EP2491407A4 - Mécanisme d'alignement et d'antidérive - Google Patents

Mécanisme d'alignement et d'antidérive

Info

Publication number: EP2491407A4
Authority: EP; European Patent Office
Prior art keywords: antiderive; alignment; antiderive mechanism
Prior art date: 2009-10-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

EP09850676.9A

Other languages

German (de)

English (en)

Other versions

EP2491407A1 (fr

Inventor

Ing-Shouh Hwang

En-Te Hwu

Hans Ulrich Danzebrink

Hartmut Illers

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Academia Sinica

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2009-10-23

Filing date

2009-10-23

Publication date

2014-03-26

2009-10-23 Application filed filed Critical

2012-08-29 Publication of EP2491407A1 publication Critical patent/EP2491407A1/fr

2014-03-26 Publication of EP2491407A4 publication Critical patent/EP2491407A4/fr

Status Withdrawn legal-status Critical Current

Links

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/06—Circuits or algorithms therefor
- G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself

Landscapes

Physics & Mathematics (AREA)
Health & Medical Sciences (AREA)
General Health & Medical Sciences (AREA)
General Physics & Mathematics (AREA)
Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
Radiology & Medical Imaging (AREA)
Length Measuring Devices By Optical Means (AREA)
Optical Recording Or Reproduction (AREA)

EP09850676.9A 2009-10-23 2009-10-23 Mécanisme d'alignement et d'antidérive Withdrawn EP2491407A4 (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
PCT/US2009/061822 WO2011049577A1 (fr)	2009-10-23	2009-10-23	Mécanisme d'alignement et d'antidérive

Publications (2)

Publication Number	Publication Date
EP2491407A1 EP2491407A1 (fr)	2012-08-29
EP2491407A4 true EP2491407A4 (fr)	2014-03-26

Family

ID=43900588

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP09850676.9A Withdrawn EP2491407A4 (fr)	2009-10-23	2009-10-23	Mécanisme d'alignement et d'antidérive

Country Status (3)

Country	Link
EP (1)	EP2491407A4 (fr)
CN (1)	CN102844665B (fr)
WO (1)	WO2011049577A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP6706519B2 (ja) *	2015-03-31	2020-06-10	株式会社日立ハイテクサイエンス	走査プローブ顕微鏡、走査プローブ顕微鏡の測定レンジ調整方法及び測定レンジ調整プログラム
CN107228621A (zh) *	2017-06-08	2017-10-03	重庆腾毅兴精密电子有限公司	一种音圈马达摆动检测装置及其方法
CN107238361B (zh) *	2017-06-08	2019-09-06	蔡银花	一种音圈马达位移精度及可靠性检测方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5661548A (en) *	1994-11-30	1997-08-26	Nikon Corporation	Projection exposure method and apparatus including a changing system for changing the reference image-formation position used to generate a focus signal
EP0807799A1 (fr) *	1996-05-13	1997-11-19	Seiko Instruments Inc.	Appareil de balayage pour une sonde
WO2001022468A1 (fr) *	1999-09-20	2001-03-29	Veeco Instruments, Inc.	Microactionneur sans recul a grande largeur de bande
US7247827B1 (en) *	2006-05-31	2007-07-24	Academia Sinica	System for measurement of the height, angle and their variations of the surface of an object
US20080277582A1 (en) *	2007-05-07	2008-11-13	Veeco Instruments Inc.	Closed loop controller and method for fast scanning probe microscopy

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5852232A (en) *	1997-01-02	1998-12-22	Kla-Tencor Corporation	Acoustic sensor as proximity detector
US6590208B2 (en) *	2001-01-19	2003-07-08	Veeco Instruments Inc.	Balanced momentum probe holder
JP2003215018A (ja) *	2002-01-23	2003-07-30	Jeol Ltd	表面情報測定方法及び表面情報測定装置
KR100501893B1 (ko) *	2002-11-14	2005-07-25	한국전자통신연구원	주파수 응답 분리 방식을 이용한 비접촉식 측정 장치 및그 측정 방법
US6845655B2 (en) *	2003-03-17	2005-01-25	Wisconsin Alumni Research Foundation	Heterodyne feedback system for scanning force microscopy and the like

2009
- 2009-10-23 CN CN200980162097.3A patent/CN102844665B/zh not_active Expired - Fee Related
- 2009-10-23 EP EP09850676.9A patent/EP2491407A4/fr not_active Withdrawn
- 2009-10-23 WO PCT/US2009/061822 patent/WO2011049577A1/fr not_active Ceased

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5661548A (en) *	1994-11-30	1997-08-26	Nikon Corporation	Projection exposure method and apparatus including a changing system for changing the reference image-formation position used to generate a focus signal
EP0807799A1 (fr) *	1996-05-13	1997-11-19	Seiko Instruments Inc.	Appareil de balayage pour une sonde
WO2001022468A1 (fr) *	1999-09-20	2001-03-29	Veeco Instruments, Inc.	Microactionneur sans recul a grande largeur de bande
US7247827B1 (en) *	2006-05-31	2007-07-24	Academia Sinica	System for measurement of the height, angle and their variations of the surface of an object
US20080277582A1 (en) *	2007-05-07	2008-11-13	Veeco Instruments Inc.	Closed loop controller and method for fast scanning probe microscopy

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2011049577A1 *

Also Published As

Publication number	Publication date
EP2491407A1 (fr)	2012-08-29
CN102844665A (zh)	2012-12-26
CN102844665B (zh)	2015-04-29
WO2011049577A1 (fr)	2011-04-28

Legal Events

Date	Code	Title	Description
2012-07-27	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
2012-08-29	17P	Request for examination filed	Effective date: 20120420
2012-08-29	AK	Designated contracting states	Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
2013-01-30	DAX	Request for extension of the european patent (deleted)
2014-03-26	A4	Supplementary search report drawn up and despatched	Effective date: 20140225
2014-03-26	RAP1	Party data changed (applicant data changed or rights of an application transferred)	Owner name: ACADEMIA SINICA
2014-03-26	RIC1	Information provided on ipc code assigned before grant	Ipc: G01Q 10/06 20100101AFI20140219BHEP
2017-03-03	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: EXAMINATION IS IN PROGRESS
2017-04-05	17Q	First examination report despatched	Effective date: 20170301
2017-11-17	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN
2017-12-20	18D	Application deemed to be withdrawn	Effective date: 20170712

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