EP2385257A3 - Vakuumpumpstufe - Google Patents

Vakuumpumpstufe Download PDF

Info

Publication number
EP2385257A3
EP2385257A3 EP11002911.3A EP11002911A EP2385257A3 EP 2385257 A3 EP2385257 A3 EP 2385257A3 EP 11002911 A EP11002911 A EP 11002911A EP 2385257 A3 EP2385257 A3 EP 2385257A3
Authority
EP
European Patent Office
Prior art keywords
rotor
channel
vacuum pump
pump stage
rotor section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP11002911.3A
Other languages
English (en)
French (fr)
Other versions
EP2385257A2 (de
EP2385257B1 (de
Inventor
Armin Conrad
Aleksandr Shirinov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2385257A2 publication Critical patent/EP2385257A2/de
Publication of EP2385257A3 publication Critical patent/EP2385257A3/de
Application granted granted Critical
Publication of EP2385257B1 publication Critical patent/EP2385257B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpstufe (100; 610) mit einem Einlass (104; 604), einem Auslass (106; 606), einem Rotor (112; 212; 312) und einem Kanal (108; 208; 308), wobei der Rotor mit einem Rotorabschnitt in den Kanal eintaucht und durch Zusammenwirken von Rotorabschnitt und Kanal eine Pumpwirkung erreicht wird, und mit einem zwischen Einlass und Auslass angeordneten Abstreifer (110). Um eine Vakuumpumpstufe bereitzustellen, die sowohl im viskosen als auch im molekularen Strömungsbereich Kompression und Saugvermögen besitzt, wird vorgeschlagen, dass der Rotorabschnitt Gestaltungselemente (114, 116; 214; 314, 340) aufweist, durch die die Pumpwirkung im molekularen Strömungsbereich nach Gaede und im höheren Druckbereich nach dem Seitenkanalprinzip bewirkt wird.
EP11002911.3A 2010-05-08 2011-04-07 Vakuumpumpstufe Not-in-force EP2385257B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010019940.0A DE102010019940B4 (de) 2010-05-08 2010-05-08 Vakuumpumpstufe

Publications (3)

Publication Number Publication Date
EP2385257A2 EP2385257A2 (de) 2011-11-09
EP2385257A3 true EP2385257A3 (de) 2014-09-03
EP2385257B1 EP2385257B1 (de) 2017-10-18

Family

ID=44144686

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11002911.3A Not-in-force EP2385257B1 (de) 2010-05-08 2011-04-07 Vakuumpumpstufe

Country Status (3)

Country Link
EP (1) EP2385257B1 (de)
JP (1) JP6302615B2 (de)
DE (1) DE102010019940B4 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013108482A1 (de) 2013-08-06 2015-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
DE102013114290A1 (de) * 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4141674A (en) * 1975-02-13 1979-02-27 Siemens Aktiengesellschaft Impeller for a ring compressor
WO2005033520A1 (en) * 2003-09-30 2005-04-14 The Boc Group Plc Vacuum pump

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE605902C (de) 1932-01-08 1934-11-20 Hugo Seemann Dr Turbohochvakuumpumpe
DE2034285A1 (de) 1970-07-10 1972-01-13 Pfeiffer Vakuumtechnik Molekularpumpe
US5238362A (en) 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
DE19930952A1 (de) 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
US6641361B2 (en) 2001-12-12 2003-11-04 Visteon Global Technologies, Inc. Fuel pump impeller for high flow applications
US6607351B1 (en) * 2002-03-12 2003-08-19 Varian, Inc. Vacuum pumps with improved impeller configurations
ITTO20020370A1 (it) * 2002-05-06 2003-11-06 Varian Spa Stadio di pompaggio per pompa da vuoto.
US6974302B2 (en) 2002-06-06 2005-12-13 Hitachi Unisia Automotive, Ltd. Turbine fuel pump
GB0229356D0 (en) 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4141674A (en) * 1975-02-13 1979-02-27 Siemens Aktiengesellschaft Impeller for a ring compressor
WO2005033520A1 (en) * 2003-09-30 2005-04-14 The Boc Group Plc Vacuum pump

Also Published As

Publication number Publication date
EP2385257A2 (de) 2011-11-09
JP6302615B2 (ja) 2018-03-28
DE102010019940B4 (de) 2021-09-23
EP2385257B1 (de) 2017-10-18
JP2011236900A (ja) 2011-11-24
DE102010019940A1 (de) 2011-11-10

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