EP2607706A2 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP2607706A2
EP2607706A2 EP12194041.5A EP12194041A EP2607706A2 EP 2607706 A2 EP2607706 A2 EP 2607706A2 EP 12194041 A EP12194041 A EP 12194041A EP 2607706 A2 EP2607706 A2 EP 2607706A2
Authority
EP
European Patent Office
Prior art keywords
stator
disks
housing
spring element
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP12194041.5A
Other languages
German (de)
English (en)
Other versions
EP2607706B1 (fr
EP2607706A3 (fr
Inventor
Markus Henry
Jürgen BREZINA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP2607706A2 publication Critical patent/EP2607706A2/fr
Publication of EP2607706A3 publication Critical patent/EP2607706A3/fr
Application granted granted Critical
Publication of EP2607706B1 publication Critical patent/EP2607706B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump, in particular a turbomolecular pump.
  • Vacuum pumps such as turbomolecular pumps, have a plurality of rotor disks connected to a rotor shaft forming the high speed rotor.
  • a stator is disposed in the pump housing.
  • the stator has a plurality of stator disks and a plurality of stator rings.
  • the stator disks are each arranged between adjacent rotor disks.
  • a rotor disk is arranged at the pump inlet and stator disks are arranged at the pump outlet.
  • the stator disks are usually designed as ring segments, so that the individual stator segments forming a ring segments for mounting from the outside between adjacent rotor disks can be inserted.
  • stator rings are arranged between the stator disks.
  • the stator rings thus radially surround the rotor disks.
  • the stator rings are preferably separate components, wherein it is also possible that the stator rings are each connected to a stator disk or formed in one piece. With such composed of half-rings stator rings and - Slices can be achieved a better thermal conductivity. However, such stator rings are expensive.
  • the vacuum pump For mounting the vacuum pump is usually carried out an arrangement of the stator between the rotor discs and a corresponding arrangement of the stator between the stator discs.
  • the thus pre-assembled rotor-stator element is then inserted in the axial direction in the pump housing.
  • a radial mounting gap is provided.
  • the first stator disk or the first stator ring in the pumping direction abuts on an inner side of the pump housing in the axial direction.
  • the last stator ring in the pumping direction or the last stator disk is located on an inner side of a housing flange.
  • the housing flange is connected to the pump housing according to an annular cover, usually screwed.
  • stator discs are accurately positioned and also ensures good heat transfer between the stator and the pump housing.
  • a tolerance compensation must take place, wherein due to the large number of stator disks and stator rings, the tolerances can add in the axial direction.
  • the width of the axial joint gap must be selected such that also adding tolerances can be compensated.
  • the housing flange has a pump housing, in particular in the axial direction, defined position.
  • the housing flange is firmly connected to the pump housing or pulled to block.
  • the tolerance compensation, the axial positioning of the stator disks and the thermal coupling of the stator to the pump housing must thus be carried out in a different manner.
  • high vacuum side i. at the pump inlet, between the first stator and the inside of the housing to provide an elastomeric ring.
  • an elastomeric ring In addition to an increased installation effort, the provision of an elastomeric ring has the disadvantage that the material flows in particular during prolonged operation and thus deteriorates the position accuracy of the stator. Also, the heat transfer between the stator and the housing is deteriorated by the provision of the elastomeric ring, so that in particular after a long period of operation, the required heat dissipation may not be ensured. Furthermore, an elastomer ring has the disadvantage that the material evaporates and in that components of the elastomeric material pass into the gas to be delivered.
  • the object of the invention is to provide a vacuum pump in which the stator discs have a high positioning quality and the stator is also thermally coupled well to the pump housing.
  • the vacuum pump according to the invention which is in particular a turbomolecular pump, has a rotor arranged in a pump housing and a stator.
  • the rotor has a plurality of rotor disks, wherein in each case a stator disk is arranged between adjacent rotor disks.
  • Stator rings are arranged between adjacent stator disks.
  • a stator disc or a stator ring is arranged, which preferably bears against a housing inner side or an inner side of a housing flange.
  • a stator element which presses apart the stator disks is arranged between two adjacent stator disks.
  • the spring element thus applies axial forces to the stator disks, so that the axially first and last stator disk or the axially first and last stator ring is pressed against the inside of the housing or the inside of the housing flange.
  • the spring element is a tolerance compensation of the stator and stator rings.
  • the spring element is arranged between two directly adjacent stator disks, so that the spring element bears against both stator disks, in particular directly, wherein the spring element optionally additionally may have a contact washer or the like in order to realize the largest possible area investment.
  • the housing flange can thus, based on the housing, be pulled to block.
  • the spring element is preferably provided between two stator disks arranged in a central region. If, for example, ten stator disks are provided, then it is preferred for the spring element to be arranged in the region of the fourth, fifth or sixth stator disk in the axial direction. It is particularly preferred that the spring element is arranged between the two central stator disks. Possibly. can also be provided more than one spring element.
  • the arrangement of the spring element in a central region has the particular advantage that the axial tolerances of the stator disks and stator rings do not add up completely, so that the overall tolerance in the axial direction is lower.
  • the spring element is designed such that a stator ring is replaced by the spring element.
  • the spring element has an inner surface facing in the direction of the rotor disk, which is formed corresponding to a stator ring. This ensures that even in the region of the spring element no or only a slightly higher return flow of the delivered gas takes place.
  • the spring element surrounds a rotor disk, in particular completely. It is particularly preferred that the spring element is annular. In an arrangement of the spring element in a central region, a good heat dissipation is already ensured by the one stator half on the pump housing or the housing flange.
  • the spring element may be formed of metal or have metal in order to improve the thermal conductivity between stator rings or stator disks in the central region.
  • the spring element may also have elastomer or be formed for example as an elastomer ring. This is possible because the occurring material evaporation in the middle range is acceptable.
  • the drawing shows a schematic, greatly simplified sectional view of a vacuum pump.
  • the vacuum pump has a rotor shaft 10 which carries a plurality of rotor disks 12 forming the rotor. Between adjacent rotor disks 12 stator disks 14 are arranged. Furthermore, a stator disc 14 is arranged in the region of a pump outlet 18 in the illustrated embodiment. In the area of a pump inlet 16, a rotor disk 12 is arranged. The stator disks 14 are arranged in a housing 20, wherein a stator ring 22 is arranged in each case between adjacent stator disks. The stator rings 22 thus each surround a rotor disk 12.
  • a spring element 24 is disposed in the illustrated embodiment between the two central stator rings 14, which replaces the corresponding stator ring.
  • the spring element 24, which is produced in particular from a metal ring, exerts axial forces on the stator disks 14 and the stator rings 22 in both axial directions 26, 28.
  • half of the stator disks 14 and the stator rings 22 are pressed in the direction of the inlet 16 or in the direction of the outlet 18.
  • the first stator disc 14 is pressed against a housing inner side 30 and abuts flat against this. As a result, a good heat transfer between the first stator 14 and the pump housing 20 is ensured.
  • a housing flange 32 is provided, which is connected to the housing 20, for example by screwing.
  • the housing flange 32 is pulled relative to the housing 20 to block, so that the housing flange 32 bears in particular flat on an outer side 34 of the housing.
  • An axial joint gap between the housing flange 32 and the housing 20 is not provided.
  • the housing flange 32 has a radially inwardly facing, annular projection 36. On an inner side 38 of the projection 36, based on a conveying direction 40, the last or outlet side stator disk is located.
  • the assembly of the vacuum pump is done by the example ring-segment-shaped stator 14 are inserted from the outside between the rotor disks 12. Between adjacent stator discs 14, the particular annular stator rings 22 and the spring element 24 are arranged. Subsequently, the preassembled stator-rotor unit is inserted into the housing 20. For this purpose, a radial mounting gap 42 is provided. Subsequently, the mounting of the housing flange 32, whereby the individual stator discs 14 are positioned accurately and at the same time due to the spring element 24 caused by the axial forces 26, 28 a flat contact for heat dissipation to the surfaces 30, 38 is realized.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP12194041.5A 2011-12-23 2012-11-23 Pompe à vide Active EP2607706B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE202011109517U DE202011109517U1 (de) 2011-12-23 2011-12-23 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2607706A2 true EP2607706A2 (fr) 2013-06-26
EP2607706A3 EP2607706A3 (fr) 2014-04-09
EP2607706B1 EP2607706B1 (fr) 2018-10-17

Family

ID=47428489

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12194041.5A Active EP2607706B1 (fr) 2011-12-23 2012-11-23 Pompe à vide

Country Status (2)

Country Link
EP (1) EP2607706B1 (fr)
DE (1) DE202011109517U1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10844864B2 (en) 2016-08-08 2020-11-24 Edwards Limited Vacuum pump

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3135306B1 (fr) * 2022-05-05 2024-05-10 Pfeiffer Vacuum Pompe à vide turbomoléculaire et procédé d’assemblage

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9013672U1 (de) 1990-09-29 1992-01-30 Leybold AG, 6450 Hanau Stator für eine Turbomolekularvakuumpumpe
DE10010371A1 (de) 2000-03-02 2001-09-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9013671U1 (de) * 1990-09-29 1992-01-30 Leybold AG, 6450 Hanau Stator für eine Turbomolekularvakuumpumpe
DE102008058149A1 (de) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9013672U1 (de) 1990-09-29 1992-01-30 Leybold AG, 6450 Hanau Stator für eine Turbomolekularvakuumpumpe
DE10010371A1 (de) 2000-03-02 2001-09-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10844864B2 (en) 2016-08-08 2020-11-24 Edwards Limited Vacuum pump

Also Published As

Publication number Publication date
EP2607706B1 (fr) 2018-10-17
DE202011109517U1 (de) 2013-03-25
EP2607706A3 (fr) 2014-04-09

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