EP2385257A3 - Etage de pompe à vide - Google Patents
Etage de pompe à vide Download PDFInfo
- Publication number
- EP2385257A3 EP2385257A3 EP11002911.3A EP11002911A EP2385257A3 EP 2385257 A3 EP2385257 A3 EP 2385257A3 EP 11002911 A EP11002911 A EP 11002911A EP 2385257 A3 EP2385257 A3 EP 2385257A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- rotor
- channel
- vacuum pump
- pump stage
- rotor section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102010019940.0A DE102010019940B4 (de) | 2010-05-08 | 2010-05-08 | Vakuumpumpstufe |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP2385257A2 EP2385257A2 (fr) | 2011-11-09 |
| EP2385257A3 true EP2385257A3 (fr) | 2014-09-03 |
| EP2385257B1 EP2385257B1 (fr) | 2017-10-18 |
Family
ID=44144686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP11002911.3A Not-in-force EP2385257B1 (fr) | 2010-05-08 | 2011-04-07 | Etage de pompe à vide |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP2385257B1 (fr) |
| JP (1) | JP6302615B2 (fr) |
| DE (1) | DE102010019940B4 (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013108482A1 (de) | 2013-08-06 | 2015-02-12 | Pfeiffer Vacuum Gmbh | Vakuumpumpstufe |
| DE102013114290A1 (de) * | 2013-12-18 | 2015-06-18 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4141674A (en) * | 1975-02-13 | 1979-02-27 | Siemens Aktiengesellschaft | Impeller for a ring compressor |
| WO2005033520A1 (fr) * | 2003-09-30 | 2005-04-14 | The Boc Group Plc | Pompe a vide |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE605902C (de) | 1932-01-08 | 1934-11-20 | Hugo Seemann Dr | Turbohochvakuumpumpe |
| DE2034285A1 (de) | 1970-07-10 | 1972-01-13 | Pfeiffer Vakuumtechnik | Molekularpumpe |
| US5238362A (en) | 1990-03-09 | 1993-08-24 | Varian Associates, Inc. | Turbomolecular pump |
| DE19930952A1 (de) | 1999-07-05 | 2001-01-11 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
| US6641361B2 (en) | 2001-12-12 | 2003-11-04 | Visteon Global Technologies, Inc. | Fuel pump impeller for high flow applications |
| US6607351B1 (en) * | 2002-03-12 | 2003-08-19 | Varian, Inc. | Vacuum pumps with improved impeller configurations |
| ITTO20020370A1 (it) * | 2002-05-06 | 2003-11-06 | Varian Spa | Stadio di pompaggio per pompa da vuoto. |
| US6974302B2 (en) | 2002-06-06 | 2005-12-13 | Hitachi Unisia Automotive, Ltd. | Turbine fuel pump |
| GB0229356D0 (en) | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping arrangement |
-
2010
- 2010-05-08 DE DE102010019940.0A patent/DE102010019940B4/de not_active Expired - Fee Related
-
2011
- 2011-04-07 EP EP11002911.3A patent/EP2385257B1/fr not_active Not-in-force
- 2011-04-22 JP JP2011095953A patent/JP6302615B2/ja not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4141674A (en) * | 1975-02-13 | 1979-02-27 | Siemens Aktiengesellschaft | Impeller for a ring compressor |
| WO2005033520A1 (fr) * | 2003-09-30 | 2005-04-14 | The Boc Group Plc | Pompe a vide |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2385257A2 (fr) | 2011-11-09 |
| JP6302615B2 (ja) | 2018-03-28 |
| DE102010019940B4 (de) | 2021-09-23 |
| EP2385257B1 (fr) | 2017-10-18 |
| JP2011236900A (ja) | 2011-11-24 |
| DE102010019940A1 (de) | 2011-11-10 |
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