EP3004819A4 - Spektrometer - Google Patents

Spektrometer Download PDF

Info

Publication number
EP3004819A4
EP3004819A4 EP14804678.2A EP14804678A EP3004819A4 EP 3004819 A4 EP3004819 A4 EP 3004819A4 EP 14804678 A EP14804678 A EP 14804678A EP 3004819 A4 EP3004819 A4 EP 3004819A4
Authority
EP
European Patent Office
Prior art keywords
spectrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP14804678.2A
Other languages
English (en)
French (fr)
Other versions
EP3004819A2 (de
Inventor
Mark Watson
Shane Buller
Keith Carron
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mks Technology Inc
Original Assignee
Mks Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US13/907,812 external-priority patent/US9791313B2/en
Application filed by Mks Technology Inc filed Critical Mks Technology Inc
Publication of EP3004819A2 publication Critical patent/EP3004819A2/de
Publication of EP3004819A4 publication Critical patent/EP3004819A4/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G01J2003/4424—Fluorescence correction for Raman spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N2021/6417—Spectrofluorimetric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/02—Mechanical
    • G01N2201/022—Casings
    • G01N2201/0221—Portable; cableless; compact; hand-held
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Microscoopes, Condenser (AREA)
EP14804678.2A 2013-05-31 2014-07-31 Spektrometer Withdrawn EP3004819A4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/907,812 US9791313B2 (en) 2010-12-01 2013-05-31 Spectrometer
PCT/IB2014/001434 WO2014191834A2 (en) 2013-05-31 2014-07-31 Spectometer

Publications (2)

Publication Number Publication Date
EP3004819A2 EP3004819A2 (de) 2016-04-13
EP3004819A4 true EP3004819A4 (de) 2017-05-24

Family

ID=51989473

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14804678.2A Withdrawn EP3004819A4 (de) 2013-05-31 2014-07-31 Spektrometer

Country Status (4)

Country Link
EP (1) EP3004819A4 (de)
JP (1) JP6590793B2 (de)
BR (1) BR112015029663B1 (de)
WO (1) WO2014191834A2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9791313B2 (en) * 2010-12-01 2017-10-17 MKS Technology Spectrometer
DE102016010236A1 (de) * 2016-08-23 2018-03-01 Blickfeld GmbH Lidar-system mit beweglicher faser
DE102016010448B4 (de) * 2016-08-30 2024-01-11 Blickfeld GmbH Faser-basierter Laser-Scanner
JP7044498B2 (ja) * 2017-08-25 2022-03-30 日本信号株式会社 アクチュエータ
EP3803293A4 (de) 2018-05-30 2022-06-15 Pendar Technologies, LLC Verfahren und vorrichtungen zur raman-spektroskopie mit abstandsdifferenz mit erhöhter augensicherheit und verminderter explosionsgefahr
WO2019231512A1 (en) * 2018-05-30 2019-12-05 Pendar Technologies, Llc Methods and devices for standoff differential raman spectroscopy with increased eye safety and decreased risk of explosion
CN109490279A (zh) * 2018-09-10 2019-03-19 桂林电子科技大学 D形微柱镜旋转式spr传感芯片
US11740128B2 (en) * 2019-07-24 2023-08-29 Sanguis Corporation System and method for non-invasive measurement of analytes in vivo
WO2025076051A1 (en) * 2023-10-02 2025-04-10 Alpha Measurement Solutions, Llc Single-lens pathway for emission and excitation using a mirror and beam splitter in a customizable optical head

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5646411A (en) * 1996-02-01 1997-07-08 Molecular Dynamics, Inc. Fluorescence imaging system compatible with macro and micro scanning objectives
US5719391A (en) * 1994-12-08 1998-02-17 Molecular Dynamics, Inc. Fluorescence imaging system employing a macro scanning objective
US6172785B1 (en) * 1997-02-24 2001-01-09 Bodenseewerk Perkin-Elmer Gmbh Light-scanning device
US6384951B1 (en) * 1997-11-19 2002-05-07 University Of Washington High throughput optical scanner
JP2002372456A (ja) * 2001-06-13 2002-12-26 Shimadzu Corp 赤外分光光度計
US20060285109A1 (en) * 2005-06-20 2006-12-21 Odhner Jefferson E Compact spectrometer
US20070091409A1 (en) * 2003-04-15 2007-04-26 E.On Ruhrgas Aktiengesellschaft Device and method for the optical scanning of media, objects, or areas
US20120162642A1 (en) * 2010-08-30 2012-06-28 Mks Technology (D/B/A Snowy Range Instruments) Spectrometer

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4265545A (en) * 1979-07-27 1981-05-05 Intec Corporation Multiple source laser scanning inspection system
JPH03180813A (ja) * 1989-12-08 1991-08-06 Matsushita Electric Ind Co Ltd 光走査装置
US6501551B1 (en) * 1991-04-29 2002-12-31 Massachusetts Institute Of Technology Fiber optic imaging endoscope interferometer with at least one faraday rotator
US5825493A (en) * 1996-06-28 1998-10-20 Raytheon Company Compact high resolution interferometer with short stroke reactionless drive
JP2000081587A (ja) * 1998-06-24 2000-03-21 Fuji Photo Film Co Ltd 光走査装置
US8402819B2 (en) * 2007-05-15 2013-03-26 Anasys Instruments, Inc. High frequency deflection measurement of IR absorption
JP2013195264A (ja) * 2012-03-21 2013-09-30 Nikon Corp 分光器及び顕微分光システム

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5719391A (en) * 1994-12-08 1998-02-17 Molecular Dynamics, Inc. Fluorescence imaging system employing a macro scanning objective
US5646411A (en) * 1996-02-01 1997-07-08 Molecular Dynamics, Inc. Fluorescence imaging system compatible with macro and micro scanning objectives
US6172785B1 (en) * 1997-02-24 2001-01-09 Bodenseewerk Perkin-Elmer Gmbh Light-scanning device
US6384951B1 (en) * 1997-11-19 2002-05-07 University Of Washington High throughput optical scanner
JP2002372456A (ja) * 2001-06-13 2002-12-26 Shimadzu Corp 赤外分光光度計
US20070091409A1 (en) * 2003-04-15 2007-04-26 E.On Ruhrgas Aktiengesellschaft Device and method for the optical scanning of media, objects, or areas
US20060285109A1 (en) * 2005-06-20 2006-12-21 Odhner Jefferson E Compact spectrometer
US20120162642A1 (en) * 2010-08-30 2012-06-28 Mks Technology (D/B/A Snowy Range Instruments) Spectrometer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NAOKI MATSUMOTO ET AL: "Development of THz ellipsometer with variable incident angle", INFRARED, MILLIMETER, AND TERAHERTZ WAVES, 2009. IRMMW-THZ 2009. 34TH INTERNATIONAL CONFERENCE ON, IEEE, PISCATAWAY, NJ, USA, 21 September 2009 (2009-09-21), pages 1 - 2, XP031562629, ISBN: 978-1-4244-5416-7 *

Also Published As

Publication number Publication date
WO2014191834A2 (en) 2014-12-04
JP2016530486A (ja) 2016-09-29
WO2014191834A3 (en) 2015-12-17
JP6590793B2 (ja) 2019-10-16
EP3004819A2 (de) 2016-04-13
BR112015029663B1 (pt) 2021-02-23
BR112015029663A2 (pt) 2017-07-25

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