EP2947971A4 - Gleichstromquelle und steuerungsverfahren für die gleichstromquelle - Google Patents

Gleichstromquelle und steuerungsverfahren für die gleichstromquelle

Info

Publication number
EP2947971A4
EP2947971A4 EP13894361.8A EP13894361A EP2947971A4 EP 2947971 A4 EP2947971 A4 EP 2947971A4 EP 13894361 A EP13894361 A EP 13894361A EP 2947971 A4 EP2947971 A4 EP 2947971A4
Authority
EP
European Patent Office
Prior art keywords
power source
direct current
current power
control method
source control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP13894361.8A
Other languages
English (en)
French (fr)
Other versions
EP2947971B1 (de
EP2947971A1 (de
Inventor
Itsuo Yuzurihara
Shinichi Kodama
Toshiyuki Adachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyosan Electric Manufacturing Co Ltd
Original Assignee
Kyosan Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyosan Electric Manufacturing Co Ltd filed Critical Kyosan Electric Manufacturing Co Ltd
Publication of EP2947971A1 publication Critical patent/EP2947971A1/de
Publication of EP2947971A4 publication Critical patent/EP2947971A4/de
Application granted granted Critical
Publication of EP2947971B1 publication Critical patent/EP2947971B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
    • H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
    • H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
    • H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H02M7/5387—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
    • H02M7/53871—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration with automatic control of output voltage or current
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/02—Conversion of DC power input into DC power output without intermediate conversion into AC
    • H02M3/04—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters
    • H02M3/10—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M3/145—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M3/155—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/156—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators
    • H02M3/158—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators including plural semiconductor devices as final control devices for a single load
    • H02M3/1582—Buck-boost converters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H01J37/32027—DC powered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3444—Associated circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/36—Means for starting or stopping converters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
    • H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
    • H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
    • H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0067—Converter structures employing plural converter units, other than for parallel operation of the units on a single load
    • H02M1/007—Plural converter units in cascade
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/02—Conversion of DC power input into DC power output without intermediate conversion into AC
    • H02M3/04—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters
    • H02M3/10—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M3/145—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M3/155—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Inverter Devices (AREA)
  • Dc-Dc Converters (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
EP13894361.8A 2013-09-27 2013-12-26 Gleichstromquelle und steuerungsverfahren für die gleichstromquelle Active EP2947971B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013201953A JP5729732B2 (ja) 2013-09-27 2013-09-27 直流電源装置、直流電源装置の制御方法
PCT/JP2013/084823 WO2015045197A1 (ja) 2013-09-27 2013-12-26 直流電源装置、直流電源装置の制御方法

Publications (3)

Publication Number Publication Date
EP2947971A1 EP2947971A1 (de) 2015-11-25
EP2947971A4 true EP2947971A4 (de) 2016-12-14
EP2947971B1 EP2947971B1 (de) 2017-09-20

Family

ID=52742386

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13894361.8A Active EP2947971B1 (de) 2013-09-27 2013-12-26 Gleichstromquelle und steuerungsverfahren für die gleichstromquelle

Country Status (7)

Country Link
US (1) US9450519B2 (de)
EP (1) EP2947971B1 (de)
JP (1) JP5729732B2 (de)
KR (1) KR101609107B1 (de)
CN (1) CN105075402B (de)
TW (1) TWI519210B (de)
WO (1) WO2015045197A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101819840B1 (ko) * 2013-10-04 2018-01-17 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 전원 장치
JP6364199B2 (ja) * 2014-02-06 2018-07-25 日立オートモティブシステムズ株式会社 電力変換システム
JP6554323B2 (ja) * 2015-05-25 2019-07-31 日立オートモティブシステムズ株式会社 電源装置
US9966231B2 (en) * 2016-02-29 2018-05-08 Lam Research Corporation Direct current pulsing plasma systems
JP6207802B1 (ja) * 2016-08-17 2017-10-04 三菱電機株式会社 バリア放電型点火装置
JP6749231B2 (ja) 2016-12-27 2020-09-02 株式会社京三製作所 電源装置、及び電源装置の制御方法
CN110086344A (zh) * 2018-01-26 2019-08-02 华中科技大学 一种llc谐振变换器的轻载运行方法
JP6858805B2 (ja) * 2019-04-11 2021-04-14 株式会社京三製作所 直流パルス電源装置、及び直流パルス電源装置の周波数制御方法
KR102274958B1 (ko) * 2019-04-15 2021-07-08 주식회사 에스제이솔루션 지능형 프리 레귤레이터를 이용한 전원공급장치
KR102242234B1 (ko) 2019-05-08 2021-04-20 주식회사 뉴파워 프라즈마 고주파 제너레이터 및 그의 동작 방법
KR102756076B1 (ko) 2021-11-16 2025-01-21 주식회사 뉴파워 프라즈마 고주파 펄스 전원 장치 및 그의 운전 방법
KR102785086B1 (ko) 2021-11-18 2025-03-26 주식회사 뉴파워 프라즈마 고주파 펄스 제너레이터 장치 및 그의 운전 방법
KR102796633B1 (ko) 2021-11-19 2025-04-18 주식회사 뉴파워 프라즈마 고주파 펄스 전원 장치 및 그의 운전 방법
CN118984057B (zh) * 2024-08-01 2025-04-04 上海崎塬能源科技有限公司 一种基于avr的等离子体电源电压输出控制方法及系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3427520A1 (de) * 1984-07-26 1986-02-06 Thyssen Industrie Ag, 4300 Essen Schaltungsanordnung zur speisung eines verbraucherzweipols
US5418707A (en) * 1992-04-13 1995-05-23 The United States Of America As Represented By The United States Department Of Energy High voltage dc-dc converter with dynamic voltage regulation and decoupling during load-generated arcs
US20060011595A1 (en) * 2004-07-13 2006-01-19 Lincoln Global, Inc. Power source for electric arc welding
EP2469699A2 (de) * 2010-12-23 2012-06-27 Daniel Friedrichs Steuerung für elektrochirurgischen Generator zur Regulierung der Ausgangsleistung des elektrochirurgischen Generators

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11229138A (ja) 1998-02-09 1999-08-24 Murata Mfg Co Ltd スパッタ装置
JP4221847B2 (ja) 1999-10-25 2009-02-12 パナソニック電工株式会社 プラズマ処理装置及びプラズマ点灯方法
CH694854A5 (fr) * 2000-05-22 2005-08-15 Mitsubishi Electric Corp Machine d'électroérosion pour former un petit orifice.
JP2002173772A (ja) * 2000-12-05 2002-06-21 Ricoh Co Ltd スパッタリング装置
JP3635538B2 (ja) 2002-07-05 2005-04-06 株式会社京三製作所 プラズマ発生用直流電源装置
JP3641785B2 (ja) 2002-08-09 2005-04-27 株式会社京三製作所 プラズマ発生用電源装置
JP4406754B2 (ja) * 2003-07-30 2010-02-03 株式会社アイ・ライティング・システム 放電灯点灯装置
JP4241515B2 (ja) * 2004-06-10 2009-03-18 パナソニック電工株式会社 放電灯点灯装置及びプロジェクタ
JP4526879B2 (ja) * 2004-06-18 2010-08-18 四変テック株式会社 直流電源装置
JP4940664B2 (ja) * 2006-01-13 2012-05-30 ウシオ電機株式会社 放電ランプ点灯装置およびプロジェクタ
CN101013329A (zh) * 2006-04-12 2007-08-08 中国科学院上海光学精密机械研究所 恒流高压直流电源
TWI371909B (en) * 2007-12-28 2012-09-01 Ind Tech Res Inst Dc/ac reference modulation circuit with feedforward compensation scheme
JP5124345B2 (ja) * 2008-05-26 2013-01-23 株式会社アルバック バイポーラパルス電源及びこのバイポーラパルス電源を複数台並列接続してなる電源装置
KR101357123B1 (ko) 2009-01-15 2014-02-04 가부시키가이샤 히다치 하이테크놀로지즈 플라즈마 처리장치
US8692466B2 (en) * 2009-02-27 2014-04-08 Mks Instruments Inc. Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator
JP5241578B2 (ja) * 2009-03-19 2013-07-17 株式会社日清製粉グループ本社 誘導熱プラズマ発生方法及び装置
JP5379544B2 (ja) * 2009-04-10 2013-12-25 パナソニック株式会社 高圧放電灯点灯装置及びそれを用いた照明器具
JP2010255061A (ja) * 2009-04-27 2010-11-11 Canon Anelva Corp スパッタリング装置及びスパッタリング処理方法
JP5478620B2 (ja) * 2009-06-10 2014-04-23 本田技研工業株式会社 変圧器の制御装置
CN103477550B (zh) * 2012-02-23 2015-06-17 株式会社京三制作所 电流型逆变器装置以及电流型逆变器装置的控制方法
TWI488546B (zh) 2012-02-23 2015-06-11 新川股份有限公司 A plasma generating device and a plasma reactor
US9160240B2 (en) * 2012-09-05 2015-10-13 Kyosan Electric Mfg. Co., Ltd. DC power supply device, and control method for DC power supply device
DE12884110T1 (de) 2012-09-07 2015-09-24 Kyosan Electric Mfg. Co., Ltd. Gleichstromversorgungsvorrichtung und steuerungsverfahren für die gleichstromversorgungsvorrichtung
US8937824B2 (en) * 2013-01-28 2015-01-20 Eaton Corporation Photovoltaic system and method of controlling same
JP5679241B1 (ja) * 2013-09-27 2015-03-04 株式会社京三製作所 電圧形直流電源装置および電圧形直流電源装置の制御方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3427520A1 (de) * 1984-07-26 1986-02-06 Thyssen Industrie Ag, 4300 Essen Schaltungsanordnung zur speisung eines verbraucherzweipols
US5418707A (en) * 1992-04-13 1995-05-23 The United States Of America As Represented By The United States Department Of Energy High voltage dc-dc converter with dynamic voltage regulation and decoupling during load-generated arcs
US20060011595A1 (en) * 2004-07-13 2006-01-19 Lincoln Global, Inc. Power source for electric arc welding
EP2469699A2 (de) * 2010-12-23 2012-06-27 Daniel Friedrichs Steuerung für elektrochirurgischen Generator zur Regulierung der Ausgangsleistung des elektrochirurgischen Generators

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
GUELDNER H ET AL: "A novel topology for pulse generators in magnetron sputter systems", POWER ELECTRONICS CONGRESS, 2000. CIEP 2000. VII IEEE INTERNATIONAL OCTOBER 15-19, 2000, PISCATAWAY, NJ, USA,IEEE, 15 October 2000 (2000-10-15), pages 365 - 370, XP010527936, ISBN: 978-0-7803-6489-9 *
See also references of WO2015045197A1 *

Also Published As

Publication number Publication date
CN105075402A (zh) 2015-11-18
WO2015045197A1 (ja) 2015-04-02
KR101609107B1 (ko) 2016-04-04
US20160204698A1 (en) 2016-07-14
TWI519210B (zh) 2016-01-21
EP2947971B1 (de) 2017-09-20
JP2015070678A (ja) 2015-04-13
TW201513735A (zh) 2015-04-01
CN105075402B (zh) 2017-04-05
EP2947971A1 (de) 2015-11-25
JP5729732B2 (ja) 2015-06-03
KR20150119451A (ko) 2015-10-23
US9450519B2 (en) 2016-09-20

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