EP2385545A3 - Verfahren und Vorrichtung zum Ultraschallbonden - Google Patents

Verfahren und Vorrichtung zum Ultraschallbonden Download PDF

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Publication number
EP2385545A3
EP2385545A3 EP11176310A EP11176310A EP2385545A3 EP 2385545 A3 EP2385545 A3 EP 2385545A3 EP 11176310 A EP11176310 A EP 11176310A EP 11176310 A EP11176310 A EP 11176310A EP 2385545 A3 EP2385545 A3 EP 2385545A3
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EP
European Patent Office
Prior art keywords
bonding
ultrasonic
during
relates
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP11176310A
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English (en)
French (fr)
Other versions
EP2385545A2 (de
EP2385545B1 (de
Inventor
Hans-Jürgen HESSE
Michael BRÖKELMANN
Sebastian HAGENKÖTTER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hesse GmbH
Original Assignee
Hesse and Knipps GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hesse and Knipps GmbH filed Critical Hesse and Knipps GmbH
Publication of EP2385545A2 publication Critical patent/EP2385545A2/de
Publication of EP2385545A3 publication Critical patent/EP2385545A3/de
Application granted granted Critical
Publication of EP2385545B1 publication Critical patent/EP2385545B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
    • B23K20/004—Wire welding
    • B23K20/005—Capillary welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K31/00—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by any single one of main groups B23K1/00 - B23K28/00
    • B23K31/12—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by any single one of main groups B23K1/00 - B23K28/00 relating to investigating the properties, e.g. the weldability, of materials
    • B23K31/125—Weld quality monitoring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Quality & Reliability (AREA)
  • Wire Bonding (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)

Abstract

Die Erfindung betrifft ein Verfahren zur Qualitätskontrolle beim Ultraschall-Bonden, bei welchem eine Transducer-Bondwerkzeug-Einheit und ein Ultraschall-Generator verwendet werden und bei dem während des Bondens mittels eines oder mehrerer Sensoren Messsignale von einem oder mehreren, während des Bondens variablen Parametern zur Beurteilung der Bondqualität und/oder zur Beeinflussung des Bondens erfasst werden und schlägt zur vorteilhaften Weiterbildung vor, dass während des Bondens zumindest ein den Zeit-Geschwindigkeit-Verlauf der Spitze des Ultraschallwerkzeuges in deren Schwingungsrichtung repräsentierendes Geschwindigkeitsverlauf-Messsignal erfasst wird. Die Erfindung betrifft auch eine Bondvorrichtung, die zur Durchführung des Verfahrens geeignet ist. Die Erfindung betrifft außerdem weitere Verfahren zur Qualitätskontrolle beim Ultraschall-Bonden und zur Durchführung dieser Verfahren geeignete Bondvorrichtungen.
EP11176310.8A 2007-11-12 2008-11-07 Verfahren und Vorrichtung zum Ultraschallbonden Active EP2385545B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007054626A DE102007054626A1 (de) 2007-11-12 2007-11-12 Verfahren und Vorrichtung zum Ultraschallbonden
EP08850453.5A EP2218097B1 (de) 2007-11-12 2008-11-07 Verfahren und vorrichtung zum ultraschallbonden

Related Parent Applications (3)

Application Number Title Priority Date Filing Date
EP08850453.5A Division-Into EP2218097B1 (de) 2007-11-12 2008-11-07 Verfahren und vorrichtung zum ultraschallbonden
EP08850453.5A Division EP2218097B1 (de) 2007-11-12 2008-11-07 Verfahren und vorrichtung zum ultraschallbonden
EP08850453.5 Division 2008-11-07

Publications (3)

Publication Number Publication Date
EP2385545A2 EP2385545A2 (de) 2011-11-09
EP2385545A3 true EP2385545A3 (de) 2012-05-02
EP2385545B1 EP2385545B1 (de) 2016-03-02

Family

ID=40328775

Family Applications (2)

Application Number Title Priority Date Filing Date
EP08850453.5A Active EP2218097B1 (de) 2007-11-12 2008-11-07 Verfahren und vorrichtung zum ultraschallbonden
EP11176310.8A Active EP2385545B1 (de) 2007-11-12 2008-11-07 Verfahren und Vorrichtung zum Ultraschallbonden

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP08850453.5A Active EP2218097B1 (de) 2007-11-12 2008-11-07 Verfahren und vorrichtung zum ultraschallbonden

Country Status (8)

Country Link
US (1) US8783545B2 (de)
EP (2) EP2218097B1 (de)
JP (2) JP5583588B2 (de)
KR (1) KR20100087214A (de)
CN (2) CN101911272B (de)
DE (1) DE102007054626A1 (de)
MY (1) MY155362A (de)
WO (1) WO2009062887A1 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007054626A1 (de) * 2007-11-12 2009-05-14 Hesse & Knipps Gmbh Verfahren und Vorrichtung zum Ultraschallbonden
US20100163601A1 (en) * 2008-12-31 2010-07-01 General Electric Company Friction weld vibration quality monitoring system
US8702882B2 (en) * 2009-11-09 2014-04-22 GM Global Technology Operations LLC Method and system for online quality monitoring and control of a vibration welding process
US20120074206A1 (en) * 2010-09-27 2012-03-29 Kulicke And Soffa Industries, Inc. Methods of forming wire bonds for wire loops and conductive bumps
US9604305B2 (en) * 2011-10-26 2017-03-28 GM Global Technology Operations LLC Quality status display for a vibration welding process
US8757469B2 (en) * 2011-10-26 2014-06-24 GM Global Technology Operations LLC Binary classification of items of interest in a repeatable process
JP5974472B2 (ja) * 2011-12-15 2016-08-23 日産自動車株式会社 ワイヤボンディング装置およびワイヤボンディング方法
CN103077906B (zh) * 2013-02-01 2017-02-08 上海华虹宏力半导体制造有限公司 硅片共晶键合检测方法
TWI522257B (zh) * 2014-07-09 2016-02-21 原相科技股份有限公司 車用安全系統及其運作方法
DE102014116474A1 (de) 2014-11-11 2016-05-12 Herrmann Ultraschalltechnik Gmbh & Co. Kg Ultraschallbearbeitungssystem mit Piezokraftsensor
DE102015120165A1 (de) * 2015-11-20 2017-05-24 Kromberg & Schubert Gmbh Vorrichtung und ein Verfahren zur Überwachung eines Ultraschallschweißprozesses
CN105499109B (zh) * 2015-12-23 2017-08-01 中国科学院声学研究所东海研究站 超声阻垢除垢控制系统
DE102017101736A1 (de) 2017-01-30 2018-08-02 F&K Delvotec Bondtechnik Gmbh Verfahren zur Herstellung von Drahtbondverbindungen und Anordnung zur Durchführung des Verfahrens
KR102242248B1 (ko) * 2017-05-02 2021-04-20 주식회사 엘지화학 이차전지의 용접 검사장치 및 검사방법
DE102019109263B4 (de) * 2019-04-09 2021-11-18 Lisa Dräxlmaier GmbH Verfahren, eine Messvorrichtung und eine Ultraschallschweißanlage zum zerstörungsfreien Prüfen einer Qualität einer Ultraschallschweißung
DE102019109262B4 (de) * 2019-04-09 2025-11-20 Lisa Dräxlmaier GmbH VORRICHTUNG UND VERFAHREN ZUM BESTIMMEN EINES ZUSTANDS EINES ULTRASCHALLSCHWEIßPROZESSES
DE102019109264C5 (de) * 2019-04-09 2025-07-31 Lisa Dräxlmaier GmbH VERFAHREN UND VORRICHTUNG ZUR ÜBERWACHUNG EINER QUALITÄT EINER ULTRASCHALLSCHWEIßUNG
JP2021018849A (ja) * 2019-07-17 2021-02-15 オムロン株式会社 予測装置、データ生成装置、予測装置の制御方法、データ生成装置の制御方法、情報処理プログラム、および記録媒体
GB2595710B (en) * 2020-06-04 2022-06-08 Advance Technical Systems Ltd Operation analysis
EP3960309A1 (de) * 2020-08-31 2022-03-02 Siemens Aktiengesellschaft Resonanzverfahren für ein schwingungssystem, einen umrichter, eine anregungseinheit und das schwingungssystem
CN113029933B (zh) * 2021-02-26 2021-11-16 广东利元亨智能装备股份有限公司 焊接质量检测系统及超声波焊接设备、焊接质量检测方法
CN113023484B (zh) * 2021-03-03 2022-10-04 福建泳力泰针织机械有限公司 一种改良式大圆机送纱机构
US11501116B1 (en) * 2021-07-19 2022-11-15 Sas Institute Inc. Quality prediction using process data
CN114510468A (zh) * 2022-01-26 2022-05-17 高德软件有限公司 数据处理方法及计算机程序产品
CN116738141A (zh) * 2022-12-29 2023-09-12 上海骄成超声波技术股份有限公司 基于双通道特征的焊接状态的识别方法、装置和电子设备
DE102023204150A1 (de) 2023-05-04 2024-11-07 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren und Vorrichtung zur Qualitätskontrolle einer Wirebond-Verbindung
CN117491403B (zh) * 2023-11-03 2024-08-09 北京霍里思特科技有限公司 用于测定煤灰分值的方法、灰分仪和存储介质
CN117600926A (zh) * 2023-12-06 2024-02-27 无锡市科尼格电梯配件有限公司 基于声波辅助的电梯导轨表面精整工艺
CN119682220B (zh) * 2024-12-13 2025-08-26 广州多优家居用品有限公司 一种可调节的超声波缝合机的智能控制方法、设备及系统
CN119536192B (zh) * 2025-01-22 2025-10-24 深圳中宝新材科技有限公司 基于聚类分析模型的智能键合铜丝的功率控制方法及系统
CN120471242B (zh) * 2025-07-17 2025-10-10 深圳市宇斯特电子有限公司 一种陶瓷线路板的制备工艺优化方法及装置

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3458921A (en) * 1965-07-19 1969-08-05 Western Electric Co Short pulse vibratory bonding
DE3429776A1 (de) * 1984-08-13 1986-02-13 Siemens AG, 1000 Berlin und 8000 München Verfahren zur qualitaetskontrolle beim ultraschallschweissen sowie zugehoerige vorrichtung
EP0247291A2 (de) * 1986-05-30 1987-12-02 Crestek, Inc. Kontrollgerät zur Überwachung der Güte von mittels Ultraschall hergestellten unlösbaren Verbindungen an Drähten und Verfahren
EP0275877A2 (de) * 1987-01-21 1988-07-27 Siemens Aktiengesellschaft Überwachung von Bondparametern während des Bondvorganges
US4998664A (en) * 1989-12-22 1991-03-12 Hughes Aircraft Company Bond signature analyzer
WO1999019107A1 (de) * 1997-10-13 1999-04-22 Hesse & Knipps Gmbh Verfahren zur qualitätskontrolle
WO2002070185A1 (de) * 2001-03-02 2002-09-12 Robert Bosch Gmbh Verfahren zum prüfen von durch ultraschall-drahtbonden hergestellten verbindungen
WO2006032316A1 (de) * 2004-09-17 2006-03-30 Hesse & Knipps Gmbh Ultraschalltransducer mit einem in der lagerung angeordneten sensor
EP1897648A1 (de) * 2006-09-05 2008-03-12 Technische Universität Berlin Verfahren und Vorrichtung zur Regelung der Herstellung von Drahtbondverbindungen

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3852999A (en) * 1969-12-29 1974-12-10 Uthe Technology Impedance measuring network
US3794236A (en) * 1973-05-07 1974-02-26 Raytheon Co Monitoring and control means for evaluating the performance of vibratory-type devices
FR2302172A1 (fr) * 1975-02-27 1976-09-24 Podselver Michel Perfectionnements aux appareils de soudage avec pression
US4606490A (en) 1982-08-24 1986-08-19 Asm Assembly Automation Limited Apparatus and method for automatic evaluation of a bond created by an ultrasonic transducer
US4599899A (en) * 1985-02-14 1986-07-15 Caterpillar Tractor Co. Apparatus and method for controlling a sonic device
US4606409A (en) * 1985-06-10 1986-08-19 Baker Oil Tools, Inc. Fluid pressure actuated firing mechanism for a well perforating gun
JPH0777229B2 (ja) * 1988-10-28 1995-08-16 株式会社新川 超音波ワイヤボンディング装置
GB8826488D0 (en) 1988-11-11 1988-12-14 Emhart Deutschland Quality control for wire bonding
JP2708222B2 (ja) * 1989-03-31 1998-02-04 株式会社東芝 ボンディング装置
EP0540189B1 (de) 1991-10-30 1997-01-15 F & K Delvotec Bondtechnik GmbH Steuerungssystem
JP2705423B2 (ja) * 1992-01-24 1998-01-28 株式会社日立製作所 超音波接合装置及び品質モニタリング方法
US5213249A (en) * 1992-05-29 1993-05-25 International Business Machines Corporation Ultrasonic adhesion/dehesion monitoring apparatus with power feedback measuring means
FR2696166B1 (fr) * 1992-09-28 1994-11-18 Escher Wyss Ag Cylindre de guidage d'une bande.
JPH07105413B2 (ja) * 1993-07-30 1995-11-13 株式会社東芝 ワイヤボンディング装置
CN1144278C (zh) * 1998-09-01 2004-03-31 松下电器产业株式会社 压点焊接的判定装置与方法及半导体部件制造装置与方法
US20040076984A1 (en) 2000-12-07 2004-04-22 Roland Eils Expert system for classification and prediction of generic diseases, and for association of molecular genetic parameters with clinical parameters
KR20030066344A (ko) * 2002-02-01 2003-08-09 에섹 트레이딩 에스에이 와이어본더로 접합시에 최적의 접합 파라미터들을결정하기 위한 방법
JP3791424B2 (ja) * 2002-02-15 2006-06-28 松下電器産業株式会社 超音波ボンディング装置及び超音波ボンディング方法
JP4102596B2 (ja) * 2002-05-17 2008-06-18 矢崎総業株式会社 超音波溶着装置
JP2004047944A (ja) * 2002-05-22 2004-02-12 Nec Corp 接合装置および接合の良否判別方法を有する接合方法
JP4434623B2 (ja) * 2003-05-12 2010-03-17 パナソニック株式会社 ボンディング装置およびボンディング方法
DE102004022509A1 (de) * 2004-01-07 2005-08-25 Stapla Ultraschall-Technik Gmbh Verfahren zum Abquetschen und Abdichten eines Rohres
DE102006043605B3 (de) * 2006-09-16 2008-03-27 Stapla Ultraschalltechnik Gmbh Verfahren zur Qualitätsüberwachung beim Ultraschallschweißen
DE102007054626A1 (de) * 2007-11-12 2009-05-14 Hesse & Knipps Gmbh Verfahren und Vorrichtung zum Ultraschallbonden

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3458921A (en) * 1965-07-19 1969-08-05 Western Electric Co Short pulse vibratory bonding
DE3429776A1 (de) * 1984-08-13 1986-02-13 Siemens AG, 1000 Berlin und 8000 München Verfahren zur qualitaetskontrolle beim ultraschallschweissen sowie zugehoerige vorrichtung
EP0247291A2 (de) * 1986-05-30 1987-12-02 Crestek, Inc. Kontrollgerät zur Überwachung der Güte von mittels Ultraschall hergestellten unlösbaren Verbindungen an Drähten und Verfahren
EP0275877A2 (de) * 1987-01-21 1988-07-27 Siemens Aktiengesellschaft Überwachung von Bondparametern während des Bondvorganges
US4998664A (en) * 1989-12-22 1991-03-12 Hughes Aircraft Company Bond signature analyzer
WO1999019107A1 (de) * 1997-10-13 1999-04-22 Hesse & Knipps Gmbh Verfahren zur qualitätskontrolle
WO2002070185A1 (de) * 2001-03-02 2002-09-12 Robert Bosch Gmbh Verfahren zum prüfen von durch ultraschall-drahtbonden hergestellten verbindungen
WO2006032316A1 (de) * 2004-09-17 2006-03-30 Hesse & Knipps Gmbh Ultraschalltransducer mit einem in der lagerung angeordneten sensor
EP1897648A1 (de) * 2006-09-05 2008-03-12 Technische Universität Berlin Verfahren und Vorrichtung zur Regelung der Herstellung von Drahtbondverbindungen

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
BROKELMANN M ET AL: "Bond process monitoring via self-sensing piezoelectric transducers", FREQUENCY CONTROL SYMPOSIUM AND EXPOSITION, 2004. PROCEEDINGS OF THE 2 004 IEEE INTERNATIONAL MONTREAL, CANADA 23-27 AUG. 2004, PISCATAWAY, NJ, USA,IEEE, 23 August 2004 (2004-08-23), pages 125 - 129, XP010784600, ISBN: 978-0-7803-8414-9 *
BROKELMANN M ET AL: "Model based development of an integrated sensor-actuator system for online quality monitoring in ultrasonic wire bonding", AD / AEROSPACE DIVISION, AMERICAN SOCIETY OF MECHANICAL ENGINEERS; 2005 ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, IMECE 2005, AMERICAN SOCIETY OF MECHANICAL ENGINEERS / AEROSPACE DIVISION, US; ORLANDO, FL, USA, vol. 70AD, 1 January 2005 (2005-01-01), pages 219 - 226, XP008149932, ISSN: 0733-4230 *
DONG ZHANG ET AL: "Monitoring wire bonding via time-frequency analysis of horn vibration", IEEE TRANSACTIONS ON ELECTRONICS PACKAGING MANUFACTURING, IEEE, PISCATAWAY, NY, US, vol. 26, no. 3, 1 July 2003 (2003-07-01), pages 216 - 220, XP011105046, ISSN: 1521-334X, DOI: 10.1109/TEPM.2003.820800 *
WANG QIWEN ET AL: "Neural network model for the wire bonding process", COMPUTERS AND OPERATIONS RESEARCH, OXFORD, GB, vol. 20, no. 8, 1 October 1993 (1993-10-01), pages 879 - 888, XP008149894, ISSN: 0305-0548, [retrieved on 20030520], DOI: 10.1016/0305-0548(93)90108-U *

Also Published As

Publication number Publication date
EP2218097B1 (de) 2016-02-24
JP5583588B2 (ja) 2014-09-03
MY155362A (en) 2015-10-15
JP2011503890A (ja) 2011-01-27
EP2218097A1 (de) 2010-08-18
US20100280646A1 (en) 2010-11-04
DE102007054626A1 (de) 2009-05-14
KR20100087214A (ko) 2010-08-03
EP2385545A2 (de) 2011-11-09
EP2385545B1 (de) 2016-03-02
JP5583821B2 (ja) 2014-09-03
CN101911272A (zh) 2010-12-08
WO2009062887A1 (de) 2009-05-22
CN102543792B (zh) 2014-11-05
US8783545B2 (en) 2014-07-22
JP2013153236A (ja) 2013-08-08
CN101911272B (zh) 2013-01-02
CN102543792A (zh) 2012-07-04

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