EP2520807A2 - Pompe à vide avec rotor - Google Patents

Pompe à vide avec rotor Download PDF

Info

Publication number
EP2520807A2
EP2520807A2 EP12002241A EP12002241A EP2520807A2 EP 2520807 A2 EP2520807 A2 EP 2520807A2 EP 12002241 A EP12002241 A EP 12002241A EP 12002241 A EP12002241 A EP 12002241A EP 2520807 A2 EP2520807 A2 EP 2520807A2
Authority
EP
European Patent Office
Prior art keywords
balancing
rotor
vacuum pump
state
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP12002241A
Other languages
German (de)
English (en)
Other versions
EP2520807A3 (fr
EP2520807B1 (fr
Inventor
Helmut Bernhardt
Wolfgang Lobach
Herbert Stammler
Anja Stroh
Bernhard Tatzber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2520807A2 publication Critical patent/EP2520807A2/fr
Publication of EP2520807A3 publication Critical patent/EP2520807A3/fr
Application granted granted Critical
Publication of EP2520807B1 publication Critical patent/EP2520807B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/662—Balancing of rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings

Definitions

  • the invention relates to a vacuum pump according to the preamble of claim 1, an arrangement according to the preamble of claim 14 and a method according to the preamble of claim 15.
  • the running quality of a vacuum pump depends crucially on the balancing quality of the rotor or the rotors.
  • a very high balancing quality can be achieved, since the balancing process is carried out under the best conditions and partly in special devices.
  • vacuum pumps in particular molecular and turbomolecular vacuum pumps, were only used in clean applications where the lowest possible end pressure was of prime importance. Today they are exposed to very different conditions. Vacuum pumps are increasingly being used to extract process gases, which in some cases lead to extreme process deposits on the rotor and in the pumping system. The balancing quality of a vacuum pump can deteriorate to a high degree of contamination within just a few months so far that further operation is permitted only after re-balancing.
  • One of these measures is targeted temperature management. In this individual areas of the vacuum pump are subjected to a heat treatment in order to avoid deposits.
  • Another solution for limiting deposits is to add inert gas.
  • the goal is either an extensive delimitation of the process components from the surfaces of the vacuum pump or an acceleration of the pumping speed.
  • the claimed features create a vacuum pump whose balancing quality can be improved in the simplest way. This can be done at the customer's site.
  • the invention can be carried out so that the vacuum pump does not have to be removed from the customer's device. Instead of a costly exchange with possibly subsequent disassembly of the vacuum pump, a fast rebalancing occurs in a process break. This achieves an enormous cost and time advantage.
  • FIG. 1 An arrangement with a vacuum pump.
  • a chamber 2 in which, for example, a coating process takes place, has a chamber flange 4, to which a vacuum-tight vacuum pump 10 is attached in a gas-tight manner.
  • the vacuum pump houses a rotor 20. Gas, which is conveyed and compressed in the vacuum pump, is transferred to the gas outlet line 6, which leads, for example, to a backing pump, not shown, which then compresses the gas to atmospheric pressure.
  • the vacuum pump has a pump electronics 12, which can be flanged directly to the vacuum pump. Within the pump electronics electronic assemblies are provided for various tasks, such as drive modules, interface controls and the like. With the pump electronics, a display element 16 is connected, which as a screen in the housing of the pump electronics, as a detachably connected handset with optical Signal instrument or as connected via an interface computer can be executed.
  • FIG Fig. 2 A first embodiment of the interior of the vacuum pump is shown in FIG Fig. 2 shown schematically.
  • the rotor 20 has a shaft 22 which carries at least one disc hub 24 to which a ring of blades 26 is attached.
  • a first end of the shaft is supported by a radial permanent magnet bearing 44 comprising a bearing stator 46 and a bearing rotor 48.
  • a fishing camp 36 prevents the contact of Lagerstator and bearing rotor in the case of high and excessive deflection of leading forces on the rotor.
  • a second end of the shaft is opposite the first.
  • the shaft is rotatably supported by a rolling bearing 50 in the axial and radial directions.
  • a motor magnet 40 is mounted on the shaft, which cooperates with a powered motor stator 38 and the shaft in rapid rotation about a rotation axis 200.
  • the rotor has a Holwecknabe 30 rotatably connected to the shaft, which carries a Holweckzylinder 32.
  • Balancing holes and introduced therein, for example, screwed, balancing weights are provided near the permanent magnet bearing.
  • a second plurality of balancing bores 106 with balancing weights 108 are mounted in the axle hub.
  • the energization of the motor stator is effected by a drive control 130 connected to the motor stator by means of current supply lines.
  • a rotor position detection unit 132 is connected to the energizing lines by means of position detection taps 142 and evaluates the rotor position from the signals of the energizing lines, for example the counter-electromotive force induced by the motor magnet. Conceivable is the use of Hall probes or the like, but the example shown has a cost advantage by eliminating components and avoids a source of error.
  • the rotor position detection unit can be part of the drive control and, for example, resort to a running in the drive control motor model in the case of a sinusoidally commutated synchronous motor to determine the rotor position.
  • a vibration sensor 50 is connected, which receives the vibrations of the rolling bearing. In this vibration signal, the information about the imbalance of the rotor 20 is included.
  • the vibration sensor is operatively connected via a sensor connection 144 to an evaluation unit 132. This is also operatively connected by means of a position detection connection 148 with the rotor position detection unit.
  • the evaluation unit is designed so that it generates the information about the imbalance from the vibration signal and assigns the information about the rotor position.
  • an assignment means for example, provided on the Holwecknabe recess 100 on the rotor, it is possible to unambiguously allocate the information about the unbalance the balancing bores and balancing weights.
  • FIG. 3 a likewise suitable embodiment of the inner life of the vacuum pump 10 before.
  • the rotor 20 comprises in this example, in addition to the shaft 22 a bell-shaped body 28, often called also short bell, which carries the blades 26. Through the bell, a cavity is created, in which the shaft is arranged. Surrounding it, it at least partially incorporates the components of a magnetic bearing to support the rotor in five axes.
  • the rotor has balancing means comprising balancing bores and balancing weights.
  • the balancing bores 102 of the first balancing plane and the balancing weights 104 located therein are located on the front side of the bell, on the outside facing away from the shaft.
  • the balancing bores 106 and the balancing weights 108 of the second balancing plane contained therein are provided on the casing of the bell between two blade rows.
  • a cover 80 may be provided which protects the balancing bores of the first level and is releasably connected to the bell.
  • closure 82 which is designed for example as a circulating around the bell metal band.
  • An assignment means which is designed for example as a small recess 100 in the form of a reduction, allows an assignment of the balancing bores to the position of the motor magnet and thus the assignment of the balancing state of the rotor to the balancing bores.
  • the assignment means in the example shown, the recess, be similar to the balancing holes covered.
  • Fig. 3 an alternative is shown, which is also applicable to the balancing bores and balancing weights.
  • a blocking gas inlet 84 sealing gas is admitted under the bell, whereby both the bell and the magnetic bearing are protected from process gases.
  • the marking is now arranged on the bell so that they are flown by the sealing gas and thus process deposits on the marking are suppressed.
  • the magnetic bearing comprises a bell-side end of the shaft associated upper radial bearing stator 60, an upper radial sensor 62, a lower radial bearing stator 64, and a lower radial sensor 66.
  • the storage is effected in two perpendicular spatial directions.
  • the radial sensors provide information about the position of the shaft within the radial bearing stators.
  • the remaining fifth axis is oriented along the axis of rotation 200 and is supported by a thrust bearing.
  • a thrust bearing Serve for this purpose an axial bearing stator 68 and the rotor side a thrust washer 70th
  • the energization of the coils of the radial and axial bearing stators is adjusted in accordance with the signals of the radial and axial sensors by a magnetic bearing controller 136 connected to the sensors and the spools.
  • the signals from the sensors contain the information about the balancing state of the rotor.
  • a sufficient number of backup bearings 36 ensures the storage in de-energized storage.
  • a drive causes the shaft and thus the rotor to rotate rapidly and comprises a motor stator 38 and a motor rotor 40.
  • the energization of the motor stator is effected by the drive controller 130 via supply lines 140.
  • a rotor position detection unit 132 is provided, which detects the rotational position of the rotor in a suitable form.
  • position detection taps 142 are provided with which the position information is determined from the counter-motor force induced by the motor magnet of the motor rotor.
  • An evaluation unit 134 is operatively connected to the rotor bearing detection unit 132 and to the magnetic bearing control 136. It is designed so that a rotor position is assigned to the determined from the magnetic bearing sensor signals balance state of the rotor. Due to the marking of the balancing state is then clearly associated with the balancing bores and balancing weights.
  • Fig. 4 Schematically illustrated are the first balancing plane 204 and the second balancing plane 206, in which balancing weights 104 and 108 are provided. With these balancing weights, the rotor is balanced as well as possible during production, so that a smooth running around the axis of rotation 200 results.
  • the motor rotor has a pronounced direction 202, which follows, for example, from the magnetization direction of a motor magnet. This direction is fixedly assigned to the positions of the balancing bores, since the motor rotor and balancing bores are stationary on the rotor. Again, stationary on the rotor is the marker 100.
  • the effects of imbalance are contained in the sensor signals.
  • the detection can be measured by sensors in two directions perpendicular to the axis of rotation.
  • a sensor may be provided which measures only in one direction and whose signal is then analyzed phase-related, because during the revolution about the axis of rotation, the imbalance is once in the direction and once perpendicular to the sensor direction.
  • the evaluation unit is now designed so that it derives from the balancing state changed by the unbalance a necessary change in individual balancing weights in the balancing planes and assigns them to the rotor position.
  • the absolute value of the unbalance can be output.
  • a simpler embodiment provides to design the evaluation unit so that it determines only the relative change of the balancing state based on the balancing state after the pump has been manufactured. From this follows the necessary change in the balancing means, in the example shown, the individual balancing weights. These changes are first assigned to the rotor position, that is, the direction 202. Since this is in a fixed relationship to the assignment means, the changes are also assigned to this.
  • a service technician After issuing the necessary changes in the balancing weights via the display element 16, which is accordingly adapted to output the information about the change of the balancing means, a service technician is able to make the necessary changes by using the assignment means of Rotor, for example, the recess, seeks and from this starting the individual balancing holes searches and adjusts the balancing weights located therein.
  • the adjustment can be a simple replacement of the balance weight.
  • the balancing weights 104a to 104d are provided, which are distributed on the rotor over the circumference and arranged at a distance from the rotation axis 200.
  • a first spatial direction 212 and a second orthogonal spatial direction 214 span the balancing plane.
  • the rotor can never be made so accurately that the center of mass coincides with the axis of rotation. He is therefore in a production balance state 230, which does not allow smooth running of the rotor at the required high speeds. Therefore, the balance weights are added to achieve an initial balance state 232 where the center of gravity is sufficiently close to the axis of rotation.
  • the masses are used in the initial state 240a to 240d, the rotor is in the tilluchtuchtSh after this process step.
  • deposits progressively change the balancing state according to the balancing curve 250 until the balancing state is achieved by deposits 234. This balancing condition requires rebalancing of the rotor for further operation of the pump.
  • the balancing state is included in the sensor signals.
  • the evaluation unit is designed and designed to change the balancing means to calculate and assign them to the rotor position and the allocation means the balancing means.
  • the absolute value of the imbalance can also be calculated and output. In both cases, as part of the process, the balancing state of the rotor is monitored and assigned to a rotor position.
  • the method now provides that upon a change in the balancing state, for example by the abovementioned deposits, balancing means provided on the rotor are changed to improve the balancing state.
  • balancing means provided on the rotor are changed to improve the balancing state.
  • the mass changes 244a to 244d the balancing weights are brought to the mass according to balances 242a to 242d.
  • the new balancing state 236 is reached which allows further operation of the rotor.
  • FIG. 6 A development of the balancing shows Fig. 6 as a section through a rotor Fig. 3 , whereby the measure also after a rotor after Fig. 2 is applicable.
  • the circumferential row of blades 26 can be seen. These are attached to the bell 28.
  • Balancing bores 106 are distributed over the circumference of the bell. All or part of the balancing bores may be designed as continuous as the balancing bore 112.
  • the assignment means may be used instead of or in addition to that in the Fig. 2 and 3 shown recess comprise a balancing bore with a larger diameter 110.
  • the allocation means provides a non-rotationally symmetrical distribution of the balancing means in the circumferential direction.
  • Fig. 6 this is shown.
  • the balancing bores 106 are located at a normal distance 220, wherein asymmetrically placed bores 114 are provided, which have a shortened distance 222 to at least one of the closest balancing bores.
  • FIGS. 7 and 8 Further embodiments of the allocation means show the FIGS. 7 and 8 .
  • Fig. 7 is a plan view of a rotor 20 shown with bell 28, on the outer periphery of blades 26 are arranged.
  • the assignment means in this example comprises an asymmetric connection screw 152.
  • the asymmetry is achieved by a shorter distance 262 from the axis of rotation.
  • this connection screw may have a different diameter.
  • Other ways of making this connecting screw asymmetrical to the others are conceivable, for example with the aid of washers, markings, color design, to name a few.
  • the balancing means comprises in this example balancing points 154 which are distributed over the circumference. At these points material is removed, for example, in a cutting or grinding manner, whereby the balancing state of the rotor is selectively changed.
  • the asymmetrical connecting screw is assigned to one of the equalization points, so that the balance means uniquely assigns the balance to the rotor position.
  • a section through a rotor with bell 28 at the level of balancing bores 112 is shown.
  • the number of blades and the number of balancing holes are in a proportionable ratio, in the example shown there are eight blades and five balancing holes. By this ratio of the number, it is possible to provide an associated balancing bore 156, which is uniquely associated, for example, with a blade edge 158 of a blade.
  • the allocation means comprises in this example elements of the rotor, namely the blades, in such a way other than the balancing means, namely the balancing bores, about the axis of rotation 200th are distributed, that an unambiguous assignment of the balance and to one of the elements arises.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP12002241.3A 2011-05-05 2012-03-28 Pompe à vide avec rotor Not-in-force EP2520807B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102011105806A DE102011105806A1 (de) 2011-05-05 2011-05-05 Vakuumpumpe mit Rotor

Publications (3)

Publication Number Publication Date
EP2520807A2 true EP2520807A2 (fr) 2012-11-07
EP2520807A3 EP2520807A3 (fr) 2014-09-24
EP2520807B1 EP2520807B1 (fr) 2017-05-10

Family

ID=46000618

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12002241.3A Not-in-force EP2520807B1 (fr) 2011-05-05 2012-03-28 Pompe à vide avec rotor

Country Status (3)

Country Link
EP (1) EP2520807B1 (fr)
JP (1) JP6188278B2 (fr)
DE (1) DE102011105806A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2746585A1 (fr) * 2012-12-18 2014-06-25 Pfeiffer Vacuum GmbH Système à vide
EP2916009A3 (fr) * 2014-03-07 2016-01-13 Pfeiffer Vacuum Gmbh Procédé et dispositif d'équilibrage d'un rotor d'une pompe à vide et pompe à vide
EP3244067A1 (fr) * 2016-05-10 2017-11-15 Pfeiffer Vacuum Gmbh Pompe à vide et procédé de réduction d'un balourd residuel dans une pompe à vide
US11105203B2 (en) 2018-01-29 2021-08-31 Carrier Corporation High efficiency centrifugal impeller with balancing weights

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013113400A1 (de) * 2013-12-03 2015-06-03 Pfeiffer Vacuum Gmbh Pumpe und Verfahren zum Wuchten eines Rotors
EP3244068B1 (fr) * 2016-05-10 2020-01-01 Pfeiffer Vacuum Gmbh Pompe à vide
JP6973348B2 (ja) * 2018-10-15 2021-11-24 株式会社島津製作所 真空ポンプ
JP7363397B2 (ja) * 2019-11-13 2023-10-18 株式会社島津製作所 真空ポンプの振動測定方法および真空ポンプ
DE102023210943A1 (de) 2023-11-03 2025-05-08 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zur Herstellung von Rotoren für Fluidpumpen

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DE3818556A1 (de) * 1988-06-01 1989-12-07 Pfeiffer Vakuumtechnik Magnetlager fuer eine schnell rotierende vakuumpumpe
US5544073A (en) * 1994-06-02 1996-08-06 Computational Systems, Inc. Rotor balancing calculator
DE19627921A1 (de) * 1996-07-11 1998-01-15 Leybold Vakuum Gmbh Verfahren zum Wuchten eines Rotors sowie für die Durchführung dieses Verfahrens geeigneter Rotor
JP2001241393A (ja) * 1999-12-21 2001-09-07 Seiko Seiki Co Ltd 真空ポンプ
JP2003021092A (ja) * 2001-07-03 2003-01-24 Boc Edwards Technologies Ltd 真空ポンプ
JP2003021093A (ja) * 2001-07-05 2003-01-24 Boc Edwards Technologies Ltd 真空ポンプ
JP2003336597A (ja) * 2002-03-12 2003-11-28 Boc Edwards Technologies Ltd ターボ分子ポンプ
JP4400348B2 (ja) * 2004-07-09 2010-01-20 株式会社島津製作所 ターボ分子ポンプおよびバランス修正方法
DE602004025916D1 (de) * 2004-07-20 2010-04-22 Varian Spa Rotationsvakuumpumpe und ihr Auswuchtverfahren
DE102004050743A1 (de) * 2004-10-19 2006-04-20 Pfeiffer Vacuum Gmbh Vibrationsarme Vakuumpumpe
DE102007027711A1 (de) * 2007-06-15 2008-12-18 Pfeiffer Vacuum Gmbh Verfahren zum Betreiben einer Anordnung mit Vakuumpumpe und Anordnung mit einer Vakuumpumpe
JP4934089B2 (ja) * 2008-04-09 2012-05-16 株式会社荏原製作所 ターボ分子ポンプ
JP2011012611A (ja) * 2009-07-02 2011-01-20 Shimadzu Corp 回転体のアンバランス修正方法、アンバランス修正装置および真空ポンプ

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2746585A1 (fr) * 2012-12-18 2014-06-25 Pfeiffer Vacuum GmbH Système à vide
EP2916009A3 (fr) * 2014-03-07 2016-01-13 Pfeiffer Vacuum Gmbh Procédé et dispositif d'équilibrage d'un rotor d'une pompe à vide et pompe à vide
EP3550150A1 (fr) * 2014-03-07 2019-10-09 Pfeiffer Vacuum Gmbh Procédé d'equilibrage d'un rotor d'une pompe à vide ou d'un rotor d'une unité de rotation pour une pompe à vide
EP3244067A1 (fr) * 2016-05-10 2017-11-15 Pfeiffer Vacuum Gmbh Pompe à vide et procédé de réduction d'un balourd residuel dans une pompe à vide
US11105203B2 (en) 2018-01-29 2021-08-31 Carrier Corporation High efficiency centrifugal impeller with balancing weights

Also Published As

Publication number Publication date
EP2520807A3 (fr) 2014-09-24
JP2012233477A (ja) 2012-11-29
EP2520807B1 (fr) 2017-05-10
JP6188278B2 (ja) 2017-08-30
DE102011105806A1 (de) 2012-11-08

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