Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B44—DECORATIVE ARTS
  • B44C—PRODUCING DECORATIVE EFFECTS; MOSAICS; TARSIA WORK; PAPERHANGING
  • B44C1/00—Processes, not specifically provided for elsewhere, for producing decorative surface effects
  • B44C1/22—Removing surface-material, e.g. by engraving, by etching
  • B44C1/227—Removing surface-material, e.g. by engraving, by etching by etching
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B44—DECORATIVE ARTS
  • B44F—SPECIAL DESIGNS OR PICTURES
  • B44F1/00—Designs or pictures characterised by special or unusual light effects
  • B44F1/06—Designs or pictures characterised by special or unusual light effects produced by transmitted light, e.g. transparencies, imitations of glass paintings
• • A—HUMAN NECESSITIES
  • A44—HABERDASHERY; JEWELLERY
  • A44C—PERSONAL ADORNMENTS, e.g. JEWELLERY; COINS
  • A44C15/00—Other forms of jewellery
  • A44C15/004—Jewellery with monograms or other inscription
• • A—HUMAN NECESSITIES
  • A44—HABERDASHERY; JEWELLERY
  • A44C—PERSONAL ADORNMENTS, e.g. JEWELLERY; COINS
  • A44C27/00—Making jewellery or other personal adornments
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
  • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
  • Y10T156/10—Methods of surface bonding and/or assembly therefor
  • Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
  • Y10T156/1062—Prior to assembly
  • Y10T156/1064—Partial cutting [e.g., grooving or incising]
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
  • Y10T428/00—Stock material or miscellaneous articles
  • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
  • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
  • Y10T428/24562—Interlaminar spaces

Definitions

• the invention relates to a method for manufacturing complex parts comprising embedded buried engraved structures with a micron resolution (that is to say on a micrometer scale) and produced by molecular bonding of elementary substrates.
• the invention thus makes it possible in particular to manufacture a part containing a buried pattern whose dimensions are at most micrometric.
• dimensions at most micrometric denotes a buried pattern whose largest dimension is typically less than 1 mm and preferably less than 500pm or 250pm.
• Micro-technologies are thus, in particular, used to make elementary components, for example a spiral spring silicon (used in particular by "Ulysse Nardin ®").
• the document FR - 2 926 747 (CEA - invention of A. REY and C. DEGUET) relates to an object comprising a graphic element carried on a support and method of producing such an object; such an object is provided with at least one graphic element, comprising at least one etched layer according to a pattern of the graphic element, a first face of said layer being disposed facing a face of at least one substrate at least partially transparent, a second face, opposite to the first face, of said layer being covered by at least one passivation layer secured to at least one face of at least one support by molecular adhesion and forming, with the support, a monolithic structure .
• the etched layer is formed, before etching, by deposition on the substrate; after etching, this etched layer is embedded in the passivation layer also formed by deposition.
• the document FR - 2 926 748 (CEA - invention of A. REY, J. F. CLERC, A. SOUBIE) relates to an object provided with a graphic element carried on a support and method of producing such an object.
• This object is provided with at least one graphic element and comprises at least one at least partially transparent substrate of which at least one face comprises troughs forming a pattern of the graphic element filled with at least one material, said face of the substrate being secured at least one side of at least one support by molecular adhesion, the substrate and the support forming a monolithic structure.
• the graphic elements have a specific appearance, either by the material of the etched layer, or by the filling material, which leads in practice to a choice limited to shades of gray, or yellow in the case of gold.
• CMOS or CCD image sensors that use small colored pixels but these are not intended for the preservation of still images.
• the object of the invention is to overcome the above-mentioned shortcomings, by proposing a method of producing parts comprising colored buried engravings, in a wide range of possible colors and hues, on a micrometric or even nanometric scale, within assembled structures. as long as possible.
• the invention proposes for this purpose a method for producing a part containing a buried pattern whose dimensions are at most micrometric, according to which
• first and second substrates are prepared, at least one of which is transparent, at least one trench being formed in at least one of these substrates from a surface intended to be adhered to the other substrate,
• the first and second substrates are assembled by bonding by molecular adhesion, the said at least one trench delimiting a hollow volume whose configuration defines the buried pattern, this hollow volume communicating with the outside of the assembly of the first and second substrates, and then
• a dye fluid is circulated in this hollow to color at least some walls.
• the process of the invention is applied to the production of transparent complex parts, advantageously formed of transparent crystals, which may be natural or synthetic.
• the hollow volume communicates with the outside along the bonding interface by molecular adhesion (which is simple to implement but with long communication paths); alternatively, the hollow volume communicates with the outside through channels arranged transversely to the interface of Molecular adhesion bonding (the communication paths may be shorter, but this in practice involves crossing one of the substrates),
• Trenches are provided in each of the first and second substrates, these trenches communicating with each other by delimiting said hollow volume (this allows a wide variety of patterns),
• the trenches are formed while forming internal studs, forming spacers adapted to extend between the bottom of a trench in one of the substrates until contact with the other substrate,
• continuous internal partitions are formed delimiting at least two chambers in the hollow volume, each of the chambers communicating with the outside, different coloring fluids being supplied to each of these chambers (alternatively, the chambers are separated by continuous partitions); ; these partitions can be formed of contiguous blocks,
• the coloring fluid contains a colored substance, for example metallic or organic particles whose mean diameter is at most one hundred nanometers (this average diameter may be chosen according to the dimensions of the trenches),
• each of the first and second substrates is transparent; preferably the two substrates are in the same material (the bonding interface by molecular adhesion is in this case substantially invisible),
• the trenches are created by engraving through lithographic masks
• At least some of the walls of the hollow volume are applied with a treatment adapted to increase its roughness
• the invention also covers a part obtained by such a method, that is to say a part containing a buried pattern whose dimensions are at more micrometric, comprising first and second substrates at least one of which is transparent and which are adhered to one another by molecular adhesion, at least one hollow volume being formed in one and / or the other of substrates in the immediate vicinity of the bonding interface, opening outwards, at least some of the walls of this hollow volume being covered with a color component; this coloring component may consist of coloring particles; this component may, alternatively, be part (or consist of) of a colored liquid at least partially filling the hollow volume.
• the part (which may be a piece of jewelery or clockwork) thus defined preferably has advantageous characteristics derived from those mentioned in connection with the process; among them we can mention in particular:
• the two substrates are of the same material (the piece thus produced is apparently a monolithic piece, since the interface is then substantially invisible),
• the hollow volume comprises studs extending over the entire height of this hollow volume
• the hollow volume comprises several chambers, at least some walls are covered with coloring components of different colors, respectively.
• These coloring components may be coloring particles or colored liquids, these coloring particles and / or these liquids having different colors from one chamber to another (there may be a coloring liquid in a chamber and coloring particles in an other room).
• FIG. 1 is a sectional view of a crystalline substrate covered with a lithography mask
• FIG. 2 is another view after etching through the mask
• FIG. 3 is another view after removal of the lithography mask
• FIG. 4 is a sectional view of a second substrate to which is fixed by molecular adhesion the first substrate of FIGS. 1 and 2 after reversing head to tail, as well as another example of a first substrate,
• FIG. 5 is a diagram from above showing the hollow volume existing in another example of an assembly
• FIG. 6 is another diagram, during circulation of a dye fluid
• FIG. 7 is another diagram of another assembly example whose volume comprises three zones substantially isolated from one another.
• first and second substrates are prepared, at least one of which is transparent, at least one trench being formed in at least one of these substrates from a surface to be adhered to the other substrate; this trench opens outwards on the edge of this substrate or on the face of this substrate which is opposite to the bonding face,
• the first and second substrates are assembled by bonding by molecular adhesion (or direct bonding), said at least one trench delimiting a hollow volume whose configuration defines the buried pattern, this hollow volume communicating with the outside of the assembly of the first and second substrates (through the aforementioned through passages), and
• a dye fluid is circulated in this hollow to color at least some walls.
• Figure 1 shows a first substrate, denoted 1 1, in which one will define, by etching, at least one trench.
• This first substrate 1 1 is advantageously transparent, being amorphous (glass %) or crystalline (sapphire, quartz, diamond ). It is advantageously a crystal.
• etching mask 12 it can be mineral (metal, oxide such as silica %) or organic (photosensitive resin ).
• an etching of the first substrate under the surface 11A is carried out through the mask 12. It may be an isotropic or anisotropic chemical etching or a dry etching plasma, reactive ion etching or ion milling, in particular).
• etching may be an isotropic or anisotropic chemical etching or a dry etching plasma, reactive ion etching or ion milling, in particular).
• the mask is removed (see FIG. 3) without degrading the surface 11A (alternatively, it may be provided that the subsequent surface preparation treatment eliminates any degradation).
• Trenches can be structured on demand:
• o profile of etching edges vertical or inclined sides
• o engraving background smooth bottom or "frosted” bottom thanks to a roughness obtained by the etching process
• the other of the substrates is also provided with trenches.
• This other substrate is here also advantageously transparent, amorphous or crystalline (see what is stated above about the first substrate), preferably consisting of a crystal also.
• the two substrates 1 1 and 21 are in the same material, so that the transparency properties are identical.
• the melting temperature of substrates 11 and 21 is greater than 25 ° C and, preferably, greater than 200 ° C, 400 ° C or 1000 ° C.
• the configuration of the trenches formed in one and / or the other of the substrates is chosen so that, together, these trenches delimit, after the subsequent gluing step, a hollow volume whose configuration defines the buried pattern to be produced.
• a surface treatment can be performed (deposition of a layer for chemical functionalization, PVD or CVD deposition, etc.), this surface treatment can also be removed selectively, for example by chemical mechanical polishing. , on the upper parts of the trenches, to eliminate the traces of the etching step.
• micro-etched crystals can then be machined mechanically according to the desired shapes (for example according to a heart shape for a jewel).
• the trenches defined in one and / or the other of the substrates are such that the hollow volume communicates with the outside (this will emerge later), at least after this possible machining step to delimit the contours of the future bonded assembly .
• Crystal assembly The different substrates or natural or synthetic crystals, with microscopic etchings or without etching, are assembled together by direct bonding, that is to say by molecular bonding, without intermediate adhesive layer.
• the substrates advantageously receive a specific surface treatment, known per se (adaptation of roughness, flatness, cleaning, surface preparation (wet and / or dry activation)); they are then brought into contact with precise positioning if necessary, especially if complementary trenches are provided in each of the substrates.
• the direct bonding is reinforced by a heat treatment, for example between 200 to 950 ° C depending on the desired strength and the materials used. The temperature of this heat treatment, however, remains below the melting point of the substrates 11, 21.
• the substrate 1 1 of FIGS. 1 to 3 has much smaller lateral dimensions than those of the second substrate 21. Indeed, this figure 4 represents, in its right part, another example of complementarity between another first substrate, denoted 1 1 ', and this second substrate 21.
• the second substrate has undergone etching only to form channels 25 extending from the bonding surface, transversely thereto (here perpendicular to it), up to the opposite face, thanks to which the hollow volume 26 delimited by the trenches in the first substrate communicates with the outside.
• the second substrate comprises a trench 27 disposed opposite one (13 '') of the trenches 13A 'and 13B', so as to jointly form a hollow volume 26 'located partly in the first substrate 1 1 and in part in the second substrate 21 (in the example considered, this trench 27 in front of a projecting portion of this substrate, placing in communication the right and left portions of the trench 13B ').
• Providing trenches in each of the substrates makes it possible to perform complex configurations.
• the difference in depth of the trenches 13A 'and 13B', on the one hand, and 27, on the other hand, may make it possible, during the subsequent coloring step, to obtain slightly different shades by means of the same dye fluid.
• Unrepresented trenches constitute external communication channels (not shown) located along the bonding interface.
• the bonding interface of the left part is noted I and that of the right part is noted ⁇ .
• One or more cut crystals can be glued with an adhesive substance or by molecular bonding to the surface of one of the substrates to make macroscopic patterns, for example decorative purposes.
• the hollow volume may include a plurality of pads and / or partitions extending from its bottom in one of the substrates to the other of the substrates; in fact, the hollow volumes may have, parallel to the bonding interface by molecular adhesion, dimensions much greater than the depth of these volumes: the presence of such studs makes it possible, in the manner of spacers, to maintain a constant spacing between the bottom of a given hollow volume, in a substrate, and the surface of the other substrate, which can contribute to a uniform coloration in the hollow volume in question; in addition, these pads contribute to bonding by molecular adhesion.
• a step of staining the substrates after their assembly is carried out.
• the coloration is obtained by injecting a colored fluid substance in at least some of the hollow volumes defined by the trenches at the bonding interface.
• the colored fluid substance infiltrates by capillarity and thus allows the coloration of the hollow volume considered.
• infiltration paths between the etched parts and the bonded portions of the crystals are used; by referring as an example to the left-hand part of FIG. 4, such an infiltration path is constituted by one of the channels 25 of FIG. 4, the other channel allowing the evacuation of the gas trapped during the bonding and repressed by the penetration of said fluid.
• the colored fluid substance may be in liquid or gaseous form.
• a multicolored coloration can be obtained by the definition of different unicolour infiltration paths. Similarly, it is possible to promote shade variations by color blends.
• It may be a fluid, for example a solvent, loaded with coloring particles which may advantageously be deposited on the walls of the hollow volume.
• the capillarity infiltration dynamic depends on the size of infiltration paths and hollow volumes, the distance to be covered by infiltration, and the viscosity of the fluid substance; in the case of multiple hollow volumes, a compromise must be found between the number of infiltration paths and the number of hollow volumes in series (if all the hollow volumes are in series, the infiltration dynamic will be slow; infiltration paths specific to each hollow volume, the dynamics will be faster, but at the cost of a possibly complex path of infiltration paths.If necessary, this infiltration can be performed at a temperature above room temperature to reduce the viscosity.
• the dye fluid when it is a gas, it can be thought that it flows easily in the hollow volume.
• it when it is a liquid, it may be difficult to circulate in the hollow volume
• a way to promote the injection and circulation of the fluid, especially when it comes to a liquid, is to apply a heat treatment that helps to reduce the viscosity of the fluid, but also, where appropriate, promote the evaporation of the constituent solvent of the fluid when it is a liquid.
• the communication orifices are advantageously sealed after circulating a sufficient quantity of fluid (see below).
• FIG. 5 schematically represents the assembly 31 of an etched transparent substrate and of an unetched transparent substrate and the pattern formed by the trenches is buried in this assembly at the bonding interface.
• the part of this assembly in which there is a trenchless molecular adhesion bonding is hatched, whereas a much clearer area represents a hollow volume 36 (the substrates are not identified as such since they are transparent).
• pads 37 are distributed inside this hollow volume (as well as near its periphery).
• Input / output paths 35 are here arranged in the plane of the interface (or at least in close proximity thereto).
• coloring fluid is placed in communication with one of the infiltration paths 35, here the path located at the top in FIG. 6.
• the configuration of the studs is such that that they leave running paths between the entry / exit paths 35; these roads can branch out and then regroup near the exit road.
• the fluid infiltrates by capillarity from the entry path to the exit path between the pads; advantageously, the configuration of FIG. 6 corresponds to the spatial configuration in which the assembly 31 is located, that is to say that the face through which the coloring fluid (above the plane of the figure) penetrates is located above the face through which this fluid can leave this assembly (below the plane of the figure); in other words, the circulation can be obtained by capillary gravitation.
• the color of the hollow volume will be all the more homogeneous that the fluid will have access to the entire hollow volume.
• the coloring results either from the deposition of coloring particles on the walls of the hollow volume, in particular its walls (or faces) parallel to the interface bonding, but also its side walls, or the presence of the colored fluid itself in the hollow volume. It is understood in the case of the deposition of particles that the trapping effect of the coloring particles on these walls depends on their surface state, and that it may be interesting that the surfaces of these walls are not too smooth. It is also understood that, when the coloration results mainly from the presence of fluid trapped in the hollow volume, the circulation of this fluid may be very limited (for example just sufficient to allow the total or partial filling of the hollow volume). Of course, coloring particles may be deposited on the walls (lateral or otherwise) as well as a consequence of a significant flow of fluid that consequently a fluid imprisonment.
• FIG. 7 represents a variant representing an assembly 41 in which the hollow volume 46, provided with studs 47, is divided into three independent chambers denoted 46A, 46B and 46C.
• the separation between the chambers is here carried out by continuous walls 48A and 48B; these walls are here represented in white, being independent of the rest of the substrates (it may indeed be areas added after etching, as the pads, alternatively, these partitions and / or these pads may be areas not etched when the engraving of the trenches constituting the hollow volume).
• the partitions can be formed of contiguous blocks.
• the entry / exit infiltration paths are not shown, being located perpendicular to the plane of the figure; there are specific paths for each of the rooms. By passing coloring fluids of different colors, three zones of different colors are obtained.
• Colored solutions with nanoparticles in solution may in particular be used.
• These nanoparticles may be metal particles of very small size, for example gold particles (Au) of the order of a few nm in size which may be up to about 100 nm.
• Au gold particles
• These particles can be protected by a carapace that will give them a good temperature resistance, for example a zirconia shell (Zr0 2 ) around gold particles. This modifies the optical properties, which must be taken into account when designing the implementation of the process.
• the choice of materials and the size of the nanoparticles will be made according to the desired color characteristics.
• the particles may in particular be of mineral type, and comprise, for example, an oxide, such as an oxide of iron, chromium, manganese, or aluminum, or mixtures of such oxides, or comprise a metal or a alloy, such as spinel, or chromium, or cobalt.
• an oxide such as an oxide of iron, chromium, manganese, or aluminum, or mixtures of such oxides, or comprise a metal or a alloy, such as spinel, or chromium, or cobalt.
• the particles may also be of organic type, phthalocyanine type, for example.
• the particles can also be formed using particles with surface plasmon effect, Au, Ag, Pt type, or with the aid of organic molecules included in a mineral matrix.
• the particles may be coated in refractory materials of the Alumina, or Zirconia, or Zircon type.
• the particles may be suspended in a solvent; when the coloration is intended to be given by fluid trapped in the hollow volume, the color is advantageously stable throughout the volume of this fluid.
• the invention can find applications in various industrial, cultural or artistic fields.
• complex watch parts for example housings or mechanical assemblies
• the substrates can be transparent.
• the trenches can be obtained by depositing material around the areas intended to form the hollow volumes.
• the separations between the chambers can be formed by continuous partitions.

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• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Laminated Bodies (AREA)
• Crystals, And After-Treatments Of Crystals (AREA)

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• 2010
  • 2010-11-08 FR FR1059214A patent/FR2967016B1/fr not_active Expired - Fee Related
• 2011
  • 2011-10-27 WO PCT/EP2011/068819 patent/WO2012062585A2/fr not_active Ceased
  • 2011-10-27 EP EP11775954.8A patent/EP2637877A2/de not_active Withdrawn
  • 2011-10-27 US US13/884,011 patent/US20130266768A1/en not_active Abandoned

Non-Patent Citations (1)

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