EP2808719B1 - Optischer Deflektor mit getrennten piezoelektrischen Abschnitten auf piezoelektrischen Aktuatoren - Google Patents

Optischer Deflektor mit getrennten piezoelektrischen Abschnitten auf piezoelektrischen Aktuatoren Download PDF

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Publication number
EP2808719B1
EP2808719B1 EP14170118.5A EP14170118A EP2808719B1 EP 2808719 B1 EP2808719 B1 EP 2808719B1 EP 14170118 A EP14170118 A EP 14170118A EP 2808719 B1 EP2808719 B1 EP 2808719B1
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EP
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Prior art keywords
semi
optical deflector
piezoelectric
circular piezoelectric
circular
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English (en)
French (fr)
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EP2808719A1 (de
Inventor
Yoshiaki Yasuda
Masanao Tani
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Stanley Electric Co Ltd
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Stanley Electric Co Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Definitions

  • the presently disclosed subject matter relates to an optical deflector used in a projector, a headlamp, a bar code reader, a laser printer, a laser head amplifier, a head-up display unit and the like, and its designing method.
  • Fig. 1A is a perspective view illustrating a first prior art one-dimensional optical deflector
  • Fig. 1B is a partial enlargement of the optical deflector of Fig. 1A enclosed by a dotted line B in Fig. 1A (see: Fig. 5 of JP2008-20701A ).
  • the first prior art one-dimensional optical deflector is constructed by a circular mirror 1, a pair of torsion bars 2a and 2b oppositely arranged along a Y-axis (rocking axis) each having an end coupled to the circumference of the mirror 1, a pair of semi-circular piezoelectric actuators 3-1 and 3-2 opposite to each other with respect to the mirror 1 each coupled to both of the torsion bars 2a and 2b for rocking the mirror 1 around the Y-axis, a rectangular fixed frame 4 surrounding the semi-circular piezoelectric actuators 3-1 and 3-2 each including one piezoelectric portion 3-11 (3-21) made of lead titanate zirconate PbZrTiO 2 (PZT), and a pair of coupling bars 5-1 and 5-2 arranged along an X-axis perpendicular to the Y-axis having ends coupled to the inner circumference of the fixed frame 4 and other ends coupled to the outer circumference of the semi-circular
  • portions of the semi-circular piezoelectric actuators 3-1 and 3-2 where the torsion bars 2a and 2b and the coupling bars 5-1 and 5-2 are coupled form loops having maximum amplitudes of a resonant vibration
  • portions of the semi-circular piezoelectric actuators 3-1 and 3-2 having 45° -angled diameter directions with respect to a diameter line between the torsion bars 2a and 2b and a diameter line between the coupling bars 5-1 and 5-2 form nodes having essentially zero amplitudes of the resonant vibration.
  • radial axes C1, C2, ⁇ , C16 are defined at intervals 22.5° centered at a point "0" on a plane of the fixed frame 4.
  • a circumferential line L is defined at a center line between the outer and inner circumferences of the semi-circular piezoelectric actuators 3-1 and 3-2.
  • P1, P2, ⁇ , P16 are defined as locations at intersections between the circumferential line L and the radial axes C1, C2, ⁇ , C16, respectively.
  • the X-axis is defined as the direction of the radial axis C5
  • the Y-axis is defined as the direction of the radial axis C1.
  • the Y-axis is shifted from the rocking direction of the mirror 1 by a half thickness of the mirror 1; however, since this half thickness is very thin, the Y-axis is substantially the same as the rocking direction of the mirror 1.
  • a Z-axis is defined as a direction perpendicular to the X-axis and the Y-axis.
  • Fig. 2 which illustrates the amplitudes at the locations P9, P10, P11, P12 and P13 along the Z-axis of Fig. 1B in a resonant state whose resonant frequency is 18. 877 kHz, three or four amplitudes at three or four X-coordinate values and at one Y-coordinate value were measured.
  • the amplitude at the location P9 was about 4.4 mm
  • the amplitude at the location P10 was about 1.6 mm
  • the amplitude at the location P11 was about 0.3 mm
  • the amplitude at the location P12 was about 1.5 mm
  • the amplitude at the location P13 was about 2.2 mm. Therefore, the amplitude at the location P11 was minimum, while the amplitude at the location P9 was maximum.
  • the amplitudes at the locations P10 and P12 were medium.
  • the amplitude at the location P13 is smaller than the amplitude at the location P9, because the coupling bar 5-2 is located at the location P13 to suppress the vibration of the portion of the semi-circular piezoelectric actuator 3-2 at the location P13. That is, if no coupling bar is present at the location P13, the amplitude at the location P13 would be considered to be the same as the amplitude at the location P9, i.e., larger than 2.2mm.
  • the amplitudes at the locations P1, P2, ⁇ , P16 of the circumferential line L in a resonant state can be as shown in Fig. 3 .
  • a drive voltage V Y1 is applied to the entire semi-circular piezoelectric actuator 3-1.
  • the amplitudes at the locations P1, P2, P8 and P9 are opposite in phase to those at the locations P4, P5 and P6, a drive voltage V Y2 opposite in phase to the drive voltage V Y1 is applied to the entire semi-circular piezoelectric actuator 3-2.
  • the drive power by the drive voltages V Y1 and V Y2 would be decreased.
  • Fig. 4 is a perspective view illustrating a second prior art one-dimensional optical deflector (see: Figs. 26, 27, 28 and 29 of JP2010-197994A and US2010/0195180A1 ).
  • the second prior art one-dimensional optical deflector is constructed by a circular mirror 101, a pair of torsion bars 102a and 102b arranged along a Y-axis each having an end coupled to the circumference of the mirror 101, a pair of linear piezoelectric actuators 103a-1 and 103a-2 each having an end coupled to the torsion bar 102a, a pair of linear piezoelectric actuators 103b-1 and 103b-2 each having an end coupled to the torsion bar 102b, and a rectangular fixed frame 104 coupled to other ends of the linear piezoelectric actuators 103a-1, 103a-2, 103b-1 and 103b-2.
  • a drive voltage V Y1 is applied to the piezoelectric portions 103a-11 and 103b-11, while a drive voltage V Y2 opposite in phase to the drive voltage V Y1 is applied to the piezoelectric portions 103a-21 and 103b-21.
  • the rocking angle of the mirror 1 can be maximum under the same drive voltages V Y1 and V Y2 .
  • Fig. 5 is a perspective view illustrating a third prior art one-dimensional optical deflector (see: Figs. 30, 31, 32, 33 and 34 of JP2010-197994A and US2010/0195180A1 ).
  • Fig. 5 further piezoelectric portions 103a-12, 103a-22, 103b-12 and 103b-22 separated from the piezoelectric portions 103a-11, 103a-21, 103b-11 and 103b-21 are formed on the linear piezoelectric actuators 103a-1, 103a-2, 103b-1 and 103b-2, respectively, of Fig. 4 .
  • the drive voltage V Y1 is applied to the piezoelectric portions 103a-22 and 103b-22
  • the drive voltage V Y2 is applied to the piezoelectric portions 103a-12 and 103b-12.
  • the rocking angle of the mirror 1 can be further increased under the same drive voltages V Y1 and V Y2 .
  • the length L P of the piezoelectric portions 103a-11, 103a-21, 103b-11 and 103b-22 is determined in accordance with the maximum value of the flexing angle of the linear piezoelectric actuators 103a-1, 103a-2, 103b-1 and 103b-2 when no torsion bar is coupled thereto or the maximum value of the moment of the linear piezoelectric actuators 103a-1, 103a-2, 103b-1 and 103b-2 when the torsion bars 102a and 102b are fixed.
  • the presently disclosed subject matter seeks to solve one or more of the above-described problems.
  • an optical deflector is provided as set forth in claim 1. Preferred embodiments of the present invention may be gathered from the dependent claims.
  • the drive power can be increased and the reliability can be enhanced.
  • Fig. 6 which illustrates a first embodiment of the one-dimensional optical deflector according to the presently disclosed subject matter
  • the semi-circular piezoelectric actuators 3-1 and 3-2 of Fig. 1 are replaced by semi-circular piezoelectric actuators 3'-1 and 3'-2, respectively.
  • radial axes C1', C2', C3', C4', C5' and C6' are defined at 60° intervals centered at a point "0" on a plane of the fixed frame 4.
  • an X-axis is defined by a radial line between the radial axes C2' and C3'
  • a Y-axis is defined by the radial axis C1'
  • a Z-axis is defined to be perpendicular to the X-axis and the Y-axis.
  • the semi-circular piezoelectric actuator 3' -1 includes piezoelectric portions 3' -11, 3' -12 and 3' -13 made of PZT separated by slits S1 and S2 arranged on the radial axes C2' and C3' , respectively.
  • the semi-circular piezoelectric actuator 3' -2 includes piezoelectric portions 3' -21, 3' -22 and 3' -23 made of PZT separated by slits S3 and S4 arranged on the radial axes C5' and C6', respectively.
  • the positions of the slits S1, S2, S3 and S4 are determined by a polarization polarity distribution on the semi-circular piezoelectric actuators 3' -1 and 3' -2 as illustrated in Fig. 7 obtained by performing a predetermined polarization simulation upon the one-dimensional optical deflector of Fig. 6 where piezoelectric portions with no slits are hypothetically provided in the semi-circular piezoelectric actuators 3' -1 and 3' -2 and a predetermined rocking operation is performed on the mirror 1.
  • the polarization polarity of polarization areas as indicated by G1 is opposite to the polarization polarity of polarization areas as indicated by G2.
  • one of the polarization polarities represents a compression stress state, while the other represents a tension stress state. That is, the positions of the slits S1, S2, S3 and S4 of Fig. 6 correspond to boundaries between the polarization polarity areas indicated by G1 and the polarization polarity areas indicated by G2 in Fig. 7 . Therefore, as illustrated in Fig.
  • a drive voltage V Y1 is applied to the piezoelectric portions 3' -11 and 3' -13 of the semi-circular piezoelectric actuator 3' -1 and the piezoelectric portion 3' -22 of the semi-circular piezoelectric actuator 3' -2, while a drive voltage V Y2 opposite in phase to the drive voltage V Y1 is applied to the piezoelectric portion 3' -12 of the semi-circular piezoelectric actuator 3' -1 and the piezoelectric portions 3' -21 and 3' -23 of the semi-circular piezoelectric actuator 3' -2.
  • the drive voltage V Y1 is a sinusoidal-wave voltage whose frequency f R is a resonant frequency as illustrated in Fig. 9A
  • the drive voltage V Y2 is a sinusoidal-wave voltage as illustrated in Fig. 9B which is opposite in phase to the sinusoidal-wave drive voltage V Y1 .
  • Figs. 9A and 9B note that the sinusoidal-wave voltages V Y1 and V Y2 are monopolar. As a result, the areas indicated by G1 and G2 of the semi-circular piezoelectric actuators 3' -1 and 3' -2 are moved in the same phase with respect to the Y-axis, to thereby effectively rock the mirror 1 with respect to the Y-axis.
  • the amplitudes of the drive voltages V Y1 and V Y2 were required to be 10V in the one-dimensional optical deflector of Fig. 6
  • the amplitudes of the drive voltages V Y1 and V Y2 were required to be 20V or more in the one-dimensional optical deflector of Fig. 1 .
  • the rocking angle of the mirror 1 by the same amplitudes of the drive voltages V Y1 and V Y2 can be larger in the one-dimensional optical deflector of Fig. 6 than in the one-dimensional optical deflector of Fig.
  • Figs. 10A, 10B, 10C, and 10D are cross-sectional views of the optical deflector of Fig. 6 .
  • Fig. 10A is a cross-sectional view of the entire optical deflector of Fig. 6
  • Figs. 10B, 10C and 10D are cross-sectional views of the semi-circular piezoelectric actuator 3' -1 (3' -2) of Fig. 6 .
  • a monocrystalline silicon support layer 1001, an intermediate silicon dioxide layer 1002 and a monocrystalline silicon active layer 1003 are formed by a silicon-on-insulator (SOI) substrate.
  • reference numeral 1004 designates a silicon dioxide layer
  • 1005 designates a lower electrode layer of a double layer made of Ti, TiO 2 or TiO x (0 ⁇ x ⁇ 2) and Pt
  • 1006 designates a PZT layer
  • 1007 designates an upper electrode layer made of Pt, Au or the like
  • 1008 designates an about 100 to 500 nm thick metal layer made of Al, Ag, Au, Pt or the like.
  • the mirror 1 is constructed by the monocrystalline silicon active layer 1003 serving as a vibration plate and the metal layer 1008 serving as a reflector.
  • the semi-circular piezoelectric actuators 3' -1 and 3' -2 are constructed by the intermediate silicon layer 1002, the monocrystalline silicon active layer 1003, the silicon dioxide layer 1004, the lower electrode layer 1005, the PZT layer 1006 and the upper electrode layer 1007. Particularly, the lower electrode layer 1005, the PZT layer 1006 and the upper electrode layer 1007 form the piezoelectric portions 3' -11, 3' -12, 3' -13, 3' -21, 3' -22 and 3' -23.
  • the fixed frame 4 is constructed by the monocrystalline silicon layer 1001, the intermediate silicon layer 1002, the monocrystalline silicon active layer 1003 and the silicon dioxide layer 1004.
  • the semi-circular piezoelectric actuators 3'-1 (3'-2) can entirely include the lower electrode layer 1005 as illustrated in Fig. 10C , or can entirely include the lower electrode layer 1005 and the PZT layer 1006 as illustrated in Fig. 10D .
  • portions of the PZT layer 1006 without the upper electrode layer 1007 are inactivated, so that the semi-circular piezoelectric actuators 3' -1 (3' -2) of Fig. 10C or 10D can serve as the semi-circular piezoelectric actuators 3' -1 (3' -2) of Fig. 10B .
  • the structure of the one-dimensional optical deflector as illustrated in Fig. 10 can be manufactured by semiconductor manufacturing technology and micro electro mechanical systems (MEMS) technology (see : JP 2009-169326 and JP 2009-223165 ).
  • MEMS micro electro mechanical systems
  • a method for designing the one-dimensional optical deflector of Fig. 6 is as follows.
  • a one-dimensional optical deflector of Fig. 6 without slits S1, S2, S3 and S4 is designed.
  • piezoelectric portions are provided at least on the piezoelectric actuators 3'-1 and 3'-2.
  • a predetermined polarization simulation is performed upon the designed one-dimensional deflector without slits S1, S2, S3 and S4 to obtain a polarization polarity distribution as illustrated in Fig. 7 while a predetermined rocking operation is performed upon the mirror 1.
  • the locations of the slits S1, S2, S3 and S4 are determined in accordance with boundaries between the polarization polarity areas of the polarization polarity distribution.
  • the piezoelectric portions 3' -11, 3' -12, 3' -13, 3' -21, 3' -22 and 3' -23 are determined in accordance with the slits S1, S2, S3 and S4.
  • a semi-diamond (or semi-lozenge)-shaped piezoelectric actuator 3" -1 including piezoelectric portions 3" -11, 3" -12 and 3" -13 and a semi-diamond-shaped piezoelectric actuator 3"-2 including the piezoelectric portions 3" -21, 3" -22 and 3" -23 and a diamond-shaped fixed frame 4' are provided instead of the semiconductor piezoelectric actuator 3' -1 including the piezoelectric portions 3' -11, 3' -12 and 3' -13 and the semi-circular piezoelectricactuator3' -21, 3' -22 and 3' -23 and the rectangular fixed frame 4, respectively, of Fig. 6 .
  • the width of the semi-diamond-shaped piezoelectric actuators 3" -1 and 3" -2 is gradually increased from the coupling portions 5-1 and 5-2 as indicated by A (see: Fig. 12 ) to the torsion bars 2a and 2b as indicated by B (see: Fig. 12 ).
  • the rocking angle of the mirror 1 can be increased under the same drive voltage V Y1 and V Y2 .
  • the piezoelectric portions 3" -11, 3" -12 and 3' -13 made of PZT are separated by slits S1' and S2' arranged on the radial axes C2' and C3', respectively.
  • the piezoelectric portions 3" -21, 3" -22 and 3" -23 made of PZT are separated by slits S3' and S4' arranged on the radial axes C5" and C6", respectively.
  • the positions of the slits S1', S2' , S3' and S4' are determined by a polarization polarity distribution on the semi-diamond-shaped piezoelectric actuators 3" -1 and 3" -2 as illustrated in Fig. 12 obtained by performing a predetermined polarization simulation upon the one-dimensional optical deflector of Fig. 11 where piezoelectric portions with no slits are hypothetically provided in the semi-diamond-shaped piezoelectric actuators 3" -1 and 3" -2 and a predetermined rocking operation is performed on the mirror 1.
  • a sinusoidal-wave drive voltage V Y1 is applied to the piezoelectric portions 3" -11 and 3" -13 of the semi-diamond-shaped piezoelectric actuator 3" -1 and the piezoelectric portion 3" -22 of the semi-diamond-shaped piezoelectric actuator 3" -2, while a sinusoidal-wave drive voltage V Y2 opposite in phase to the drive voltage V Y1 is applied to the piezoelectric portion 3" -12 of the semi-diamond-shaped piezoelectric actuator 3" -1 and the piezoelectric portions 3" -21 and 3" -23 of the semi-diamond-shaped piezoelectric actuator 3" -2.
  • the structure of the one-dimensional optical deflector of Fig. 11 is similar to that of the one-dimensional optical deflector of Fig. 6 as illustrated in Fig. 10 . Also, the method for designing the one-dimensional optical deflector of Fig. 11 is similar to the method for designing the one-dimensional optical deflector of Fig. 6 .
  • Fig. 13 which illustrates a third embodiment of the one-dimensional optical deflector according to the presently disclosed subject matter
  • the piezoelectric portions 3' -12 and 3' -22 are removed from the semi-circular piezoelectric actuators 3' -1 and 3' -2 of Fig. 6 .
  • a sinusoidal-wave drive voltage V Y1 as illustrated in Fig. 9A is applied to the piezoelectric portions 3' -11 and 3' -13 of the semi-circular piezoelectric actuator 3' -1, while a sinusoidal-wave drive voltage V Y2 as illustrated in Fig. 9B opposite in phase to the drive voltage V Y1 is applied to the piezoelectric portions 3' -21 and 3' -23 of the semi-circular piezoelectric actuator 3' -2.
  • the amplitudes of the drive voltages V Y1 and V Y2 were required to be 11 to 12V in the one-dimensional optical deflector of Fig. 13 . Therefore, in the same way as in the one-dimensional optical deflector of Fig. 6 , the power consumption can be decreased, and the deterioration of the piezoelectric portions made of PZT can be suppressed to enhance the reliability.
  • the structure of the one-dimensional optical deflector of Fig. 13 is similar to that of the one-dimensional optical deflector of Fig. 6 as illustrated in Fig. 10 . Also, the method for designing the one-dimensional optical deflector of Fig. 13 is similar to the method for designing the one-dimensional optical deflector of Fig. 6 .
  • the one-dimensional optical deflector of Fig. 6 where no drive voltage is applied to the piezoelectric portions 3' -12 and 3' -22 can be used as the one-dimensional optical deflector of Figs. 13 and 14 .
  • no drive voltage is applied to the piezoelectric portion 3' -12 of the semi-circular piezoelectric actuator 3' -1 and the piezoelectric portion 3' -22 of the semi-circular piezoelectric actuator 3' -2.
  • Fig. 15 which illustrates a fourth embodiment of the one-dimensional optical deflector according to the presently disclosed subject matter
  • torsion bars 2'a and 2'b are provided instead of the torsion bars 2a and 2b, respectively, of Fig. 6 . Since the torsion bars 2'a and 2'b are coupled between the outer circumference of the mirror 1 and the inner circumference of the fixed frame 4 through the semi-circular piezoelectric actuators 3' -1 and 3' -2, the torsion bars 2'a and 2'b can be stably twisted by the piezoelectric actuators 3' -1 and 3' -2. Also, since the mirror 1 is supported by a four-point support at the fixed frame 4, the support of the mirror 1 is more stable in the one-dimensional optical deflector of Fig. 15 than in the one-dimensional optical deflector of Fig. 6 .
  • a piezoelectric sensor 1501 is provided at a portion crossing between the torsion bar 2b and the semi-circular piezoelectric actuator 3'-1.
  • the piezoelectric sensor 1501 is constructed by the lower electrode layer 1005, the PZT layer 1006 and the upper electrode layer 1007 in the same way as those of Fig. 10 , in order to sense rocking vibrations of the torsion bar 2b caused by the semi-circular piezoelectric actuator 3'-1.
  • the piezoelectric sensor 1501 senses a strong stress due to the rocking vibrations of the torsion bar 2b which would be concentrated at an inner side portion of the semi-circular piezoelectric actuator 3'-1 in the vicinity of the torsion bar 2b.
  • the piezoelectric sensor 1501 is arranged at a width portion having a width of less than 0.18 ⁇ W from the inner circumference of the semi-circular piezoelectric actuator 3'-1.
  • a sense conductive layer 1601 is connected from the upper electrode layer (not shown) of the piezoelectric sensor 1501 over the torsion bar 2b to a sense pad P S on the fixed frame 4.
  • ground conductive layers 1602 and 1603 are arranged to sandwich the sense conductive layer 1601, so that the sense conductive layer 1601 is electrostatically shielded by the ground conductive layers 1602 and 1603, thus preventing the sense conductive layer 1601 from crosstalking with the drive voltages V Y1 and V Y2 at the piezoelectric portion 3'-13 of the semi-circular piezoelectric actuator 3'-1 and the piezoelectric portion 3'-21 of the semi-circular piezoelectric actuator 3'-2.
  • the ground conductive layers 1602 and 1603 are connected over the torsion bar 2b to a ground pad P GND on the fixed frame 4.
  • a sense voltage V S of the piezoelectric sensor 1501 is supplied from the sense conductive layer 1601 to the sense pad P S , and then is supplied to a control unit (not shown) which controls the drive voltages V Y1 and V Y2 . Therefore, the frequency of the drive voltages V Y1 and V Y2 is controlled by the control unit, so that the sense voltage V S is brought close to its maximum value, thus realizing a resonance state.
  • the structure of the one-dimensional optical deflector of Fig. 15 is similar to that of the one-dimensional optical deflector of Fig. 6 as illustrated in Fig. 10 . Also, the method for designing the one-dimensional optical deflector of Fig. 15 is similar to the method for designing the one-dimensional optical deflector of Fig. 6 .
  • the one-dimensional optical deflector of Fig. 6 is applied to a light scanning system as illustrated in Fig. 17 .
  • a light source 1701 emits a light beam BM and transmits it to the mirror 1 of the one-dimensional optical deflector of Fig. 6 .
  • a control unit 1702 controls the light source 1701, so that the control unit 1702 turns ON and OFF the light source 1701, as occasion demands. Also, the control unit 1702 controls the sinusoidal-wave drive voltages V Y1 and V Y2 as illustrated in Figs.
  • control unit 1702 turns ON the light source 1701 for a half period of the sinusoidal-wave voltage V Y1 and turns OFF the light source 1701 for the other half period of the sinusoidal-wave voltage V Y1 .
  • the light beam BM is reflected by the mirror 1 to emit a scanning light beam SB.
  • the control unit 1702 is constructed by a microcomputer including a central processing unit (CPU), a read-only memory (ROM), a random access memory (RAM) and the like.
  • the one-dimensional optical deflector of Fig. 11 , 13 or 15 can also be applied to the light scanning system of Fig. 17 .
  • the mirror 1 is circular; however, the mirror 1 can be an ellipse.
  • the slits S1, S2, S3 and S4 are arranged along a 60°, 120°, 240° and 300° -angled direction with respect to the rocking direction of the mirror 1.
  • Fig. 1 illustrates that the slits S1, S2, S3 and S4 (S1', S2', S3' and S4') are arranged along a 60°, 120°, 240° and 300° -angled direction with respect to the rocking direction of the mirror 1.
  • the slit S1 (S1') can be arranged along a first radial direction which is +30° to +60° -angled with respect to the rocking direction
  • the slit S2 (S2') can be arranged along a second radial direction which is +120° to +150° -angled with respect to the rocking direction
  • the slit S3 (S3') can be arranged along a third radial direction which is +210° to +240° -angled with respect to the rocking direction
  • the slit S4 (S4') can be arranged along a fourth radial direction which is +300° to +330° -angled with respect to the rocking direction.
  • the slits S1 and S3 are arranged along a first diameter direction which is obtained by inclining the rocking direction (axis) by a first predetermined angle between +30° and +60°, while the slits S2 and S4 (S2' and S4') are arranged along a second diameter direction which is obtained by inclining the rocking direction (axis) by a second predetermined angle between -30° and -60° .
  • Fig. 19 which is a perspective view illustrating a two-dimensional optical deflector to which the one-dimensional optical deflector of Fig. 6 is applied
  • the rectangular fixed frame 4 of Fig. 6 serves as a movable frame 4M.
  • a rectangular fixed frame 11 is provided to surround the movable frame 4M.
  • a pair of outer meander-type piezoelectric actuators 12 and 13 between the fixed frame 11 and the movable frame 4M and serving as cantilevers for rocking the mirror 1 around the X-axis.
  • the piezoelectric actuators 12 and 13 are arranged opposite to each other with respect to the X-axis.
  • the outer piezoelectric actuator 12 is constructed by piezoelectric cantilevers 12-1, 12-2, 12-3 and 12-4 which are serially-coupled from the fixed frame 11 to the movable frame 4M. Also, each of the piezoelectric cantilevers 12-1, 12-2, 12-3 and 12-4 are in parallel with the Y-axis. Therefore, the piezoelectric cantilevers 12-1, 12-2, 12-3 and 12-4 are folded at every cantilever or meandering from the fixed frame 11 to the movable frame 4M, so that the amplitudes of the piezoelectric cantilevers 12-1, 12-2, 12-3 and 12-4 can be changed along directions perpendicular to the X-axis.
  • the outer piezoelectric actuator 13 is constructed by piezoelectric cantilevers 13-1, 13-2, 13-3 and 13-4 which are serially-coupled from the fixed frame 11 to the movable frame 4M. Also, each of the piezoelectric cantilevers 13-1, 13-2, 13-3 and 13-4 are in parallel with the Y-axis. Therefore, the piezoelectric cantilevers 13-1, 13-2, 13-3 and 13-4 are folded at every cantilever or meandering from the fixed frame 11 to the movable frame 4M, so that the amplitudes of the piezoelectric cantilevers 13-1, 13-2, 13-3 and 13-4 can be changed along directions perpendicular to the X-axis.
  • the number of piezoelectric cantilevers in each of the outer piezoelectric actuators 12 and 13 can be other values such as 2, 6, 8, ⁇ .
  • pads P X1 and P X2 are connected to a control unit 1901 which applies a drive voltage V X1 to the pad P X1 , and applies a drive voltage V X2 to the pad P X2 .
  • the drive voltages V X1 and V X2 opposite in phase to each other are saw-tooth-shaped, and have a frequency of 15 kHz.
  • the pad P X1 is connected via conductive layers (not shown) to the upper electrode layers of the odd-numbered piezoelectric cantilevers 12-1, 12-3, 13-1 and 13-3 of the outer piezoelectric actuators 12 and 13.
  • the pad P X2 is connected via conductive layers to the upper electrode layers of the even-numbered piezoelectric cantilevers 12-2, 12-4, 13-2 and 13-4 of the outer piezoelectric actuators 12 and 13.
  • pads P Y1 , P Y2 , P S and P GND are provided on the frame 11 .
  • the pad P Y1 is connected via conductive layers (not shown) to the upper electrode layer of the semi-circular piezoelectric actuator 3' -1.
  • the pad P Y2 is connected via conductive layers (not shown) to the upper electrode layer of the semi-circular piezoelectric actuator 3' -2.
  • the pad P S is connected via conductive layers (not shown) to the upper electrode layer of the piezoelectric sensor (not shown).
  • the pad P GND is connected via conductive layers (not shown) to the lower electrode layers of all the piezoelectric actuators and the piezoelectric sensor.
  • a light source 1901 corresponding to the light source 1701 of Fig. 17 and a control unit 1902 corresponding to the control unit 1702 of Fig. 17 are provided.
  • the control unit 1902 further controls the drive voltages V Y1 and V Y2 in accordance with the sense voltage V S and also, controls the drive voltages V X1 and V X2 .
  • the one-dimensional optical deflector of Fig. 11 , 13 or 15 can also be applied to the two-dimensional optical deflector of Fig. 19 .
  • the piezoelectric actuators are semi-circular or semi-diamond-shaped; however, the piezoelectric actuators can be of another bent-type.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)

Claims (6)

  1. Optischer Deflektor, der Folgendes aufweist:
    einen Spiegel (1);
    einen Rahmen (4, 4'), der den Spiegel (1) umgibt;
    erste und zweite Torsionsstäbe (2a, 2b, 2'a, 2'b), die gegenüberliegend entlang einer ersten Achse des Rahmens (4, 4') angeordnet sind, wobei jeder der ersten und zweiten Torsionsstäbe (2a, 2b, 2'a, 2'b) ein Ende hat, welches an einen Umfang des Spiegels (1) gekoppelt ist;
    erste und zweite halbkreisförmige piezoelektrische Betätigungsvorrichtungen (3'-1, 3'-2, 3"-1, 3"-2), die bezüglich des Spiegels (1) gegenüberliegend zueinander sind, um den Spiegel (1) um die erste Achse zu schwenken, wobei jede der ersten und zweiten halbkreisförmigen piezoelektrischen Betätigungsvorrichtung (3'-1, 3'-2, 3"-1, 3"-2) mit sowohl dem ersten als auch mit dem zweiten Torsionsstab (2a, 2b, 2'a, 2'b) gekoppelt ist;
    erste und zweite Koppelungsstäbe (5-1, 5-2), die jeweils zwischen dem Rahmen (4, 4') und einer der ersten und zweiten halbkreisförmigen piezoelektrischen Betätigungsvorrichtungen (3'-1, 3'-2, 3"-1, 3"-2) angekoppelt ist und entlang einer zweiten Achse angeordnet ist, die senkrecht zur ersten Achse ist; und
    eine Steuereinheit (1702), die ausgebildet ist, um die ersten und zweiten halbkreisförmigen piezoelektrischen Betätigungsvorrichtungen (3'-1, 3'-2, 3"-1, 3"-2) zu steuern,
    wobei jede der ersten und zweiten halbkreisförmigen piezoelektrischen Betätigungsvorrichtungen (3'-1, 3'-2, 3"-1, 3"-2) in erste, zweite und dritte Bereiche (G1, G2) von dem ersten Torsionsstab (2a, 2'a) zum zweiten Torsionsstab (2b, 2'b) in Übereinstimmung mit Grenzen aufgeteilt ist, und zwar angeordnet entlang einer ersten radialen Richtung entlang einer Winkelrichtung von +30° bis +60°, einer zweiten radialen Richtung entlang einer Winkelrichtung von +120° bis +150°, einer dritten radialen Richtung entlang einer Winkelrichtung von +210° bis +240° und einer vierten radialen Richtung entlang einer Winkelrichtung von +300° bis +330° bezüglich der ersten Achse,
    wobei der zweite Bereich (G2) der ersten halbkreisförmigen piezoelektrischen Betätigungsvorrichtung (3'-1, 3"-1) zwischen den ersten und zweiten radialen Richtungen ist,
    wobei der zweite Bereich (G2) der zweiten halbkreisförmigen piezoelektrischen Betätigungsvorrichtung (3'-2, 3"-2) zwischen den dritten und vierten radialen Richtungen ist,
    wobei erste piezoelektrische Teile (3'-11, 3'-13, 3'-22, 3"-11, 3"-13, 3"-22) in den ersten und dritten Bereichen der ersten halbkreisförmigen piezoelektrischen Betätigungsvorrichtung (3'-1, 3"-1) und dem zweiten Bereich der zweiten halbkreisförmigen piezoelektrischen Betätigungsvorrichtung (3'-2, 3"-2) geformt sind,
    wobei zweiten piezoelektrische Teile (3'-21, 3'-23, 3'-12, 3"-21, 3"-23, 3"-12) in den ersten und dritten Bereichen der zweiten halbkreisförmigen piezoelektrischen Betätigungsvorrichtung (3'-2, 3"-2) und dem zweiten Bereich der ersten halbkreisförmigen piezoelektrischen Betätigungsvorrichtung (3'-1, 3"-1) geformt sind,
    wobei die Steuereinheit (1702) ausgebildet ist, um eine erste Antriebsspannung (Vy1) an die ersten piezoelektrischen Teile (3'-11, 3'-13, 3'-22, 3"-11, 3"-13, 3"-22) und eine zweite Antriebsspannung (Vy2) mit entgegengesetzter Phase zur ersten Antriebsspannung (Vy1) an die zweiten piezoelektrischen Teile (3'-21, 3'-23, 3'-12, 3"-21, 3"-23, 3"-12) anzulegen.
  2. Optischer Deflektor nach Anspruch 1, wobei die ersten und zweiten halbkreisförmigen piezoelektrischen Betätigungsvorrichtungen (3"-1, 3"-2) halbdiamantenförmig sind, und wobei der Rahmen (4') diamantenförmig ist.
  3. Optischer Deflektor nach Anspruch 2, wobei eine Breite der ersten und zweiten halbkreisförmigen piezoelektrischen Betätigungsvorrichtungen (3"-1, 3"-2) allmählich von den ersten und zweiten Koppelungsstäben (5-1, 5-2) zu den ersten und zweiten Torsionsstäben (2'a, 2'b) zunimmt.
  4. Optischer Deflektor nach Anspruch 1, wobei die ersten und zweiten Torsionsstäbe (2'a, 2'b) durch die ersten und zweiten halbkreisförmigen piezoelektrischen Betätigungsvorrichtungen (3'-1, 3'-2) mit einem Innenumfang des Rahmens (4) gekoppelt sind.
  5. Optischer Deflektor nach Anspruch 4, der weiter Folgendes aufweist:
    einen piezoelektrischen Sensor (1501) an einem Teil, der eine Kreuzung zwischen den ersten und zweiten Torsionsstäben (2a, 2b) und einem der ersten und zweiten halbkreisförmigen piezoelektrischen Betätigungsvorrichtungen (3'-1, 3'-2) darstellt; und
    eine Abfühlleitungsschicht (1601), die von der einen der ersten und zweiten halbkreisförmigen piezoelektrischen Betätigungsvorrichtungen (3'-1, 3'-2) über den einen der ersten und zweiten Torsionsstäbe (2a, 2b) mit einem Abfühlpfad (Ps) an dem Rahmen (4) verbunden ist; und
    ersten und zweite Erdungsleitungschichten (1602, 1603), welche die Abfühlleitungsschicht (1601) sandwichartig aufnehmen und über den einen der ersten und zweiten Torsionsstäbe (2a, 2b) mit einem Erdungs-Pad (PGND) an dem Rahmen (4) verbunden sind.
  6. Optischer Deflektor nach Anspruch 1, der weiter Folgendes aufweist:
    einen weiteren Rahmen (11), der den Rahmen (4M) umgibt); und
    erste und zweite äußere piezoelektrische Betätigungsvorrichtungen (12, 13), die zwischen dem Rahmen (4M) und dem anderen Rahmen (11) angekoppelt sind, um den Spiegel (1) um eine zweite Achse zu kippen, die senkrecht zur ersten Achse ist.
EP14170118.5A 2013-05-28 2014-05-27 Optischer Deflektor mit getrennten piezoelektrischen Abschnitten auf piezoelektrischen Aktuatoren Active EP2808719B1 (de)

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