EP2772651A3 - Pumpe - Google Patents

Pumpe Download PDF

Info

Publication number
EP2772651A3
EP2772651A3 EP14154409.8A EP14154409A EP2772651A3 EP 2772651 A3 EP2772651 A3 EP 2772651A3 EP 14154409 A EP14154409 A EP 14154409A EP 2772651 A3 EP2772651 A3 EP 2772651A3
Authority
EP
European Patent Office
Prior art keywords
coolant
side channel
vacuum pump
stator element
pumping stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP14154409.8A
Other languages
English (en)
French (fr)
Other versions
EP2772651B1 (de
EP2772651A2 (de
Inventor
Dr. Aleksandr Shirinov
Wolfgang Söhngen
Torsten Gogol
Sebastian Oberbeck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2772651A2 publication Critical patent/EP2772651A2/de
Publication of EP2772651A3 publication Critical patent/EP2772651A3/de
Application granted granted Critical
Publication of EP2772651B1 publication Critical patent/EP2772651B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5806—Cooling the drive system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5813—Cooling the control unit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe mit wenigstens einer Seitenkanalpumpstufe, die einen durch zumindest ein Statorelement begrenzten Seitenkanal umfasst, und mit einem Kühlmittelkreislauf zur Kühlung der Vakuumpumpe mit einem Kühlmittel, wobei der Kühlmittelkreislauf wenigstens einen Kühlmittelkanal für die Seitenkanalpumpstufe aufweist, der zumindest bereichsweise durch das Statorelement begrenzt ist.
EP14154409.8A 2013-03-01 2014-02-10 Pumpe Not-in-force EP2772651B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013203577.2A DE102013203577A1 (de) 2013-03-01 2013-03-01 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2772651A2 EP2772651A2 (de) 2014-09-03
EP2772651A3 true EP2772651A3 (de) 2014-12-24
EP2772651B1 EP2772651B1 (de) 2018-04-11

Family

ID=50070411

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14154409.8A Not-in-force EP2772651B1 (de) 2013-03-01 2014-02-10 Pumpe

Country Status (3)

Country Link
US (1) US20140248166A1 (de)
EP (1) EP2772651B1 (de)
DE (1) DE102013203577A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015213527A1 (de) * 2015-07-17 2017-01-19 Leybold Gmbh Pumpensystem
DE102015015863A1 (de) * 2015-12-09 2017-06-14 Fte Automotive Gmbh Elektromotorisch angetriebene Flüssigkeitspumpe
GB2569648A (en) * 2017-12-22 2019-06-26 Edwards Ltd Magnetic shield for a vacuum pump
DE102022213712A1 (de) * 2022-12-15 2024-06-20 Robert Bosch Gesellschaft mit beschränkter Haftung Anodenrezirkulationsgebläse mit integriertem Sensor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5020969A (en) * 1988-09-28 1991-06-04 Hitachi, Ltd. Turbo vacuum pump
US5664935A (en) * 1994-09-19 1997-09-09 Hitachi, Ltd. Vacuum pump
DE19819267A1 (de) * 1998-04-30 1999-11-04 Becker Kg Gebr Strömungsmaschine
US20120189436A1 (en) * 2011-01-21 2012-07-26 Toyota Motor Engineering & Manufacturing North America, Inc. Temperature control ring for vehicle air pump

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0689756B2 (ja) * 1986-05-02 1994-11-14 株式会社日立製作所 ドライ真空ポンプ
US5983777A (en) * 1997-12-18 1999-11-16 Cassaday; Michael M. Method and apparatus for diaphragm pumping with adjustable flow
DE10048695A1 (de) * 2000-09-30 2002-04-11 Leybold Vakuum Gmbh Pumpe als Seitenkanalpumpe
US20080066859A1 (en) * 2006-08-30 2008-03-20 Michiaki Kobayashi Plasma processing apparatus capable of adjusting pressure within processing chamber
WO2011021428A1 (ja) * 2009-08-21 2011-02-24 エドワーズ株式会社 真空ポンプ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5020969A (en) * 1988-09-28 1991-06-04 Hitachi, Ltd. Turbo vacuum pump
US5664935A (en) * 1994-09-19 1997-09-09 Hitachi, Ltd. Vacuum pump
DE19819267A1 (de) * 1998-04-30 1999-11-04 Becker Kg Gebr Strömungsmaschine
US20120189436A1 (en) * 2011-01-21 2012-07-26 Toyota Motor Engineering & Manufacturing North America, Inc. Temperature control ring for vehicle air pump

Also Published As

Publication number Publication date
EP2772651B1 (de) 2018-04-11
DE102013203577A1 (de) 2014-09-04
US20140248166A1 (en) 2014-09-04
EP2772651A2 (de) 2014-09-03

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