EP4549740A3 - Pompe à vide optimisée en termes de technique d'écoulement et de température - Google Patents

Pompe à vide optimisée en termes de technique d'écoulement et de température

Info

Publication number
EP4549740A3
EP4549740A3 EP25164817.6A EP25164817A EP4549740A3 EP 4549740 A3 EP4549740 A3 EP 4549740A3 EP 25164817 A EP25164817 A EP 25164817A EP 4549740 A3 EP4549740 A3 EP 4549740A3
Authority
EP
European Patent Office
Prior art keywords
holweck
rotor
vacuum pump
diameter
sleeve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP25164817.6A
Other languages
German (de)
English (en)
Other versions
EP4549740A2 (fr
Inventor
Jan Hofmann
Maximilian Birkenfeld
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP25164817.6A priority Critical patent/EP4549740A3/fr
Publication of EP4549740A2 publication Critical patent/EP4549740A2/fr
Publication of EP4549740A3 publication Critical patent/EP4549740A3/fr
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP25164817.6A 2025-03-19 2025-03-19 Pompe à vide optimisée en termes de technique d'écoulement et de température Pending EP4549740A3 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP25164817.6A EP4549740A3 (fr) 2025-03-19 2025-03-19 Pompe à vide optimisée en termes de technique d'écoulement et de température

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP25164817.6A EP4549740A3 (fr) 2025-03-19 2025-03-19 Pompe à vide optimisée en termes de technique d'écoulement et de température

Publications (2)

Publication Number Publication Date
EP4549740A2 EP4549740A2 (fr) 2025-05-07
EP4549740A3 true EP4549740A3 (fr) 2025-10-22

Family

ID=94971879

Family Applications (1)

Application Number Title Priority Date Filing Date
EP25164817.6A Pending EP4549740A3 (fr) 2025-03-19 2025-03-19 Pompe à vide optimisée en termes de technique d'écoulement et de température

Country Status (1)

Country Link
EP (1) EP4549740A3 (fr)

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0260733A1 (fr) * 1986-08-12 1988-03-23 Ultra-Centrifuge Nederland N.V. Pompe sous vide élevé
JPH10122179A (ja) * 1996-10-18 1998-05-12 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ
DE102013209614A1 (de) * 2013-05-23 2014-11-27 Pfeiffer Vacuum Gmbh Verfahren zur Herstellung eines strukturierten Bauteils
DE202013009462U1 (de) * 2013-10-28 2015-01-29 Oerlikon Leybold Vacuum Gmbh Trägerelement für Rohrelemente einer Holweckstufe
US20160298649A1 (en) * 2013-09-24 2016-10-13 Oerlikon Leybold Vacuum Gmbh Vacuum pump
EP2565464B1 (fr) * 2011-09-05 2019-04-24 Pfeiffer Vacuum GmbH Pompe à vide
EP2933497B1 (fr) * 2014-04-17 2020-10-07 Pfeiffer Vacuum GmbH Pompe à vide
EP3907406A1 (fr) * 2021-04-16 2021-11-10 Pfeiffer Vacuum Technology AG Pompe à vide
GB2607339A (en) * 2021-06-04 2022-12-07 Edwards Ltd Holweck drag pump
EP3034882B1 (fr) * 2014-12-17 2024-08-14 Pfeiffer Vacuum Gmbh Pompe à vide
EP4251887B1 (fr) * 2020-11-25 2025-01-01 Edwards Limited Mécanisme de pompage de traînée pour pompe turbomoléculaire

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4108931B1 (fr) 2022-09-01 2024-06-26 Pfeiffer Vacuum Technology AG Procédé permettant de faire fonctionner une pompe à vide moléculaire pour obtenir une puissance d'aspiration améliorée

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0260733A1 (fr) * 1986-08-12 1988-03-23 Ultra-Centrifuge Nederland N.V. Pompe sous vide élevé
JPH10122179A (ja) * 1996-10-18 1998-05-12 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ
EP2565464B1 (fr) * 2011-09-05 2019-04-24 Pfeiffer Vacuum GmbH Pompe à vide
DE102013209614A1 (de) * 2013-05-23 2014-11-27 Pfeiffer Vacuum Gmbh Verfahren zur Herstellung eines strukturierten Bauteils
US20160298649A1 (en) * 2013-09-24 2016-10-13 Oerlikon Leybold Vacuum Gmbh Vacuum pump
DE202013009462U1 (de) * 2013-10-28 2015-01-29 Oerlikon Leybold Vacuum Gmbh Trägerelement für Rohrelemente einer Holweckstufe
EP2933497B1 (fr) * 2014-04-17 2020-10-07 Pfeiffer Vacuum GmbH Pompe à vide
EP3034882B1 (fr) * 2014-12-17 2024-08-14 Pfeiffer Vacuum Gmbh Pompe à vide
EP4251887B1 (fr) * 2020-11-25 2025-01-01 Edwards Limited Mécanisme de pompage de traînée pour pompe turbomoléculaire
EP3907406A1 (fr) * 2021-04-16 2021-11-10 Pfeiffer Vacuum Technology AG Pompe à vide
GB2607339A (en) * 2021-06-04 2022-12-07 Edwards Ltd Holweck drag pump

Also Published As

Publication number Publication date
EP4549740A2 (fr) 2025-05-07

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