EP2532895A1 - Pompe à vide avec des paliers disposés à un côté - Google Patents

Pompe à vide avec des paliers disposés à un côté Download PDF

Info

Publication number
EP2532895A1
EP2532895A1 EP11004566A EP11004566A EP2532895A1 EP 2532895 A1 EP2532895 A1 EP 2532895A1 EP 11004566 A EP11004566 A EP 11004566A EP 11004566 A EP11004566 A EP 11004566A EP 2532895 A1 EP2532895 A1 EP 2532895A1
Authority
EP
European Patent Office
Prior art keywords
rotor shafts
drive
bearing
rotors
magnetized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP11004566A
Other languages
German (de)
English (en)
Other versions
EP2532895B1 (fr
Inventor
Jürgen Dr. Dirscherl
Frank Dr. Gitmans
Gerhard Rüster
Markus Prasse
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vacuubrand GmbH and Co KG
Original Assignee
Vacuubrand GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vacuubrand GmbH and Co KG filed Critical Vacuubrand GmbH and Co KG
Priority to EP13002962.2A priority Critical patent/EP2642127B1/fr
Priority to EP20110004566 priority patent/EP2532895B1/fr
Publication of EP2532895A1 publication Critical patent/EP2532895A1/fr
Application granted granted Critical
Publication of EP2532895B1 publication Critical patent/EP2532895B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C17/00—Arrangements for drive of co-operating members, e.g. for rotary piston and casing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02—Arrangements of bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0078—Fixing rotors on shafts, e.g. by clamping together hub and shaft
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/042—Heating; Cooling; Heat insulation by injecting a fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/045—Heating; Cooling; Heat insulation of the electric motor in hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/20—Manufacture essentially without removing material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/20—Manufacture essentially without removing material
    • F04C2230/23—Manufacture essentially without removing material by permanently joining parts together
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/20—Manufacture essentially without removing material
    • F04C2230/24—Manufacture essentially without removing material by extrusion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/60—Assembly methods
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/60—Assembly methods
    • F04C2230/601—Adjustment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/402—Plurality of electronically synchronised motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F04C2240/51—Bearings for cantilever assemblies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F04C2240/52—Bearings for assemblies with supports on both sides
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/60—Shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/02—Light metals
    • F05C2201/021—Aluminium

Definitions

  • the invention relates to a vacuum pump, preferably with a pumping speed of less than 50 m 3 / h, with a screw pump unit with two helical, intermeshing rotors in a suitably shaped pump chamber of a screw pump stator having a suction side with an inlet and a pressure side with an outlet , and with a two-shaft synchronous drive with two magnetized, non-contacting cylinders which are mounted on the rotor bearing rotor shafts and synchronize them in opposite directions due to their mutual magnetic interaction, and one or more, the two magnetized cylinder surrounding windings of a motor stator, the magnetic fields traveling through suitable current supply generate such that the two magnetized cylinders and thus the rotor shafts rotate in opposite directions synchronously, the bearing of the two rotor shafts being provided only on the drive, in particular therefore no bearing the remote from the drive side of the pump chamber is present.
  • the invention thus relates to a vacuum pump with a screw pump unit running oil-free and non-contact in the pump chamber.
  • a vacuum pump is regularly provided for a final vacuum range 10 2 Pa to 10 -2 Pa (fine vacuum).
  • membrane vacuum pumps are very advantageous, since the pumping chamber is hermetically separated from the drive region by the gas-tight clamped membrane. Due to the limited compression ratio and the normally operated only by the gas flow valves, however, pressures below 50 Pa are difficult to achieve.
  • screw vacuum pumps short: screw pumps
  • two helical rotors are non-contact in a suitably shaped pump chamber of a screw pump stator, so that their counter rotation requires gas from an inlet to an outlet.
  • Screw pumps An advantage of screw pumps is a high possible compression, as screw pumps can be built intrinsically multi-stage, because each thread acts as a stage. Screw pumps thus offer the possibility of achieving a good final vacuum with only one pair of rotors.
  • the vacuum pump with a screw pump unit from which the present invention is based shows two screw pump units and in between the drive of the rotor shafts, which serve for both screw pump units as a carrier of the helical, intermeshing rotors. Both pairs of rotors are each mounted on the fly.
  • Abrasive seals are disadvantageous because they wear. Gap seals with labyrinth and external purge gas supply are complex, require a lot of space and require an external purge gas supply. For the typical use of conventional, large-scale screw pumps, for example in production plants, this is not a significant problem. Even with this aspect, however, different requirements arise for compact screw pumps with a pumping speed below 50 m 3 / h.
  • the drive of the rotors in two-shaft pumps (such as Roots, claw and screw pumps), for example, by two synchronously running motors or by a means for driving and synchronizing the rotors from a single drive shaft such as a transmission.
  • Mechanical transmissions are large, noisy, expensive and heavy, and require sealing the gear lubricant out and to the pump chamber.
  • Conventional known drives with two motors, which are electronically synchronized, are due to the necessary precise angle measurement and control electronics expensive and worthwhile at best for very large screw pumps,
  • a transmission may be formed as a so-called magnetic transmission,
  • the synchronization of the two rotor shafts takes place by contactless passing cylinders, discs, etc.
  • the associated cylinders are kept in synchronization, Since the cylinder is not A magnetic gearbox runs quietly, without wear and lubrication.
  • the disadvantage is that high magnetic attraction forces must act between the cylinders.
  • the known vacuum pump with a screw pump unit of which the invention ( EP 0 811 766 B1 ), applies a magnetic synchronous drive of the type described above for driving the screw pump units.
  • this vacuum pump with two screw pump units and the seated synchronous two-shaft drive located in the pump chambers on the drive side edges of the rotors sealing rings, which are held stationary on the drive and engage in grooves in the rotors. They form gap seals or abrasive seals as well as at the passage points of the rotor shafts.
  • a synchronous two-shaft drive with magnetized cylinders on the rotor shafts carrying rotor is very compact and therefore very suitable for vacuum pumps with low flow rate of less than 50 m 3 / h. It is disadvantageous if the drive and the bearings in the funded gas touched area. Such a construction is disadvantageous for many applications, as gases with a certain dust or vapor content or even corrosive gases and vapors often have to be conveyed. Even if the vapors are not corrosive per se, they can in condensed form, for example, damage the bearings by washing out the bearing greases or causing rusting of the bearings. Even pumping out containers filled with ambient air may cause the humidity in the vacuum pump to cause further consequential damage.
  • purge gas supplies as described above. On the drive side, this is not only helpful for protecting the drive and storage area of the pump against pumped media, but also for cooling the gas and the screws in the area of the pressure-side end of the screw. In this area, a large part of the heat of compression is released by the gas delivery device permanently cool purge gas is conveyed past this area, so that hot gas is discharged and the area is cooled.
  • the teaching of the present invention is based on the problem, the known vacuum pump with a screw pump unit in such a way and further, that it can be made compact, can be pumped with her condensing and / or corrosive media, but despite the resulting high demands on the Manufacturing accuracy of the components can be manufactured and assembled using standard manufacturing methods.
  • a vacuum pump in a first variant with the features of claim 1.
  • This is preferably a vacuum pump with a pumping speed of less than 50 m 3 / h.
  • the invention provides the pressure side of the screw pump - at atmospheric pressure - to put on the drive side, and to keep the storage / drive range to atmospheric pressure, so that on the drive side no sliding seals - apart from lubricant seals within the bearing - are required and a good cooling of the two-shaft synchronous motor is possible. Since, however, due to the flying bearing of the rotors and on the crash inlet side no rotary joints and thus no sliding seals are required, it is possible to design the entire pump for virtually non-contact operation of the rotors. Such a pump contains no wear parts per se. It can be practically called maintenance-free.
  • the magnetized cylinders of the drive are arranged on the rotor shafts in each case between spaced-apart rotor shaft bearings.
  • the screw pump according to the invention has a bearing of the two rotor shafts, for example in radial or axial ball bearings.
  • the rotor shafts each have a so-called fixed bearing in which an outer ring fixedly mounted in the housing and an inner ring fixed to the rotor shaft, and a so-called floating bearing, in which an outer ring and / or inner ring is mounted axially displaceable to the housing or to the rotor shaft.
  • Such an arrangement is advantageous to provide i.a. to compensate for the different thermal expansions of rotor shafts and housing parts.
  • the two fixed bearings are arranged closer to the pump chamber, so that the rotor shafts are guided here with the least possible play.
  • the two movable bearings are housed according to the invention on the side facing away from the pumping chamber side of the pump, wherein the floating bearings have an axial bias by means of resilient elements in order to achieve a backlash-free operation.
  • the spring force acts parallel and in the same direction as the gas force on the rotors at final vacuum, so that with changing suction - and thus changing gas forces on the Rotors - the rotors can not be moved axially within the bearing clearance under any circumstances.
  • This arrangement ensures an exact and play-free guidance of the rotor shafts, a compensation of the thermal expansion of the rotor shafts and housing parts, a cheap and easy installation and the ability to disassemble the drive-side mounting without much effort, for example, for a repair.
  • the vacuum pump is constructed so that between the drive and the pump chamber, a one-piece or multi-part housing bearing shield is provided, each receiving a bearing of the two rotor shafts.
  • a housing bearing shield is provided between the drive and the pump chamber, each receiving a bearing of the two rotor shafts.
  • the respective fixed bearing Preferably, the respective fixed bearing.
  • the bearings of the rotor shafts in this housing bearing shield are preferably arranged according to the invention on the side facing away from the pumping chamber side of the housing bearing shield.
  • a one-piece or multi-part motor bearing plate each receiving a further bearing of the two rotor shafts, preferably the respective floating bearing with the previously described biasing arrangement by means of resilient elements, between the two is the screw pump stator, so the component of the pump housing, which forms the suction chamber ,
  • the cylinders of the two-shaft synchronous drive are advantageously arranged between the bearings of the two rotor shafts, so that the occurring magnetic forces can be transmitted with a short path into the bearings.
  • the construction of the vacuum pump according to the invention makes it possible to dispense with grinding seals as far as possible or completely.
  • the housing bearing plate has means for exact alignment of screw pump stator on one side and engine mount plate on the other side.
  • the position of the motor bearing plate to the housing bearing shield determines the orientation of the two rotors, since in these elements the Storage of the rotor shafts takes place. These must run exactly parallel to each other and centrally in the screw pump stator.
  • the screw pump stator must therefore be aligned exactly centered and parallel to the escape from the housing bearing shield and engine end shield.
  • the housing bearing plate is designed according to the invention so that at least a part of this alignment determining mechanical means serves for the exact positioning of the screw pump stator and the motor bearing plate.
  • At least a portion of these mechanical elements are designed so that their formation - for example by machining the housing bearing shield - from one side, i. without rotation of the housing bearing shield during the formation of these mechanical elements, can take place,
  • At least a part of these mechanical means is in line with the receiving bores for the Rotonvellenlager.
  • these mechanical elements in the form of a pinning thus the holes for the pins are arranged in a line with the two shaft bearing bores, so that the processing device must be moved from one hole to the next in one direction only. The precision is further improved and the demands on the processing machine are reduced. At the same time, the travel paths of the processing machine are minimized in this arrangement.
  • Such an arrangement also implies that the corresponding elements, such as pin bores, in the counterparts of the housing bearing shield, that is the engine bearing shield and the screw pump stator, are in line with the bearing bores in the engine bearing shield or with the main axis of the pump chamber, with corresponding advantages the production of these components.
  • the housing bearing plate also serves as a separation between the pumping chamber and the drive chamber.
  • feeds for purging gas are arranged in the housing bearing plate and open into the region between the bearings of the rotor shafts and the pumping chamber.
  • the feeds open into at least one cavity around at least one of the rotor shafts.
  • the flow cross section from the cavity to the suction chamber is greater than or equal to the flow cross section from the cavity to the bearing of the rotor shafts. This ensures that the purge gas can be distributed in a cavity around each of the two rotor shafts before it exits in the direction of the pumping chamber.
  • the dimensioning of the opening cross sections serves the direction of the purge gas flow.
  • the purge gas can either be fed externally with overpressure or be sucked in from the other side by means of an integrated gas conveying device.
  • the motor housing - preferably made only of a cup-shaped motor bearing plate and fasteners - made open and the drive is cooled by means of cooling air directly from the outside.
  • the motor stator consisting of laminated cores and the winding (possibly encapsulated), as well as the two magnetic cylinders directly blow
  • the cooling air even through the gap between the Magnetzylinderem and the motor stator and between the motor stator and motor end shield can be performed.
  • appropriately designed openings in the engine mount plate allow access On optional, existing fasteners for the magnetized cylinders, so that if necessary, the angular orientation of these cylinders can be done even when mounted engine end shield.
  • the screw pump stator is designed as an extruded profile of an aluminum alloy.
  • the screw pump stator with its 8 similar inner shape to form the pump chamber and preferably also with other means for heat dissipation on the outside such. Cooling fins or cooling air ducts can be made in one piece.
  • the front end of the pump chamber is then carried out by an additional lid.
  • the inner wall can be coated or lined with chemically resistant plastics such as fluoroplastics or PEEK - possibly reinforced with fillers such as carbon fibers - or sprayed thermoplastic.
  • the anchoring of the lining or ejection along the pump chamber is preferably carried out by longitudinal grooves in the extruded profile, which may also have an undercut. Such longitudinal grooves can be integrated easily and almost cost-neutral in the extruded profile according to the invention.
  • the frontal cover may be provided with appropriate anchorages for a coating, lining or overmolding, or per se made of a chemically resistant material.
  • the rotors are integral with the rotor shafts and the rotor shafts are made in one or more parts and preferably made of a high performance plastic such as PEEK, preferably reinforced with fibers, especially carbon fibers, or from a Aluminum, nickel or titanium alloy exist.
  • a high performance plastic such as PEEK
  • the rotors are carried out separately from the rotor shafts, but are permanently connected to the rotor shafts, wherein the rotor shafts are in one piece or are made of several parts and preferably made of an aluminum, nickel or titanium alloy and wherein finally the rotors are preferably made of plastic and, more preferably, applied in a plastic injection molding process on the rotor shafts.
  • the non-detachable connection of the respective parts with each other can be done by shrinking, gluing or overmolding with plastic. Of course, this connection process takes place before the finishing of the finished unit of rotor and rotor shafts.
  • high performance plastics such as PEEK - preferably reinforced with carbon fiber - or nickel-based high corrosion resistant alloys such as Hastelloy or aluminum or titanium alloys possible alternatives to the known steel alloys.
  • high-strength materials such as aluminum, titanium or nickel alloys such as Hastelloy are possible alternatives to the known steel alloys for the rotor shafts.
  • the screw rotor itself in this case preferably consists of a plastic such as PPS or PEEK - preferably reinforced for example with carbon fiber - which is preferably injected thermoplastic around the rotor shaft, so that a solid and - apart from destructive methods - indissoluble compound results.
  • a rotor shaft of a high-strength aluminum alloy with an overmolded plastic rotor offers particular advantages, since the thermal expansion coefficients of these materials are more similar to each other than with a steel shaft, so that even at high operating temperatures detachment of the rotor from the rotor shaft can be avoided.
  • Another advantage is the higher thermal conductivity of an aluminum alloy compared to steel.
  • the plastic extrusion also offers the advantage of extremely favorable manufacturing costs of the rotor, in particular the fact that the screw contour can be at least roughly preformed, so that during the subsequent finishing of the complete unit of rotor and rotor shaft, for example by turning, milling or grinding, a lower material removal required is than, for example, the use of plastic solid material.
  • the aluminum alloy may for example be surrounded by a tube made of a different material, such as steel or a nickel alloy, although other geometries and material combinations are also conceivable.
  • Advantage of a rotor shaft made of an alloy such as Hastelloy would be the high corrosion resistance.
  • the screw rotors are not formed integrally with the rotor shafts, these are advantageously connected in advance.
  • balance weights for example in the form of eccentrically shaped discs, can be pre-assembled. After mounting the screw rotor shaft units in the housing bearing shield - still without magnetic cylinder - they must be aligned exactly to each other.
  • the rotors can be aligned, for example, by a suitable mounting device with spacers between the individual screw threads to each other.
  • the alignment according to a further variant of the invention with the help of in rotor manufacture - preferably on the rotor end face - attached markings for the exact angular alignment of the rotors to each other.
  • the alignment of the magnetized cylinders relative to each other can be done according to the invention either by brackets that allow the Magnetzylinderem to align themselves before they are fixed on the shafts. Due to their magnetic interaction, these tend to align themselves correctly to each other (each north to south pole). If, therefore, the screw rotors are set in the correct angular position, the correct alignment of the magnetic cylinders takes place automatically.
  • at least one of the magnetized cylinders is rotatable relative to the associated rotor shaft and means are provided to move the magnetized cylinder in the to fix desired angular position on the associated rotor shaft.
  • the means of fixation must of course be designed this way be that the fixation then no further movement is caused from the correct position out.
  • ring clamping elements are used for similar applications, but these are expensive and expensive, and also tend when tightening the elements for twisting out of the optimal position and to an axial displacement.
  • At least one of the magnetized cylinder is mounted on a first holder, for example by gluing. This sits, for example, by suitable fits, but rotatable but no play on a second bracket which is fixedly connected to the rotor shaft.
  • the fixed connection of the second support with the rotor shaft consists for example of fits between shaft and hub, which ensure an exact alignment, and one or more tolerance rings, which ensure a reliable power transmission.
  • means are provided to the first holder (with the magnetized cylinder ) in a suitable angular position on the second holder (on the rotor shaft) to fix as soon as the two magnetized cylinders have aligned correctly relative to each other.
  • the cylinder and the first bracket can also be made in one piece.
  • the second holder and the rotor shaft can also be made in one piece as an alternative.
  • At least one of the magnetic cylinders has at least one marking which indicates the pole position exactly, for example in the form of at least one notch on at least one end face.
  • markings which indicates the pole position exactly, for example in the form of at least one notch on at least one end face.
  • Such notches-or other depressions or elevations-can for example already be used in magnet production, usually this will be a sintering process, and be used as an alignment mark in the subsequent magnetization, so that the markings indicate exactly the pole position of the magnetized cylinders.
  • the markings of the pole position can be used to apply the two cylinders on their brackets accurately and correctly aligned to the respective rotor shafts, without the need for further adjustment or self-alignment of the magnets in rotatable brackets with subsequent fixation.
  • a gluing or, as explained above, an arrangement with fits and tolerance rings can be used. Such an arrangement consists of even fewer parts than the above-described embodiment and avoids detachable connections such as screws entirely.
  • both rotor shafts each have two axially spaced bearings
  • the axial distance of the rotor shaft bearing 0.3 times to 2 times, preferably the 05, times to 1.5 times, the free Length of rotor shafts in the pump chamber is.
  • the lateral spacing of the axes of rotation of the rotor shafts is a measure of the compact construction of the vacuum pump according to the invention. According to a preferred teaching, it is provided that the vacuum pump according to the invention has a very compact screw pump unit. For this purpose, it is provided that the lateral spacing of the axes of rotation of the rotor shafts is 20 mm to 100 mm, preferably 25 mm to 60 mm.
  • the upper limit of the lateral distances of the rotor shafts is assigned to the upper limit of the pumping speed for the vacuum pumps according to the invention.
  • a typical value for an exemplary vacuum pump according to the invention has a lateral spacing of the axes of rotation of the rotor shafts of about 40 mm at a pumping speed of about 10 m 3 / h ,
  • the vacuum pump on the drive side even further simplify and optimize their dimensional stability, that you a motor stator comprehensive motor housing together with the housing bearing plate cup-shaped executes one piece and attaches only the engine mount plate separately.
  • the motor bearing plate together with the motor housing comprehensive motor housing together pot-shaped run in one piece and then connect this cup-shaped unit with the housing bearing plate, in particular spigot (see the above explanations of a preferred variant of the vacuum pump according to the invention),
  • Fig. 1 This consists essentially of a screw pump unit 2, a drive part 3 and an intermediate housing bearing plate 4.
  • the screw pump unit 2 here has two mutually engaged helical rotors 5, 5 ', in this case in one piece represented with the rotor shafts 6, 6 '.
  • the rotors 5, 5 ' run without contact in a screw pump stator 7 with an essentially 8-shaped pump chamber 7 "and cooling ribs 36.
  • the pump chamber 7" is closed off by a cover 8 having an inlet 9. Due to the counter-synchronous rotation of the two rotors 5, 5 ', gas is conveyed from the inlet 9 to an outlet 10 (not shown here) on the drive side of the rotors 5, 5'.
  • the drive part 3 has non-contact magnetized cylinders 11, 11 '.
  • a motor stator 12 surrounds the magnetized cylinders 11, 11 'in an essentially 8-shaped manner.
  • the existing of a permanent magnet material with suitable properties cylinder 11, 11 ' are suitably magnetized so that their magnetic interaction causes the synchronization of the two rotor shafts 6, 6' in the form of a magnetic transmission.
  • the winding contained in the motor stator 12 (not shown separately) can be energized by a suitable controller (not shown), so that the magnetized cylinder 11, 11 '- and thus the rotor shafts 6, 6' and the rotors 5, 5 '- in offset in opposite synchronous rotation.
  • the rotor shafts 6, 6 ' have no bearings in the region of the pump chamber 7 ", but instead a first pair of bearings 13, 13' are accommodated in the housing bearing shield 4.
  • the axial distance between the bearings 13, 15 or 13 ', 15' assigned to a rotor shaft 6 or 6 ' is similar to the free rotor wavelength (protruding into the pump chamber 7 from the bearings 13, 13').
  • the second bearings 15, 15 ' are preferably designed as a floating bearing.
  • the gas force acts on the Rotors 5, 5 'due to the pressure difference from the inlet 9 to the outlet 10 in the same direction as the spring force.
  • the bearings 13, 13 ' are provided on the side facing away from the pump chamber 7 "side of the housing bearing shield 4, and between these bearings 13, 13' and the pump chamber 7" no sliding seals are present.
  • these means in the form of pins 19, 19 'and 20, 20', which sit in exactly mounted holes 21, 21 'executed.
  • the illustrated and preferred embodiment shows in Fig. 1 in that here the drive 3 has a motor housing 17 'comprising the motor stator 12, which in this case is designed in one piece with the motor bearing plate 17 in the form of a cup.
  • the bores 21, 21' are preferably continuous and can thus be introduced from one side into the housing bearing shield 4.
  • these bores 21, 21 ' are preferably designed in line with the bearing bores 14, 14' (in the direction of view parallel to the rotor shafts, see also FIG Fig. 2 and 4 ), so that in the manufacture of the housing bearing shield 4, the machining device for attaching these crucial for the alignment of the rotor shafts 6, 6 'of the screw pump stator 7 and the motor bearing plate 17 elements must be moved only in one dimension.
  • the vacuum pump can be very compact, with few parts and comparatively easy to manufacture and assemble.
  • gas delivery devices 22, 22 ' which are mounted on the rotor shafts 6, 6' and by their rotation suck gas from feeds 23 for purge gas and blow in the direction of the pump chamber 7.
  • conveyed medium should be kept away from the storage / drive area
  • the purge gas stream constantly supplies cool gas to the hot region at the pressure-side end of the rotors 5, 5 ', and the gas which is particularly heated by the compression is permanently exchanged and the pump chamber 7 "is cooled from the inside.
  • markings are provided on the end faces of the rotors 5, 5 'which allow the exact alignment of the rotors 5, 5' during pump assembly without manual alignment.
  • the holders according to the invention of the magnetized cylinders 11, 11 'each consist of a first soft-magnetic, substantially cylindrical portion 26, 26', on which the magnetized cylinders 11, 11 'are fixed, for example by gluing.
  • the power transmission from the inner parts 27, 27 'of the brackets for the magnetized cylinders 11, 11' on the rotor shafts 6, 6 ' takes place in the illustrated and preferred embodiment by means of at least one tolerance ring 29, 29', the in each case in a suitable groove on the associated rotor shaft 6, 6 'is arranged.
  • the tolerance ring 29, 29 ' results in a press fit of the inner parts 27, 27' on the rotor shaft 6, 6 'and thus a rotationally fixed connection.
  • a suitable device for example with the aid of markings on the rotors 5, 5 ', which indicate the exact alignment of the screw threads.
  • the preassembled units of the outer parts 26, 26' with the cylinders 11, 11 'and the inner parts 27, 27' are mounted on the rotor shafts 6, 6 '.
  • the outer parts 26, 26 ' can still be easily rotated on the inner parts 27, 27' at this time, so that the magnetized cylinders 11, 11 'can align relative to each other (north to south pole), in this position Cylinder 11, 11 'with their own brackets, namely the outer parts 26, 26', for example by screwing on the inner parts 27, 27 'fixed.
  • Fig. 1 one sees only one fixing screw 30, 30 'of the screw connections on the two rotor shafts 6, 6'. More details can be seen in Fig. 4 , The front view from the drive side with removed motor housing 17, 17 'and motor bearing plate 17.
  • the fixing screws 30, 30' are provided with disc-shaped plates 31, 31 '(washers) for power distribution.
  • Fig. 2b shows a cut in Fig. 1 identified with II-II. It can be seen here the structure of the brackets for the magnetized cylinders 11, 11 'very well. Inside are the rotor shafts 6, 6 '. On these are the there permanently arranged inner cylindrical parts 27, 27 'of the holder. Coaxially arranged thereon are the outer parts 26, 26 ', which then in turn support the magnetized cylinders 11, 11'.
  • the second magnetized cylinder can then be aligned and fixed relative to the first magnetized cylinder by means of its adjustable holder,
  • Fig. 2a shows a further embodiment, compared to the in Fig. 1 and Fig. 2b illustrated embodiment with respect to the holder of the magnetized cylinder 11, 11 'is modified.
  • brackets 32, 32 'of the magnetized cylinder 11, 11' which are provided for the purpose of correct assembly already from the outset with marks 33, 33 'in the form of transverse notches.
  • the advantage of such a construction lies in the smaller number of individual components of the brackets. However, the assembly only with alignment of the notches 33, 33 'is somewhat more difficult.
  • Fig. 3a and 3b show schematic exterior views of the vacuum pump 1 according to the invention with the main external components housing bearing shield 4, engine mounting plate 17 and motor housing 17 'and screw pump stator 7, once from the drive side ( Fig. 3a ) and once from the pump chamber side ( Fig. 3b , Ribs 36 partially cut off) ago.
  • Fig. 3a Incidentally stud bolts 17 ", with which the cup-shaped motor housing 17 'integral with the motor bearing plate 17 is fastened to the housing bearing shield 4.
  • a suitable cooling air flow generated for example by a fan (not shown)
  • the axis-parallel in the extension of the rotor shafts 6, 6 ' is arranged on the engine mount plate 17 and blows on the engine mounting plate 17, air flows through the openings 34 in the motor housing 17' and cools there the magnetized cylinders 11, 11 'on the rotor shafts 6, 6' and the Motor stator 12, wherein the cooling air can also flow through the gap between the magnetized cylinders 11, 11 'and the motor stator 12.
  • the heated cooling air exits at the openings 35 again.
  • the housing bearing plate 4 to the motor bearing plate 17 matching openings 35 so that the cooling air can flow through there.
  • the cooling air thus the drive 3 and the housing bearing plate 4 are effectively cooled.
  • the cooling air flow is dimensioned so that a part thereof passes outside on the motor bearing plate 17, the housing bearing plate 4 and the screw pump stator 7 and thus also cools these components. Possibly.
  • Means are provided to direct the flow of cooling air along the pump.
  • the openings 34 in the engine mount plate 17 at the same time allow access to the brackets of the cylinder 11, 11 'and their fasteners 30, 30', if present.
  • the screw pump stator 7 is designed as an extruded profile of an aluminum alloy and that the screw pump stator 7 forming extruded profile preferably longitudinally inside and / or outside means 36 for improved heat transfer to the ambient air.
  • the means 36 for improved heat transfer to the ambient air which are mentioned here, cooling fins 36 extending in the longitudinal direction of the screw pump stator 7 are concerned in the illustrated embodiment.
  • the illustrated and preferred embodiment it is preferably a vacuum pump with a capacity of about 10 m 3 / h. In this it is provided that the lateral distance of the axes of rotation of the rotor shafts 6, 6 'is about 40 mm.
  • the vacuum pump according to the invention is very compact, it is particularly suitable for Laboranassemblecn.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP20110004566 2011-06-06 2011-06-06 Pompe à vide avec des paliers disposés à un côté Active EP2532895B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP13002962.2A EP2642127B1 (fr) 2011-06-06 2011-06-06 Pompe à vide avec des paliers disposés à un côté
EP20110004566 EP2532895B1 (fr) 2011-06-06 2011-06-06 Pompe à vide avec des paliers disposés à un côté

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP20110004566 EP2532895B1 (fr) 2011-06-06 2011-06-06 Pompe à vide avec des paliers disposés à un côté

Related Child Applications (2)

Application Number Title Priority Date Filing Date
EP13002962.2A Division-Into EP2642127B1 (fr) 2011-06-06 2011-06-06 Pompe à vide avec des paliers disposés à un côté
EP13002962.2A Division EP2642127B1 (fr) 2011-06-06 2011-06-06 Pompe à vide avec des paliers disposés à un côté

Publications (2)

Publication Number Publication Date
EP2532895A1 true EP2532895A1 (fr) 2012-12-12
EP2532895B1 EP2532895B1 (fr) 2014-02-26

Family

ID=44773189

Family Applications (2)

Application Number Title Priority Date Filing Date
EP20110004566 Active EP2532895B1 (fr) 2011-06-06 2011-06-06 Pompe à vide avec des paliers disposés à un côté
EP13002962.2A Active EP2642127B1 (fr) 2011-06-06 2011-06-06 Pompe à vide avec des paliers disposés à un côté

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP13002962.2A Active EP2642127B1 (fr) 2011-06-06 2011-06-06 Pompe à vide avec des paliers disposés à un côté

Country Status (1)

Country Link
EP (2) EP2532895B1 (fr)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2995922A1 (fr) * 2014-09-12 2016-03-16 Vacuubrand Gmbh + Co Kg Dispositif de mesure de pression de gaz
CN106050664A (zh) * 2016-08-05 2016-10-26 北京朗禾科技有限公司 一种复合转子真空泵
CN106151031A (zh) * 2016-09-30 2016-11-23 北京艾岗科技有限公司 一种无油螺杆空压机
WO2017012988A3 (fr) * 2015-07-17 2017-04-06 Leybold Gmbh Système de pompe
DE102016211260A1 (de) * 2016-06-23 2017-12-28 Leybold Gmbh Vakuumpumpen-Rotorgehäuse, Vakuumpumpen-Gehäuse sowie Verfahren zur Herstellung eines Vakuumpumpen-Rotorgehäuses
WO2018024050A1 (fr) * 2016-08-05 2018-02-08 北京朗禾科技有限公司 Dispositif de transmission à deux arbres à rotor composite à deux moteurs
CN107786051A (zh) * 2017-11-23 2018-03-09 苏州工业职业技术学院 一种浮动定位机壳铆压工装
CN109415938A (zh) * 2016-07-08 2019-03-01 皮尔伯格泵技术有限公司 带有一体式法兰元件的机动车辅助装置真空泵
EP2924293B1 (fr) 2014-03-26 2019-04-17 Pfeiffer Vacuum GmbH Pompe à vide à piston de presse
EP3499040A1 (fr) * 2017-12-15 2019-06-19 Pfeiffer Vacuum Gmbh Pompe à vide à vis
CN111946616A (zh) * 2020-08-05 2020-11-17 蚌埠艾普压缩机制造有限公司 一种压缩机双螺杆结构
WO2021160677A1 (fr) * 2020-02-11 2021-08-19 Gardner Denver Deutschland Gmbh Compresseur à vis ayant des rotors montés sur un côté
CN114033678A (zh) * 2021-12-03 2022-02-11 北京航天石化技术装备工程有限公司 无润滑油脂窜漏的高洁净度电动回转容积泵及工作方法
CN114483576A (zh) * 2022-03-01 2022-05-13 绍兴威格隆泵业有限公司 外联式磁力驱动双螺杆泵
EP4474650A1 (fr) * 2023-06-09 2024-12-11 Illinois Tool Works Inc. Pompe à vis et ses composants
US12533995B2 (en) 2023-08-31 2026-01-27 Illinois Tool Works Inc. Battery electric vehicle temperature-regulation system

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103062057B (zh) * 2013-01-06 2015-11-25 南通大学 一种螺杆式真空泵
JP7141332B2 (ja) * 2018-12-28 2022-09-22 株式会社荏原製作所 真空ポンプ装置
DE102020119335A1 (de) * 2020-03-31 2021-09-30 Vacuubrand Gmbh + Co Kg Elektromotor und Vakuumpumpe

Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2503020A1 (de) * 1975-01-25 1976-07-29 Wikotool Syst Tech Maschbau Drehkolbenmaschine sowie verfahren zu ihrer herstellung
EP0171180A1 (fr) * 1984-07-04 1986-02-12 Kabushiki Kaisha Kobe Seiko Sho Compresseur à vis
WO1991010045A1 (fr) * 1989-12-22 1991-07-11 Opcon Autorotor Ab Compresseur a vis pour moteurs a combustion interne
JPH04178143A (ja) 1990-11-07 1992-06-25 Sumitomo Special Metals Co Ltd 一体型２軸同期駆動モーター
DE68905027T2 (de) * 1988-11-07 1993-06-17 Cit Alcatel Mehrstufige roots-pumpe und deren montageverfahren.
DE19522560A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Vakuumpumpe mit einem Paar innerhalb eines axial durchströmten Schöpfraums umlaufender Verdrängerrotoren
EP0811766A2 (fr) * 1996-06-03 1997-12-10 Ebara Corporation Pompe de déplacement positif à vide
GB2336038A (en) * 1998-04-02 1999-10-06 Brook Motors Limited Surface cooling of electrical machines
DE19941107A1 (de) * 1998-10-23 2000-04-27 Mitsubishi Electric Corp Motor mit eingebetteten Permanentmagneten und Verfahren zur Herstellung eines Motors
US6139298A (en) * 1998-07-08 2000-10-31 Hokuetsu Industries Co., Ltd. Shaft structure in screw rotor of screw fluid assembly
EP1059454A1 (fr) * 1999-06-09 2000-12-13 Sterling Fluid Systems (Germany) GmbH Compresseur à piston rotatif avec écoulement axial
DE19945871A1 (de) * 1999-09-24 2001-03-29 Leybold Vakuum Gmbh Schraubenpumpe, insbesondere Schraubenvakuumpumpe, mit zwei Pumpstufen
WO2004031585A1 (fr) 2002-10-04 2004-04-15 Ebara Densan Ltd. Pompe a vis et procede de mise en oeuvre
EP1643129A1 (fr) * 2004-10-01 2006-04-05 LOT Vacuum Co., Ltd. Pompe à vide sèche à étages multiples avec un rotor de type Roots et un rotor de type à vis
JP2007049803A (ja) * 2005-08-09 2007-02-22 Honda Motor Co Ltd 永久磁石式回転子とその製造方法
WO2007030898A1 (fr) * 2005-09-13 2007-03-22 Atlas Copco Airpower, Naamloze Vennootschap Vis améliorée de compresseur à vis à injection d’eau et procédé de fabrication de ladite vis
WO2007088989A1 (fr) * 2006-01-31 2007-08-09 Ebara Densan Ltd. Unité de pompe à vide

Patent Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2503020A1 (de) * 1975-01-25 1976-07-29 Wikotool Syst Tech Maschbau Drehkolbenmaschine sowie verfahren zu ihrer herstellung
EP0171180A1 (fr) * 1984-07-04 1986-02-12 Kabushiki Kaisha Kobe Seiko Sho Compresseur à vis
DE68905027T2 (de) * 1988-11-07 1993-06-17 Cit Alcatel Mehrstufige roots-pumpe und deren montageverfahren.
WO1991010045A1 (fr) * 1989-12-22 1991-07-11 Opcon Autorotor Ab Compresseur a vis pour moteurs a combustion interne
JPH04178143A (ja) 1990-11-07 1992-06-25 Sumitomo Special Metals Co Ltd 一体型２軸同期駆動モーター
DE19522560A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Vakuumpumpe mit einem Paar innerhalb eines axial durchströmten Schöpfraums umlaufender Verdrängerrotoren
EP0811766B1 (fr) 1996-06-03 2004-02-11 Ebara Corporation Pompe de déplacement positif à vide
EP0811766A2 (fr) * 1996-06-03 1997-12-10 Ebara Corporation Pompe de déplacement positif à vide
GB2336038A (en) * 1998-04-02 1999-10-06 Brook Motors Limited Surface cooling of electrical machines
US6139298A (en) * 1998-07-08 2000-10-31 Hokuetsu Industries Co., Ltd. Shaft structure in screw rotor of screw fluid assembly
DE19941107A1 (de) * 1998-10-23 2000-04-27 Mitsubishi Electric Corp Motor mit eingebetteten Permanentmagneten und Verfahren zur Herstellung eines Motors
EP1059454A1 (fr) * 1999-06-09 2000-12-13 Sterling Fluid Systems (Germany) GmbH Compresseur à piston rotatif avec écoulement axial
DE19945871A1 (de) * 1999-09-24 2001-03-29 Leybold Vakuum Gmbh Schraubenpumpe, insbesondere Schraubenvakuumpumpe, mit zwei Pumpstufen
WO2004031585A1 (fr) 2002-10-04 2004-04-15 Ebara Densan Ltd. Pompe a vis et procede de mise en oeuvre
EP1643129A1 (fr) * 2004-10-01 2006-04-05 LOT Vacuum Co., Ltd. Pompe à vide sèche à étages multiples avec un rotor de type Roots et un rotor de type à vis
JP2007049803A (ja) * 2005-08-09 2007-02-22 Honda Motor Co Ltd 永久磁石式回転子とその製造方法
WO2007030898A1 (fr) * 2005-09-13 2007-03-22 Atlas Copco Airpower, Naamloze Vennootschap Vis améliorée de compresseur à vis à injection d’eau et procédé de fabrication de ladite vis
WO2007088989A1 (fr) * 2006-01-31 2007-08-09 Ebara Densan Ltd. Unité de pompe à vide

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2924293B1 (fr) 2014-03-26 2019-04-17 Pfeiffer Vacuum GmbH Pompe à vide à piston de presse
EP2995922A1 (fr) * 2014-09-12 2016-03-16 Vacuubrand Gmbh + Co Kg Dispositif de mesure de pression de gaz
WO2017012988A3 (fr) * 2015-07-17 2017-04-06 Leybold Gmbh Système de pompe
JP2018520304A (ja) * 2015-07-17 2018-07-26 レイボルド ゲーエムベーハー ポンプシステム
DE102016211260A1 (de) * 2016-06-23 2017-12-28 Leybold Gmbh Vakuumpumpen-Rotorgehäuse, Vakuumpumpen-Gehäuse sowie Verfahren zur Herstellung eines Vakuumpumpen-Rotorgehäuses
US11078912B2 (en) 2016-07-08 2021-08-03 Pierburg Pump Technology Gmbh Automotive auxiliary assembly vacuum pump having a single-piece flange element
CN109415938A (zh) * 2016-07-08 2019-03-01 皮尔伯格泵技术有限公司 带有一体式法兰元件的机动车辅助装置真空泵
CN106050664A (zh) * 2016-08-05 2016-10-26 北京朗禾科技有限公司 一种复合转子真空泵
WO2018024050A1 (fr) * 2016-08-05 2018-02-08 北京朗禾科技有限公司 Dispositif de transmission à deux arbres à rotor composite à deux moteurs
CN106151031A (zh) * 2016-09-30 2016-11-23 北京艾岗科技有限公司 一种无油螺杆空压机
CN107786051A (zh) * 2017-11-23 2018-03-09 苏州工业职业技术学院 一种浮动定位机壳铆压工装
CN107786051B (zh) * 2017-11-23 2023-08-29 苏州工业职业技术学院 一种浮动定位机壳铆压工装
EP3499040A1 (fr) * 2017-12-15 2019-06-19 Pfeiffer Vacuum Gmbh Pompe à vide à vis
US12071949B2 (en) * 2020-02-11 2024-08-27 Gardner Denver Deutschland Gmbh Screw compressor having rotors mounted on one side
WO2021160677A1 (fr) * 2020-02-11 2021-08-19 Gardner Denver Deutschland Gmbh Compresseur à vis ayant des rotors montés sur un côté
US12584485B2 (en) 2020-02-11 2026-03-24 Gardner Denver Deutschland Gmbh Screw compressor having rotors mounted on one side
CN115552122A (zh) * 2020-02-11 2022-12-30 嘉德纳丹佛德国有限公司 具有单侧支承的转子的螺旋式压缩机
US20230071320A1 (en) * 2020-02-11 2023-03-09 Gardner Denver Deutschland Gmbh Screw compressor having rotors mounted on one side
CN111946616A (zh) * 2020-08-05 2020-11-17 蚌埠艾普压缩机制造有限公司 一种压缩机双螺杆结构
CN114033678A (zh) * 2021-12-03 2022-02-11 北京航天石化技术装备工程有限公司 无润滑油脂窜漏的高洁净度电动回转容积泵及工作方法
CN114483576A (zh) * 2022-03-01 2022-05-13 绍兴威格隆泵业有限公司 外联式磁力驱动双螺杆泵
EP4474650A1 (fr) * 2023-06-09 2024-12-11 Illinois Tool Works Inc. Pompe à vis et ses composants
US12560167B2 (en) 2023-06-09 2026-02-24 Illinois Tool Works Inc. Screw pump and its components
US12533995B2 (en) 2023-08-31 2026-01-27 Illinois Tool Works Inc. Battery electric vehicle temperature-regulation system

Also Published As

Publication number Publication date
EP2532895B1 (fr) 2014-02-26
EP2642127A1 (fr) 2013-09-25
EP2642127B1 (fr) 2019-01-09

Similar Documents

Publication Publication Date Title
EP2642127B1 (fr) Pompe à vide avec des paliers disposés à un côté
EP3647599B1 (fr) Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes
EP3259459A1 (fr) Dispositif de pompage pour l'entraînement de gaz de blow-by
EP3480929B1 (fr) Carter refroidi pour le stator d'entraînement direct
EP3974655B1 (fr) Pompe à vide à spirales et son procédé de fabrication
DE29904409U1 (de) Schraubenkompressor
EP2726740B1 (fr) Micropompe, élément palier pour une micropompe et procédé pour la faire fonctionner
EP2093863B1 (fr) Moteur à arbre creux destiné à l'accouplement sur un arbre de machine
EP1354135B1 (fr) Mini-palier de precision pour mini ou microsystemes et procede de montage de tels systemes
DE29904410U1 (de) Schraubenkompressor
EP3884168A1 (fr) Compresseur à canal latéral pour système de pile à combustible, permettant le transport et/ou la compression d'un fluide gazeux
DE102011054607A1 (de) Vakuumpumpe
CH661318A5 (de) Rotationskolbenmaschine.
DE69403020T2 (de) Verdrängermaschine mit magnetischer Führung
DE102011011384B4 (de) Hand-Werkzeugmaschine mit einem Lamellenmotor aus einem Nicht-Metall
EP3112688A1 (fr) Pompe à vide à débit partagé et système à vide doté d'une pompe à débit partagé
DE29904411U1 (de) Schraubenkompressor
EP1488107B1 (fr) Pompe a excentrique et procede permettant de faire fonctionner ladite pompe
DE102008017535B3 (de) Radialkolbenpumpe
EP4217610B1 (fr) Groupe moteur-pompe
EP1637771A2 (fr) Dispositif d'entraînement à éléments filetés
EP0739450A1 (fr) Dispositif d'etancheite pour unite piston-cylindre
DE102020103384B4 (de) Schraubenverdichter mit einseitig gelagerten Rotoren
DE102006016244A1 (de) Rotorpumpe
EP3112689A1 (fr) Pompe à vide à debit partagé

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

17P Request for examination filed

Effective date: 20130610

RBV Designated contracting states (corrected)

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

RIN1 Information on inventor provided before grant (corrected)

Inventor name: PRASSE, MARKUS

Inventor name: GITMANS, FRANK DR.

Inventor name: RUESTER, GERHARD

Inventor name: DIRSCHERL, JUERGEN DR.

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

INTG Intention to grant announced

Effective date: 20131031

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 653785

Country of ref document: AT

Kind code of ref document: T

Effective date: 20140315

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502011002183

Country of ref document: DE

Effective date: 20140417

REG Reference to a national code

Ref country code: NL

Ref legal event code: VDEP

Effective date: 20140226

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140626

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140526

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140626

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502011002183

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

Ref country code: LU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140606

26N No opposition filed

Effective date: 20141127

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502011002183

Country of ref document: DE

Effective date: 20141127

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20140606

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 6

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140527

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20110606

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

Ref country code: BE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140630

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 7

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 653785

Country of ref document: AT

Kind code of ref document: T

Effective date: 20160606

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160606

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 8

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20140226

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20250616

Year of fee payment: 15

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20250618

Year of fee payment: 15

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20250624

Year of fee payment: 15

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 20250701

Year of fee payment: 15