EP2527048A3 - Verfahren zum Herstellen dünner Schichten und entsprechende Schicht - Google Patents

Verfahren zum Herstellen dünner Schichten und entsprechende Schicht Download PDF

Info

Publication number
EP2527048A3
EP2527048A3 EP20120181651 EP12181651A EP2527048A3 EP 2527048 A3 EP2527048 A3 EP 2527048A3 EP 20120181651 EP20120181651 EP 20120181651 EP 12181651 A EP12181651 A EP 12181651A EP 2527048 A3 EP2527048 A3 EP 2527048A3
Authority
EP
European Patent Office
Prior art keywords
layer
layers
mixture
producing thin
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20120181651
Other languages
English (en)
French (fr)
Other versions
EP2527048A2 (de
EP2527048B1 (de
Inventor
Klaus-Dieter Vissing
Matthias Ott
Christopher DÖLLE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Publication of EP2527048A2 publication Critical patent/EP2527048A2/de
Publication of EP2527048A3 publication Critical patent/EP2527048A3/de
Application granted granted Critical
Publication of EP2527048B1 publication Critical patent/EP2527048B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
    • B05D3/141—Plasma treatment
    • B05D3/145—After-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/08—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2202/00—Metallic substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2202/00—Metallic substrate
    • B05D2202/20—Metallic substrate based on light metals
    • B05D2202/25—Metallic substrate based on light metals based on Al
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2203/00—Other substrates
    • B05D2203/30—Other inorganic substrates, e.g. ceramics, silicon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2601/00—Inorganic fillers
    • B05D2601/20—Inorganic fillers used for non-pigmentation effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • B05D3/061—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation using U.V.
    • B05D3/065—After-treatment
    • B05D3/066—After-treatment involving also the use of a gas
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31663—As siloxane, silicone or silane

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Laminated Bodies (AREA)
  • Paints Or Removers (AREA)

Abstract

Die Erfindung betrifft ein Beschichtungsverfahren, umfassend die Schritte
a) Bereitstellen einer Mischung oder eines Reinstoffs, umfassend oder bestehend aus reaktionsträgen, flüssigen Precursoren,
b) Aufbringen einer flüssigen Schicht aus der Mischung oder dem Reinstoff auf eine zu beschichtende Oberfläche,
c) Vernetzten der flüssigen Precursoren mittels Strahlung mit einer Wellenlänge von ≤ 250 nm, so dass aus der Mischung eine feste Schicht entsteht und die Schicht ≥ 10 Atom-% C umfasst, bezogen auf die Menge der in der Schicht enthaltenen Atome ohne H und F,
und so dass der in der Schicht enthaltene C zu maximal 50 Atom-% des C, bezogen auf die Menge der in der Schicht enthaltenen C-Atome, Bestandteil einer Methoxygruppe ist.
Sie betrifft ferner mittels dieses Verfahrens herstellbare oder erzeugte Schichten und deren Verwendungen sowie entsprechende beschichtete Gegenstände und deren Verwendungen.
EP12181651.6A 2007-04-30 2008-04-30 Verfahren zum Herstellen dünner Schichten und entsprechende Schicht Not-in-force EP2527048B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200710020655 DE102007020655A1 (de) 2007-04-30 2007-04-30 Verfahren zum Herstellen dünner Schichten und entsprechende Schicht
EP08749932A EP2144714A2 (de) 2007-04-30 2008-04-30 Verfahren zum herstellen dünner schichten und entsprechende schicht

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP08749932A Division EP2144714A2 (de) 2007-04-30 2008-04-30 Verfahren zum herstellen dünner schichten und entsprechende schicht
EP08749932.3 Division 2008-04-30

Publications (3)

Publication Number Publication Date
EP2527048A2 EP2527048A2 (de) 2012-11-28
EP2527048A3 true EP2527048A3 (de) 2013-01-16
EP2527048B1 EP2527048B1 (de) 2015-12-30

Family

ID=39809566

Family Applications (2)

Application Number Title Priority Date Filing Date
EP08749932A Withdrawn EP2144714A2 (de) 2007-04-30 2008-04-30 Verfahren zum herstellen dünner schichten und entsprechende schicht
EP12181651.6A Not-in-force EP2527048B1 (de) 2007-04-30 2008-04-30 Verfahren zum Herstellen dünner Schichten und entsprechende Schicht

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP08749932A Withdrawn EP2144714A2 (de) 2007-04-30 2008-04-30 Verfahren zum herstellen dünner schichten und entsprechende schicht

Country Status (4)

Country Link
US (1) US20100173167A1 (de)
EP (2) EP2144714A2 (de)
DE (1) DE102007020655A1 (de)
WO (1) WO2008132230A2 (de)

Families Citing this family (68)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003299296A1 (en) * 2002-11-29 2004-06-23 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Method and device for machining a wafer, in addition to a wafer comprising a separation layer and a support layer
WO2016003888A1 (en) * 2014-06-30 2016-01-07 Immunolight, Llc Improved adhesive bonding composition and method of use
DE102008013166A1 (de) * 2008-03-07 2009-09-10 Iplas Innovative Plasma Systems Gmbh Verfahren zur Herstellung einer interferenzfarbenfreien Schutzschicht
DE102008001014A1 (de) * 2008-04-04 2009-10-08 Bio-Gate Ag Schichtmaterial
DE102008032431A1 (de) * 2008-07-10 2010-01-14 Behr Gmbh & Co. Kg Kondensator, Verfahren zum Herstellen eines Kondensators sowie Verfahren zum Vorbereiten eines Betriebs eines Kondensators
DE102008034041B4 (de) * 2008-07-22 2011-11-10 Krd Sicherheitstechnik Gmbh Kunststoff-Verbundscheibe für insbesondere die Fahrzeugverscheibung
DE102008047118B4 (de) * 2008-09-15 2024-02-01 Dürr Systems Ag Lackieranlagenbauteil
DE102008060708A1 (de) * 2008-12-05 2010-06-17 Dianogen Gmbh Beschichtung von Kunststoffsubstraten für den medizinischen Einsatz zur Verbesserung der bildgebenden Eigenschaften
DE102009027733A1 (de) * 2009-07-15 2011-01-27 Innovative Sensor Technology Ist Ag Sensorelement zur Bestimmung mindestens einer physikalischen Messgröße
DE102009027768B4 (de) * 2009-07-16 2015-02-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Dichtungsartikel
WO2011108671A1 (ja) * 2010-03-04 2011-09-09 イマジニアリング株式会社 被膜形成装置、及び被膜形成物の製造方法
US10066109B2 (en) 2010-04-28 2018-09-04 3M Innovative Properties Company Articles including nanosilica-based primers for polymer coatings and methods
WO2011139573A2 (en) 2010-04-28 2011-11-10 3M Innovative Properties Company Silicone-based material
JP5609324B2 (ja) * 2010-06-30 2014-10-22 大日本印刷株式会社 加飾シートの製造方法、加飾シート及びそれを用いてなる加飾成形品
EP2588287A4 (de) * 2010-07-01 2018-01-17 Inmold Biosystems A/S Verfahren und vorrichtung zur herstellung eines nanostrukturierten oder glatten polymerartikels
BR112013006753A2 (pt) 2010-10-06 2016-06-21 3M Innovative Properties Co artigos antirreflexivos com revestimentos à base de nanossílica e camada de barreira
WO2012051371A1 (en) * 2010-10-15 2012-04-19 3M Innovative Properties Company Ultraviolet radiation crosslinking of silicones
KR20140051162A (ko) * 2011-04-01 2014-04-30 프레지던트 앤드 펠로우즈 오브 하바드 칼리지 투석 유사 치료(ｄｌｔ) 장치
CN102345087A (zh) * 2011-06-17 2012-02-08 范犇 一种用于金属防腐蚀的纳米放射处理装置
KR101335908B1 (ko) 2011-07-21 2013-12-02 씨제이제일제당 (주) 소수성을 갖는 식품 포장재의 제조방법 및 그에 사용되는 몰드
EP2750884A4 (de) * 2011-09-01 2015-04-29 3M Innovative Properties Co Verfahren zur herstellung einer zumindest teilweise gehärteten schicht
DE102011082983A1 (de) * 2011-09-19 2013-03-21 Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG Membran und Sensor mit Membran
KR101281432B1 (ko) 2011-09-21 2013-07-02 한국과학기술원 균일한 기름 코팅이 가능한 식품 포장재, 그의 제조방법 및 그를 제조하기 위한 몰드
US8632860B2 (en) * 2011-11-02 2014-01-21 Sheila Shahidi Method of preparation of multifunctional technical textile by plasma-treatment
EP2626010B1 (de) 2012-02-10 2015-08-26 W & H Dentalwerk Bürmoos GmbH Medizinisches, insbesondere dentales oder chirurgisches, Instrument mit Beschichtung
DE102012007787B4 (de) * 2012-04-20 2016-07-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Wintersportausrüstung, Verfahren zu deren Herstellung und Verwendung einer Beschichtung
DE102012109272B4 (de) 2012-09-28 2022-07-28 PV TECH Plasma und Vakuum Technologie GmbH Nanostrukturierte offenporige Diffusionsschicht für die kontrollierte Abgabe von Kupferionen zum gezielten Abtöten von MRE-Keimen
DE102012021061B4 (de) * 2012-10-24 2018-12-27 Bayerische Motoren Werke Aktiengesellschaft Verfahren zur Herstellung einer Beschichtung auf einer Substratoberfläche
WO2014107524A1 (en) * 2013-01-03 2014-07-10 Elwha Llc Nanoimprint lithography
US9561603B2 (en) 2013-01-03 2017-02-07 Elwha, Llc Nanoimprint lithography
US9302424B2 (en) 2013-01-03 2016-04-05 Elwha, Llc Nanoimprint lithography
US9962863B2 (en) 2013-01-03 2018-05-08 Elwha Llc Nanoimprint lithography
KR102077248B1 (ko) * 2013-01-25 2020-02-13 삼성전자주식회사 기판 가공 방법
DE102013214294B4 (de) 2013-07-22 2021-06-24 Robert Bosch Gmbh Ultraschallsensor
DE102013215912B3 (de) * 2013-08-12 2015-02-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Farbneutral beschichteter kupferhaltiger Gegenstand, Verfahren zu dessen Herstellung sowie Verwendung einer entsprechenden farbneutralen Beschichtung
DE102013215919B3 (de) * 2013-08-12 2015-02-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Farbneutral beschichteter metallhaltiger Gegenstand mit metallhaltiger oder Metall-Oberfläche, Verfahren zu dessen Herstellung sowie Verwendung einer entsprechenden farbneutralen Beschichtung
CN111978921A (zh) 2013-09-30 2020-11-24 圣戈本陶瓷及塑料股份有限公司 成形磨粒及其形成方法
WO2015075040A1 (de) * 2013-11-19 2015-05-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum verbinden von silikongummi mit einem substrat
US20150292815A1 (en) * 2014-04-10 2015-10-15 Applied Materials, Inc. Susceptor with radiation source compensation
US9442344B2 (en) * 2014-06-02 2016-09-13 Vadient Optics, Llc Nanocomposite high order nonlinear optical-element
WO2016019303A1 (en) 2014-07-31 2016-02-04 Carrier Corporation Coated heat exchanger
DE102014217000A1 (de) 2014-08-26 2016-03-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Oberflächenmodifiziertes Silikon und Verfahren zu dessen Herstellung
CN106796914B (zh) * 2014-10-17 2020-07-14 住友大阪水泥股份有限公司 静电卡盘装置
US11216131B2 (en) * 2014-11-20 2022-01-04 Dongwoo Fine-Chem Co., Ltd. Film touch sensor and manufacturing method therefor
KR20160071735A (ko) 2014-12-12 2016-06-22 동우 화인켐 주식회사 필름 터치 센서 및 그의 제조 방법
DE102015101396B4 (de) 2015-01-30 2018-08-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Flächiges Verpackungsmaterial und Verfahren zur Herstellung einer Verpackung und zur Qualitätskontrolle eines Bestrahlungsprozesses
DE102015107744B3 (de) * 2015-05-18 2016-07-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Markierung von Werkstücken und ein derart hergestelltes Werkstück
DE102016205318A1 (de) * 2016-03-31 2017-10-05 BSH Hausgeräte GmbH Oberflächenbeschichtung für hochwertige Weiß- und/oder Grauware
WO2017223173A1 (en) 2016-06-21 2017-12-28 Bridgestone Americas Tire Operations, Llc Methods for treating inner liner surface, inner liners resulting therefrom and tires containing such inner liners
WO2018005810A1 (en) 2016-06-30 2018-01-04 Bridgestone Americas Tire Operations, Llc Methods for treating inner liners, inner liners resulting therefrom and tires containing such inner liners
CN110225834A (zh) 2016-12-15 2019-09-10 普利司通美国轮胎运营有限责任公司 带阻挡物的密封剂层、包括密封剂层的轮胎以及相关方法
CN110214076A (zh) 2016-12-15 2019-09-06 普利司通美国轮胎运营有限责任公司 含有密封剂的轮胎和相关方法
EP3555220B1 (de) 2016-12-15 2022-05-25 Bridgestone Americas Tire Operations, LLC Verfahren zur herstellung von polymerhaltigen beschichtungen auf gehärteten innenauskleidungen, verfahren zur herstellung von reifen mit solchen innenauskleidungen und reifen mit einer derartigen innenauskleidungen
KR102391634B1 (ko) * 2017-07-13 2022-04-27 엘지디스플레이 주식회사 베젤 패턴이 형성된 표시 장치 및 이의 제조 방법
BE1025227B1 (nl) * 2017-11-10 2018-12-06 Hannecard Nv Inrichting en werkwijze met verbeterde anti-adhesie
DE102018108881A1 (de) 2018-04-13 2019-10-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Oberflächenmodifiziertes Silikon, dessen Verwendung in Antihaftbeschichtungen sowie dieses enthaltendes Verbundmaterial
DE102018212540A1 (de) * 2018-07-27 2020-01-30 Bayerische Motoren Werke Aktiengesellschaft Verfahren zum Beschichten eines Kraftfahrzeugrohbauteils sowie Kraftfahrzeugrohbauteil
WO2020092273A1 (en) * 2018-10-30 2020-05-07 Arizona Board Of Regents On Behalf Of Arizona State University Enhanced sorbent membrane for carbon dioxide capture and method for same
DE102019205967A1 (de) 2019-04-25 2020-10-29 Volkswagen Aktiengesellschaft Verfahren zur Vorbehandlung und Beschichtung eines Substrats
DE102019118173A1 (de) 2019-07-04 2021-01-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Oberflächenmodifiziertes Silikon, dessen Verwendung in Antihaftbeschichtungen sowie dieses enthaltendes Verbundmaterial
DE102019120570A1 (de) * 2019-07-30 2021-02-04 Pro-Beam Gmbh & Co. Kgaa Verfahren sowie elektronenstrahlanlage zum bearbeiten von pulverförmigen werkstoffen bei hohen beschleunigungsspannungen
CN111063851B (zh) * 2019-12-30 2022-02-18 江苏厚生新能源科技有限公司 一种图案分布式涂胶隔膜的制备方法
CN112097082A (zh) * 2020-10-19 2020-12-18 深圳市泰迅数码有限公司 一种米碳纤维自拍杆
TWI778474B (zh) * 2020-12-21 2022-09-21 研能科技股份有限公司 室內氣體汙染過濾方法
DE102020135061A1 (de) 2020-12-29 2022-06-30 Ralph Domnick Beschichtungsverfahren und Silizium enthaltende Beschichtung
DE102022106766A1 (de) 2022-03-23 2023-09-28 Bayerische Motoren Werke Aktiengesellschaft Verfahren zum Vorbehandeln einer Oberfläche eines Werkstücks
CN115537800B (zh) * 2022-09-29 2024-09-27 江苏大学 一种金属表面多级超疏水结构的加工系统及其制备方法
CN119237206B (zh) * 2024-11-15 2025-04-18 江苏吉福新材料股份有限公司 一种抗菌装饰板用抗菌耐磨涂层喷涂设备及使用方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0588038A1 (de) * 1992-09-09 1994-03-23 Heraeus Noblelight GmbH Verfahren zur Herstellung von oxidischen Schutzschichten
DE29606258U1 (de) * 1996-02-26 1996-08-29 Heraeus Noblelight Gmbh, 63450 Hanau Gegenstand mit mattierter Oberfläche
DE102004061983A1 (de) * 2004-12-23 2006-07-06 Rehau Ag + Co. Materialzusammensetzung zur Vernetzung
DE102005026359A1 (de) * 2005-06-07 2006-12-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Beschichtungsverfahren
WO2007017488A1 (de) * 2005-08-11 2007-02-15 Siemens Aktiengesellschaft Beschichtungen für den einsatz im bereich der energieerzeugung

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3014799A (en) * 1955-12-20 1961-12-26 Gerald Oster Cross-linking of hydrocarbons
GB1263294A (en) * 1968-01-15 1972-02-09 Union Carbide Corp Radiation-convertible polymers
US3789042A (en) * 1971-05-26 1974-01-29 Union Carbide Corp Radiation curable dinorbornene compositions
US4777063A (en) * 1985-05-02 1988-10-11 Raychem Corporation Curable organopolysiloxane composition
CH675178A5 (de) 1987-10-23 1990-08-31 Bbc Brown Boveri & Cie
CH676168A5 (de) 1988-10-10 1990-12-14 Asea Brown Boveri
DE4019539A1 (de) 1990-06-19 1992-01-02 Siemens Ag Verfahren zum erzeugen einer dauerhaften entnetzenden beschichtung
US6537830B1 (en) * 1992-10-23 2003-03-25 Symetrix Corporation Method of making ferroelectric FET with polycrystalline crystallographically oriented ferroelectric material
DE4418845C5 (de) * 1994-05-30 2012-01-05 Synova S.A. Verfahren und Vorrichtung zur Materialbearbeitung mit Hilfe eines Laserstrahls
ATE186857T1 (de) 1995-05-04 1999-12-15 Noelle Gmbh Vorrichtung zum härten einer schicht auf einem substrat
US5891530A (en) 1996-04-19 1999-04-06 Minnesota Mining And Manufacturing Company Method for producing a coating
JP3751124B2 (ja) 1997-07-23 2006-03-01 独立行政法人産業技術総合研究所 ガスバリア性フィルムとその製造法
DE19748240C2 (de) 1997-10-31 2001-05-23 Fraunhofer Ges Forschung Verfahren zur korrosionsfesten Beschichtung von Metallsubstraten mittels Plasmapolymerisation und dessen Anwendung
DE19756790A1 (de) 1997-12-19 1999-07-01 Fraunhofer Ges Forschung Prepolymer mit darin isoliert dispergierten nanoskaligen Feststoffteilchen, Verfahren zu seiner Herstellung und seine Verwendung
US6224949B1 (en) * 1998-06-11 2001-05-01 3M Innovative Properties Company Free radical polymerization method
DE19916474A1 (de) 1999-04-13 2000-10-26 Ist Metz Gmbh Bestrahlungsgerät
US6338901B1 (en) * 1999-05-03 2002-01-15 Guardian Industries Corporation Hydrophobic coating including DLC on substrate
DE19957034B4 (de) 1999-11-26 2006-04-13 Heraeus Noblelight Gmbh Verfahren zur Behandlung von Oberflächen von Substraten und Vorrichtung
DE19961632A1 (de) 1999-12-14 2001-06-28 Inst Oberflaechenmodifizierung Kit zur Beschichtung von Oberflächen, strahlenhärtbares Beschichtungsmittel und Verfahren zur Erzeugung von kratz-, abrieb- und haftfesten Beschichtungen
DE10034737C2 (de) 2000-07-17 2002-07-11 Fraunhofer Ges Forschung Verfahren zur Herstellung einer permanenten Entformungsschicht durch Plasmapolymerisation auf der Oberfläche eines Formteilwerkzeugs, ein nach dem Verfahren herstellbares Formteilwerkzeug und dessen Verwendung
DE10131156A1 (de) 2001-06-29 2003-01-16 Fraunhofer Ges Forschung Arikel mit plasmapolymerer Beschichtung und Verfahren zu dessen Herstellung
DE10353530A1 (de) 2003-11-14 2005-06-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Wafer mit Deckschicht und Trennschicht, Verfahren zur Herstellung eines solchen Wafers sowie Verfahren zum Dünnen bzw. Rückseitenmetallisieren eines Wafers
DE10353756A1 (de) 2003-11-17 2005-06-30 Bio-Gate Bioinnovative Materials Gmbh Schichtmaterial
US7128559B1 (en) 2004-01-13 2006-10-31 Sandia National Laboratories Programmable imprint lithography template
DE102004026479B4 (de) 2004-05-27 2006-05-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Erzeugnis mit Deckschicht und Abformschicht
DE102005046233A1 (de) 2004-10-01 2006-04-06 Ist Metz Gmbh UV-Bestrahlungsaggregat
DE102005052409B3 (de) * 2005-10-31 2007-07-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Beschichtungsverfahren, dessen Verwendung sowie beschichtete Körper
WO2007051806A1 (de) * 2005-10-31 2007-05-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Beschichtungsverfahren und beschichtete körper
DE102006018491A1 (de) 2006-04-19 2007-10-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Flexible plasmapolymere Produkte, entsprechende Artikel, Herstellverfahren und Verwendung
DE102006028809B4 (de) * 2006-06-21 2015-10-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Wafer-Träger-Anordnung, Schichtverbund zur Verwendung bei der Herstellung einer solchen Wafer-Träger-Anordnung sowie entsprechende Verfahren und Verwendungen

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0588038A1 (de) * 1992-09-09 1994-03-23 Heraeus Noblelight GmbH Verfahren zur Herstellung von oxidischen Schutzschichten
DE29606258U1 (de) * 1996-02-26 1996-08-29 Heraeus Noblelight Gmbh, 63450 Hanau Gegenstand mit mattierter Oberfläche
DE102004061983A1 (de) * 2004-12-23 2006-07-06 Rehau Ag + Co. Materialzusammensetzung zur Vernetzung
DE102005026359A1 (de) * 2005-06-07 2006-12-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Beschichtungsverfahren
WO2007017488A1 (de) * 2005-08-11 2007-02-15 Siemens Aktiengesellschaft Beschichtungen für den einsatz im bereich der energieerzeugung

Also Published As

Publication number Publication date
WO2008132230A2 (de) 2008-11-06
EP2144714A2 (de) 2010-01-20
EP2527048A2 (de) 2012-11-28
US20100173167A1 (en) 2010-07-08
WO2008132230A3 (de) 2009-08-27
DE102007020655A1 (de) 2008-11-06
EP2527048B1 (de) 2015-12-30

Similar Documents

Publication Publication Date Title
WO2008132230A3 (de) Verfahren zum herstellen dünner schichten und entsprechende schicht
EP2252673B9 (de) Verfahren zum einstellen der reibungszahl eines metallischen werkstücks
EP1879154A3 (de) Verfahren zur Herstellung eines Sicherheitselements
EP3725519A3 (de) Verfahren zur herstellung einer tiefmatten werkstückoberfläche, z. b. einer möbel oder fussbodenfläche, sowie werkstückoberfläche
WO2008132045A3 (en) Substrates with biocidal coating
WO2007115959A3 (en) Process for producing metal oxide flakes
EP1119589A1 (de) Schichtwerkstoff und verfahren zum herstellen eines solchen
DE112005000678T5 (de) Verfahren zum Bilden eines glänzenden bzw. glitzernden Beschichtungsfilms und glänzender bzw. glitzernder beschichteter Gegenstand
EP2511317A3 (de) Verfahren zum Aufbringen eines Lackes und Schichtverbund zur Verwendung in einem solchen Verfahren
EP2027223A2 (de) Kratz- und abriebfeste beschichtungen auf polymeren oberflächen
EP2368086A1 (de) Kondensatorrohr mit erhöhter hydrophobie, herstellungsverfahren und verwendung dazu
EP2051808B1 (de) Selbstreinigende oberflächenbeschichtung (photokatalyse)
EP2296171A3 (de) Verwendung von metallorganischen gerüstmaterialien zur herstellung von mikroelektronischen bauteilen
EP2562002A3 (de) Flächiges Element und Verfahren zum Herstellen desselben
EP2198982A3 (de) Korrosionsschutzsystem zur Beschichtung von Metalloberflächen und Verfahren zu seiner Herstellung
EP2552603A1 (de) Substrate mit mehrfarbiger lackierung und ihre herstellung
DE50311195D1 (de) Beschichtungsstoff, verfahren zu seiner herstellung und seine verwendung zur herstellung haftfester beschichtungen
EP2236163A3 (de) Implantat aus einem biokorrodierbaren metallischen Werkstoff mit einer nanopartikel-haltigen Silanbeschichtung und dazugehöriges Herstellungsverfahren
EP2960070B1 (de) Verfahren zum Veredeln einer Holzwerkstoffplatte
EP2165814A2 (de) Betonnachbehandlungsmittel
WO2023110154A1 (de) Verfahren zur herstellung eines hochabriebfesten, lackbeschichteten materials mit einer konversionsschicht auf einem insbesondere bandförmigen aluminiumträger
EP2041333A2 (de) Korrosionbeständiges substrat mit einer cr(vi)-freien dreilagigen beschichtung und verfahren zu dessen herstellung
DE102012202517B4 (de) Zwei-Phasen-Lackbeschichtung und Verfahren zum Beschichten eines Substrats
EP1527902A3 (de) Verfahren zur Herstellung bahnförmiger Materialien
EP2910680A1 (de) Schichtstoff und Verfahren zu dessen Herstellung

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AC Divisional application: reference to earlier application

Ref document number: 2144714

Country of ref document: EP

Kind code of ref document: P

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

RIC1 Information provided on ipc code assigned before grant

Ipc: B05D 3/00 20060101ALI20121212BHEP

Ipc: B05D 5/08 20060101ALN20121212BHEP

Ipc: B05D 3/14 20060101AFI20121212BHEP

Ipc: B05D 3/06 20060101ALI20121212BHEP

17P Request for examination filed

Effective date: 20130716

RBV Designated contracting states (corrected)

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

17Q First examination report despatched

Effective date: 20130917

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

RIC1 Information provided on ipc code assigned before grant

Ipc: B05D 5/08 20060101ALN20150623BHEP

Ipc: B05D 3/14 20060101AFI20150623BHEP

Ipc: B05D 3/00 20060101ALI20150623BHEP

Ipc: B05D 3/06 20060101ALI20150623BHEP

INTG Intention to grant announced

Effective date: 20150717

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AC Divisional application: reference to earlier application

Ref document number: 2144714

Country of ref document: EP

Kind code of ref document: P

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 767212

Country of ref document: AT

Kind code of ref document: T

Effective date: 20160115

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502008013697

Country of ref document: DE

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 9

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160330

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151230

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151230

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20151230

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151230

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151230

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160331

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151230

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151230

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151230

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151230

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151230

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151230

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151230

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160430

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160502

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151230

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151230

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160430

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502008013697

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151230

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

26N No opposition filed

Effective date: 20161003

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160430

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160430

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160430

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151230

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 10

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160430

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 767212

Country of ref document: AT

Kind code of ref document: T

Effective date: 20160430

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160430

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 11

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20080430

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151230

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151230

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151230

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151230

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151230

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20220425

Year of fee payment: 15

Ref country code: FR

Payment date: 20220420

Year of fee payment: 15

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20230430

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230430

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230430

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230430

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20240418

Year of fee payment: 17

P01 Opt-out of the competence of the unified patent court (upc) registered

Free format text: CASE NUMBER: UPC_APP_326289/2023

Effective date: 20230524

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 502008013697

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20251104