EP2362686A3 - Transducteur acoustique pour l'insertion dans une oreille - Google Patents
Transducteur acoustique pour l'insertion dans une oreille Download PDFInfo
- Publication number
- EP2362686A3 EP2362686A3 EP11001587A EP11001587A EP2362686A3 EP 2362686 A3 EP2362686 A3 EP 2362686A3 EP 11001587 A EP11001587 A EP 11001587A EP 11001587 A EP11001587 A EP 11001587A EP 2362686 A3 EP2362686 A3 EP 2362686A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- ear
- installation
- sound converter
- deflection
- sound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R25/00—Electric hearing aids
- H04R25/60—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles
- H04R25/604—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles of acoustic or vibrational transducers
- H04R25/606—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles of acoustic or vibrational transducers acting directly on the eardrum, the ossicles or the skull, e.g. mastoid, tooth, maxillary or mandibular bone, or mechanically stimulating the cochlea, e.g. at the oval window
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
- H04R31/003—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor for diaphragms or their outer suspension
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/10—Earpieces; Attachments therefor ; Earphones; Monophonic headphones
- H04R1/1016—Earpieces of the intra-aural type
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R2460/00—Details of hearing devices, i.e. of ear- or headphones covered by H04R1/10 or H04R5/033 but not provided for in any of their subgroups, or of hearing aids covered by H04R25/00 but not provided for in any of its subgroups
- H04R2460/13—Hearing devices using bone conduction transducers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Otolaryngology (AREA)
- Neurosurgery (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102010009453A DE102010009453A1 (de) | 2010-02-26 | 2010-02-26 | Schallwandler zum Einsetzen in ein Ohr |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP2362686A2 EP2362686A2 (fr) | 2011-08-31 |
| EP2362686A3 true EP2362686A3 (fr) | 2012-01-04 |
| EP2362686B1 EP2362686B1 (fr) | 2016-08-03 |
Family
ID=44069919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP11001587.2A Active EP2362686B1 (fr) | 2010-02-26 | 2011-02-25 | Transducteur acoustique pour l'insertion dans une oreille |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US9497556B2 (fr) |
| EP (1) | EP2362686B1 (fr) |
| DE (1) | DE102010009453A1 (fr) |
| DK (1) | DK2362686T3 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10293377B2 (en) | 2014-10-02 | 2019-05-21 | Chirp Microsystems | Micromachined ultrasonic transducers with a slotted membrane structure |
Families Citing this family (58)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8401212B2 (en) | 2007-10-12 | 2013-03-19 | Earlens Corporation | Multifunction system and method for integrated hearing and communication with noise cancellation and feedback management |
| WO2009155358A1 (fr) | 2008-06-17 | 2009-12-23 | Earlens Corporation | Dispositifs d’audition électromécaniques optiques dotés de composants d’alimentation et de signal séparés |
| EP3509324B1 (fr) | 2008-09-22 | 2023-08-16 | Earlens Corporation | Dispositifs à armature équilibrée et procédés d'écoute |
| DE102010009453A1 (de) | 2010-02-26 | 2011-09-01 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Schallwandler zum Einsetzen in ein Ohr |
| EP3758394A1 (fr) | 2010-12-20 | 2020-12-30 | Earlens Corporation | Appareil auditif intra-auriculaire anatomiquement personnalisé |
| CN103460721B (zh) * | 2011-03-31 | 2017-05-24 | 韦斯伯技术公司 | 具有间隙控制几何形状的声换能器以及声换能器制造方法 |
| US9031266B2 (en) * | 2011-10-11 | 2015-05-12 | Infineon Technologies Ag | Electrostatic loudspeaker with membrane performing out-of-plane displacement |
| CN102595276A (zh) * | 2012-02-28 | 2012-07-18 | 王宜蓉 | 一种振动体消振装置 |
| EP2713196A1 (fr) | 2012-09-27 | 2014-04-02 | poLight AS | Lentille variuable compenant actionneurs piézoélectriques disposés avec une configuration d'électrodes interdigitées |
| DE102013114771B4 (de) | 2013-12-23 | 2018-06-28 | Eberhard Karls Universität Tübingen Medizinische Fakultät | In den Gehörgang einbringbare Hörhilfe und Hörhilfe-System |
| US10034103B2 (en) | 2014-03-18 | 2018-07-24 | Earlens Corporation | High fidelity and reduced feedback contact hearing apparatus and methods |
| DK3169396T3 (da) | 2014-07-14 | 2021-06-28 | Earlens Corp | Glidende forspænding og peak-begrænsning for optiske høreapparater |
| WO2016048936A1 (fr) * | 2014-09-23 | 2016-03-31 | Med-El Elektromedizinische Geraete Gmbh | Système de prothèse auditive électro-mécanique hybride |
| US9924276B2 (en) | 2014-11-26 | 2018-03-20 | Earlens Corporation | Adjustable venting for hearing instruments |
| US20160165020A1 (en) * | 2014-12-04 | 2016-06-09 | Plastoform Industries Limited | Pair of integrated wireless earphone for a mobile communication device |
| DE102015101482B3 (de) * | 2015-02-02 | 2016-05-19 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Elektroakustisches Implantat |
| MY201278A (en) * | 2015-09-14 | 2024-02-14 | Wing Acoustics Ltd | Improvements in or relating to audio transducers |
| DK3888564T3 (da) | 2015-10-02 | 2025-07-14 | Earlens Corp | Indretning til tilpasset afgivelse af medicin i øregangen |
| WO2017069701A1 (fr) * | 2015-10-21 | 2017-04-27 | Agency For Science, Technology And Research | Transducteur d'ultrasons et son procédé de fabrication |
| WO2017116791A1 (fr) | 2015-12-30 | 2017-07-06 | Earlens Corporation | Systèmes, appareil et procédés auditifs reposant sur la lumière |
| US10492010B2 (en) | 2015-12-30 | 2019-11-26 | Earlens Corporations | Damping in contact hearing systems |
| US11350226B2 (en) | 2015-12-30 | 2022-05-31 | Earlens Corporation | Charging protocol for rechargeable hearing systems |
| WO2017179616A1 (fr) * | 2016-04-15 | 2017-10-19 | 第一精工株式会社 | Système de haut-parleur |
| CN112738700A (zh) | 2016-09-09 | 2021-04-30 | 伊尔兰斯公司 | 智能镜系统和方法 |
| WO2018093733A1 (fr) | 2016-11-15 | 2018-05-24 | Earlens Corporation | Procédure d'impression améliorée |
| DE102017208911A1 (de) * | 2017-05-26 | 2018-11-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanischer Schallwandler |
| US20180352348A1 (en) * | 2017-06-06 | 2018-12-06 | Sonitus Technologies Inc. | Bone conduction device |
| KR102452952B1 (ko) | 2017-12-06 | 2022-10-12 | 삼성전자주식회사 | 방향성 음향 센서 및 이를 포함하는 전자 장치 |
| WO2019173470A1 (fr) | 2018-03-07 | 2019-09-12 | Earlens Corporation | Dispositif auditif de contact et matériaux de structure de rétention |
| WO2019199680A1 (fr) | 2018-04-09 | 2019-10-17 | Earlens Corporation | Filtre dynamique |
| DE102018207922A1 (de) * | 2018-05-18 | 2019-11-21 | Vibrosonic Gmbh | Mehrteiliges, tief im Gehörgang platziertes Trommelfell-Kontakt-Hörgerät |
| DK3579578T3 (da) | 2018-06-07 | 2022-05-02 | Sonion Nederland Bv | Miniaturelydgiver |
| DE102018220731B3 (de) | 2018-11-30 | 2020-06-04 | Med-El Elektromedizinische Geräte GmbH | Elektroakustischer Wandler zur Implantation in ein Ohr, Verfahren zur Herstellung eines solchen und Cochlea-Implantatsystem |
| EP3675522A1 (fr) * | 2018-12-28 | 2020-07-01 | Sonion Nederland B.V. | Haut-parleur miniature essentiellement sans fuite acoustique |
| DE102019201273A1 (de) * | 2019-01-31 | 2020-08-06 | Vibrosonic Gmbh | Vibrationsmodul zum Auflegen auf ein Trommelfell |
| EP3733311A1 (fr) | 2019-05-02 | 2020-11-04 | Ecole Polytechnique Federale De Lausanne (EPFL) EPFL-TTO | Actionnement de structures piézoélectriques à l'aide de films minces ferroélectriques ayant plusieurs éléments |
| WO2020235131A1 (fr) | 2019-05-17 | 2020-11-26 | 株式会社村田製作所 | Dispositif piézoélectrique |
| DE102019116080A1 (de) | 2019-06-13 | 2020-12-17 | USound GmbH | MEMS-Schallwandler mit einer aus Polymer ausgebildeten Membran |
| CN114830520B (zh) | 2019-12-17 | 2026-04-24 | 株式会社村田制作所 | 换能器 |
| EP4082961A4 (fr) | 2019-12-25 | 2023-10-25 | Denso Corporation | Élément piézoélectrique, dispositif piézoélectrique et procédé de fabrication d'élément piézoélectrique |
| US11202138B2 (en) * | 2020-03-05 | 2021-12-14 | Facebook Technologies, Llc | Miniature high performance MEMS piezoelectric transducer for in-ear applications |
| DE112021001186T5 (de) * | 2020-04-30 | 2022-12-15 | Murata Manufacturing Co., Ltd. | Piezoelektrisches bauelement |
| US11972749B2 (en) | 2020-07-11 | 2024-04-30 | xMEMS Labs, Inc. | Wearable sound device |
| US11323797B2 (en) * | 2020-07-11 | 2022-05-03 | xMEMS Labs, Inc. | Acoustic transducer, wearable sound device and manufacturing method of acoustic transducer |
| US11884535B2 (en) | 2020-07-11 | 2024-01-30 | xMEMS Labs, Inc. | Device, package structure and manufacturing method of device |
| US12088988B2 (en) * | 2020-07-11 | 2024-09-10 | xMEMS Labs, Inc. | Venting device and venting method thereof |
| US12022253B2 (en) | 2020-07-11 | 2024-06-25 | xMEMS Labs, Inc. | Venting device |
| US12151934B2 (en) | 2020-07-11 | 2024-11-26 | xMEMS Labs, Inc. | Device and method of equalizing low frequency roll off for wearable sound device |
| US12028673B2 (en) | 2020-07-11 | 2024-07-02 | xMEMS Labs, Inc. | Driving circuit and wearable sound device thereof |
| US12157663B2 (en) * | 2020-07-11 | 2024-12-03 | xMEMS Labs, Inc. | Venting device, manufacturing method of venting device, venting method and device |
| US11399228B2 (en) | 2020-07-11 | 2022-07-26 | xMEMS Labs, Inc. | Acoustic transducer, wearable sound device and manufacturing method of acoustic transducer |
| DE102021130035A1 (de) * | 2021-11-17 | 2023-05-17 | USound GmbH | MEMS-Schallwandler mit einer gekrümmten Kontur eines Kragarmelements |
| WO2023150154A1 (fr) * | 2022-02-03 | 2023-08-10 | Massachusetts Institute Of Technology | Microphone piézoélectrique entièrement différentiel et système amplificateur pour implants cochléaires et autres dispositifs auditifs |
| EP4258691B1 (fr) | 2022-04-08 | 2026-01-21 | STMicroelectronics S.r.l. | Transducteur électroacoustique microélectromécanique à membrane |
| CN217693709U (zh) * | 2022-06-20 | 2022-10-28 | 瑞声开泰科技(武汉)有限公司 | Mems扬声器 |
| EP4456551A1 (fr) * | 2023-04-24 | 2024-10-30 | GN Audio A/S | Dispositif auditif comprenant une cloison |
| WO2025011711A2 (fr) | 2023-07-07 | 2025-01-16 | Friedrich Bock | Connexion par câble ; appareil électronique ; procédé pour établir de manière réversible une connexion de câble d'un appareil électronique ; procédé pour changer différents appareils ; bouchon de fermeture pour l'oreille d'un être vivant ; procédé pour augmenter l'effet acoustique d'un appareil électronique ; procédé pour protéger l'ouïe d'un être vivant ; procédé d'audiométrie ; adaptateur audio |
| US12317034B2 (en) * | 2023-09-21 | 2025-05-27 | xMEMS Labs, Inc. | Air-pulse generating device with tooth edge patterned slit |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2540187A (en) * | 1947-12-26 | 1951-02-06 | Zenith Radio Corp | Piezoelectric transducer and method for producing same |
| US2900536A (en) * | 1954-11-18 | 1959-08-18 | Astatic Corp | Design of electro-mechanical transducer elements |
| DE1200890B (de) * | 1960-03-07 | 1965-09-16 | Siemens Ag | Biegungsschwinger aus scheibenfoermigem elektrostriktivem Material |
| JPS61150499A (ja) * | 1984-12-24 | 1986-07-09 | Sawafuji Dainameka Kk | 分割形圧電振動板 |
| WO1997022154A1 (fr) * | 1995-12-15 | 1997-06-19 | The Penn State Research Foundation | Transducteurs composites en ceramique electroactive/metal |
| WO2005006809A1 (fr) * | 2003-07-09 | 2005-01-20 | Shimada Manufacturing Co., Ltd. | Generateur piezoelectrique de vibrations et dispositif de transmission de sons vibratoires |
| US20050228214A1 (en) * | 2004-04-09 | 2005-10-13 | Schneider Robert E | Implantable hearing aid transducer retention apparatus |
| US20060087203A1 (en) * | 2004-10-27 | 2006-04-27 | Kyungpook National University Industry-Academic Cooperation Foundation | Piezoelectric type vibrator, implantable hearing aid with the same, and method of implanting the same |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1875A (en) * | 1840-12-01 | Improvement in the mode of heating buildings by means of an apparatus consisting of | ||
| US2386279A (en) * | 1942-07-21 | 1945-10-09 | Raymond W Tibbetts | Piezoelectric device |
| FR1601030A (fr) * | 1968-01-08 | 1970-08-03 | ||
| JP2886588B2 (ja) * | 1989-07-11 | 1999-04-26 | 日本碍子株式会社 | 圧電/電歪アクチュエータ |
| DE4104358A1 (de) * | 1991-02-13 | 1992-08-20 | Implex Gmbh | Implantierbares hoergeraet zur anregung des innenohres |
| DE4135408A1 (de) * | 1991-10-26 | 1993-04-29 | Man Nutzfahrzeuge Ag | Verfahren zur umwandlung elektrischer energie in mechanische schwingungen, sowie vorrichtungen zur durchfuehrung dieses verfahrens |
| USH1875H (en) | 1996-07-22 | 2000-10-03 | Microtronic A/S | Electroacoustic transducer |
| US5899847A (en) * | 1996-08-07 | 1999-05-04 | St. Croix Medical, Inc. | Implantable middle-ear hearing assist system using piezoelectric transducer film |
| FR2788176B1 (fr) * | 1998-12-30 | 2001-05-25 | Thomson Csf | Dispositif a ondes acoustiques guidees dans une fine couche de materiau piezo-electrique collee par une colle moleculaire sur un substrat porteur et procede de fabrication |
| US6277148B1 (en) | 1999-02-11 | 2001-08-21 | Soundtec, Inc. | Middle ear magnet implant, attachment device and method, and test instrument and method |
| DE10046938A1 (de) * | 2000-09-21 | 2002-04-25 | Implex Ag Hearing Technology I | Mindestens teilimplantierbares Hörsystem mit direkter mechanischer Stimulation eines lymphatischen Raums des Innenohres |
| US7646544B2 (en) * | 2005-05-14 | 2010-01-12 | Batchko Robert G | Fluidic optical devices |
| JP2004532743A (ja) * | 2000-10-25 | 2004-10-28 | ワシントン ステート ユニバーシティ リサーチ ファウンデーション | 圧電マイクロトランスデューサ、その使用法および製造法 |
| US7275292B2 (en) * | 2003-03-07 | 2007-10-02 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Method for fabricating an acoustical resonator on a substrate |
| CA2521688C (fr) * | 2003-06-26 | 2012-01-03 | Med-El Elektromedizinische Geraete Gmbh | Systeme et procede permettant de diminuer l'effet des champs magnetiques sur un transducteur magnetique |
| US7442164B2 (en) * | 2003-07-23 | 2008-10-28 | Med-El Elektro-Medizinische Gerate Gesellschaft M.B.H. | Totally implantable hearing prosthesis |
| CA2620323A1 (fr) | 2005-08-22 | 2007-03-01 | 3Win N.V. | Ensemble combine comprenant un actionneur de vibrateur et un dispositif implantable |
| JP5309626B2 (ja) * | 2007-03-14 | 2013-10-09 | 株式会社ニコン | 振動アクチュエータ、振動子の製造方法及び振動アクチュエータの製造方法 |
| US8042916B2 (en) * | 2007-03-31 | 2011-10-25 | Micropoint Biosciences, Inc. | Micromachined fluid ejector array |
| DE102010009453A1 (de) | 2010-02-26 | 2011-09-01 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Schallwandler zum Einsetzen in ein Ohr |
-
2010
- 2010-02-26 DE DE102010009453A patent/DE102010009453A1/de not_active Ceased
-
2011
- 2011-02-24 US US13/034,141 patent/US9497556B2/en active Active
- 2011-02-25 DK DK11001587.2T patent/DK2362686T3/en active
- 2011-02-25 EP EP11001587.2A patent/EP2362686B1/fr active Active
-
2016
- 2016-10-03 US US15/283,782 patent/US10206045B2/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2540187A (en) * | 1947-12-26 | 1951-02-06 | Zenith Radio Corp | Piezoelectric transducer and method for producing same |
| US2900536A (en) * | 1954-11-18 | 1959-08-18 | Astatic Corp | Design of electro-mechanical transducer elements |
| DE1200890B (de) * | 1960-03-07 | 1965-09-16 | Siemens Ag | Biegungsschwinger aus scheibenfoermigem elektrostriktivem Material |
| JPS61150499A (ja) * | 1984-12-24 | 1986-07-09 | Sawafuji Dainameka Kk | 分割形圧電振動板 |
| WO1997022154A1 (fr) * | 1995-12-15 | 1997-06-19 | The Penn State Research Foundation | Transducteurs composites en ceramique electroactive/metal |
| WO2005006809A1 (fr) * | 2003-07-09 | 2005-01-20 | Shimada Manufacturing Co., Ltd. | Generateur piezoelectrique de vibrations et dispositif de transmission de sons vibratoires |
| US20050228214A1 (en) * | 2004-04-09 | 2005-10-13 | Schneider Robert E | Implantable hearing aid transducer retention apparatus |
| US20060087203A1 (en) * | 2004-10-27 | 2006-04-27 | Kyungpook National University Industry-Academic Cooperation Foundation | Piezoelectric type vibrator, implantable hearing aid with the same, and method of implanting the same |
Non-Patent Citations (1)
| Title |
|---|
| HONG E-P ET AL: "VIBRATION MODELING AND DESIGN OF PIEZOELECTRIC FLOATING MASS TRANSDUCER FOR IMPLANTABLE MIDDLE EAR HEARING DEVICES", IEICE TRANSACTIONS ON FUNDAMENTALS OF ELECTRONICS,COMMUNICATIONS AND COMPUTER SCIENCES, ENGINEERING SCIENCES SOCIETY, TOKYO, JP, vol. E90A, no. 8, 1 August 2007 (2007-08-01), pages 1620 - 1627, XP001506577, ISSN: 0916-8508, DOI: 10.1093/IETFEC/E90-A.8.1620 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10293377B2 (en) | 2014-10-02 | 2019-05-21 | Chirp Microsystems | Micromachined ultrasonic transducers with a slotted membrane structure |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2362686B1 (fr) | 2016-08-03 |
| DE102010009453A1 (de) | 2011-09-01 |
| EP2362686A2 (fr) | 2011-08-31 |
| US10206045B2 (en) | 2019-02-12 |
| US20120053393A1 (en) | 2012-03-01 |
| US20170094417A1 (en) | 2017-03-30 |
| DK2362686T3 (en) | 2016-12-05 |
| US9497556B2 (en) | 2016-11-15 |
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