EP2246573A3 - Système de sécurité pour pompe à vide poussé - Google Patents
Système de sécurité pour pompe à vide poussé Download PDFInfo
- Publication number
- EP2246573A3 EP2246573A3 EP10161376A EP10161376A EP2246573A3 EP 2246573 A3 EP2246573 A3 EP 2246573A3 EP 10161376 A EP10161376 A EP 10161376A EP 10161376 A EP10161376 A EP 10161376A EP 2246573 A3 EP2246573 A3 EP 2246573A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- connection flange
- opening
- pipe section
- high vacuum
- safety
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/02—Surge control
- F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
- F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH6682009 | 2009-04-28 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP2246573A2 EP2246573A2 (fr) | 2010-11-03 |
| EP2246573A3 true EP2246573A3 (fr) | 2011-12-07 |
| EP2246573B1 EP2246573B1 (fr) | 2013-02-13 |
Family
ID=42154735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP20100161376 Not-in-force EP2246573B1 (fr) | 2009-04-28 | 2010-04-28 | Système de sécurité pour pompe à vide poussé |
Country Status (1)
| Country | Link |
|---|---|
| EP (1) | EP2246573B1 (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102011100311A1 (de) * | 2011-05-03 | 2012-11-08 | Pfeiffer Vacuum Gmbh | Vorrichtung mit einer Leitstruktur |
| CN104279140B (zh) | 2013-07-12 | 2018-08-24 | 西港能源有限公司 | 低温泵法兰 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58106186A (ja) * | 1981-12-18 | 1983-06-24 | Hitachi Ltd | トラツプ装置 |
| US5537833A (en) * | 1995-05-02 | 1996-07-23 | Helix Technology Corporation | Shielded cryogenic trap |
| US6309184B1 (en) * | 1998-10-19 | 2001-10-30 | Saes Getters S.P.A. | Temperature-responsive mobile shielding device between a getter pump and a turbo pump mutually connected in line |
| US6368371B1 (en) * | 1998-01-22 | 2002-04-09 | Ebara Corporation | Trap device and trap system |
-
2010
- 2010-04-28 EP EP20100161376 patent/EP2246573B1/fr not_active Not-in-force
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58106186A (ja) * | 1981-12-18 | 1983-06-24 | Hitachi Ltd | トラツプ装置 |
| US5537833A (en) * | 1995-05-02 | 1996-07-23 | Helix Technology Corporation | Shielded cryogenic trap |
| US6368371B1 (en) * | 1998-01-22 | 2002-04-09 | Ebara Corporation | Trap device and trap system |
| US6309184B1 (en) * | 1998-10-19 | 2001-10-30 | Saes Getters S.P.A. | Temperature-responsive mobile shielding device between a getter pump and a turbo pump mutually connected in line |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2246573B1 (fr) | 2013-02-13 |
| EP2246573A2 (fr) | 2010-11-03 |
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