C2-RV4-DV3-B.
• FIG. 2 shows a four-stage membrane suction pump with four pump chambers Hi, H 2 , H 3 and H 4 .
• the pump chambers Hi, H 2 , H 3 , H 4 of the diaphragm suction pump 10 shown in Figure 2 each have one, at least one inlet valve SV1, SV2, SV3 and SV4 having fluid inlet and one, at least one outlet valve DV1, DV2, DV3 or DV4 having fluid outlet.
• the fluid outlets of the pump heads are H-
• the successive pumping spaces Hi, H 2 , H 3 , H 4 are each via a connecting line C1, C2, C3 connected in such a way that the membrane suction pump 10 in Figure 2 on reaching and in particular when a differential pressure in the suction line from a parallel operating their pump chambers Hi, H 2 , H 3 , H 4 in a serial operation of these pump chambers Hi, H 2 , H 3 , H 4 passes.
• 4 interconnecting connecting lines C1, C2, C3 are in the, successive pump chambers Hi, H 2, H 3, H, both on the inlet side and outlet side, respectively, a check valve RV1, RV2, RV3, RV4, RV5, interposed RV6.
• FIG. 2 shows by dashed lines that the membrane suction pump 10 can also have more than four pump chambers Hi, H 2 , H 3 , H 4 , H 5 .
• FIG. 3 shows the delivery rate or the pumping speed of the membrane suction pump 10 shown in FIGS. 1 and 2 as a function of the vacuum achieved. While the solid line shows the pumping speed of a single-headed pump, which is limited in the achievable ultimate vacuum, it is indicated by a dot-dash line that parallel-switched pump chambers do not differ in the achievable ultimate vacuum, but rather in the delivery rate. If the pump chambers of a multi-head diaphragm suction pump are connected in series, the pumping speed is comparable to a single-headed diaphragm pump, but the pump chambers connected in series can reach a much lower ultimate vacuum (see dashed line in FIG.
• the diaphragm pumps shown in Figures 1 and 2 now follow in the start phase of a pumping process the curve parallel diaphragm heads (dash-dotted line) in the optimal switching point OS, driven by interpretation of the valve sizes and valve masses of the check valves can go into the curve of a series-connected membrane suction pump.
• the membrane suction pumps 10 shown in FIGS. 1 and 2 are characterized in that they achieve the lowest possible ultimate vacuum in the shortest possible time.
• FIG. 4 shows the first pumping stage Hi of a multi-head diaphragm suction pump comparable to FIG. 1 or 2. While the fluid inlet located outside the cutting plane is not shown, the outlet valve DV1 interposed in the fluid outlet and the check valve RV1 provided in the connection line C1 are clearly visible. It is clear from a comparison of the valves DV1 and RV1 that the check valve RV1 provided here in the inflow region of the connecting line C1 is smaller in comparison to the inlet and outlet valves of the pump chambers, and that this check valve RV1 has a line section L open towards the adjacent pump chamber Hi a is assigned to the connection line C1 with a smaller in comparison to the inlet and outlet valves clear line cross-section.
• the connecting line C1 becomes effective only in the region of the optimum switching point, and since the connecting line C1 only has to handle comparatively low flow rates in this pumping phase, the clear cross section of this connecting line C1 can be made comparatively small in comparison with the suction line and the pressure line.
• This also makes it possible, inter alia, to carry out the check valve RV1 provided in the connection line C1 with a very small flow cross-section and correspondingly small diameter compared to the suction and pressure valves. But this also allows the check valve RV1 react quickly due to the low mass of its disk-shaped valve or locking body when closing the suction and pressure valves.
• the line section L a compared to the inlet and outlet valves has a much smaller clear line cross-section, the remaining between the check valve RV1 on the one hand and the adjacent pumping room Hi harmful space can be kept so low that the generation of a very low final vacuum is possible. While the line section L a leading to the adjacent pumping space Hi has a comparatively small clear line cross section, the line section L b provided between the check valves RV 1 and RV 2 may possibly also have a larger line cross section.
• the line sections L a and L b have comparable clear line cross sections.

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• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• General Engineering & Computer Science (AREA)
• Reciprocating Pumps (AREA)
• Static Random-Access Memory (AREA)
• External Artificial Organs (AREA)

Applications Claiming Priority (2)

Publications (2)

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• 2007
  • 2007-12-01 DE DE200710057945 patent/DE102007057945B4/de active Active
  • 2007-12-01 DE DE202007018538U patent/DE202007018538U1/de not_active Expired - Lifetime
• 2008
  • 2008-11-11 ES ES08853296T patent/ES2364231T3/es active Active
  • 2008-11-11 US US12/744,576 patent/US8628304B2/en active Active
  • 2008-11-11 WO PCT/EP2008/009493 patent/WO2009068180A1/fr not_active Ceased
  • 2008-11-11 DE DE200850003230 patent/DE502008003230D1/de active Active
  • 2008-11-11 AT AT08853296T patent/ATE505648T1/de active
  • 2008-11-11 JP JP2010535264A patent/JP5312470B2/ja active Active
  • 2008-11-11 CN CN2008801184895A patent/CN101883924B/zh active Active
  • 2008-11-11 EP EP20080853296 patent/EP2227636B1/fr active Active

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