EP2565464A3 - Pompe à vide - Google Patents
Pompe à vide Download PDFInfo
- Publication number
- EP2565464A3 EP2565464A3 EP12180605.3A EP12180605A EP2565464A3 EP 2565464 A3 EP2565464 A3 EP 2565464A3 EP 12180605 A EP12180605 A EP 12180605A EP 2565464 A3 EP2565464 A3 EP 2565464A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum pump
- shaft
- sleeve
- hub
- concentric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012193203A JP5683544B2 (ja) | 2011-09-05 | 2012-09-03 | 真空ポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102011112689.2A DE102011112689B4 (de) | 2011-09-05 | 2011-09-05 | Vakuumpumpe |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP2565464A2 EP2565464A2 (fr) | 2013-03-06 |
| EP2565464A3 true EP2565464A3 (fr) | 2015-04-15 |
| EP2565464B1 EP2565464B1 (fr) | 2019-04-24 |
Family
ID=46963391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP12180605.3A Active EP2565464B1 (fr) | 2011-09-05 | 2012-08-16 | Pompe à vide |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP2565464B1 (fr) |
| JP (1) | JP5683544B2 (fr) |
| DE (1) | DE102011112689B4 (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE202013009462U1 (de) * | 2013-10-28 | 2015-01-29 | Oerlikon Leybold Vacuum Gmbh | Trägerelement für Rohrelemente einer Holweckstufe |
| DE102013114290A1 (de) | 2013-12-18 | 2015-06-18 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
| EP3907406B1 (fr) * | 2021-04-16 | 2023-05-03 | Pfeiffer Vacuum Technology AG | Pompe à vide |
| EP4549740A3 (fr) * | 2025-03-19 | 2025-10-22 | Pfeiffer Vacuum Technology AG | Pompe à vide optimisée en termes de technique d'écoulement et de température |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB180991A (fr) * | 1921-06-01 | 1923-08-07 | Fernand Hippolyte Louis Holweck | |
| DE1010235B (de) * | 1955-04-22 | 1957-06-13 | Arthur Pfeiffer Fa | Molekularpumpe |
| EP1067290A2 (fr) * | 1999-07-05 | 2001-01-10 | Pfeiffer Vacuum GmbH | Pompe à vide |
| DE102009035332A1 (de) * | 2009-07-30 | 2011-02-03 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4427154A1 (de) | 1994-08-01 | 1996-02-08 | Balzers Pfeiffer Gmbh | Reibungspumpe mit Magnetlagerung |
| DE102009021620B4 (de) | 2009-05-16 | 2021-07-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
-
2011
- 2011-09-05 DE DE102011112689.2A patent/DE102011112689B4/de active Active
-
2012
- 2012-08-16 EP EP12180605.3A patent/EP2565464B1/fr active Active
- 2012-09-03 JP JP2012193203A patent/JP5683544B2/ja active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB180991A (fr) * | 1921-06-01 | 1923-08-07 | Fernand Hippolyte Louis Holweck | |
| DE1010235B (de) * | 1955-04-22 | 1957-06-13 | Arthur Pfeiffer Fa | Molekularpumpe |
| EP1067290A2 (fr) * | 1999-07-05 | 2001-01-10 | Pfeiffer Vacuum GmbH | Pompe à vide |
| DE102009035332A1 (de) * | 2009-07-30 | 2011-02-03 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102011112689B4 (de) | 2024-03-21 |
| EP2565464B1 (fr) | 2019-04-24 |
| DE102011112689A1 (de) | 2013-03-07 |
| EP2565464A2 (fr) | 2013-03-06 |
| JP5683544B2 (ja) | 2015-03-11 |
| JP2013053626A (ja) | 2013-03-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2921702A3 (fr) | Unité pompes-moteur | |
| EP4279119A3 (fr) | Pompe à sang | |
| EP2628958A3 (fr) | Roue directrice pour une pompe et pompe | |
| EP1956245A3 (fr) | Rotor de pompe à vis et procédé de réduction d'écoulement glissant | |
| EP2461061A3 (fr) | Outil de démontage pour le démontage d'une palier à roulement | |
| DE102014219821A1 (de) | Rückführstufe | |
| EP2505783A3 (fr) | Rotor d'un étage de compresseur axial d'une turbomachine | |
| EP2503104A3 (fr) | Turbomachine | |
| EP2728171A3 (fr) | Ensemble de pale de rotor d'éolienne avec un insert annulaire dans le pied de pale | |
| EP2677178A3 (fr) | Pompe | |
| DE102014205235A1 (de) | Schaufelreihengruppe | |
| EP2851566A3 (fr) | Pompe à engrenages intérieurs et circuit hydraulique pour entraînement d'un véhicule automobile | |
| EP2743525A3 (fr) | Agencement de disque pour un agencement de palier axial | |
| EP2378065A3 (fr) | Procédé de réparation d'un agencement de rotor d'une turbomachine, élément annulaire pour un agencement de rotor d'une turbomachine et agencement de rotor pour une turbomachine | |
| EP2811117A3 (fr) | Anneau de renforcement pour une turbomachine | |
| EP2505851A3 (fr) | Aubage de stator pour un compresseur axial dans une turbomachine | |
| EP2706238A3 (fr) | Pompe centrifuge et protection de roue mobile pour pompe centrifuge | |
| EP2605372A3 (fr) | Elément de support pour aimant permanent sur un rotor d'une machine électrique | |
| EP2053256A3 (fr) | Bague de sécurisation sur une liaison d'arbres-moyeux | |
| EP2505850A3 (fr) | Douille de palier | |
| EP3007329A3 (fr) | Support de rotation d'extrémité et fixation de refroidissement | |
| EP2916026A3 (fr) | Système de couplage double | |
| EP2410131A3 (fr) | Rotor d'une turbomachine | |
| EP2921715A1 (fr) | Groupe de série d'aubes | |
| EP3225785A3 (fr) | Joint de cannelure pour moteur de turbine à gaz |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
| AX | Request for extension of the european patent |
Extension state: BA ME |
|
| PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
| AK | Designated contracting states |
Kind code of ref document: A3 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
| AX | Request for extension of the european patent |
Extension state: BA ME |
|
| RIC1 | Information provided on ipc code assigned before grant |
Ipc: F04D 19/04 20060101AFI20150311BHEP |
|
| 17P | Request for examination filed |
Effective date: 20150928 |
|
| RBV | Designated contracting states (corrected) |
Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
| GRAP | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOSNIGR1 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: GRANT OF PATENT IS INTENDED |
|
| INTG | Intention to grant announced |
Effective date: 20181120 |
|
| GRAS | Grant fee paid |
Free format text: ORIGINAL CODE: EPIDOSNIGR3 |
|
| GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE PATENT HAS BEEN GRANTED |
|
| AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
| REG | Reference to a national code |
Ref country code: GB Ref legal event code: FG4D Free format text: NOT ENGLISH |
|
| REG | Reference to a national code |
Ref country code: CH Ref legal event code: EP |
|
| REG | Reference to a national code |
Ref country code: AT Ref legal event code: REF Ref document number: 1124483 Country of ref document: AT Kind code of ref document: T Effective date: 20190515 Ref country code: IE Ref legal event code: FG4D Free format text: LANGUAGE OF EP DOCUMENT: GERMAN |
|
| REG | Reference to a national code |
Ref country code: DE Ref legal event code: R096 Ref document number: 502012014648 Country of ref document: DE |
|
| REG | Reference to a national code |
Ref country code: NL Ref legal event code: MP Effective date: 20190424 |
|
| REG | Reference to a national code |
Ref country code: LT Ref legal event code: MG4D |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: NL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: AL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 Ref country code: PT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190824 Ref country code: FI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 Ref country code: LT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 Ref country code: HR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 Ref country code: NO Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190724 Ref country code: SE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 Ref country code: ES Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LV Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 Ref country code: RS Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 Ref country code: PL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 Ref country code: BG Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190724 Ref country code: GR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190725 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IS Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190824 |
|
| REG | Reference to a national code |
Ref country code: DE Ref legal event code: R097 Ref document number: 502012014648 Country of ref document: DE |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 Ref country code: RO Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 Ref country code: EE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 Ref country code: SK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: SM Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 |
|
| PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: TR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 |
|
| 26N | No opposition filed |
Effective date: 20200127 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20190831 Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20190831 Ref country code: MC Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 Ref country code: SI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 Ref country code: LU Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20190816 |
|
| REG | Reference to a national code |
Ref country code: BE Ref legal event code: MM Effective date: 20190831 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20190831 Ref country code: IE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20190816 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: BE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20190831 |
|
| REG | Reference to a national code |
Ref country code: AT Ref legal event code: MM01 Ref document number: 1124483 Country of ref document: AT Kind code of ref document: T Effective date: 20190816 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: AT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20190816 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: CY Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: HU Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO Effective date: 20120816 Ref country code: MT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: MK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190424 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 20250617 Year of fee payment: 14 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: IT Payment date: 20250626 Year of fee payment: 14 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20250731 Year of fee payment: 14 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: CZ Payment date: 20250704 Year of fee payment: 14 |