EP3203298A4 - Dispositif d'entraînement de miroir et son procédé d'entraînement - Google Patents

Dispositif d'entraînement de miroir et son procédé d'entraînement Download PDF

Info

Publication number: EP3203298A4
Authority: EP; European Patent Office
Prior art keywords: method therefor; drive; mirror; drive device; drive method
Prior art date: 2014-09-30
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP15847123.5A

Other languages

German (de)

English (en)

Other versions

EP3203298B1 (fr

EP3203298A1 (fr

Inventor

Takayuki Naono

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Fujifilm Corp

Original Assignee

Fujifilm Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2014-09-30

Filing date

2015-09-29

Publication date

2017-09-20

2015-09-29 Application filed by Fujifilm Corp filed Critical Fujifilm Corp

2017-08-09 Publication of EP3203298A1 publication Critical patent/EP3203298A1/fr

2017-09-20 Publication of EP3203298A4 publication Critical patent/EP3203298A4/fr

2021-07-14 Application granted granted Critical

2021-07-14 Publication of EP3203298B1 publication Critical patent/EP3203298B1/fr

Status Active legal-status Critical Current

2035-09-29 Anticipated expiration legal-status Critical

Links

Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/208—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using shear or torsion displacement, e.g. d15 type devices
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/302—Sensors
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/101—Piezoelectric or electrostrictive devices with electrical and mechanical input and output, e.g. having combined actuator and sensor parts
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Ceramic Engineering (AREA)
Micromachines (AREA)
Mechanical Optical Scanning Systems (AREA)
Mechanical Light Control Or Optical Switches (AREA)

EP15847123.5A 2014-09-30 2015-09-29 Dispositif d'entraînement de miroir et son procédé d'entraînement Active EP3203298B1 (fr)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2014201650		2014-09-30
PCT/JP2015/077588 WO2016052547A1 (fr)	2014-09-30	2015-09-29	Dispositif d'entraînement de miroir et son procédé d'entraînement

Publications (3)

Publication Number	Publication Date
EP3203298A1 EP3203298A1 (fr)	2017-08-09
EP3203298A4 true EP3203298A4 (fr)	2017-09-20
EP3203298B1 EP3203298B1 (fr)	2021-07-14

Family

ID=55630573

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP15847123.5A Active EP3203298B1 (fr)	2014-09-30	2015-09-29	Dispositif d'entraînement de miroir et son procédé d'entraînement

Country Status (4)

Country	Link
US (1)	US10371940B2 (fr)
EP (1)	EP3203298B1 (fr)
JP (1)	JP6308700B2 (fr)
WO (1)	WO2016052547A1 (fr)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE112017000678B4 (de) *	2016-02-05	2020-06-18	Fujifilm Corporation	Piezoelektrisches Element
CN108604008B (zh) *	2016-02-17	2020-11-10	三菱电机株式会社	反射镜驱动装置、反射镜驱动装置的控制方法及反射镜驱动装置的制造方法
WO2018088291A1 (fr) *	2016-11-09	2018-05-17	第一精工株式会社	Élément réfléchissant mobile
US11262576B2 (en) *	2017-10-31	2022-03-01	Panasonic Intellectual Property Management Co., Ltd.	Reflective optical element
JP6985602B2 (ja) *	2018-01-29	2021-12-22	ミツミ電機株式会社	光走査装置及び光走査装置の製造方法
JP7077682B2 (ja)	2018-03-12	2022-05-31	セイコーエプソン株式会社	圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター
JP6870699B2 (ja) *	2018-05-03	2021-05-12	株式会社村田製作所	拡大された画像領域を備える走査光学デバイス
CN113574007B (zh) *	2019-03-28	2024-12-03	富士胶片株式会社	微镜器件及微镜器件的驱动方法
EP3961289A4 (fr)	2019-04-26	2022-06-15	FUJIFILM Corporation	Dispositif de micro-miroir
FI20196026A1 (en)	2019-11-28	2021-05-29	Teknologian Tutkimuskeskus Vtt Oy	Improvements for driving a microelectromechanical system mirror
US12514123B2 (en)	2021-05-12	2025-12-30	Hamamatsu Photonics K.K.	Actuator device and actuator system
JP7769558B2 (ja)	2021-05-12	2025-11-13	浜松ホトニクス株式会社	圧電ユニット及びアクチュエータ装置
US12527227B2 (en) *	2021-05-12	2026-01-13	Hamamatsu Photonics K.K.	Actuator device
JP7696305B2 (ja)	2021-05-12	2025-06-20	浜松ホトニクス株式会社	アクチュエータ装置
DE102021134310B4 (de)	2021-12-22	2025-12-24	Tdk Electronics Ag	Piezoelektrisches Spiegelbauelement, Verfahren zum Betrieb des piezoelektrischen Spiegelbauelements und Projektionsvorrichtung mit dem piezoelektrischen Spiegelbauelement
CN119631004A (zh) *	2022-07-25	2025-03-14	松下知识产权经营株式会社	驱动元件及光偏转元件
DE102022209396A1 (de) *	2022-09-09	2024-03-14	Carl Zeiss Smt Gmbh	Verfahren zum Betreiben eines optischen Bauelements, optisches Bauelement
KR20250162805A (ko)	2023-04-11	2025-11-19	티디케이 일렉트로닉스 아게	마이크로 전기 기계 미러, 마이크로 전기 기계 미러를 작동하기 위한 방법, 투사 장치 및 마이크로 전기 기계 미러의 용도
DE102023109108B4 (de) *	2023-04-11	2024-11-14	Tdk Electronics Ag	Mikroelektromechanischer Spiegel, Verfahren zum Betrieb eines mikroelektromechanischen Spiegels, Projektionsvorrichtung und Verwendung eines mikroelektromechanischen Spiegels
DE102023005475B4 (de) *	2023-04-11	2025-12-24	Tdk Electronics Ag	Mikroelektromechanischer Spiegel, Verfahren zum Betrieb eines mikroelektromechanischen Spiegels, Projektionsvorrichtung und Verwendung eines mikroelektromechanischen Spiegels

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP1857855A2 (fr) *	2006-05-16	2007-11-21	Omron Corporation	Dispositif de commande, dispositif de balayage optique et dispositif de détection d'informations sur des objets
US20100195180A1 (en) *	2009-01-30	2010-08-05	Goichi Akanuma	Deflecting mirror for deflecting and scanning light beam

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JPH11112048A (ja) *	1997-10-02	1999-04-23	Seiko Epson Corp	圧電体素子、インクジェット式記録ヘッドおよびそれらの製造方法
JP2005128147A (ja) *	2003-10-22	2005-05-19	Stanley Electric Co Ltd	光偏向器及び光学装置
JP4972781B2 (ja)	2007-06-19	2012-07-11	コニカミノルタアドバンストレイヤー株式会社	マイクロスキャナ及びそれを備えた光走査装置。
JP2010085506A (ja)	2008-09-29	2010-04-15	Brother Ind Ltd	光スキャナ及びこの光スキャナを備えた画像表示装置
US9158108B2 (en) *	2010-07-29	2015-10-13	Nec Corporation	Optical scanning device and image display device
JP5264954B2 (ja)	2011-03-30	2013-08-14	富士フイルム株式会社	ミラー駆動装置及び方法
JP5943870B2 (ja) *	2013-04-01	2016-07-05	富士フイルム株式会社	圧電体膜
JP6092713B2 (ja) *	2013-05-28	2017-03-08	スタンレー電気株式会社	光偏向器

2015
- 2015-09-29 EP EP15847123.5A patent/EP3203298B1/fr active Active
- 2015-09-29 WO PCT/JP2015/077588 patent/WO2016052547A1/fr not_active Ceased
- 2015-09-29 JP JP2016552088A patent/JP6308700B2/ja active Active
2017
- 2017-03-29 US US15/473,129 patent/US10371940B2/en active Active

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP1857855A2 (fr) *	2006-05-16	2007-11-21	Omron Corporation	Dispositif de commande, dispositif de balayage optique et dispositif de détection d'informations sur des objets
US20100195180A1 (en) *	2009-01-30	2010-08-05	Goichi Akanuma	Deflecting mirror for deflecting and scanning light beam

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
HIROKAZU MATSUO ET AL: "Novel Design for Optical Scanner with Piezoelectric Film Deposited by Metal Organic Chemical Vapor Deposition", JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 49, no. 4, 1 April 2010 (2010-04-01), JP, pages 04DL19, XP055396113, ISSN: 0021-4922, DOI: 10.1143/JJAP.49.04DL19 *
See also references of WO2016052547A1 *

Also Published As

Publication number	Publication date
EP3203298B1 (fr)	2021-07-14
WO2016052547A1 (fr)	2016-04-07
JP6308700B2 (ja)	2018-04-11
EP3203298A1 (fr)	2017-08-09
US20170199375A1 (en)	2017-07-13
US10371940B2 (en)	2019-08-06
JPWO2016052547A1 (ja)	2017-09-07

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