EP2362686A3 - Schallwandler zum Einsetzen in ein Ohr - Google Patents
Schallwandler zum Einsetzen in ein Ohr Download PDFInfo
- Publication number
- EP2362686A3 EP2362686A3 EP11001587A EP11001587A EP2362686A3 EP 2362686 A3 EP2362686 A3 EP 2362686A3 EP 11001587 A EP11001587 A EP 11001587A EP 11001587 A EP11001587 A EP 11001587A EP 2362686 A3 EP2362686 A3 EP 2362686A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- ear
- installation
- sound converter
- deflection
- sound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R25/00—Electric hearing aids
- H04R25/60—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles
- H04R25/604—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles of acoustic or vibrational transducers
- H04R25/606—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles of acoustic or vibrational transducers acting directly on the eardrum, the ossicles or the skull, e.g. mastoid, tooth, maxillary or mandibular bone, or mechanically stimulating the cochlea, e.g. at the oval window
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
- H04R31/003—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor for diaphragms or their outer suspension
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/10—Earpieces; Attachments therefor ; Earphones; Monophonic headphones
- H04R1/1016—Earpieces of the intra-aural type
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R2460/00—Details of hearing devices, i.e. of ear- or headphones covered by H04R1/10 or H04R5/033 but not provided for in any of their subgroups, or of hearing aids covered by H04R25/00 but not provided for in any of its subgroups
- H04R2460/13—Hearing devices using bone conduction transducers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Otolaryngology (AREA)
- Neurosurgery (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Abstract
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102010009453A DE102010009453A1 (de) | 2010-02-26 | 2010-02-26 | Schallwandler zum Einsetzen in ein Ohr |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP2362686A2 EP2362686A2 (de) | 2011-08-31 |
| EP2362686A3 true EP2362686A3 (de) | 2012-01-04 |
| EP2362686B1 EP2362686B1 (de) | 2016-08-03 |
Family
ID=44069919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP11001587.2A Active EP2362686B1 (de) | 2010-02-26 | 2011-02-25 | Schallwandler zum Einsetzen in ein Ohr |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US9497556B2 (de) |
| EP (1) | EP2362686B1 (de) |
| DE (1) | DE102010009453A1 (de) |
| DK (1) | DK2362686T3 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10293377B2 (en) | 2014-10-02 | 2019-05-21 | Chirp Microsystems | Micromachined ultrasonic transducers with a slotted membrane structure |
Families Citing this family (58)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8401212B2 (en) | 2007-10-12 | 2013-03-19 | Earlens Corporation | Multifunction system and method for integrated hearing and communication with noise cancellation and feedback management |
| WO2009155358A1 (en) | 2008-06-17 | 2009-12-23 | Earlens Corporation | Optical electro-mechanical hearing devices with separate power and signal components |
| EP3509324B1 (de) | 2008-09-22 | 2023-08-16 | Earlens Corporation | Ausgewogene ankervorrichtungen und verfahren zum hören |
| DE102010009453A1 (de) | 2010-02-26 | 2011-09-01 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Schallwandler zum Einsetzen in ein Ohr |
| EP3758394A1 (de) | 2010-12-20 | 2020-12-30 | Earlens Corporation | Anatomisch angepasstes gehörgangs-hörgerät |
| CN103460721B (zh) * | 2011-03-31 | 2017-05-24 | 韦斯伯技术公司 | 具有间隙控制几何形状的声换能器以及声换能器制造方法 |
| US9031266B2 (en) * | 2011-10-11 | 2015-05-12 | Infineon Technologies Ag | Electrostatic loudspeaker with membrane performing out-of-plane displacement |
| CN102595276A (zh) * | 2012-02-28 | 2012-07-18 | 王宜蓉 | 一种振动体消振装置 |
| EP2713196A1 (de) | 2012-09-27 | 2014-04-02 | poLight AS | Deformierbare Linse mit piezoelektrische Aktuatoren mit kammartiger Elektrodenkonfiguration |
| DE102013114771B4 (de) | 2013-12-23 | 2018-06-28 | Eberhard Karls Universität Tübingen Medizinische Fakultät | In den Gehörgang einbringbare Hörhilfe und Hörhilfe-System |
| US10034103B2 (en) | 2014-03-18 | 2018-07-24 | Earlens Corporation | High fidelity and reduced feedback contact hearing apparatus and methods |
| DK3169396T3 (da) | 2014-07-14 | 2021-06-28 | Earlens Corp | Glidende forspænding og peak-begrænsning for optiske høreapparater |
| WO2016048936A1 (en) * | 2014-09-23 | 2016-03-31 | Med-El Elektromedizinische Geraete Gmbh | Hybrid electro-mechanical hearing prosthesis system |
| US9924276B2 (en) | 2014-11-26 | 2018-03-20 | Earlens Corporation | Adjustable venting for hearing instruments |
| US20160165020A1 (en) * | 2014-12-04 | 2016-06-09 | Plastoform Industries Limited | Pair of integrated wireless earphone for a mobile communication device |
| DE102015101482B3 (de) * | 2015-02-02 | 2016-05-19 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Elektroakustisches Implantat |
| MY201278A (en) * | 2015-09-14 | 2024-02-14 | Wing Acoustics Ltd | Improvements in or relating to audio transducers |
| DK3888564T3 (da) | 2015-10-02 | 2025-07-14 | Earlens Corp | Indretning til tilpasset afgivelse af medicin i øregangen |
| WO2017069701A1 (en) * | 2015-10-21 | 2017-04-27 | Agency For Science, Technology And Research | Ultrasound transducer and method of forming the same |
| WO2017116791A1 (en) | 2015-12-30 | 2017-07-06 | Earlens Corporation | Light based hearing systems, apparatus and methods |
| US10492010B2 (en) | 2015-12-30 | 2019-11-26 | Earlens Corporations | Damping in contact hearing systems |
| US11350226B2 (en) | 2015-12-30 | 2022-05-31 | Earlens Corporation | Charging protocol for rechargeable hearing systems |
| WO2017179616A1 (ja) * | 2016-04-15 | 2017-10-19 | 第一精工株式会社 | スピーカシステム |
| CN112738700A (zh) | 2016-09-09 | 2021-04-30 | 伊尔兰斯公司 | 智能镜系统和方法 |
| WO2018093733A1 (en) | 2016-11-15 | 2018-05-24 | Earlens Corporation | Improved impression procedure |
| DE102017208911A1 (de) * | 2017-05-26 | 2018-11-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanischer Schallwandler |
| US20180352348A1 (en) * | 2017-06-06 | 2018-12-06 | Sonitus Technologies Inc. | Bone conduction device |
| KR102452952B1 (ko) | 2017-12-06 | 2022-10-12 | 삼성전자주식회사 | 방향성 음향 센서 및 이를 포함하는 전자 장치 |
| WO2019173470A1 (en) | 2018-03-07 | 2019-09-12 | Earlens Corporation | Contact hearing device and retention structure materials |
| WO2019199680A1 (en) | 2018-04-09 | 2019-10-17 | Earlens Corporation | Dynamic filter |
| DE102018207922A1 (de) * | 2018-05-18 | 2019-11-21 | Vibrosonic Gmbh | Mehrteiliges, tief im Gehörgang platziertes Trommelfell-Kontakt-Hörgerät |
| DK3579578T3 (da) | 2018-06-07 | 2022-05-02 | Sonion Nederland Bv | Miniaturelydgiver |
| DE102018220731B3 (de) | 2018-11-30 | 2020-06-04 | Med-El Elektromedizinische Geräte GmbH | Elektroakustischer Wandler zur Implantation in ein Ohr, Verfahren zur Herstellung eines solchen und Cochlea-Implantatsystem |
| EP3675522A1 (de) * | 2018-12-28 | 2020-07-01 | Sonion Nederland B.V. | Miniaturlautsprecher ohne wesentliche akustische leckage |
| DE102019201273A1 (de) * | 2019-01-31 | 2020-08-06 | Vibrosonic Gmbh | Vibrationsmodul zum Auflegen auf ein Trommelfell |
| EP3733311A1 (de) | 2019-05-02 | 2020-11-04 | Ecole Polytechnique Federale De Lausanne (EPFL) EPFL-TTO | Betätigung eines piezoelektrischen strukturen mit ferroelektrischer dünnschichten mit mehreren elementen |
| WO2020235131A1 (ja) | 2019-05-17 | 2020-11-26 | 株式会社村田製作所 | 圧電デバイス |
| DE102019116080A1 (de) | 2019-06-13 | 2020-12-17 | USound GmbH | MEMS-Schallwandler mit einer aus Polymer ausgebildeten Membran |
| CN114830520B (zh) | 2019-12-17 | 2026-04-24 | 株式会社村田制作所 | 换能器 |
| EP4082961A4 (de) | 2019-12-25 | 2023-10-25 | Denso Corporation | Piezoelektrisches element, piezoelektrische vorrichtung und herstellungsverfahren eines piezoelektrischen elementes |
| US11202138B2 (en) * | 2020-03-05 | 2021-12-14 | Facebook Technologies, Llc | Miniature high performance MEMS piezoelectric transducer for in-ear applications |
| DE112021001186T5 (de) * | 2020-04-30 | 2022-12-15 | Murata Manufacturing Co., Ltd. | Piezoelektrisches bauelement |
| US11972749B2 (en) | 2020-07-11 | 2024-04-30 | xMEMS Labs, Inc. | Wearable sound device |
| US11323797B2 (en) * | 2020-07-11 | 2022-05-03 | xMEMS Labs, Inc. | Acoustic transducer, wearable sound device and manufacturing method of acoustic transducer |
| US11884535B2 (en) | 2020-07-11 | 2024-01-30 | xMEMS Labs, Inc. | Device, package structure and manufacturing method of device |
| US12088988B2 (en) * | 2020-07-11 | 2024-09-10 | xMEMS Labs, Inc. | Venting device and venting method thereof |
| US12022253B2 (en) | 2020-07-11 | 2024-06-25 | xMEMS Labs, Inc. | Venting device |
| US12151934B2 (en) | 2020-07-11 | 2024-11-26 | xMEMS Labs, Inc. | Device and method of equalizing low frequency roll off for wearable sound device |
| US12028673B2 (en) | 2020-07-11 | 2024-07-02 | xMEMS Labs, Inc. | Driving circuit and wearable sound device thereof |
| US12157663B2 (en) * | 2020-07-11 | 2024-12-03 | xMEMS Labs, Inc. | Venting device, manufacturing method of venting device, venting method and device |
| US11399228B2 (en) | 2020-07-11 | 2022-07-26 | xMEMS Labs, Inc. | Acoustic transducer, wearable sound device and manufacturing method of acoustic transducer |
| DE102021130035A1 (de) * | 2021-11-17 | 2023-05-17 | USound GmbH | MEMS-Schallwandler mit einer gekrümmten Kontur eines Kragarmelements |
| WO2023150154A1 (en) * | 2022-02-03 | 2023-08-10 | Massachusetts Institute Of Technology | A fully differential piezoelectric microphone and amplifier system for cochlear implants and other hearing devices |
| EP4258691B1 (de) | 2022-04-08 | 2026-01-21 | STMicroelectronics S.r.l. | Mikroelektromechanischer membran-elektroakustikwandler |
| CN217693709U (zh) * | 2022-06-20 | 2022-10-28 | 瑞声开泰科技(武汉)有限公司 | Mems扬声器 |
| EP4456551A1 (de) * | 2023-04-24 | 2024-10-30 | GN Audio A/S | Hörgerät mit einer trennwand |
| WO2025011711A2 (de) | 2023-07-07 | 2025-01-16 | Friedrich Bock | Kabelverbindung; elektronisches gerät; verfahren zur reversiblen herstellung einer kabelverbindung eines elektronischen geräts; verfahren zum wechsel verschiedener geräte; verschluss-stopfen für ein ohr eines lebewesens; verfahren zur erhöhung der akustischen wirkung von einem elektronischen gerät; verfahren zum schutz eines gehörs eines lebewesens; audiometrie-verfahren; audio-adapter |
| US12317034B2 (en) * | 2023-09-21 | 2025-05-27 | xMEMS Labs, Inc. | Air-pulse generating device with tooth edge patterned slit |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2540187A (en) * | 1947-12-26 | 1951-02-06 | Zenith Radio Corp | Piezoelectric transducer and method for producing same |
| US2900536A (en) * | 1954-11-18 | 1959-08-18 | Astatic Corp | Design of electro-mechanical transducer elements |
| DE1200890B (de) * | 1960-03-07 | 1965-09-16 | Siemens Ag | Biegungsschwinger aus scheibenfoermigem elektrostriktivem Material |
| JPS61150499A (ja) * | 1984-12-24 | 1986-07-09 | Sawafuji Dainameka Kk | 分割形圧電振動板 |
| WO1997022154A1 (en) * | 1995-12-15 | 1997-06-19 | The Penn State Research Foundation | Metal-electroactive ceramic composite transducers |
| WO2005006809A1 (ja) * | 2003-07-09 | 2005-01-20 | Shimada Manufacturing Co., Ltd. | 圧電型振動発生器及びこれを用いた振動送音器 |
| US20050228214A1 (en) * | 2004-04-09 | 2005-10-13 | Schneider Robert E | Implantable hearing aid transducer retention apparatus |
| US20060087203A1 (en) * | 2004-10-27 | 2006-04-27 | Kyungpook National University Industry-Academic Cooperation Foundation | Piezoelectric type vibrator, implantable hearing aid with the same, and method of implanting the same |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1875A (en) * | 1840-12-01 | Improvement in the mode of heating buildings by means of an apparatus consisting of | ||
| US2386279A (en) * | 1942-07-21 | 1945-10-09 | Raymond W Tibbetts | Piezoelectric device |
| FR1601030A (de) * | 1968-01-08 | 1970-08-03 | ||
| JP2886588B2 (ja) * | 1989-07-11 | 1999-04-26 | 日本碍子株式会社 | 圧電/電歪アクチュエータ |
| DE4104358A1 (de) * | 1991-02-13 | 1992-08-20 | Implex Gmbh | Implantierbares hoergeraet zur anregung des innenohres |
| DE4135408A1 (de) * | 1991-10-26 | 1993-04-29 | Man Nutzfahrzeuge Ag | Verfahren zur umwandlung elektrischer energie in mechanische schwingungen, sowie vorrichtungen zur durchfuehrung dieses verfahrens |
| USH1875H (en) | 1996-07-22 | 2000-10-03 | Microtronic A/S | Electroacoustic transducer |
| US5899847A (en) * | 1996-08-07 | 1999-05-04 | St. Croix Medical, Inc. | Implantable middle-ear hearing assist system using piezoelectric transducer film |
| FR2788176B1 (fr) * | 1998-12-30 | 2001-05-25 | Thomson Csf | Dispositif a ondes acoustiques guidees dans une fine couche de materiau piezo-electrique collee par une colle moleculaire sur un substrat porteur et procede de fabrication |
| US6277148B1 (en) | 1999-02-11 | 2001-08-21 | Soundtec, Inc. | Middle ear magnet implant, attachment device and method, and test instrument and method |
| DE10046938A1 (de) * | 2000-09-21 | 2002-04-25 | Implex Ag Hearing Technology I | Mindestens teilimplantierbares Hörsystem mit direkter mechanischer Stimulation eines lymphatischen Raums des Innenohres |
| US7646544B2 (en) * | 2005-05-14 | 2010-01-12 | Batchko Robert G | Fluidic optical devices |
| JP2004532743A (ja) * | 2000-10-25 | 2004-10-28 | ワシントン ステート ユニバーシティ リサーチ ファウンデーション | 圧電マイクロトランスデューサ、その使用法および製造法 |
| US7275292B2 (en) * | 2003-03-07 | 2007-10-02 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Method for fabricating an acoustical resonator on a substrate |
| CA2521688C (en) * | 2003-06-26 | 2012-01-03 | Med-El Elektromedizinische Geraete Gmbh | System and method for reducing effect of magnetic fields on a magnetic transducer |
| US7442164B2 (en) * | 2003-07-23 | 2008-10-28 | Med-El Elektro-Medizinische Gerate Gesellschaft M.B.H. | Totally implantable hearing prosthesis |
| CA2620323A1 (en) | 2005-08-22 | 2007-03-01 | 3Win N.V. | A combined set comprising a vibrator actuator and an implantable device |
| JP5309626B2 (ja) * | 2007-03-14 | 2013-10-09 | 株式会社ニコン | 振動アクチュエータ、振動子の製造方法及び振動アクチュエータの製造方法 |
| US8042916B2 (en) * | 2007-03-31 | 2011-10-25 | Micropoint Biosciences, Inc. | Micromachined fluid ejector array |
| DE102010009453A1 (de) | 2010-02-26 | 2011-09-01 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Schallwandler zum Einsetzen in ein Ohr |
-
2010
- 2010-02-26 DE DE102010009453A patent/DE102010009453A1/de not_active Ceased
-
2011
- 2011-02-24 US US13/034,141 patent/US9497556B2/en active Active
- 2011-02-25 DK DK11001587.2T patent/DK2362686T3/en active
- 2011-02-25 EP EP11001587.2A patent/EP2362686B1/de active Active
-
2016
- 2016-10-03 US US15/283,782 patent/US10206045B2/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2540187A (en) * | 1947-12-26 | 1951-02-06 | Zenith Radio Corp | Piezoelectric transducer and method for producing same |
| US2900536A (en) * | 1954-11-18 | 1959-08-18 | Astatic Corp | Design of electro-mechanical transducer elements |
| DE1200890B (de) * | 1960-03-07 | 1965-09-16 | Siemens Ag | Biegungsschwinger aus scheibenfoermigem elektrostriktivem Material |
| JPS61150499A (ja) * | 1984-12-24 | 1986-07-09 | Sawafuji Dainameka Kk | 分割形圧電振動板 |
| WO1997022154A1 (en) * | 1995-12-15 | 1997-06-19 | The Penn State Research Foundation | Metal-electroactive ceramic composite transducers |
| WO2005006809A1 (ja) * | 2003-07-09 | 2005-01-20 | Shimada Manufacturing Co., Ltd. | 圧電型振動発生器及びこれを用いた振動送音器 |
| US20050228214A1 (en) * | 2004-04-09 | 2005-10-13 | Schneider Robert E | Implantable hearing aid transducer retention apparatus |
| US20060087203A1 (en) * | 2004-10-27 | 2006-04-27 | Kyungpook National University Industry-Academic Cooperation Foundation | Piezoelectric type vibrator, implantable hearing aid with the same, and method of implanting the same |
Non-Patent Citations (1)
| Title |
|---|
| HONG E-P ET AL: "VIBRATION MODELING AND DESIGN OF PIEZOELECTRIC FLOATING MASS TRANSDUCER FOR IMPLANTABLE MIDDLE EAR HEARING DEVICES", IEICE TRANSACTIONS ON FUNDAMENTALS OF ELECTRONICS,COMMUNICATIONS AND COMPUTER SCIENCES, ENGINEERING SCIENCES SOCIETY, TOKYO, JP, vol. E90A, no. 8, 1 August 2007 (2007-08-01), pages 1620 - 1627, XP001506577, ISSN: 0916-8508, DOI: 10.1093/IETFEC/E90-A.8.1620 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10293377B2 (en) | 2014-10-02 | 2019-05-21 | Chirp Microsystems | Micromachined ultrasonic transducers with a slotted membrane structure |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2362686B1 (de) | 2016-08-03 |
| DE102010009453A1 (de) | 2011-09-01 |
| EP2362686A2 (de) | 2011-08-31 |
| US10206045B2 (en) | 2019-02-12 |
| US20120053393A1 (en) | 2012-03-01 |
| US20170094417A1 (en) | 2017-03-30 |
| DK2362686T3 (en) | 2016-12-05 |
| US9497556B2 (en) | 2016-11-15 |
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