EP2290242A2 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number
EP2290242A2
EP2290242A2 EP20100008413 EP10008413A EP2290242A2 EP 2290242 A2 EP2290242 A2 EP 2290242A2 EP 20100008413 EP20100008413 EP 20100008413 EP 10008413 A EP10008413 A EP 10008413A EP 2290242 A2 EP2290242 A2 EP 2290242A2
Authority
EP
European Patent Office
Prior art keywords
flange
collar
vacuum pump
pump
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20100008413
Other languages
German (de)
English (en)
Other versions
EP2290242B1 (fr
EP2290242A3 (fr
Inventor
Robert Watz
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2290242A2 publication Critical patent/EP2290242A2/fr
Publication of EP2290242A3 publication Critical patent/EP2290242A3/fr
Application granted granted Critical
Publication of EP2290242B1 publication Critical patent/EP2290242B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump according to the preamble of the first claim.
  • Vacuum pumps for the molecular flow area in particular turbomolecular vacuum pumps, have a fast rotating rotor.
  • the rotation is so fast that the blades connected to the rotor reach a speed close to the speed of sound.
  • the speed values are in the range of tens of thousands of revolutions per minute.
  • the measure to arrange on the side facing away from the housing of the pump flange a collar associated with the suction reduces the forces introduced into the fastening means. While the state of the art is aimed at coping with the torques occurring in the event of a fault, which follow from the conservation of angular momentum, the radial forces, which according to findings of the inventors are not negligible, are handled with the aid of the invention. By reducing the radial forces introduced into the fasteners, a failure mechanism is turned off. Another advantage of the measure is that further components such as arranged between the pump flange and chamber flange centering omitted. These cost on the one hand money, on the other hand, they weaken the connection in addition.
  • a further development proposes to provide a damping element, in which kinetic energy is converted into deformation energy, so that the resulting forces and moments are reduced.
  • the pump flange can be integrated in the form of a groove or a step, a sealing element, so that the number of parts can be further reduced.
  • Another development provides a relief groove, which is arranged in the radial direction outside of the collar adjacent. This improves the Force flow within the collar in case of failure and reduces the risk of shearing the collar. This will make the connection even safer.
  • FIG. 1 A section through an arrangement with vacuum pump 1 and chamber flange 2 shows Fig. 1 ,
  • the vacuum pump has a pump flange 4, which is detachably connected to the chamber flange 2 and surrounds the suction opening 5 of the vacuum pump.
  • a screw 30 makes this detachable connection.
  • the chamber flange is shown here as an opening in a wall which is surrounded by an annular surface. However, the chamber flange may also be provided on a tube piece connected to the chamber.
  • the pump flange is arranged on the housing 6 of the vacuum pump.
  • This housing encloses vacuum-tight the vacuum generating components.
  • These are in particular the stator disks 8, which which are axially spaced apart by spacers 9.
  • the blades 14 attached to the bell rotor 12 move together with the stator disks to move the gas.
  • the bell-rotor 12 is connected to a shaft 10, the connection being produced by one or more screws 16 or equivalent means.
  • the shaft is rotatably supported, for example, as shown here by an active radial magnetic bearing 18, and is set by a drive 20 in rapid rotation.
  • the worst case of error in this example is the rupture of the bell rotor along its longitudinal axis, ie in the axial direction 24. Two or more fragments of the bell rotor then move largely in the radial direction 22 due to the centrifugal forces. In this case, the connection between pump flange and chamber flange must not be completely solved.
  • the Fig. 2 shows the in Fig. 1 by a dashed line framed part in a cut and with more details.
  • the screw 30 passes through a channel 32, for example a through-hole, and engages with a thread 34. As a result, the pump flange 4 is pulled against the chamber flange 2 and so made the connection.
  • An advantageous development is to provide a sealing groove 50 on the side facing away from the housing 6 of the pump flange between the collar and through hole, in which a sealing ring 52, for example, an elastomeric ring is located.
  • a sealing ring 52 for example, an elastomeric ring is located.
  • the pump flange has a relief groove 44 which adjoins the collar in the radial direction outside.
  • This relief groove causes a more favorable distribution of the resulting in the event of a fault by the contact with the chamber flange forces and thus counteracts the shearing off of the collar.
  • it allows to choose the collar gap 42 as closely as possible, since the production-related curvature 46 is not on the collar foot with the chamber flange in a plane.
  • a narrow collar gap means that the diameter of the through-bore 32 can be kept small.
  • Fig. 3 A development of the pump flange and the arrangement according to Fig. 2 is in Fig. 3 shown, wherein the same section is shown.
  • the collar 40 ' has on its radially outer side on a damping element 60. By this arrangement, it faces the chamber flange 2 'and is located between chamber flange and collar.
  • This damping element is chosen so that it is deformable and at the same time suitable for the high-vacuum range. The latter means that it contains as few virtual leaks as possible and has a low outgassing rate.
  • the final pressure reached by the vacuum pump should be influenced by less than half a decade. These requirements for the damping element are achieved, for example, when it is designed as a copper ring. In the event of a fault, the damping element initially comes into contact with the chamber flange and is subsequently deformed, as a result of which a portion of the kinetic energy is dissipated.
  • a step 56 may be arranged on the pump flange 4 '. This serves a sealing ring 52 'in the radial direction 22' as an inner boundary. Radially outward it is limited by a support ring 54th
  • the step creates an axial gap 66 in the region of the screw 30 '. This has an advantageous effect in the event of a fault since the screw receives additional deformation latitude, which is equally present in all directions of force.
  • the connection of the chamber flange and pump flange becomes more resistant in both the radial and circumferential directions, as the shearing action on the screws is distributed on their axial-gap section.
  • a bracket 70 comprises a hook bolt 72 and a counter hook 84, wherein the hook bolt has a threaded portion which passes through a cylindrical channel of a counter hook.
  • a nut 76 is engaged with the threaded portion.
  • the hook screw engages in a groove 82 of the chamber flange 2 "arranged on a pipe section 38.
  • the counter hook engages in a groove 84 of the pump flange 4".
  • a collar 40 is on the side facing away from the housing of the pump flange and associated with the suction port. By this arrangement, it protrudes into the space surrounded by the chamber flange.
  • the collar moves through the above-mentioned forces in the radial direction 22 "and comes into contact with the chamber flange, which drastically reduces the shearing load acting on the boundaries of the grooves 82 and 84 and on hooks and hooks Act essentially only forces in the axial direction 24 "and along the grooves, ie in the circumferential direction.
  • the clamp is designed by default.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP10008413.6A 2009-08-28 2010-08-12 Pompe à vide Active EP2290242B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200910039120 DE102009039120A1 (de) 2009-08-28 2009-08-28 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2290242A2 true EP2290242A2 (fr) 2011-03-02
EP2290242A3 EP2290242A3 (fr) 2014-07-02
EP2290242B1 EP2290242B1 (fr) 2017-02-08

Family

ID=43216148

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10008413.6A Active EP2290242B1 (fr) 2009-08-28 2010-08-12 Pompe à vide

Country Status (2)

Country Link
EP (1) EP2290242B1 (fr)
DE (1) DE102009039120A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015014521A1 (fr) * 2013-07-29 2015-02-05 Siemens Aktiengesellschaft Fraisage concentrique sur un carter de vapeur d'échappement
EP2913534A3 (fr) * 2014-02-28 2015-09-09 Pfeiffer Vacuum GmbH Agencement de pompe à vide
EP2918843A1 (fr) * 2014-03-14 2015-09-16 Pfeiffer Vacuum Gmbh Amortisseur pour pompes à vide
EP3067565A1 (fr) * 2015-03-13 2016-09-14 Pfeiffer Vacuum Gmbh Pompe à vide
JP2020133628A (ja) * 2019-02-12 2020-08-31 プファイファー・ヴァキューム・ゲーエムベーハー 真空装置及び真空システム
CN113167283A (zh) * 2018-12-13 2021-07-23 爱德华兹有限公司 真空泵

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015104438B4 (de) * 2015-03-24 2023-06-15 Pfeiffer Vacuum Gmbh Vakuumsystem

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1312804A1 (fr) 2001-11-16 2003-05-21 BOC Edwards Technologies, Limited Pompe à vide
EP1537336A2 (fr) 2002-08-29 2005-06-08 Alcatel Dispositif de fixation de pompe a vide

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2086526A5 (fr) * 1970-04-01 1971-12-31 Commissariat Energie Atomique
JP4104098B2 (ja) * 1999-03-31 2008-06-18 エドワーズ株式会社 真空ポンプ
JP2002327698A (ja) * 2001-04-27 2002-11-15 Boc Edwards Technologies Ltd 真空ポンプ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1312804A1 (fr) 2001-11-16 2003-05-21 BOC Edwards Technologies, Limited Pompe à vide
EP1537336A2 (fr) 2002-08-29 2005-06-08 Alcatel Dispositif de fixation de pompe a vide

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015014521A1 (fr) * 2013-07-29 2015-02-05 Siemens Aktiengesellschaft Fraisage concentrique sur un carter de vapeur d'échappement
EP2913534A3 (fr) * 2014-02-28 2015-09-09 Pfeiffer Vacuum GmbH Agencement de pompe à vide
JP2015165134A (ja) * 2014-02-28 2015-09-17 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ装置
EP2918843A1 (fr) * 2014-03-14 2015-09-16 Pfeiffer Vacuum Gmbh Amortisseur pour pompes à vide
EP3067565A1 (fr) * 2015-03-13 2016-09-14 Pfeiffer Vacuum Gmbh Pompe à vide
JP2016169732A (ja) * 2015-03-13 2016-09-23 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ
CN113167283A (zh) * 2018-12-13 2021-07-23 爱德华兹有限公司 真空泵
CN113167283B (zh) * 2018-12-13 2023-12-22 爱德华兹有限公司 真空泵
JP2020133628A (ja) * 2019-02-12 2020-08-31 プファイファー・ヴァキューム・ゲーエムベーハー 真空装置及び真空システム

Also Published As

Publication number Publication date
EP2290242B1 (fr) 2017-02-08
DE102009039120A1 (de) 2011-03-03
EP2290242A3 (fr) 2014-07-02

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