EP2246573A2 - Système de sécurité pour pompe à vide poussé - Google Patents

Système de sécurité pour pompe à vide poussé Download PDF

Info

Publication number
EP2246573A2
EP2246573A2 EP10161376A EP10161376A EP2246573A2 EP 2246573 A2 EP2246573 A2 EP 2246573A2 EP 10161376 A EP10161376 A EP 10161376A EP 10161376 A EP10161376 A EP 10161376A EP 2246573 A2 EP2246573 A2 EP 2246573A2
Authority
EP
European Patent Office
Prior art keywords
pipe section
flange
sectional area
fenders
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10161376A
Other languages
German (de)
English (en)
Other versions
EP2246573B1 (fr
EP2246573A3 (fr
Inventor
Marcel Kohler
Herbert Vogt
Urs Frick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HSR AG
Original Assignee
HSR AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HSR AG filed Critical HSR AG
Publication of EP2246573A2 publication Critical patent/EP2246573A2/fr
Publication of EP2246573A3 publication Critical patent/EP2246573A3/fr
Application granted granted Critical
Publication of EP2246573B1 publication Critical patent/EP2246573B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps

Definitions

  • the present invention relates to a protective device for high-vacuum pumps, in particular for turbomolecular pumps according to the preamble of claim 1, as well as a vacuum system with such a protective device.
  • Turbomolecular pumps have been used for several decades to create a high vacuum on all types of process equipment, especially those of the semiconductor industry. Turbomolecular pumps have the advantage that they have a high pumping speed, little susceptibility to contamination and are generally very durable. For the extraction of corrosive gases special turbomolecular pumps are used, whose bearings can be purged with an inert gas.
  • Selenium compounds are also used in the manufacture of modern photovoltaic cells. These compounds have the unpleasant property that they can deposit on cool surfaces. If turbomolecular pumps are used, the compounds are deposited on the rotors and stators of the turbomolecular pumps. This can lead to imbalances in a relatively short time, which can lead to the destruction of the turbomolecular pump.
  • sheets are often used in practice, which are arranged in the passage in front of the turbomolecular pump. By means of the plates harmful and also condensable gases and compounds can be deposited. The disadvantage, however, is that the sheets restrict the conductance, so that the suction power of the turbomolecular pump drops dramatically.
  • One goal is to propose a device that is efficient.
  • Another goal is to propose a device that is easy to clean.
  • Another goal is to propose a device that allows a high conductance.
  • the device according to the invention has the advantage that high-vacuum pumps and in particular turbomolecular pumps can be effectively protected by them from unwanted, condensable vapors, in particular metal vapors.
  • the fenders are accessible from the outside through the opening of the third connection flange. They can be inserted and removed through the opening of the third connection flange in the passage. This has the advantage that the fenders do not have to be permanently arranged in the passage, but - depending on the process - can be used or removed. By providing a separate connection flange to insert and remove the mudguards, the turbomolecular pump need not be removed to remove the mudguards.
  • the conductance can still be relatively high because the fenders do not fill the entire cross-sectional area of the pipe section.
  • the fenders are arranged and arranged so that the passage between the first and second openings is optically blocked. This can ensure that the vapors to be pumped on their way to the pump on the fenders and can condense on this.
  • the fenders are designed such that the Leitwertstre by the fenders arranged in the passage less than 40%, preferably less than 30% and most preferably less than 25% of the conductance without baffles.
  • the pipe section adjoining the first connection flange defines a first pipe section and the pipe section adjoining the second connection flange has a second pipe section, and the first and second pipe sections are arranged at an angle to each other, wherein the expanded cross-sectional area between the first and second pipe sections is provided.
  • the first and second pipe sections may be arranged at an approximately right angle to each other.
  • An expedient embodiment provides that the pipe section is designed as a T-connector, wherein the first and second connection flanges preferably have a smaller nominal diameter than the third connection flange.
  • the fenders angle profiles with a first and a second leg, which angle profiles in the space between the first and second, a bend defining pipe sections are arranged and their first leg in the axial direction of the first pipe section and the second leg in the preferred axial direction of the second Tube section are oriented.
  • the shape of the fenders and their arrangement is thus such that on the one hand, the conductance is as high as possible and on the other hand at least a single contact of the molecules to be pumped with the baffles is made sure. This is achieved in that the fenders are formed and arranged so that there is no optical passage between the first and second connection flange.
  • the fenders are arranged on a holder, which is arranged in the extended cross-sectional area of the pipe section.
  • the holder can be supported on the inner wall of the pipe section or on a flange which can be screwed onto the third connecting flange.
  • the latter embodiment has the advantage that the fenders unscrewed together with the flange resp. can be removed.
  • the holder is formed by a tube, the ends of which are screwed through the tube piece or a screwed onto the third connection flange Blind flange are guided.
  • the tube can be made of copper or of a stainless steel.
  • the fenders are arranged in a preferably short distance from the inner wall of the pipe section, ie they are thermally insulated from the pipe section.
  • the mudguards are arranged on opposite sides on a shell corresponding to the shape of the pipe section.
  • This has the advantage that the inner wall of the pipe section is shielded by the jacket, which is modeled on the inner walls of the pipe section, and the vapors can condense on this.
  • the tube is arranged in turns on the jacket and with this in heat conductive contact. This allows not only the baffles but also the jacket to cool.
  • the tube can also be used at low temperatures, e.g. with liquid nitrogen, to be cooled.
  • the fender and optional jacket existing mounting part is spaced anywhere to the inner walls or is supported exclusively on thermal insulation elements on the pipe section.
  • the holder is arranged with the baffles on a flange which can be screwed to the third connection flange.
  • This is a convenient design, in which no additional fasteners or supports on the pipe section are needed. It is conceivable spacers made of a material with a low coefficient of thermal conductivity, e.g. To use ceramic, plastic, etc., to keep the baffles, respectively the coat enclosing the fenders at a distance from the blank.
  • the present invention is also a vacuum system with a protective device according to one of claims 1 to 16 and a turbomolecular pump, which is connected to the second flange.
  • a protective device according to one of claims 1 to 16 and a turbomolecular pump, which is connected to the second flange.
  • the protective device 11 comprises a pipe section 13 with a first connection flange 15 having a first opening 16 for connecting the pipe section 13 to a process installation (not shown in the figure), a second connection flange 17 having a second opening 18 for connecting a high-vacuum pump (not shown) to the first Pipe section 13 and a third opening 20 having third connection flange 19, which is provided between the first connection flange 15 and the second connection flange 17 on the pipe section 13.
  • the space between the first connection flange 15 and the second connection flange 17 defines a passage 21 for the gas to be pumped out of a process chamber.
  • fenders 23 are arranged, which preferably completely obstruct the passage 21 optically.
  • the fenders are dimensioned so that in the suction direction 25 a view is optically blocked.
  • the diameter of the Fenders 23 substantially the clear widths of the passage at the narrowest points 27 and 29.
  • the protective plates 23 preferably have an angled structure which ensures that gas molecules once entered into the passage channels-in the case where they do not adhere to the deflecting plates-are deflected in such a way that they penetrate the passageway.
  • the fenders 23 are easily accessible through the third connection flange 19.
  • the fenders are arranged directly on a blind flange 31. This has the advantage that the removal of the mudguards 23 by unscrewing the blind flange 31 is possible. Also, no additional fittings are needed to order the fenders 23 in the pipe section 13.
  • the tube piece has a pipe section 33 with an enlarged cross section 33.
  • the extended cross-sectional area 33 is spherical in the embodiment shown.
  • the protective plates 23 are arranged in the region of the largest cross section. Due to the enlarged cross-section, a gap 35 between the baffles 23 and the inner wall of the pipe section 13 may be present, which ensures the maintenance of a good conductance.
  • the protective plates 23 are preferably surrounded by a jacket 37, respectively accommodated therein.
  • the optional jacket 37 preferably has a shape adapted to the expanded pipe section 33, so that only a small gap 41 remains between the jacket 37 and the inner wall 39 of the pipe section 13.
  • the mudguards 23 are in contact with a cooling circuit.
  • This cooling circuit comprises a tube 43, which is guided through the blind flange 31 and in heat-conducting contact with the jacket 37 and preferably the mudguards 23.
  • the protruding from the blind flange 31 pipe sections define connecting pieces 45,47 for connecting the pipe to a not shown in detail cooling unit.
  • the connecting pieces 45, 47 are advantageously designed as vacuum-insulated passages for the lines transporting the cooling medium, so that there is no cold bridge to the connecting flange.
  • the cooling line at the same time forms the holder for the jacket and the shrouds arranged in the jacket 37.
  • connection flange 15 for the connection of the pipe section 13 to a vacuum system and the connection flange 17 for the connection of the high vacuum pump is not opposite each other as in the embodiment according to FIG. 1 but at an approximately right angle to each other.
  • the first pipe section 49 adjoining the first connection flange 15 and the second pipe section 51 adjoining the second connection flange 17 are at right angles to one another.
  • This embodiment has the advantage that the high-vacuum pump, which is normally a turbomolecular pump, can be arranged very close to the process plant. As a result, the space requirement of the turbomolecular pump to be protected by the protection device is not significantly increased.
  • a sheath 37 is provided with spaced-apart linear guards 23 therein.
  • the jacket 37 has the shape of a preferably circular cylinder 53, which has an opening 55 on one end face and whose other end face is closed by a bottom 57.
  • a holder 59 is provided, on which the fenders 23 are arranged.
  • the fenders 23 have the shape of an angle profile 61, wherein the one leg 63 of the angle profile 61 is oriented to the first opening 16 and the other leg 65 to the second opening 18.
  • the cylinder 53 has a hole 69 in the cylinder jacket on the side oriented to the opening 16, which preferably the same or a similar dimension as the opening 16 has.
  • the number of angle profiles is chosen so that the passage 21 between the opening 16 and the opening 18 is just blocked visually. Adjacent to the angle profiles 61 flat profiles 67 are still provided. However, these can also be omitted, as realized in the third embodiment ( 3 and 4 ).
  • the device of FIG. 2 can be inexpensively made of a pipe section of a certain diameter by the second flange inside and the third flange outside the tube is arranged.
  • the first connection flange which is preferably the same in diameter as the second connection flange, is attached to the jacket of the pipe section as a stub.
  • This connector has two connection flanges, which advantageously have the same nominal size as the connection flange of the high vacuum pump.
  • the holder 59 is formed by a cooling line of a cooling circuit.
  • the cooling line can also be soldered to the holder.
  • This cooling line is guided through the blind flange 31 and extends in turns preferably also around the jacket of the cylinder 53.
  • This has the advantage that both the cylinder jacket of the protection device and the mudguards 23 can be cooled.
  • the embodiment according to the FIGS. 3 and 4 differs from that of the embodiment according to FIG. 2 only in that the flat profiles are omitted.
  • the protective plates are arranged in a tube section with an enlarged cross-sectional area compared to the opening of the first connecting flange.
  • connection flanges it is particularly advantageous if standard nominal sizes are used for the connection flanges.
  • the following nominal diameters can be used for a protective device: Nominal diameter of first connection flange: 250 mm (DIN250ISO-K / F) Nominal size of second connection flange: 250 mm (DIN250ISO-K / F) Nominal size of third connection flange: 320 mm (DIN320ISO-K / F) Mudguards and pipes Version in stainless steel
  • the internals such as fenders, holder and shell are preferably made entirely of stainless steel.
  • the protection device 11 is used as follows: The protection device 11 is installed between the process plant and the high vacuum pump. During operation of the process plant and when high vacuum is reached in the plant, the mudguards are cooled before the actual processes run off. This can be done with water or other coolants, such as water, as required. Liquid nitrogen, done. Condensable molecules are deposited on the fenders or cladding as they pass through the protection device. After the process plant has been flooded, the blind flange 31 with the protective sheets arranged thereon can be removed and freed from the adhering molecules (eg by thermal (heating) or mechanical removal (eg sandblasting).) It is conceivable to provide a sliding valve between the protective device and the process plant. so that the fenders can be removed without having to flooded the process plant, and a sliding valve could be provided between the fender and the high vacuum pump.
  • CuInSe compounds are used for certain cell types, inter alia, for the production of so-called CIGS solar cells or CIS cells, in which case S may be sulfur or selenium, depending on the cell type.
  • S may be sulfur or selenium, depending on the cell type.
  • selenium compounds selenium metal vapors also form in the reaction chamber. These vapors are deposited on the stators and rotors of turbomolecular pumps as they are drawn by the pump. If the turbomolecular pump for a long time in contact with these metal vapors, imbalances can arise, which lead to the destruction of the turbomolecular pump. With the aid of the device according to the invention it is possible To effectively protect turbomolecular pumps from harmful, condensable metal vapors.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP20100161376 2009-04-28 2010-04-28 Système de sécurité pour pompe à vide poussé Not-in-force EP2246573B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH6682009 2009-04-28

Publications (3)

Publication Number Publication Date
EP2246573A2 true EP2246573A2 (fr) 2010-11-03
EP2246573A3 EP2246573A3 (fr) 2011-12-07
EP2246573B1 EP2246573B1 (fr) 2013-02-13

Family

ID=42154735

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20100161376 Not-in-force EP2246573B1 (fr) 2009-04-28 2010-04-28 Système de sécurité pour pompe à vide poussé

Country Status (1)

Country Link
EP (1) EP2246573B1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011100311A1 (de) * 2011-05-03 2012-11-08 Pfeiffer Vacuum Gmbh Vorrichtung mit einer Leitstruktur
WO2015003651A1 (fr) 2013-07-12 2015-01-15 Westport Power Inc. Bride de pompe cryogénique

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58106186A (ja) * 1981-12-18 1983-06-24 Hitachi Ltd トラツプ装置
US5537833A (en) * 1995-05-02 1996-07-23 Helix Technology Corporation Shielded cryogenic trap
US6368371B1 (en) * 1998-01-22 2002-04-09 Ebara Corporation Trap device and trap system
IT1302694B1 (it) * 1998-10-19 2000-09-29 Getters Spa Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea.

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011100311A1 (de) * 2011-05-03 2012-11-08 Pfeiffer Vacuum Gmbh Vorrichtung mit einer Leitstruktur
DE102011100311A8 (de) * 2011-05-03 2013-01-03 Pfeiffer Vacuum Gmbh Vorrichtung mit einer Leitstruktur
EP2520810A3 (fr) * 2011-05-03 2017-08-02 Pfeiffer Vacuum GmbH Dispositif doté d'une structure de commande
WO2015003651A1 (fr) 2013-07-12 2015-01-15 Westport Power Inc. Bride de pompe cryogénique
EP3019747A4 (fr) * 2013-07-12 2017-06-21 Westport Power Inc. Bride de pompe cryogénique
US11655809B2 (en) 2013-07-12 2023-05-23 Westport Fuel Systems Canada Inc. Cryogenic pump flange

Also Published As

Publication number Publication date
EP2246573B1 (fr) 2013-02-13
EP2246573A3 (fr) 2011-12-07

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